Abstract
The addition of electronics, computers, and software to interferometry has
enabled enormous improvements in optical metrology. This paper discusses four
areas in which computerized interferometric measurement improvements have been
made in the measurement of surface shape and surface roughness: (a) The use
of computer-generated holograms for the testing of aspheric optics,
(b) phase-shifting interferometry for getting interferometric data into a
computer so the data can be analyzed, (c) computerized interference
microscopes, including multiple-wavelength and coherence scanning, for the
precision measurement of surface microstructure, and
(d) vibration-insensitive dynamic interferometers for enabling precise
measurements in noncontrolled environments.
© 2012 Optical Society of America
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