Abstract

The elementary function method is an approximate method for propagation calculations in spatially, partially coherent light in two dimensions. In this paper, we present the numerical application of this method to a 248 nm UV excimer laser source. We present experimental results of the measurement of the degree of spatial coherence and the beam profile of this source. The elementary function method is then applied to the real beam data and used to simulate the effects of imaging an opaque edge with a source of varying degrees of spatial coherence. The effect of spatial coherence on beam homogenization is also presented.

© 2013 Optical Society of America

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