Abstract

We present a hydrodynamic, deterministic polishing tool (HyDRa) based on the fluid-jet polishing (FJP) principle. In contrast to other FJP methods, the polishing flux is accelerated with pressurized air and then expelled at high velocity, forming a radial, grazing abrasive pattern that exerts no net force of the tool on the surface to be polished, since the vacuum and thrust forces that are created at the tool’s output balance each other out. The grazing effect minimizes microroughness, making it appropriate for finishing high-quality surfaces. The principle of operation as well as polishing results of a series of small etalon plates are presented.

© 2013 Optical Society of America

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  1. E. Ruiz, E. Sohn, L. Salas, and E. Luna, “Hydrodynamic radial flux tool for polishing and grinding optical and semiconductor surfaces,” U.S. patent7,169,012 (January302007).
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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
  11. M. Nunez, J. Salinas, E. Luna, L. Salas, E. Ruiz, E. Sohn, A. Nava, I. Cruz-Gonzalez, and B. Martinez, “Surface roughness results using a hydrodynamic polishing tool (HyDra),” Proc. SPIE 5494, 459–467 (2004).
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    [CrossRef]
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2011 (1)

2010 (2)

Z. Li, S. Li, Y. Dai, and X. Peng, “Optimization and application of influence function in abrasive jet polishing,” Appl. Opt. 49, 2947–2953 (2010).
[CrossRef]

T. Arnol, G. Böhm, R. Fechner, J. Meister, A. Nickel, F. Frost, T. Hänsel, and A. Schindler, “Ultra-precision surface finishing by ion beam and plasma jet techniques-status and outlook,” Nucl. Instrum. Methods Phys. Res. A 616, 147–156 (2010).
[CrossRef]

2009 (1)

2008 (1)

2006 (2)

2004 (3)

J. Gonzlez-García, A. Cordero-Dávila, E. Luna, M. Nunez, E. Ruiz, L. Salas, I. Cruz-González, and E. Sohn, “Static and dynamic removal rate of a new hydrodynamic polishing tool (HyDra),” Appl. Opt. 43, 3623–3631 (2004).
[CrossRef]

M. Nunez, J. Salinas, E. Luna, L. Salas, E. Ruiz, E. Sohn, A. Nava, I. Cruz-Gonzalez, and B. Martinez, “Surface roughness results using a hydrodynamic polishing tool (HyDra),” Proc. SPIE 5494, 459–467 (2004).
[CrossRef]

E. Ruiz, E. Sohn, E. Luna, L. Salas, A. Cordero, J. González, M. Nunez, J. Salinas, I. Cruz-González, J. Valdéz, V. Cabrera, and B. Martínez, “New perspectives in hydrodynamic radial polishing,” Proc. SPIE 5494, 91–100 (2004).
[CrossRef]

2002 (1)

1998 (1)

1994 (1)

I. Cruz-González, L. Carrasco, E. Ruiz, L. Salas, M. Skrutskie, M. Meyer, P. Sotelo, F. Barbosa, L. Gutiérrez, A. Iriarte, F. Cobos, A. Bernal, B. Sánchez, J. Valdéz, S. Argüelles, and P. Conconi, “CAMILA infrared camera/spectrograph for OAN-SPM,” Proc. SPIE 2198, 774–780 (1994).
[CrossRef]

Argüelles, S.

I. Cruz-González, L. Carrasco, E. Ruiz, L. Salas, M. Skrutskie, M. Meyer, P. Sotelo, F. Barbosa, L. Gutiérrez, A. Iriarte, F. Cobos, A. Bernal, B. Sánchez, J. Valdéz, S. Argüelles, and P. Conconi, “CAMILA infrared camera/spectrograph for OAN-SPM,” Proc. SPIE 2198, 774–780 (1994).
[CrossRef]

Arnol, T.

T. Arnol, G. Böhm, R. Fechner, J. Meister, A. Nickel, F. Frost, T. Hänsel, and A. Schindler, “Ultra-precision surface finishing by ion beam and plasma jet techniques-status and outlook,” Nucl. Instrum. Methods Phys. Res. A 616, 147–156 (2010).
[CrossRef]

Barbosa, F.

I. Cruz-González, L. Carrasco, E. Ruiz, L. Salas, M. Skrutskie, M. Meyer, P. Sotelo, F. Barbosa, L. Gutiérrez, A. Iriarte, F. Cobos, A. Bernal, B. Sánchez, J. Valdéz, S. Argüelles, and P. Conconi, “CAMILA infrared camera/spectrograph for OAN-SPM,” Proc. SPIE 2198, 774–780 (1994).
[CrossRef]

Bennett, J. N.

Bernal, A.

I. Cruz-González, L. Carrasco, E. Ruiz, L. Salas, M. Skrutskie, M. Meyer, P. Sotelo, F. Barbosa, L. Gutiérrez, A. Iriarte, F. Cobos, A. Bernal, B. Sánchez, J. Valdéz, S. Argüelles, and P. Conconi, “CAMILA infrared camera/spectrograph for OAN-SPM,” Proc. SPIE 2198, 774–780 (1994).
[CrossRef]

Böhm, G.

T. Arnol, G. Böhm, R. Fechner, J. Meister, A. Nickel, F. Frost, T. Hänsel, and A. Schindler, “Ultra-precision surface finishing by ion beam and plasma jet techniques-status and outlook,” Nucl. Instrum. Methods Phys. Res. A 616, 147–156 (2010).
[CrossRef]

Cabrera, V.

E. Ruiz, E. Sohn, E. Luna, L. Salas, A. Cordero, J. González, M. Nunez, J. Salinas, I. Cruz-González, J. Valdéz, V. Cabrera, and B. Martínez, “New perspectives in hydrodynamic radial polishing,” Proc. SPIE 5494, 91–100 (2004).
[CrossRef]

Carrasco, L.

I. Cruz-González, L. Carrasco, E. Ruiz, L. Salas, M. Skrutskie, M. Meyer, P. Sotelo, F. Barbosa, L. Gutiérrez, A. Iriarte, F. Cobos, A. Bernal, B. Sánchez, J. Valdéz, S. Argüelles, and P. Conconi, “CAMILA infrared camera/spectrograph for OAN-SPM,” Proc. SPIE 2198, 774–780 (1994).
[CrossRef]

Cobos, F.

I. Cruz-González, L. Carrasco, E. Ruiz, L. Salas, M. Skrutskie, M. Meyer, P. Sotelo, F. Barbosa, L. Gutiérrez, A. Iriarte, F. Cobos, A. Bernal, B. Sánchez, J. Valdéz, S. Argüelles, and P. Conconi, “CAMILA infrared camera/spectrograph for OAN-SPM,” Proc. SPIE 2198, 774–780 (1994).
[CrossRef]

Conconi, P.

I. Cruz-González, L. Carrasco, E. Ruiz, L. Salas, M. Skrutskie, M. Meyer, P. Sotelo, F. Barbosa, L. Gutiérrez, A. Iriarte, F. Cobos, A. Bernal, B. Sánchez, J. Valdéz, S. Argüelles, and P. Conconi, “CAMILA infrared camera/spectrograph for OAN-SPM,” Proc. SPIE 2198, 774–780 (1994).
[CrossRef]

Cordero, A.

E. Ruiz, E. Sohn, E. Luna, L. Salas, A. Cordero, J. González, M. Nunez, J. Salinas, I. Cruz-González, J. Valdéz, V. Cabrera, and B. Martínez, “New perspectives in hydrodynamic radial polishing,” Proc. SPIE 5494, 91–100 (2004).
[CrossRef]

Cordero-Dávila, A.

Cruz-Gonzalez, I.

M. Nunez, J. Salinas, E. Luna, L. Salas, E. Ruiz, E. Sohn, A. Nava, I. Cruz-Gonzalez, and B. Martinez, “Surface roughness results using a hydrodynamic polishing tool (HyDra),” Proc. SPIE 5494, 459–467 (2004).
[CrossRef]

Cruz-González, I.

J. Gonzlez-García, A. Cordero-Dávila, E. Luna, M. Nunez, E. Ruiz, L. Salas, I. Cruz-González, and E. Sohn, “Static and dynamic removal rate of a new hydrodynamic polishing tool (HyDra),” Appl. Opt. 43, 3623–3631 (2004).
[CrossRef]

E. Ruiz, E. Sohn, E. Luna, L. Salas, A. Cordero, J. González, M. Nunez, J. Salinas, I. Cruz-González, J. Valdéz, V. Cabrera, and B. Martínez, “New perspectives in hydrodynamic radial polishing,” Proc. SPIE 5494, 91–100 (2004).
[CrossRef]

I. Cruz-González, L. Carrasco, E. Ruiz, L. Salas, M. Skrutskie, M. Meyer, P. Sotelo, F. Barbosa, L. Gutiérrez, A. Iriarte, F. Cobos, A. Bernal, B. Sánchez, J. Valdéz, S. Argüelles, and P. Conconi, “CAMILA infrared camera/spectrograph for OAN-SPM,” Proc. SPIE 2198, 774–780 (1994).
[CrossRef]

Dai, Y.

Dunn, C. R.

Duparre, A.

Fähnle, O.

O. Fähnle, S. Mourad, K. Hauser, and M. Meeder, “Detection and removal of spatial mid-frequencies in sub-aperture finishing,” in International Optical Design Conference and Optical Fabrication and Testing, OSA Technical Digest (CD) (Optical Society of America, 2010), paper OWE4.

Fähnle, O. W.

Fang, H.

Fechner, R.

T. Arnol, G. Böhm, R. Fechner, J. Meister, A. Nickel, F. Frost, T. Hänsel, and A. Schindler, “Ultra-precision surface finishing by ion beam and plasma jet techniques-status and outlook,” Nucl. Instrum. Methods Phys. Res. A 616, 147–156 (2010).
[CrossRef]

Ferre-Borrull, J.

Frankena, H.

Frost, F.

T. Arnol, G. Böhm, R. Fechner, J. Meister, A. Nickel, F. Frost, T. Hänsel, and A. Schindler, “Ultra-precision surface finishing by ion beam and plasma jet techniques-status and outlook,” Nucl. Instrum. Methods Phys. Res. A 616, 147–156 (2010).
[CrossRef]

Gliech, S.

González, J.

E. Ruiz, E. Sohn, E. Luna, L. Salas, A. Cordero, J. González, M. Nunez, J. Salinas, I. Cruz-González, J. Valdéz, V. Cabrera, and B. Martínez, “New perspectives in hydrodynamic radial polishing,” Proc. SPIE 5494, 91–100 (2004).
[CrossRef]

Gonzlez-García, J.

Guo, P.

Gutiérrez, L.

I. Cruz-González, L. Carrasco, E. Ruiz, L. Salas, M. Skrutskie, M. Meyer, P. Sotelo, F. Barbosa, L. Gutiérrez, A. Iriarte, F. Cobos, A. Bernal, B. Sánchez, J. Valdéz, S. Argüelles, and P. Conconi, “CAMILA infrared camera/spectrograph for OAN-SPM,” Proc. SPIE 2198, 774–780 (1994).
[CrossRef]

Hänsel, T.

T. Arnol, G. Böhm, R. Fechner, J. Meister, A. Nickel, F. Frost, T. Hänsel, and A. Schindler, “Ultra-precision surface finishing by ion beam and plasma jet techniques-status and outlook,” Nucl. Instrum. Methods Phys. Res. A 616, 147–156 (2010).
[CrossRef]

Hauser, K.

O. Fähnle, S. Mourad, K. Hauser, and M. Meeder, “Detection and removal of spatial mid-frequencies in sub-aperture finishing,” in International Optical Design Conference and Optical Fabrication and Testing, OSA Technical Digest (CD) (Optical Society of America, 2010), paper OWE4.

Herrera, J.

E. Luna, L. Salas, E. Sohn, E. Ruiz, J. M. Nunez, and J. Herrera, “Deterministic convergence in iterative phase shifting,” Appl. Opt. 48, 1494–1501 (2009).
[CrossRef]

E. Ruiz, L. Salas, E. Sohn, E. Luna, J. Herrera, and F. Quirosare, preparing a manuscript to be called “HyDRa: control of parameters for deterministic polishing”.

Iriarte, A.

I. Cruz-González, L. Carrasco, E. Ruiz, L. Salas, M. Skrutskie, M. Meyer, P. Sotelo, F. Barbosa, L. Gutiérrez, A. Iriarte, F. Cobos, A. Bernal, B. Sánchez, J. Valdéz, S. Argüelles, and P. Conconi, “CAMILA infrared camera/spectrograph for OAN-SPM,” Proc. SPIE 2198, 774–780 (1994).
[CrossRef]

Li, S.

Li, Z.

Luna, E.

E. Luna, L. Salas, E. Sohn, E. Ruiz, J. M. Nunez, and J. Herrera, “Deterministic convergence in iterative phase shifting,” Appl. Opt. 48, 1494–1501 (2009).
[CrossRef]

M. Nunez, J. Salinas, E. Luna, L. Salas, E. Ruiz, E. Sohn, A. Nava, I. Cruz-Gonzalez, and B. Martinez, “Surface roughness results using a hydrodynamic polishing tool (HyDra),” Proc. SPIE 5494, 459–467 (2004).
[CrossRef]

J. Gonzlez-García, A. Cordero-Dávila, E. Luna, M. Nunez, E. Ruiz, L. Salas, I. Cruz-González, and E. Sohn, “Static and dynamic removal rate of a new hydrodynamic polishing tool (HyDra),” Appl. Opt. 43, 3623–3631 (2004).
[CrossRef]

E. Ruiz, E. Sohn, E. Luna, L. Salas, A. Cordero, J. González, M. Nunez, J. Salinas, I. Cruz-González, J. Valdéz, V. Cabrera, and B. Martínez, “New perspectives in hydrodynamic radial polishing,” Proc. SPIE 5494, 91–100 (2004).
[CrossRef]

E. Ruiz, L. Salas, E. Sohn, E. Luna, J. Herrera, and F. Quirosare, preparing a manuscript to be called “HyDRa: control of parameters for deterministic polishing”.

E. Ruiz, E. Sohn, L. Salas, and E. Luna, “Hydrodynamic radial flux tool for polishing and grinding optical and semiconductor surfaces,” U.S. patent7,169,012 (January302007).

Martinez, B.

M. Nunez, J. Salinas, E. Luna, L. Salas, E. Ruiz, E. Sohn, A. Nava, I. Cruz-Gonzalez, and B. Martinez, “Surface roughness results using a hydrodynamic polishing tool (HyDra),” Proc. SPIE 5494, 459–467 (2004).
[CrossRef]

Martínez, B.

E. Ruiz, E. Sohn, E. Luna, L. Salas, A. Cordero, J. González, M. Nunez, J. Salinas, I. Cruz-González, J. Valdéz, V. Cabrera, and B. Martínez, “New perspectives in hydrodynamic radial polishing,” Proc. SPIE 5494, 91–100 (2004).
[CrossRef]

Meeder, M.

O. Fähnle, S. Mourad, K. Hauser, and M. Meeder, “Detection and removal of spatial mid-frequencies in sub-aperture finishing,” in International Optical Design Conference and Optical Fabrication and Testing, OSA Technical Digest (CD) (Optical Society of America, 2010), paper OWE4.

Meister, J.

T. Arnol, G. Böhm, R. Fechner, J. Meister, A. Nickel, F. Frost, T. Hänsel, and A. Schindler, “Ultra-precision surface finishing by ion beam and plasma jet techniques-status and outlook,” Nucl. Instrum. Methods Phys. Res. A 616, 147–156 (2010).
[CrossRef]

Meyer, M.

I. Cruz-González, L. Carrasco, E. Ruiz, L. Salas, M. Skrutskie, M. Meyer, P. Sotelo, F. Barbosa, L. Gutiérrez, A. Iriarte, F. Cobos, A. Bernal, B. Sánchez, J. Valdéz, S. Argüelles, and P. Conconi, “CAMILA infrared camera/spectrograph for OAN-SPM,” Proc. SPIE 2198, 774–780 (1994).
[CrossRef]

Mourad, S.

O. Fähnle, S. Mourad, K. Hauser, and M. Meeder, “Detection and removal of spatial mid-frequencies in sub-aperture finishing,” in International Optical Design Conference and Optical Fabrication and Testing, OSA Technical Digest (CD) (Optical Society of America, 2010), paper OWE4.

Nava, A.

M. Nunez, J. Salinas, E. Luna, L. Salas, E. Ruiz, E. Sohn, A. Nava, I. Cruz-Gonzalez, and B. Martinez, “Surface roughness results using a hydrodynamic polishing tool (HyDra),” Proc. SPIE 5494, 459–467 (2004).
[CrossRef]

Nickel, A.

T. Arnol, G. Böhm, R. Fechner, J. Meister, A. Nickel, F. Frost, T. Hänsel, and A. Schindler, “Ultra-precision surface finishing by ion beam and plasma jet techniques-status and outlook,” Nucl. Instrum. Methods Phys. Res. A 616, 147–156 (2010).
[CrossRef]

Notni, G.

Nunez, J. M.

Nunez, M.

M. Nunez, J. Salinas, E. Luna, L. Salas, E. Ruiz, E. Sohn, A. Nava, I. Cruz-Gonzalez, and B. Martinez, “Surface roughness results using a hydrodynamic polishing tool (HyDra),” Proc. SPIE 5494, 459–467 (2004).
[CrossRef]

J. Gonzlez-García, A. Cordero-Dávila, E. Luna, M. Nunez, E. Ruiz, L. Salas, I. Cruz-González, and E. Sohn, “Static and dynamic removal rate of a new hydrodynamic polishing tool (HyDra),” Appl. Opt. 43, 3623–3631 (2004).
[CrossRef]

E. Ruiz, E. Sohn, E. Luna, L. Salas, A. Cordero, J. González, M. Nunez, J. Salinas, I. Cruz-González, J. Valdéz, V. Cabrera, and B. Martínez, “New perspectives in hydrodynamic radial polishing,” Proc. SPIE 5494, 91–100 (2004).
[CrossRef]

Peng, X.

Quirosare, F.

E. Ruiz, L. Salas, E. Sohn, E. Luna, J. Herrera, and F. Quirosare, preparing a manuscript to be called “HyDRa: control of parameters for deterministic polishing”.

Ruiz, E.

E. Luna, L. Salas, E. Sohn, E. Ruiz, J. M. Nunez, and J. Herrera, “Deterministic convergence in iterative phase shifting,” Appl. Opt. 48, 1494–1501 (2009).
[CrossRef]

M. Nunez, J. Salinas, E. Luna, L. Salas, E. Ruiz, E. Sohn, A. Nava, I. Cruz-Gonzalez, and B. Martinez, “Surface roughness results using a hydrodynamic polishing tool (HyDra),” Proc. SPIE 5494, 459–467 (2004).
[CrossRef]

J. Gonzlez-García, A. Cordero-Dávila, E. Luna, M. Nunez, E. Ruiz, L. Salas, I. Cruz-González, and E. Sohn, “Static and dynamic removal rate of a new hydrodynamic polishing tool (HyDra),” Appl. Opt. 43, 3623–3631 (2004).
[CrossRef]

E. Ruiz, E. Sohn, E. Luna, L. Salas, A. Cordero, J. González, M. Nunez, J. Salinas, I. Cruz-González, J. Valdéz, V. Cabrera, and B. Martínez, “New perspectives in hydrodynamic radial polishing,” Proc. SPIE 5494, 91–100 (2004).
[CrossRef]

I. Cruz-González, L. Carrasco, E. Ruiz, L. Salas, M. Skrutskie, M. Meyer, P. Sotelo, F. Barbosa, L. Gutiérrez, A. Iriarte, F. Cobos, A. Bernal, B. Sánchez, J. Valdéz, S. Argüelles, and P. Conconi, “CAMILA infrared camera/spectrograph for OAN-SPM,” Proc. SPIE 2198, 774–780 (1994).
[CrossRef]

E. Ruiz, E. Sohn, L. Salas, and E. Luna, “Hydrodynamic radial flux tool for polishing and grinding optical and semiconductor surfaces,” U.S. patent7,169,012 (January302007).

E. Ruiz, L. Salas, E. Sohn, E. Luna, J. Herrera, and F. Quirosare, preparing a manuscript to be called “HyDRa: control of parameters for deterministic polishing”.

Salas, L.

E. Luna, L. Salas, E. Sohn, E. Ruiz, J. M. Nunez, and J. Herrera, “Deterministic convergence in iterative phase shifting,” Appl. Opt. 48, 1494–1501 (2009).
[CrossRef]

M. Nunez, J. Salinas, E. Luna, L. Salas, E. Ruiz, E. Sohn, A. Nava, I. Cruz-Gonzalez, and B. Martinez, “Surface roughness results using a hydrodynamic polishing tool (HyDra),” Proc. SPIE 5494, 459–467 (2004).
[CrossRef]

J. Gonzlez-García, A. Cordero-Dávila, E. Luna, M. Nunez, E. Ruiz, L. Salas, I. Cruz-González, and E. Sohn, “Static and dynamic removal rate of a new hydrodynamic polishing tool (HyDra),” Appl. Opt. 43, 3623–3631 (2004).
[CrossRef]

E. Ruiz, E. Sohn, E. Luna, L. Salas, A. Cordero, J. González, M. Nunez, J. Salinas, I. Cruz-González, J. Valdéz, V. Cabrera, and B. Martínez, “New perspectives in hydrodynamic radial polishing,” Proc. SPIE 5494, 91–100 (2004).
[CrossRef]

I. Cruz-González, L. Carrasco, E. Ruiz, L. Salas, M. Skrutskie, M. Meyer, P. Sotelo, F. Barbosa, L. Gutiérrez, A. Iriarte, F. Cobos, A. Bernal, B. Sánchez, J. Valdéz, S. Argüelles, and P. Conconi, “CAMILA infrared camera/spectrograph for OAN-SPM,” Proc. SPIE 2198, 774–780 (1994).
[CrossRef]

E. Ruiz, E. Sohn, L. Salas, and E. Luna, “Hydrodynamic radial flux tool for polishing and grinding optical and semiconductor surfaces,” U.S. patent7,169,012 (January302007).

E. Ruiz, L. Salas, E. Sohn, E. Luna, J. Herrera, and F. Quirosare, preparing a manuscript to be called “HyDRa: control of parameters for deterministic polishing”.

Salinas, J.

E. Ruiz, E. Sohn, E. Luna, L. Salas, A. Cordero, J. González, M. Nunez, J. Salinas, I. Cruz-González, J. Valdéz, V. Cabrera, and B. Martínez, “New perspectives in hydrodynamic radial polishing,” Proc. SPIE 5494, 91–100 (2004).
[CrossRef]

M. Nunez, J. Salinas, E. Luna, L. Salas, E. Ruiz, E. Sohn, A. Nava, I. Cruz-Gonzalez, and B. Martinez, “Surface roughness results using a hydrodynamic polishing tool (HyDra),” Proc. SPIE 5494, 459–467 (2004).
[CrossRef]

Sánchez, B.

I. Cruz-González, L. Carrasco, E. Ruiz, L. Salas, M. Skrutskie, M. Meyer, P. Sotelo, F. Barbosa, L. Gutiérrez, A. Iriarte, F. Cobos, A. Bernal, B. Sánchez, J. Valdéz, S. Argüelles, and P. Conconi, “CAMILA infrared camera/spectrograph for OAN-SPM,” Proc. SPIE 2198, 774–780 (1994).
[CrossRef]

Schindler, A.

T. Arnol, G. Böhm, R. Fechner, J. Meister, A. Nickel, F. Frost, T. Hänsel, and A. Schindler, “Ultra-precision surface finishing by ion beam and plasma jet techniques-status and outlook,” Nucl. Instrum. Methods Phys. Res. A 616, 147–156 (2010).
[CrossRef]

Shi, C.

Skrutskie, M.

I. Cruz-González, L. Carrasco, E. Ruiz, L. Salas, M. Skrutskie, M. Meyer, P. Sotelo, F. Barbosa, L. Gutiérrez, A. Iriarte, F. Cobos, A. Bernal, B. Sánchez, J. Valdéz, S. Argüelles, and P. Conconi, “CAMILA infrared camera/spectrograph for OAN-SPM,” Proc. SPIE 2198, 774–780 (1994).
[CrossRef]

Sohn, E.

E. Luna, L. Salas, E. Sohn, E. Ruiz, J. M. Nunez, and J. Herrera, “Deterministic convergence in iterative phase shifting,” Appl. Opt. 48, 1494–1501 (2009).
[CrossRef]

M. Nunez, J. Salinas, E. Luna, L. Salas, E. Ruiz, E. Sohn, A. Nava, I. Cruz-Gonzalez, and B. Martinez, “Surface roughness results using a hydrodynamic polishing tool (HyDra),” Proc. SPIE 5494, 459–467 (2004).
[CrossRef]

J. Gonzlez-García, A. Cordero-Dávila, E. Luna, M. Nunez, E. Ruiz, L. Salas, I. Cruz-González, and E. Sohn, “Static and dynamic removal rate of a new hydrodynamic polishing tool (HyDra),” Appl. Opt. 43, 3623–3631 (2004).
[CrossRef]

E. Ruiz, E. Sohn, E. Luna, L. Salas, A. Cordero, J. González, M. Nunez, J. Salinas, I. Cruz-González, J. Valdéz, V. Cabrera, and B. Martínez, “New perspectives in hydrodynamic radial polishing,” Proc. SPIE 5494, 91–100 (2004).
[CrossRef]

E. Ruiz, L. Salas, E. Sohn, E. Luna, J. Herrera, and F. Quirosare, preparing a manuscript to be called “HyDRa: control of parameters for deterministic polishing”.

E. Ruiz, E. Sohn, L. Salas, and E. Luna, “Hydrodynamic radial flux tool for polishing and grinding optical and semiconductor surfaces,” U.S. patent7,169,012 (January302007).

Sotelo, P.

I. Cruz-González, L. Carrasco, E. Ruiz, L. Salas, M. Skrutskie, M. Meyer, P. Sotelo, F. Barbosa, L. Gutiérrez, A. Iriarte, F. Cobos, A. Bernal, B. Sánchez, J. Valdéz, S. Argüelles, and P. Conconi, “CAMILA infrared camera/spectrograph for OAN-SPM,” Proc. SPIE 2198, 774–780 (1994).
[CrossRef]

Steinert, J.

Valdéz, J.

E. Ruiz, E. Sohn, E. Luna, L. Salas, A. Cordero, J. González, M. Nunez, J. Salinas, I. Cruz-González, J. Valdéz, V. Cabrera, and B. Martínez, “New perspectives in hydrodynamic radial polishing,” Proc. SPIE 5494, 91–100 (2004).
[CrossRef]

I. Cruz-González, L. Carrasco, E. Ruiz, L. Salas, M. Skrutskie, M. Meyer, P. Sotelo, F. Barbosa, L. Gutiérrez, A. Iriarte, F. Cobos, A. Bernal, B. Sánchez, J. Valdéz, S. Argüelles, and P. Conconi, “CAMILA infrared camera/spectrograph for OAN-SPM,” Proc. SPIE 2198, 774–780 (1994).
[CrossRef]

van Brug, H.

Walker, D. D.

Wan, Y.

Wu, F.

Yu, J.

Yuan, J.

Appl. Opt. (7)

Chin. Opt. Lett. (1)

Nucl. Instrum. Methods Phys. Res. A (1)

T. Arnol, G. Böhm, R. Fechner, J. Meister, A. Nickel, F. Frost, T. Hänsel, and A. Schindler, “Ultra-precision surface finishing by ion beam and plasma jet techniques-status and outlook,” Nucl. Instrum. Methods Phys. Res. A 616, 147–156 (2010).
[CrossRef]

Opt. Express (1)

Proc. SPIE (3)

E. Ruiz, E. Sohn, E. Luna, L. Salas, A. Cordero, J. González, M. Nunez, J. Salinas, I. Cruz-González, J. Valdéz, V. Cabrera, and B. Martínez, “New perspectives in hydrodynamic radial polishing,” Proc. SPIE 5494, 91–100 (2004).
[CrossRef]

M. Nunez, J. Salinas, E. Luna, L. Salas, E. Ruiz, E. Sohn, A. Nava, I. Cruz-Gonzalez, and B. Martinez, “Surface roughness results using a hydrodynamic polishing tool (HyDra),” Proc. SPIE 5494, 459–467 (2004).
[CrossRef]

I. Cruz-González, L. Carrasco, E. Ruiz, L. Salas, M. Skrutskie, M. Meyer, P. Sotelo, F. Barbosa, L. Gutiérrez, A. Iriarte, F. Cobos, A. Bernal, B. Sánchez, J. Valdéz, S. Argüelles, and P. Conconi, “CAMILA infrared camera/spectrograph for OAN-SPM,” Proc. SPIE 2198, 774–780 (1994).
[CrossRef]

Other (3)

O. Fähnle, S. Mourad, K. Hauser, and M. Meeder, “Detection and removal of spatial mid-frequencies in sub-aperture finishing,” in International Optical Design Conference and Optical Fabrication and Testing, OSA Technical Digest (CD) (Optical Society of America, 2010), paper OWE4.

E. Ruiz, E. Sohn, L. Salas, and E. Luna, “Hydrodynamic radial flux tool for polishing and grinding optical and semiconductor surfaces,” U.S. patent7,169,012 (January302007).

E. Ruiz, L. Salas, E. Sohn, E. Luna, J. Herrera, and F. Quirosare, preparing a manuscript to be called “HyDRa: control of parameters for deterministic polishing”.

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Figures (9)

Fig. 1.
Fig. 1.

Tool influence function. The lower image shows the removal function profile extracted from the upper interferogram. This profile was obtained by operating the tool on a fixed position over the workpiece for 2 s. DH is the full width at half-maximum (FWHM) of the removal function. Tool footprint diameters typically range between 3 and 10 mm, depending on the particular tool.

Fig. 2.
Fig. 2.

HyDRa polishing process setup. The tool is mounted on a 5 DOF CNC machine. Slurry is pumped to the tool from the slurry management unit (SMU) and supplied to the tool, where it is converted into a controlled-density abrasive foam that is accelerated and expelled radially onto the workpiece. A load cell continually monitors tool force and regulates tool height to zero-force operation. A software package generates dwell-time-based tool trajectories from interferometric measurements.

Fig. 3.
Fig. 3.

Pressure profile exerted onto the work surface by the HyDRa tool as a function of tool radius for different push–pull forces.

Fig. 4.
Fig. 4.

HyDRa tool at a distance Z of a sample being polished. The forces at play are shown in the diagram (see text), and the resultant is measured with a load cell.

Fig. 5.
Fig. 5.

Force applied by the HyDRa tool as a function of distance Z from the work surface for accelerating pressure PT=50psi. Typical error bars are shown: 0.1 N for the load cell and 20 μm for Z position. The solid line is an analytical function fit.

Fig. 6.
Fig. 6.

Volumetric removal rate DV as a function of accelerating pressure (PT) for different polishing agents: 1 μm cerium oxide (Opaline), 5 μm aluminum oxide (μ grit), and 12 μm aluminum oxide. Opaline polisher rates are presented for window glass (solid line), fused silica, and borosilicate (dotted line). μ grit removal is presented for window glass and CLEARCERAM-Z vitroceramic. All fitting curves are scaled versions of the same second-order polynomial law where the scaling factor is a function of particle size and substrate material (see text). Tool height was adjusted for zero-force polishing.

Fig. 7.
Fig. 7.

Two-dimensional power spectral density PSD2 as a function of linear spatial frequency obtained with HyDRa on etalon C.

Fig. 8.
Fig. 8.

Example of one of four polished etalon plates before and after HyDRa polishing. The upper images show the wrapped phase of the surface before (left) and after (right) polishing. The lower images show the unwrapped phases of the original and polished surface, respectively. The inscribed circle marks the usable region of this plate.

Fig. 9.
Fig. 9.

Microroughness of a 50μm×50μm area, obtained from a Linnik microinterferogram, of one of the polished etalon plates.

Tables (1)

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Table 1. Fitting Curve Parameters

Equations (4)

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FemgFv+Fh=0;
Fe+Fx+Fv=0.
F(z)=De(1eα(zze))2De,
z0=zeln(2)2α

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