Abstract

For extremely high-performance lithographic lenses, the edge level accuracy of the manufacturing process and multicompensation strategies must be applied. Element clocking can be effectively used to compensate for the low-order figure errors of the elements. Considering that commercial optical software is usually incapable of obtaining good convergence for clocking optimization, this paper proposes a mathematical model of a lithographic lens containing the errors of a surface figure, after which a clocking optimization algorithm is programmed. A clocking optimization instance proving that the clocking optimization algorithm is capable of finding the optimized angle of elements and that clocking is an effective compensation strategy. The calculated accuracy of the proposed mathematic model was found to be acceptable for clocking optimization.

© 2013 Optical Society of America

Full Article  |  PDF Article
Related Articles
Optical control of the Advanced Technology Solar Telescope

Robert Upton
Appl. Opt. 45(23) 5881-5896 (2006)

Calibration and precompensation of noncommon path aberrations for extreme adaptive optics

Jean-François Sauvage, Thierry Fusco, Gérard Rousset, and Cyril Petit
J. Opt. Soc. Am. A 24(8) 2334-2346 (2007)

No wavefront sensor adaptive optics system for compensation of primary aberrations by software analysis of a point source image. 1. Methods

Enrico Grisan, Fabio Frassetto, Vania Da Deppo, Giampiero Naletto, and Alfredo Ruggeri
Appl. Opt. 46(25) 6434-6441 (2007)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (7)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (4)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription