Abstract

Miniaturized laser Doppler vibrometers (LDVs) have many advantages over conventional bulk LDVs. In this paper, the realization of a miniaturized heterodyne LDV integrated on silicon-on-insulator substrate is reported. The optical frequency shifters in these on-chip LDVs employ a serrodyne technique, and they generate a frequency shift at 2 kHz. Vibrations of a mirror for the frequency range between 1.1 and 123 Hz and the velocity range between 0.8 and 400  μm/s are measured by both an on-chip LDV and a commercial LDV. The measurement results agree well. A compensation method for the influence of on-chip spurious reflections is also demonstrated.

© 2013 Optical Society of America

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    [CrossRef]
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    [CrossRef]
  3. A. Campo and J. Dirckx, “Dual-beam laser Doppler vibrometer for measurement of pulse wave velocity in elastic vessels,” Proc. SPIE 8011, 80118Y (2011).
    [CrossRef]
  4. W. Bogaerts, R. Baets, P. Dumon, V. Wiaux, S. Beckx, D. Taillaert, B. Luyssaert, J. Van Campenhout, P. Bienstman, and D. Van Thourhout, “Nanophotonic waveguides in silicon-on-insulator fabricated with CMOS technology,” J. Lightwave Technol. 23, 401–412 (2005).
    [CrossRef]
  5. A. T. Waz, P. R. Kaczmarek, and K. M. Abramski, “Laser-fibre vibrometry at 1550 nm,” Meas. Sci. Technol. 20, 105301 (2009).
    [CrossRef]
  6. T. O. H. Charrett, S. W. James, and R. P. Tatam, “Optical fibre laser velocimetry: a review,” Meas. Sci. Technol. 23, 032001 (2012).
    [CrossRef]
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    [CrossRef]
  8. Y. Li, S. Meersman, and R. Baets, “Optical frequency shifter on SOI using thermo-optic serrodyne modulation,” Proceedings of 7th International Conference in Group IV Photonics (IEEE, 2010), p. P1.4.
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    [CrossRef]
  10. S. Stankovic, R. Jones, M. N. Sysak, J. M. Heck, G. Roelkens, and D. Van Thourhout, “Hybrid III-V/Si distributed-feedback laser based on adhesive bonding,” IEEE Photon. Technol. Lett. 24, 2155–2158 (2012).
    [CrossRef]
  11. D. Vermeulen, Y. De Koninck, Y. Li, E. Lambert, W. Bogaerts, R. Baets, and G. Roelkens, “Reflectionless grating coupling for silicon-on-insulator integrated circuits,” in Proceedings of 8th IEEE International Conference on Group IV Photonics (IEEE, 2011), pp. 74–76.
  12. Y. Li, D. Vermeulen, Y. De Koninck, G. Yurtsever, G. Roelkens, and R. Baets, “Compact grating couplers on silicon-on-insulator (SOI) with reduced back reflection,” Opt. Lett. 37, 4356–4358 (2012).
    [CrossRef]
  13. “OFV-534 Compact Sensor Head and OFV-5000 Modular Vibrometer Controller,” www.polytec.com .
  14. J. R. Carson, “Notes on the theory of modulation,” Proc. IRE 10, 57–64 (1922).
    [CrossRef]

2012 (3)

T. O. H. Charrett, S. W. James, and R. P. Tatam, “Optical fibre laser velocimetry: a review,” Meas. Sci. Technol. 23, 032001 (2012).
[CrossRef]

S. Stankovic, R. Jones, M. N. Sysak, J. M. Heck, G. Roelkens, and D. Van Thourhout, “Hybrid III-V/Si distributed-feedback laser based on adhesive bonding,” IEEE Photon. Technol. Lett. 24, 2155–2158 (2012).
[CrossRef]

Y. Li, D. Vermeulen, Y. De Koninck, G. Yurtsever, G. Roelkens, and R. Baets, “Compact grating couplers on silicon-on-insulator (SOI) with reduced back reflection,” Opt. Lett. 37, 4356–4358 (2012).
[CrossRef]

2011 (2)

Y. Li, S. Meersman, and R. Baets, “Realization of fiber-based laser Doppler vibrometer with serrodyne frequency shifting,” Appl. Opt. 50, 2809–2814 (2011).
[CrossRef]

A. Campo and J. Dirckx, “Dual-beam laser Doppler vibrometer for measurement of pulse wave velocity in elastic vessels,” Proc. SPIE 8011, 80118Y (2011).
[CrossRef]

2009 (1)

A. T. Waz, P. R. Kaczmarek, and K. M. Abramski, “Laser-fibre vibrometry at 1550 nm,” Meas. Sci. Technol. 20, 105301 (2009).
[CrossRef]

2007 (1)

2005 (1)

1990 (1)

1987 (1)

H. Toda, M. Haruna, and H. Nishihara, “Optical integrated circuit for a fiber laser Doppler velocimeter,” J. Lightwave Technol. 5, 901–905 (1987).
[CrossRef]

1922 (1)

J. R. Carson, “Notes on the theory of modulation,” Proc. IRE 10, 57–64 (1922).
[CrossRef]

Abramski, K. M.

A. T. Waz, P. R. Kaczmarek, and K. M. Abramski, “Laser-fibre vibrometry at 1550 nm,” Meas. Sci. Technol. 20, 105301 (2009).
[CrossRef]

Baets, R.

Y. Li, D. Vermeulen, Y. De Koninck, G. Yurtsever, G. Roelkens, and R. Baets, “Compact grating couplers on silicon-on-insulator (SOI) with reduced back reflection,” Opt. Lett. 37, 4356–4358 (2012).
[CrossRef]

Y. Li, S. Meersman, and R. Baets, “Realization of fiber-based laser Doppler vibrometer with serrodyne frequency shifting,” Appl. Opt. 50, 2809–2814 (2011).
[CrossRef]

W. Bogaerts, R. Baets, P. Dumon, V. Wiaux, S. Beckx, D. Taillaert, B. Luyssaert, J. Van Campenhout, P. Bienstman, and D. Van Thourhout, “Nanophotonic waveguides in silicon-on-insulator fabricated with CMOS technology,” J. Lightwave Technol. 23, 401–412 (2005).
[CrossRef]

Y. Li, S. Meersman, and R. Baets, “Optical frequency shifter on SOI using thermo-optic serrodyne modulation,” Proceedings of 7th International Conference in Group IV Photonics (IEEE, 2010), p. P1.4.

D. Vermeulen, Y. De Koninck, Y. Li, E. Lambert, W. Bogaerts, R. Baets, and G. Roelkens, “Reflectionless grating coupling for silicon-on-insulator integrated circuits,” in Proceedings of 8th IEEE International Conference on Group IV Photonics (IEEE, 2011), pp. 74–76.

Beckx, S.

Bienstman, P.

Bogaerts, W.

W. Bogaerts, R. Baets, P. Dumon, V. Wiaux, S. Beckx, D. Taillaert, B. Luyssaert, J. Van Campenhout, P. Bienstman, and D. Van Thourhout, “Nanophotonic waveguides in silicon-on-insulator fabricated with CMOS technology,” J. Lightwave Technol. 23, 401–412 (2005).
[CrossRef]

D. Vermeulen, Y. De Koninck, Y. Li, E. Lambert, W. Bogaerts, R. Baets, and G. Roelkens, “Reflectionless grating coupling for silicon-on-insulator integrated circuits,” in Proceedings of 8th IEEE International Conference on Group IV Photonics (IEEE, 2011), pp. 74–76.

Brown, R. G.

Burnett, J. G.

Campo, A.

A. Campo and J. Dirckx, “Dual-beam laser Doppler vibrometer for measurement of pulse wave velocity in elastic vessels,” Proc. SPIE 8011, 80118Y (2011).
[CrossRef]

Carson, J. R.

J. R. Carson, “Notes on the theory of modulation,” Proc. IRE 10, 57–64 (1922).
[CrossRef]

Charrett, T. O. H.

T. O. H. Charrett, S. W. James, and R. P. Tatam, “Optical fibre laser velocimetry: a review,” Meas. Sci. Technol. 23, 032001 (2012).
[CrossRef]

De Koninck, Y.

Y. Li, D. Vermeulen, Y. De Koninck, G. Yurtsever, G. Roelkens, and R. Baets, “Compact grating couplers on silicon-on-insulator (SOI) with reduced back reflection,” Opt. Lett. 37, 4356–4358 (2012).
[CrossRef]

D. Vermeulen, Y. De Koninck, Y. Li, E. Lambert, W. Bogaerts, R. Baets, and G. Roelkens, “Reflectionless grating coupling for silicon-on-insulator integrated circuits,” in Proceedings of 8th IEEE International Conference on Group IV Photonics (IEEE, 2011), pp. 74–76.

Dirckx, J.

A. Campo and J. Dirckx, “Dual-beam laser Doppler vibrometer for measurement of pulse wave velocity in elastic vessels,” Proc. SPIE 8011, 80118Y (2011).
[CrossRef]

Dumon, P.

Green, W.

Haruna, M.

H. Toda, M. Haruna, and H. Nishihara, “Optical integrated circuit for a fiber laser Doppler velocimeter,” J. Lightwave Technol. 5, 901–905 (1987).
[CrossRef]

Heck, J. M.

S. Stankovic, R. Jones, M. N. Sysak, J. M. Heck, G. Roelkens, and D. Van Thourhout, “Hybrid III-V/Si distributed-feedback laser based on adhesive bonding,” IEEE Photon. Technol. Lett. 24, 2155–2158 (2012).
[CrossRef]

James, S. W.

T. O. H. Charrett, S. W. James, and R. P. Tatam, “Optical fibre laser velocimetry: a review,” Meas. Sci. Technol. 23, 032001 (2012).
[CrossRef]

Jones, R.

S. Stankovic, R. Jones, M. N. Sysak, J. M. Heck, G. Roelkens, and D. Van Thourhout, “Hybrid III-V/Si distributed-feedback laser based on adhesive bonding,” IEEE Photon. Technol. Lett. 24, 2155–2158 (2012).
[CrossRef]

Kaczmarek, P. R.

A. T. Waz, P. R. Kaczmarek, and K. M. Abramski, “Laser-fibre vibrometry at 1550 nm,” Meas. Sci. Technol. 20, 105301 (2009).
[CrossRef]

Lambert, E.

D. Vermeulen, Y. De Koninck, Y. Li, E. Lambert, W. Bogaerts, R. Baets, and G. Roelkens, “Reflectionless grating coupling for silicon-on-insulator integrated circuits,” in Proceedings of 8th IEEE International Conference on Group IV Photonics (IEEE, 2011), pp. 74–76.

Li, Y.

Y. Li, D. Vermeulen, Y. De Koninck, G. Yurtsever, G. Roelkens, and R. Baets, “Compact grating couplers on silicon-on-insulator (SOI) with reduced back reflection,” Opt. Lett. 37, 4356–4358 (2012).
[CrossRef]

Y. Li, S. Meersman, and R. Baets, “Realization of fiber-based laser Doppler vibrometer with serrodyne frequency shifting,” Appl. Opt. 50, 2809–2814 (2011).
[CrossRef]

D. Vermeulen, Y. De Koninck, Y. Li, E. Lambert, W. Bogaerts, R. Baets, and G. Roelkens, “Reflectionless grating coupling for silicon-on-insulator integrated circuits,” in Proceedings of 8th IEEE International Conference on Group IV Photonics (IEEE, 2011), pp. 74–76.

Y. Li, S. Meersman, and R. Baets, “Optical frequency shifter on SOI using thermo-optic serrodyne modulation,” Proceedings of 7th International Conference in Group IV Photonics (IEEE, 2010), p. P1.4.

Lowans, B. S.

Luyssaert, B.

Mansbridge, J.

Meersman, S.

Y. Li, S. Meersman, and R. Baets, “Realization of fiber-based laser Doppler vibrometer with serrodyne frequency shifting,” Appl. Opt. 50, 2809–2814 (2011).
[CrossRef]

Y. Li, S. Meersman, and R. Baets, “Optical frequency shifter on SOI using thermo-optic serrodyne modulation,” Proceedings of 7th International Conference in Group IV Photonics (IEEE, 2010), p. P1.4.

Moir, C. I.

Nishihara, H.

H. Toda, M. Haruna, and H. Nishihara, “Optical integrated circuit for a fiber laser Doppler velocimeter,” J. Lightwave Technol. 5, 901–905 (1987).
[CrossRef]

Roelkens, G.

S. Stankovic, R. Jones, M. N. Sysak, J. M. Heck, G. Roelkens, and D. Van Thourhout, “Hybrid III-V/Si distributed-feedback laser based on adhesive bonding,” IEEE Photon. Technol. Lett. 24, 2155–2158 (2012).
[CrossRef]

Y. Li, D. Vermeulen, Y. De Koninck, G. Yurtsever, G. Roelkens, and R. Baets, “Compact grating couplers on silicon-on-insulator (SOI) with reduced back reflection,” Opt. Lett. 37, 4356–4358 (2012).
[CrossRef]

D. Vermeulen, Y. De Koninck, Y. Li, E. Lambert, W. Bogaerts, R. Baets, and G. Roelkens, “Reflectionless grating coupling for silicon-on-insulator integrated circuits,” in Proceedings of 8th IEEE International Conference on Group IV Photonics (IEEE, 2011), pp. 74–76.

Rooks, M.

Sekaric, L.

Stankovic, S.

S. Stankovic, R. Jones, M. N. Sysak, J. M. Heck, G. Roelkens, and D. Van Thourhout, “Hybrid III-V/Si distributed-feedback laser based on adhesive bonding,” IEEE Photon. Technol. Lett. 24, 2155–2158 (2012).
[CrossRef]

Sysak, M. N.

S. Stankovic, R. Jones, M. N. Sysak, J. M. Heck, G. Roelkens, and D. Van Thourhout, “Hybrid III-V/Si distributed-feedback laser based on adhesive bonding,” IEEE Photon. Technol. Lett. 24, 2155–2158 (2012).
[CrossRef]

Taillaert, D.

Tatam, R. P.

T. O. H. Charrett, S. W. James, and R. P. Tatam, “Optical fibre laser velocimetry: a review,” Meas. Sci. Technol. 23, 032001 (2012).
[CrossRef]

Toda, H.

H. Toda, M. Haruna, and H. Nishihara, “Optical integrated circuit for a fiber laser Doppler velocimeter,” J. Lightwave Technol. 5, 901–905 (1987).
[CrossRef]

Van Campenhout, J.

Van Thourhout, D.

S. Stankovic, R. Jones, M. N. Sysak, J. M. Heck, G. Roelkens, and D. Van Thourhout, “Hybrid III-V/Si distributed-feedback laser based on adhesive bonding,” IEEE Photon. Technol. Lett. 24, 2155–2158 (2012).
[CrossRef]

W. Bogaerts, R. Baets, P. Dumon, V. Wiaux, S. Beckx, D. Taillaert, B. Luyssaert, J. Van Campenhout, P. Bienstman, and D. Van Thourhout, “Nanophotonic waveguides in silicon-on-insulator fabricated with CMOS technology,” J. Lightwave Technol. 23, 401–412 (2005).
[CrossRef]

Vermeulen, D.

Y. Li, D. Vermeulen, Y. De Koninck, G. Yurtsever, G. Roelkens, and R. Baets, “Compact grating couplers on silicon-on-insulator (SOI) with reduced back reflection,” Opt. Lett. 37, 4356–4358 (2012).
[CrossRef]

D. Vermeulen, Y. De Koninck, Y. Li, E. Lambert, W. Bogaerts, R. Baets, and G. Roelkens, “Reflectionless grating coupling for silicon-on-insulator integrated circuits,” in Proceedings of 8th IEEE International Conference on Group IV Photonics (IEEE, 2011), pp. 74–76.

Waz, A. T.

A. T. Waz, P. R. Kaczmarek, and K. M. Abramski, “Laser-fibre vibrometry at 1550 nm,” Meas. Sci. Technol. 20, 105301 (2009).
[CrossRef]

Wiaux, V.

Yurtsever, G.

Appl. Opt. (2)

IEEE Photon. Technol. Lett. (1)

S. Stankovic, R. Jones, M. N. Sysak, J. M. Heck, G. Roelkens, and D. Van Thourhout, “Hybrid III-V/Si distributed-feedback laser based on adhesive bonding,” IEEE Photon. Technol. Lett. 24, 2155–2158 (2012).
[CrossRef]

J. Lightwave Technol. (2)

Meas. Sci. Technol. (2)

A. T. Waz, P. R. Kaczmarek, and K. M. Abramski, “Laser-fibre vibrometry at 1550 nm,” Meas. Sci. Technol. 20, 105301 (2009).
[CrossRef]

T. O. H. Charrett, S. W. James, and R. P. Tatam, “Optical fibre laser velocimetry: a review,” Meas. Sci. Technol. 23, 032001 (2012).
[CrossRef]

Opt. Express (1)

Opt. Lett. (1)

Proc. IRE (1)

J. R. Carson, “Notes on the theory of modulation,” Proc. IRE 10, 57–64 (1922).
[CrossRef]

Proc. SPIE (1)

A. Campo and J. Dirckx, “Dual-beam laser Doppler vibrometer for measurement of pulse wave velocity in elastic vessels,” Proc. SPIE 8011, 80118Y (2011).
[CrossRef]

Other (3)

Y. Li, S. Meersman, and R. Baets, “Optical frequency shifter on SOI using thermo-optic serrodyne modulation,” Proceedings of 7th International Conference in Group IV Photonics (IEEE, 2010), p. P1.4.

D. Vermeulen, Y. De Koninck, Y. Li, E. Lambert, W. Bogaerts, R. Baets, and G. Roelkens, “Reflectionless grating coupling for silicon-on-insulator integrated circuits,” in Proceedings of 8th IEEE International Conference on Group IV Photonics (IEEE, 2011), pp. 74–76.

“OFV-534 Compact Sensor Head and OFV-5000 Modular Vibrometer Controller,” www.polytec.com .

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