Abstract

The addition of electronics, computers, and software to interferometry has enabled enormous improvements in optical metrology. This paper discusses four areas in which computerized interferometric measurement improvements have been made in the measurement of surface shape and surface roughness: (a) The use of computer-generated holograms for the testing of aspheric optics, (b) phase-shifting interferometry for getting interferometric data into a computer so the data can be analyzed, (c) computerized interference microscopes, including multiple-wavelength and coherence scanning, for the precision measurement of surface microstructure, and (d) vibration-insensitive dynamic interferometers for enabling precise measurements in noncontrolled environments.

© 2012 Optical Society of America

Full Article  |  PDF Article

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (8)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (9)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription