Abstract
A multilayer structure consisting of alternate layers of W and has been deposited using a magnetron sputtering system. The structure of the as-deposited and vacuum-annealed multilayer sample has been characterized using grazing incidence x-ray reflectivity, grazing incidence diffraction, and the normal incidence reflectivity has been measured using synchrotron radiation. A two-layer model consisting of tungsten and boron carbide is presented. The multilayer structure was found to be stable after 800°C annealing. Grazing incidence x-ray diffraction measurements suggested that W is polycrystalline with small grain size. No signature of tungsten carbide or tungsten boride formation could be observed during the annealing treatments. A near normal incidence soft x-ray reflectivity (SXRR) of was obtained at 6.8 nm wavelength. A little drop () in SXRR after 800°C annealing suggested that there were no compositional changes within the layers during the annealing treatments.
© 2013 Optical Society of America
Full Article | PDF ArticleMore Like This
Miriam Barthelmess and Saša Bajt
Appl. Opt. 50(11) 1610-1619 (2011)
Dmitriy Ksenzov, Christoph Schlemper, and Ullrich Pietsch
Appl. Opt. 49(25) 4767-4773 (2010)
Dmitriy Ksenzov, Tobias Panzner, Christoph Schlemper, Christian Morawe, and Ullrich Pietsch
Appl. Opt. 48(35) 6684-6691 (2009)