Dynamic symmetrical pattern projection based laser triangulation sensor for precise surface position measurement of various material types

Abstract

This paper describes a custom, material-type-independent laser-triangulation-based measurement system that utilizes a high-quality ultraviolet laser beam. Laser structuring applications demand material surface alignment regarding the laser focus position, where fabrication conditions are optimal. Robust alignment of various material types was solved by introducing dynamic symmetrical pattern projection, and a “double curve fitting” centroid detection algorithm with subsurface scattering compensation. Experimental results have shown that the measurement system proves robust to laser intensity variation, with measurement bias lower than 50 μm and standard deviation lower than $\pm 6.3\mathrm{\mu m}$ for all materials. The developed probe has been integrated into a PCB prototyping system for material referencing purposes.

© 2013 Optical Society of America

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