Abstract

Piezoelectric PbZr0.52Ti0.48O3 (PZT) thin films deposited on thin glass substrates have been proposed for adjustable optics in future x-ray telescopes. The light weight of these x-ray optics enables large collecting areas, while the capability to correct mirror figure errors with the PZT thin film will allow much higher imaging resolution than possible with conventional lightweight optics. However, the low strain temperature and flexible nature of the thin glass complicate the use of chemical-solution deposition due to warping of the substrate at typical crystallization temperatures for the PZT. RF magnetron sputtering enabled preparation of PZT films with thicknesses up to 3 μm on Schott D263 glass substrates with much less deformation. X-ray diffraction analysis indicated that the films crystallized with the perovskite phase and showed no indication of secondary phases. Films with 1cm2 electrodes exhibited relative permittivity values near 1100 and loss tangents below 0.05. In addition, the remanent polarization was 26μC/cm2 with coercive fields of 33kV/cm. The transverse piezoelectric coefficient was as high as 6.1±0.6C/m2. To assess influence functions for the x-ray optics application, the piezoelectrically induced deflection of individual cells was measured and compared with finite-element-analysis calculations. The good agreement between the results suggests that actuation of PZT thin films can control mirror figure errors to a precision of about 5 nm, allowing sub-arcsecond imaging.

© 2013 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Optical waveguiding in epitaxial PbTiO3 thin films

Elhadj Dogheche, Boujemaa Jaber, and Dénis Rémiens
Appl. Opt. 37(19) 4245-4248 (1998)

Amorphous In2Ga2ZnO7 films with adjustable structural, electrical and optical properties deposited by magnetron sputtering

Xianjie Zhou, Jiwen Xu, Ling Yang, Xiaosheng Tang, Qiuping Wei, and Zhiming Yu
Opt. Mater. Express 5(7) 1628-1634 (2015)

Single-crystalline Ge1-x-ySixSny alloys on Si (100) grown by magnetron sputtering

Jun Zheng, Suyuan Wang, Tianwei Zhou, Yuhua Zuo, Buwen Cheng, and Qiming Wang
Opt. Mater. Express 5(2) 287-294 (2015)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (8)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (3)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription