Dynamic symmetrical pattern projection based laser triangulation sensor for precise surface position measurement of various material types

Abstract

This paper describes a custom, material-type-independent laser-triangulation-based measurement system that utilizes a high-quality ultraviolet laser beam. Laser structuring applications demand material surface alignment regarding the laser focus position, where fabrication conditions are optimal. Robust alignment of various material types was solved by introducing dynamic symmetrical pattern projection, and a “double curve fitting” centroid detection algorithm with subsurface scattering compensation. Experimental results have shown that the measurement system proves robust to laser intensity variation, with measurement bias lower than 50 μm and standard deviation lower than $\pm 6.3\mathrm{\mu m}$ for all materials. The developed probe has been integrated into a PCB prototyping system for material referencing purposes.

© 2013 Optical Society of America

Flying spot laser triangulation scanner using lateral synchronization for surface profile precision measurement

Hanlin Zhang, Yongjie Ren, Changjie Liu, and Jigui Zhu
Appl. Opt. 53(20) 4405-4412 (2014)

Development of a diffraction-type optical triangulation sensor

Chien-Hung Liu, Wen-Yuh Jywe, and Chao-Kwai Chen
Appl. Opt. 43(30) 5607-5613 (2004)

Laser triangulation: fundamental uncertainty in distance measurement

Rainer G. Dorsch, Gerd Häusler, and Jürgen M. Herrmann
Appl. Opt. 33(7) 1306-1314 (1994)

Analysis of imaging for laser triangulation sensors under Scheimpflug rule

Antonin Miks, Jiri Novak, and Pavel Novak
Opt. Express 21(15) 18225-18235 (2013)

High-dynamic angle measurement based on laser displacement sensors

Junhua Sun, Jie Zhang, Zhen Liu, and Guangjun Zhang
Appl. Opt. 52(23) 5676-5685 (2013)