Abstract

A fiber pressure sensor with a collimator at the off-center position of a diaphragm is demonstrated. The detection mechanism is incident-angle sensitive rather than traditional working-distance sensitive. Due to the small beam divergence of the collimator, the control on working distance is less stringent, and high sensitivity can be realized because the coupling efficiency of the collimator is very sensitive to the incident angle decided by the off-center diaphragm reflection. Sensitivity of 1.11 and 0.16dB/KPa can be achieved with silicon diaphragm thicknesses of 100 and 150 μm, respectively. Moreover, the detection range can be continually shifted by changing the pressure in the sealed diaphragm cavity.

© 2013 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Compressible fiber optic micro-Fabry-Pérot cavity with ultra-high pressure sensitivity

Ying Wang, D. N. Wang, Chao Wang, and Tianyi Hu
Opt. Express 21(12) 14084-14089 (2013)

Micro-cantilever-based fiber optic hydrophone fabricated by a femtosecond laser

Jie Liu, Lei Yuan, Jincheng Lei, Wenge Zhu, Baokai Cheng, Qi Zhang, Yang Song, Chuan Chen, and Hai Xiao
Opt. Lett. 42(13) 2459-2462 (2017)

Fiber-tip gas pressure sensor based on dual capillaries

Ben Xu, Chao Wang, D. N. Wang, Yaming Liu, and Yi Li
Opt. Express 23(18) 23484-23492 (2015)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (8)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (5)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription