Abstract

This study will examine the feasibility of applying the hydrodynamic effect to ultrasmooth surface polishing. Differing from conventional pad polishing, hydrodynamic effect polishing is noncontact, as the polishing wheel is floated on the workpiece under the hydrodynamic effect. The material removal mechanism and the removal contour are analyzed in detail. Dynamic pressure and shear stress distribution on the workpiece are numerically simulated in three dimensions under different clearances between the polishing wheel and the workpiece, showing that the dynamic pressure distribution and the magnitude of shear stress on the workpiece are greatly influenced by the clearance. It is clearly demonstrated from fixed-point polishing experiments that material removal rates and contours are determined by the combined action of dynamic pressure and shear stress. A material removal analytic model is presented with the hydrodynamic effect polishing method. Finally, a polishing experiment is conducted on a quartz glass and the plastic scratches, cracks, and bumpy structures on the initial surface are clearly removed. Moreover, the processed surface roughness is improved to 0.145 nm rms, 0.116 nm Ra.

© 2013 Optical Society of America

Full Article  |  PDF Article

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (8)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (7)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription