P. Wang, W. Tian, R. Wang, L. Wang, Y. Sui, and H. Yang, “Rotating chuck test for removing chuck error of optical surface,” Acta Opt. Sin. 31, 136–143 (2011).

E. Miao, J. Zhang, Y. Gu, Y. Kang, and W. Liu, “Measurement error analysis of high precision Fizeau interferometer for lithography projection objective,” Chinese J. Lasers 37, 2029–2034 (2010).

[CrossRef]

T. Matsuyama, I. Tanaka, T. Ozawa, K. Nomura, and T. Koyama, “Improving lens performance through the most recent lens manufacturing process,” Proc. SPIE 5040, 801–810 (2003).

[CrossRef]

T. Yoshihara, R. Koizumi, K. Takahashi, S. Suda, and A. Suzuki, “Realization of very small aberration projection lenses,” Proc. SPIE 4000, 559–566 (2000).

[CrossRef]

X. Wei and X. Yu, “An optical wavefront sensing and reconstruction method based on Zernike polynominals,” Acta Opt. Sin. 14, 718–723 (1994).

E. Miao, J. Zhang, Y. Gu, Y. Kang, and W. Liu, “Measurement error analysis of high precision Fizeau interferometer for lithography projection objective,” Chinese J. Lasers 37, 2029–2034 (2010).

[CrossRef]

E. Miao, J. Zhang, Y. Gu, Y. Kang, and W. Liu, “Measurement error analysis of high precision Fizeau interferometer for lithography projection objective,” Chinese J. Lasers 37, 2029–2034 (2010).

[CrossRef]

T. Yoshihara, R. Koizumi, K. Takahashi, S. Suda, and A. Suzuki, “Realization of very small aberration projection lenses,” Proc. SPIE 4000, 559–566 (2000).

[CrossRef]

T. Matsuyama, I. Tanaka, T. Ozawa, K. Nomura, and T. Koyama, “Improving lens performance through the most recent lens manufacturing process,” Proc. SPIE 5040, 801–810 (2003).

[CrossRef]

E. Miao, J. Zhang, Y. Gu, Y. Kang, and W. Liu, “Measurement error analysis of high precision Fizeau interferometer for lithography projection objective,” Chinese J. Lasers 37, 2029–2034 (2010).

[CrossRef]

T. Matsuyama, I. Tanaka, T. Ozawa, K. Nomura, and T. Koyama, “Improving lens performance through the most recent lens manufacturing process,” Proc. SPIE 5040, 801–810 (2003).

[CrossRef]

E. Miao, J. Zhang, Y. Gu, Y. Kang, and W. Liu, “Measurement error analysis of high precision Fizeau interferometer for lithography projection objective,” Chinese J. Lasers 37, 2029–2034 (2010).

[CrossRef]

T. Matsuyama, I. Tanaka, T. Ozawa, K. Nomura, and T. Koyama, “Improving lens performance through the most recent lens manufacturing process,” Proc. SPIE 5040, 801–810 (2003).

[CrossRef]

T. Matsuyama, I. Tanaka, T. Ozawa, K. Nomura, and T. Koyama, “Improving lens performance through the most recent lens manufacturing process,” Proc. SPIE 5040, 801–810 (2003).

[CrossRef]

T. Yoshihara, R. Koizumi, K. Takahashi, S. Suda, and A. Suzuki, “Realization of very small aberration projection lenses,” Proc. SPIE 4000, 559–566 (2000).

[CrossRef]

P. Wang, W. Tian, R. Wang, L. Wang, Y. Sui, and H. Yang, “Rotating chuck test for removing chuck error of optical surface,” Acta Opt. Sin. 31, 136–143 (2011).

T. Yoshihara, R. Koizumi, K. Takahashi, S. Suda, and A. Suzuki, “Realization of very small aberration projection lenses,” Proc. SPIE 4000, 559–566 (2000).

[CrossRef]

T. Yoshihara, R. Koizumi, K. Takahashi, S. Suda, and A. Suzuki, “Realization of very small aberration projection lenses,” Proc. SPIE 4000, 559–566 (2000).

[CrossRef]

T. Matsuyama, I. Tanaka, T. Ozawa, K. Nomura, and T. Koyama, “Improving lens performance through the most recent lens manufacturing process,” Proc. SPIE 5040, 801–810 (2003).

[CrossRef]

P. Wang, W. Tian, R. Wang, L. Wang, Y. Sui, and H. Yang, “Rotating chuck test for removing chuck error of optical surface,” Acta Opt. Sin. 31, 136–143 (2011).

P. Wang, W. Tian, R. Wang, L. Wang, Y. Sui, and H. Yang, “Rotating chuck test for removing chuck error of optical surface,” Acta Opt. Sin. 31, 136–143 (2011).

P. Wang, W. Tian, R. Wang, L. Wang, Y. Sui, and H. Yang, “Rotating chuck test for removing chuck error of optical surface,” Acta Opt. Sin. 31, 136–143 (2011).

P. Wang, W. Tian, R. Wang, L. Wang, Y. Sui, and H. Yang, “Rotating chuck test for removing chuck error of optical surface,” Acta Opt. Sin. 31, 136–143 (2011).

X. Wei and X. Yu, “An optical wavefront sensing and reconstruction method based on Zernike polynominals,” Acta Opt. Sin. 14, 718–723 (1994).

W. Xu, “Optical ddesign and imaging performance compensation for the lithographic lens,” Ph.D. dissertation (Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Science, 2011) pp. 29–31.

P. Wang, W. Tian, R. Wang, L. Wang, Y. Sui, and H. Yang, “Rotating chuck test for removing chuck error of optical surface,” Acta Opt. Sin. 31, 136–143 (2011).

T. Yoshihara, R. Koizumi, K. Takahashi, S. Suda, and A. Suzuki, “Realization of very small aberration projection lenses,” Proc. SPIE 4000, 559–566 (2000).

[CrossRef]

X. Wei and X. Yu, “An optical wavefront sensing and reconstruction method based on Zernike polynominals,” Acta Opt. Sin. 14, 718–723 (1994).

E. Miao, J. Zhang, Y. Gu, Y. Kang, and W. Liu, “Measurement error analysis of high precision Fizeau interferometer for lithography projection objective,” Chinese J. Lasers 37, 2029–2034 (2010).

[CrossRef]

P. Wang, W. Tian, R. Wang, L. Wang, Y. Sui, and H. Yang, “Rotating chuck test for removing chuck error of optical surface,” Acta Opt. Sin. 31, 136–143 (2011).

X. Wei and X. Yu, “An optical wavefront sensing and reconstruction method based on Zernike polynominals,” Acta Opt. Sin. 14, 718–723 (1994).

E. Miao, J. Zhang, Y. Gu, Y. Kang, and W. Liu, “Measurement error analysis of high precision Fizeau interferometer for lithography projection objective,” Chinese J. Lasers 37, 2029–2034 (2010).

[CrossRef]

T. Matsuyama, I. Tanaka, T. Ozawa, K. Nomura, and T. Koyama, “Improving lens performance through the most recent lens manufacturing process,” Proc. SPIE 5040, 801–810 (2003).

[CrossRef]

T. Yoshihara, R. Koizumi, K. Takahashi, S. Suda, and A. Suzuki, “Realization of very small aberration projection lenses,” Proc. SPIE 4000, 559–566 (2000).

[CrossRef]

W. Xu, “Optical ddesign and imaging performance compensation for the lithographic lens,” Ph.D. dissertation (Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Science, 2011) pp. 29–31.

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