Abstract

Various zinc oxide films were deposited by ion-beam sputter deposition (IBSD) under different oxygen partial pressures (PO2) at room temperature. The as-deposited ZnO films fabricated at PO2>1.0×104Torr had poly-crystalline structures to absorb water on the surface at ambient condition. Simultaneously, the film surfaces were covered and smoothed by the surface layers formed with the water, hydroxyl (OH) groups, and ZnO materials investigated by X-ray photoelectron spectroscopy (XPS). When the compositions of the surface layers were used in a multilayer fitting model of spectroscopic ellipsometry, the actual optical refractive index of the ZnO film deposited at PO2=1.2×104Torr was found to be about 1.9618 at λ=550nm.

© 2012 Optical Society of America

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