Abstract

Miniaturized laser Doppler vibrometers (LDVs) have many advantages over conventional bulk LDVs. In this paper, the realization of a miniaturized heterodyne LDV integrated on silicon-on-insulator substrate is reported. The optical frequency shifters in these on-chip LDVs employ a serrodyne technique, and they generate a frequency shift at 2 kHz. Vibrations of a mirror for the frequency range between 1.1 and 123 Hz and the velocity range between 0.8 and 400μm/s are measured by both an on-chip LDV and a commercial LDV. The measurement results agree well. A compensation method for the influence of on-chip spurious reflections is also demonstrated.

© 2013 Optical Society of America

Full Article  |  PDF Article
Related Articles
Realization of fiber-based laser Doppler vibrometer with serrodyne frequency shifting

Yanlu Li, Stijn Meersman, and Roel Baets
Appl. Opt. 50(17) 2809-2814 (2011)

Low-voltage high-performance silicon photonic devices and photonic integrated circuits operating up to 30 Gb/s

Gyungock Kim, Jeong Woo Park, In Gyoo Kim, Sanghoon Kim, Sanggi Kim, Jong Moo Lee, Gun Sik Park, Jiho Joo, Ki-Seok Jang, Jin Hyuk Oh, Sun Ae Kim, Jong Hoon Kim, Jun Young Lee, Jong Moon Park, Do-Won Kim, Deog-Kyoon Jeong, Moon-Sang Hwang, Jeong-Kyoum Kim, Kyu-Sang Park, Han-Kyu Chi, Hyun-Chang Kim, Dong-Wook Kim, and Mu Hee Cho
Opt. Express 19(27) 26936-26947 (2011)

High-speed and high-sensitivity displacement measurement with phase-locked low-coherence interferometry

Lazo M. Manojlović, Miloš B. Živanov, Miloš P. Slankamenac, Jovan S. Bajić, and Dragan Z. Stupar
Appl. Opt. 51(19) 4333-4342 (2012)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (15)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (4)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription