C. B. Lee, G. H. Kim, and S. K. Lee, “Design and construction of a single unit multi-function optical encoder for a six-degree-of-freedom motion error measurement in an ultraprecision linear stage,” Meas. Sci. Technol. 22, 105901 (2011).

[CrossRef]

H. Schwenke, W. Knapp, H. Haitjema, A. Weckenmann, R. Schmitt, and F. Delbressine, “Geometric error measurement and compensation of machines—an update,” CIRP Ann. Manuf. Technol. 57, 660–675 (2008).

[CrossRef]

C. Kuang, E. Hong, and J. Ni, “A high-precision five-degree-of-freedom measurement system based on laser collimator and interferometry techniques,” Rev. Sci. Instrum. 78, 095105 (2007).

[CrossRef]

C. Kuang, Q. Feng, B. Zhang, B. Liu, S. Chen, and Z. Zhang, “A four-degree-of-freedom laser measurement system (FDMS) using a single-mode fiber-coupled laser module,” Sens. Actuators A 125, 100–108 (2005).

[CrossRef]

C. H. Liu, W. Y. Jywe, C. C. Hsu, and T. H. Hsu, “Development of a laser-based high-precision six-degrees-of-freedom motion errors measuring system for linear stage,” Rev. Sci. Instrum. 76, 055110 (2005).

[CrossRef]

Q. Feng, B. Zhang, and C. Kuang, “A straightness measurement system using a single-mode fiber-coupled laser module,” Opt. Laser Technol. 36, 279–283 (2004).

[CrossRef]

Q. Hao, D. Li, and Y. Wang, “High-accuracy long distance alignment using single-mode optical fiber and phase plate,” Opt. Laser Technol. 34, 287–292 (2002).

[CrossRef]

K. C. Fan and Y. Zhao, “A laser straightness measurement system using optical fiber and modulation techniques,” Int. J. Mach. Tools Manufact. 40, 2073–2081 (2000).

[CrossRef]

R. Ramesh, M. A. Mannan, and A. N. Poo, “Error compensation in machine tools—a review: Part I: geometric, cutting-force induced and fixture-dependent errors,” Int. J. Mach. Tools Manuf. 40, 1235–1256 (2000).

[CrossRef]

Q. Hao, Y. Zhao, D. Li, and M. Cao, “Straightness measurement using laser diode and CCD camera,” Chin. J. Lasers 8, 215–220 (1999).

K. C. Fan, M. J. Chen, and W. M. Huang, “A six-degree-of-freedom measurement system for the motion accuracy of linear stages,” Int. J. Mach. Tools Manuf. 38, 155–164 (1998).

[CrossRef]

J. Ni, “CNC machine accuracy enhancement through real-time error compensation,” Manuf. Sci. Eng. 119, 717–725 (1997).

[CrossRef]

C. Chou, L. Y. Chou, C. K. Peng, Y. C. Huang, and K. C. Fan, “CCD-based CMM geometrical error measurement using Fourier phase shift algorithm,” Int. J. Mach. Tools Manuf. 37, 579–590 (1997).

[CrossRef]

P. S. Huang and J. Ni, “On-line error compensation of coordinate measuring machines,” Int. J. Mach. Tools Manuf. 35, 725–738 (1995).

[CrossRef]

J. Ni and S. M. Wu, “An on-line measurement technique for machine volumetric error compensation,” J. Eng. Ind. 115, 85–92 (1993).

[CrossRef]

J. Ni, P. S. Huang, and S. M. Wu, “A multi-degree-of-freedom measuring system for CMM geometric errors,” J. Eng. Ind. 114, 362–369 (1992).

Q. Hao, Y. Zhao, D. Li, and M. Cao, “Straightness measurement using laser diode and CCD camera,” Chin. J. Lasers 8, 215–220 (1999).

K. C. Fan, M. J. Chen, and W. M. Huang, “A six-degree-of-freedom measurement system for the motion accuracy of linear stages,” Int. J. Mach. Tools Manuf. 38, 155–164 (1998).

[CrossRef]

C. Kuang, Q. Feng, B. Zhang, B. Liu, S. Chen, and Z. Zhang, “A four-degree-of-freedom laser measurement system (FDMS) using a single-mode fiber-coupled laser module,” Sens. Actuators A 125, 100–108 (2005).

[CrossRef]

C. Chou, L. Y. Chou, C. K. Peng, Y. C. Huang, and K. C. Fan, “CCD-based CMM geometrical error measurement using Fourier phase shift algorithm,” Int. J. Mach. Tools Manuf. 37, 579–590 (1997).

[CrossRef]

C. Chou, L. Y. Chou, C. K. Peng, Y. C. Huang, and K. C. Fan, “CCD-based CMM geometrical error measurement using Fourier phase shift algorithm,” Int. J. Mach. Tools Manuf. 37, 579–590 (1997).

[CrossRef]

H. Schwenke, W. Knapp, H. Haitjema, A. Weckenmann, R. Schmitt, and F. Delbressine, “Geometric error measurement and compensation of machines—an update,” CIRP Ann. Manuf. Technol. 57, 660–675 (2008).

[CrossRef]

K. C. Fan and Y. Zhao, “A laser straightness measurement system using optical fiber and modulation techniques,” Int. J. Mach. Tools Manufact. 40, 2073–2081 (2000).

[CrossRef]

K. C. Fan, M. J. Chen, and W. M. Huang, “A six-degree-of-freedom measurement system for the motion accuracy of linear stages,” Int. J. Mach. Tools Manuf. 38, 155–164 (1998).

[CrossRef]

C. Chou, L. Y. Chou, C. K. Peng, Y. C. Huang, and K. C. Fan, “CCD-based CMM geometrical error measurement using Fourier phase shift algorithm,” Int. J. Mach. Tools Manuf. 37, 579–590 (1997).

[CrossRef]

C. Kuang, Q. Feng, B. Zhang, B. Liu, S. Chen, and Z. Zhang, “A four-degree-of-freedom laser measurement system (FDMS) using a single-mode fiber-coupled laser module,” Sens. Actuators A 125, 100–108 (2005).

[CrossRef]

Q. Feng, B. Zhang, and C. Kuang, “A straightness measurement system using a single-mode fiber-coupled laser module,” Opt. Laser Technol. 36, 279–283 (2004).

[CrossRef]

H. Schwenke, W. Knapp, H. Haitjema, A. Weckenmann, R. Schmitt, and F. Delbressine, “Geometric error measurement and compensation of machines—an update,” CIRP Ann. Manuf. Technol. 57, 660–675 (2008).

[CrossRef]

Q. Hao, D. Li, and Y. Wang, “High-accuracy long distance alignment using single-mode optical fiber and phase plate,” Opt. Laser Technol. 34, 287–292 (2002).

[CrossRef]

Q. Hao, Y. Zhao, D. Li, and M. Cao, “Straightness measurement using laser diode and CCD camera,” Chin. J. Lasers 8, 215–220 (1999).

C. Kuang, E. Hong, and J. Ni, “A high-precision five-degree-of-freedom measurement system based on laser collimator and interferometry techniques,” Rev. Sci. Instrum. 78, 095105 (2007).

[CrossRef]

C. H. Liu, W. Y. Jywe, C. C. Hsu, and T. H. Hsu, “Development of a laser-based high-precision six-degrees-of-freedom motion errors measuring system for linear stage,” Rev. Sci. Instrum. 76, 055110 (2005).

[CrossRef]

C. H. Liu, W. Y. Jywe, C. C. Hsu, and T. H. Hsu, “Development of a laser-based high-precision six-degrees-of-freedom motion errors measuring system for linear stage,” Rev. Sci. Instrum. 76, 055110 (2005).

[CrossRef]

P. S. Huang and J. Ni, “On-line error compensation of coordinate measuring machines,” Int. J. Mach. Tools Manuf. 35, 725–738 (1995).

[CrossRef]

J. Ni, P. S. Huang, and S. M. Wu, “A multi-degree-of-freedom measuring system for CMM geometric errors,” J. Eng. Ind. 114, 362–369 (1992).

K. C. Fan, M. J. Chen, and W. M. Huang, “A six-degree-of-freedom measurement system for the motion accuracy of linear stages,” Int. J. Mach. Tools Manuf. 38, 155–164 (1998).

[CrossRef]

C. Chou, L. Y. Chou, C. K. Peng, Y. C. Huang, and K. C. Fan, “CCD-based CMM geometrical error measurement using Fourier phase shift algorithm,” Int. J. Mach. Tools Manuf. 37, 579–590 (1997).

[CrossRef]

C. H. Liu, W. Y. Jywe, C. C. Hsu, and T. H. Hsu, “Development of a laser-based high-precision six-degrees-of-freedom motion errors measuring system for linear stage,” Rev. Sci. Instrum. 76, 055110 (2005).

[CrossRef]

C. B. Lee, G. H. Kim, and S. K. Lee, “Design and construction of a single unit multi-function optical encoder for a six-degree-of-freedom motion error measurement in an ultraprecision linear stage,” Meas. Sci. Technol. 22, 105901 (2011).

[CrossRef]

H. Schwenke, W. Knapp, H. Haitjema, A. Weckenmann, R. Schmitt, and F. Delbressine, “Geometric error measurement and compensation of machines—an update,” CIRP Ann. Manuf. Technol. 57, 660–675 (2008).

[CrossRef]

C. Kuang, E. Hong, and J. Ni, “A high-precision five-degree-of-freedom measurement system based on laser collimator and interferometry techniques,” Rev. Sci. Instrum. 78, 095105 (2007).

[CrossRef]

C. Kuang, Q. Feng, B. Zhang, B. Liu, S. Chen, and Z. Zhang, “A four-degree-of-freedom laser measurement system (FDMS) using a single-mode fiber-coupled laser module,” Sens. Actuators A 125, 100–108 (2005).

[CrossRef]

Q. Feng, B. Zhang, and C. Kuang, “A straightness measurement system using a single-mode fiber-coupled laser module,” Opt. Laser Technol. 36, 279–283 (2004).

[CrossRef]

C. B. Lee, G. H. Kim, and S. K. Lee, “Design and construction of a single unit multi-function optical encoder for a six-degree-of-freedom motion error measurement in an ultraprecision linear stage,” Meas. Sci. Technol. 22, 105901 (2011).

[CrossRef]

C. B. Lee, G. H. Kim, and S. K. Lee, “Design and construction of a single unit multi-function optical encoder for a six-degree-of-freedom motion error measurement in an ultraprecision linear stage,” Meas. Sci. Technol. 22, 105901 (2011).

[CrossRef]

Q. Hao, D. Li, and Y. Wang, “High-accuracy long distance alignment using single-mode optical fiber and phase plate,” Opt. Laser Technol. 34, 287–292 (2002).

[CrossRef]

Q. Hao, Y. Zhao, D. Li, and M. Cao, “Straightness measurement using laser diode and CCD camera,” Chin. J. Lasers 8, 215–220 (1999).

C. Kuang, Q. Feng, B. Zhang, B. Liu, S. Chen, and Z. Zhang, “A four-degree-of-freedom laser measurement system (FDMS) using a single-mode fiber-coupled laser module,” Sens. Actuators A 125, 100–108 (2005).

[CrossRef]

C. H. Liu, H. L. Huang, and H. W. Lee, “Five-degrees-of-freedom diffractive laser encoder,” Appl. Opt. 48, 2767–2777 (2009).

[CrossRef]

C. H. Liu, W. Y. Jywe, C. C. Hsu, and T. H. Hsu, “Development of a laser-based high-precision six-degrees-of-freedom motion errors measuring system for linear stage,” Rev. Sci. Instrum. 76, 055110 (2005).

[CrossRef]

R. Ramesh, M. A. Mannan, and A. N. Poo, “Error compensation in machine tools—a review: Part I: geometric, cutting-force induced and fixture-dependent errors,” Int. J. Mach. Tools Manuf. 40, 1235–1256 (2000).

[CrossRef]

C. Kuang, E. Hong, and J. Ni, “A high-precision five-degree-of-freedom measurement system based on laser collimator and interferometry techniques,” Rev. Sci. Instrum. 78, 095105 (2007).

[CrossRef]

J. Ni, “CNC machine accuracy enhancement through real-time error compensation,” Manuf. Sci. Eng. 119, 717–725 (1997).

[CrossRef]

P. S. Huang and J. Ni, “On-line error compensation of coordinate measuring machines,” Int. J. Mach. Tools Manuf. 35, 725–738 (1995).

[CrossRef]

J. Ni and S. M. Wu, “An on-line measurement technique for machine volumetric error compensation,” J. Eng. Ind. 115, 85–92 (1993).

[CrossRef]

J. Ni, P. S. Huang, and S. M. Wu, “A multi-degree-of-freedom measuring system for CMM geometric errors,” J. Eng. Ind. 114, 362–369 (1992).

C. Chou, L. Y. Chou, C. K. Peng, Y. C. Huang, and K. C. Fan, “CCD-based CMM geometrical error measurement using Fourier phase shift algorithm,” Int. J. Mach. Tools Manuf. 37, 579–590 (1997).

[CrossRef]

R. Ramesh, M. A. Mannan, and A. N. Poo, “Error compensation in machine tools—a review: Part I: geometric, cutting-force induced and fixture-dependent errors,” Int. J. Mach. Tools Manuf. 40, 1235–1256 (2000).

[CrossRef]

R. Ramesh, M. A. Mannan, and A. N. Poo, “Error compensation in machine tools—a review: Part I: geometric, cutting-force induced and fixture-dependent errors,” Int. J. Mach. Tools Manuf. 40, 1235–1256 (2000).

[CrossRef]

H. Schwenke, W. Knapp, H. Haitjema, A. Weckenmann, R. Schmitt, and F. Delbressine, “Geometric error measurement and compensation of machines—an update,” CIRP Ann. Manuf. Technol. 57, 660–675 (2008).

[CrossRef]

H. Schwenke, W. Knapp, H. Haitjema, A. Weckenmann, R. Schmitt, and F. Delbressine, “Geometric error measurement and compensation of machines—an update,” CIRP Ann. Manuf. Technol. 57, 660–675 (2008).

[CrossRef]

Q. Hao, D. Li, and Y. Wang, “High-accuracy long distance alignment using single-mode optical fiber and phase plate,” Opt. Laser Technol. 34, 287–292 (2002).

[CrossRef]

H. Schwenke, W. Knapp, H. Haitjema, A. Weckenmann, R. Schmitt, and F. Delbressine, “Geometric error measurement and compensation of machines—an update,” CIRP Ann. Manuf. Technol. 57, 660–675 (2008).

[CrossRef]

J. Ni and S. M. Wu, “An on-line measurement technique for machine volumetric error compensation,” J. Eng. Ind. 115, 85–92 (1993).

[CrossRef]

J. Ni, P. S. Huang, and S. M. Wu, “A multi-degree-of-freedom measuring system for CMM geometric errors,” J. Eng. Ind. 114, 362–369 (1992).

C. Kuang, Q. Feng, B. Zhang, B. Liu, S. Chen, and Z. Zhang, “A four-degree-of-freedom laser measurement system (FDMS) using a single-mode fiber-coupled laser module,” Sens. Actuators A 125, 100–108 (2005).

[CrossRef]

Q. Feng, B. Zhang, and C. Kuang, “A straightness measurement system using a single-mode fiber-coupled laser module,” Opt. Laser Technol. 36, 279–283 (2004).

[CrossRef]

C. Kuang, Q. Feng, B. Zhang, B. Liu, S. Chen, and Z. Zhang, “A four-degree-of-freedom laser measurement system (FDMS) using a single-mode fiber-coupled laser module,” Sens. Actuators A 125, 100–108 (2005).

[CrossRef]

K. C. Fan and Y. Zhao, “A laser straightness measurement system using optical fiber and modulation techniques,” Int. J. Mach. Tools Manufact. 40, 2073–2081 (2000).

[CrossRef]

Q. Hao, Y. Zhao, D. Li, and M. Cao, “Straightness measurement using laser diode and CCD camera,” Chin. J. Lasers 8, 215–220 (1999).

Q. Hao, Y. Zhao, D. Li, and M. Cao, “Straightness measurement using laser diode and CCD camera,” Chin. J. Lasers 8, 215–220 (1999).

H. Schwenke, W. Knapp, H. Haitjema, A. Weckenmann, R. Schmitt, and F. Delbressine, “Geometric error measurement and compensation of machines—an update,” CIRP Ann. Manuf. Technol. 57, 660–675 (2008).

[CrossRef]

R. Ramesh, M. A. Mannan, and A. N. Poo, “Error compensation in machine tools—a review: Part I: geometric, cutting-force induced and fixture-dependent errors,” Int. J. Mach. Tools Manuf. 40, 1235–1256 (2000).

[CrossRef]

P. S. Huang and J. Ni, “On-line error compensation of coordinate measuring machines,” Int. J. Mach. Tools Manuf. 35, 725–738 (1995).

[CrossRef]

C. Chou, L. Y. Chou, C. K. Peng, Y. C. Huang, and K. C. Fan, “CCD-based CMM geometrical error measurement using Fourier phase shift algorithm,” Int. J. Mach. Tools Manuf. 37, 579–590 (1997).

[CrossRef]

K. C. Fan, M. J. Chen, and W. M. Huang, “A six-degree-of-freedom measurement system for the motion accuracy of linear stages,” Int. J. Mach. Tools Manuf. 38, 155–164 (1998).

[CrossRef]

K. C. Fan and Y. Zhao, “A laser straightness measurement system using optical fiber and modulation techniques,” Int. J. Mach. Tools Manufact. 40, 2073–2081 (2000).

[CrossRef]

J. Ni and S. M. Wu, “An on-line measurement technique for machine volumetric error compensation,” J. Eng. Ind. 115, 85–92 (1993).

[CrossRef]

J. Ni, P. S. Huang, and S. M. Wu, “A multi-degree-of-freedom measuring system for CMM geometric errors,” J. Eng. Ind. 114, 362–369 (1992).

J. Ni, “CNC machine accuracy enhancement through real-time error compensation,” Manuf. Sci. Eng. 119, 717–725 (1997).

[CrossRef]

C. B. Lee, G. H. Kim, and S. K. Lee, “Design and construction of a single unit multi-function optical encoder for a six-degree-of-freedom motion error measurement in an ultraprecision linear stage,” Meas. Sci. Technol. 22, 105901 (2011).

[CrossRef]

Q. Feng, B. Zhang, and C. Kuang, “A straightness measurement system using a single-mode fiber-coupled laser module,” Opt. Laser Technol. 36, 279–283 (2004).

[CrossRef]

Q. Hao, D. Li, and Y. Wang, “High-accuracy long distance alignment using single-mode optical fiber and phase plate,” Opt. Laser Technol. 34, 287–292 (2002).

[CrossRef]

C. H. Liu, W. Y. Jywe, C. C. Hsu, and T. H. Hsu, “Development of a laser-based high-precision six-degrees-of-freedom motion errors measuring system for linear stage,” Rev. Sci. Instrum. 76, 055110 (2005).

[CrossRef]

C. Kuang, E. Hong, and J. Ni, “A high-precision five-degree-of-freedom measurement system based on laser collimator and interferometry techniques,” Rev. Sci. Instrum. 78, 095105 (2007).

[CrossRef]

C. Kuang, Q. Feng, B. Zhang, B. Liu, S. Chen, and Z. Zhang, “A four-degree-of-freedom laser measurement system (FDMS) using a single-mode fiber-coupled laser module,” Sens. Actuators A 125, 100–108 (2005).

[CrossRef]