Abstract

This paper presents a novel filtering method with a double triangular prism in an optical-readout thermal imaging system. First, the working principle of this system is described in detail, followed by the analysis of sensitivity. Then, infrared images of hands are obtained. On the basis of the analysis, it is concluded that this filtering method, whose noise equivalent temperature difference (NETD) can reach 145 mK, is effective in obtaining high-quality images. Finally, comparing the filtering method with a knife-edge filter, we can draw the conclusion that the filtering method can effectively improve image quality (the value of NETD is less than that of a knife-edge filter).

© 2012 Optical Society of America

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  1. A. Rogalski, “Infrared detectors: status and trends,” Prog. Quantum Electron. 27, 59–210 (2003).
    [CrossRef]
  2. P. I. Oden, P. G. Datskos, T. Thundat, and R. J. Warmack, “Uncooled thermal imaging using a piezoresistive microcantilever,” Appl. Phys. Lett. 69, 3277–3279 (1996).
    [CrossRef]
  3. S. R. Manalis, S. C. Minne, C. F. Quate, G. G. Yaralioglu, and A. Atalar, “Two-dimensional micromechanical bimorph arrays for detection of thermal radiation,” Appl. Phys. Lett. 70, 3311–3313 (1997).
    [CrossRef]
  4. M. Mao, T. Perazzo, O. Kwon, A. Majumda, J. Varesi, and P. Norton, “Direct-view uncooled micro-optomechanical infrared camera,” in Proceedings of IEEE Conference on Micro Electro Mechanical Systems (IEEE, 1999), pp. 100–105.
  5. P. Norton, M. Mao, T. M. Perazzo, Y. Zhao, O. Kwon, A. Majumdar, and J. B. Varesi, “Micro-optomechanical infrared receiver with optical readout: MIRROR,” Proc. SPIE 4028, 72–78 (2000).
    [CrossRef]
  6. T. Ishizuya, J. Suzuki, K. Akagawa, and T. Kazama, “Optically readable bi-material infrared detector,” Proc. SPIE 4369, 342–349 (2001).
    [CrossRef]
  7. D. Grbovic, N. V. Lavrik, P. G. Datskos, D. Forrai, E. Nelson, J. Devitt, and B. McIntyre, “Uncooled infrared imaging using bimaterial microcantilever arrays,” Appl. Phys. Lett. 89, 073118 (2006).
    [CrossRef]
  8. N. Lavrik, R. Archibald, D. Grbovic, S. Rajic, and P. Datskos, “Uncooled MEMS IR imagers with optical readout and image processing,” Proc. SPIE 6542, 65421E (2006).
    [CrossRef]
  9. D. Grbovic, N. V. Lavrik, S. Rajic, and P. G. Datskosa, “Arrays of SiO2 substrate-free micromechanical uncooled infrared and terahertz detectors,” J. Appl. Phys. 104, 054508(2008).
    [CrossRef]
  10. J. P. Salerno, “High frame rate imaging using uncooled optical readout photomechanical IR sensor,” Proc. SPIE 6542, 65421D (2007).
    [CrossRef]
  11. J. Zhao, V. DiFilippo, and M. Li, “Low cost molded optics for IR imaging,” Proc. SPIE 7298, 72983J (2009).
    [CrossRef]
  12. C. D. W. Jones, C. A. Bolle, R. Ryf, M. E. Simon, F. Pardo, V. A. Aksyuk, W. Y.-C. Lai, J. E. Bower, J. F. Miner, F. P. Klemens, R. A. Cirelli, T. W. Sorsch, E. J. Ferry, L. A. Fetter, C.-S. Pai, J. A. Taylor, B. Vyas, G. P. Watson, B. Stekas, M. R. Baker, A. R. Papazian, N. R. Basavanhally, W. M. Mansfield, A. Kornblit, R. C. Keller, J. V. Gates, and A. P. Ramirez, “MEMS thermal imager with optical readout,” Sens. Actuators A 155, 47–57 (2009).
    [CrossRef]
  13. L. Pan, Q. C. Zhang, X. P. Wu, Z. H. Duan, D. P. Chen, W. B. Wang, and Z. Y. Guo, “MEMS based optomechanical infrared imaging,” Exp. Mech. 19, 404–406 (2004).
  14. T. Cheng, “Research of optical readout uncooled infrared imaging system based on MEMS,” Ph.D. dissertation (University of Science and Technology of China, 2010).
  15. J. H. Xie, D. Z. Zhao, and J. X. Yan, Physical Optics Tutorials (Beijing Institute of Technology Press, 2005).
  16. Z. M. Xiong, Q. C. Zhang, D. P. Chen, X. P. Wu, Z. Y. Guo, F. L. Dong, Z. Y. Miu, and C. B. Li, “Optical-readout micro-cantilever array IR imaging system and performance analysis,” Chin. J. Phys. 56, 2529–2536 (2007).

2009 (2)

J. Zhao, V. DiFilippo, and M. Li, “Low cost molded optics for IR imaging,” Proc. SPIE 7298, 72983J (2009).
[CrossRef]

C. D. W. Jones, C. A. Bolle, R. Ryf, M. E. Simon, F. Pardo, V. A. Aksyuk, W. Y.-C. Lai, J. E. Bower, J. F. Miner, F. P. Klemens, R. A. Cirelli, T. W. Sorsch, E. J. Ferry, L. A. Fetter, C.-S. Pai, J. A. Taylor, B. Vyas, G. P. Watson, B. Stekas, M. R. Baker, A. R. Papazian, N. R. Basavanhally, W. M. Mansfield, A. Kornblit, R. C. Keller, J. V. Gates, and A. P. Ramirez, “MEMS thermal imager with optical readout,” Sens. Actuators A 155, 47–57 (2009).
[CrossRef]

2008 (1)

D. Grbovic, N. V. Lavrik, S. Rajic, and P. G. Datskosa, “Arrays of SiO2 substrate-free micromechanical uncooled infrared and terahertz detectors,” J. Appl. Phys. 104, 054508(2008).
[CrossRef]

2007 (2)

J. P. Salerno, “High frame rate imaging using uncooled optical readout photomechanical IR sensor,” Proc. SPIE 6542, 65421D (2007).
[CrossRef]

Z. M. Xiong, Q. C. Zhang, D. P. Chen, X. P. Wu, Z. Y. Guo, F. L. Dong, Z. Y. Miu, and C. B. Li, “Optical-readout micro-cantilever array IR imaging system and performance analysis,” Chin. J. Phys. 56, 2529–2536 (2007).

2006 (2)

D. Grbovic, N. V. Lavrik, P. G. Datskos, D. Forrai, E. Nelson, J. Devitt, and B. McIntyre, “Uncooled infrared imaging using bimaterial microcantilever arrays,” Appl. Phys. Lett. 89, 073118 (2006).
[CrossRef]

N. Lavrik, R. Archibald, D. Grbovic, S. Rajic, and P. Datskos, “Uncooled MEMS IR imagers with optical readout and image processing,” Proc. SPIE 6542, 65421E (2006).
[CrossRef]

2004 (1)

L. Pan, Q. C. Zhang, X. P. Wu, Z. H. Duan, D. P. Chen, W. B. Wang, and Z. Y. Guo, “MEMS based optomechanical infrared imaging,” Exp. Mech. 19, 404–406 (2004).

2003 (1)

A. Rogalski, “Infrared detectors: status and trends,” Prog. Quantum Electron. 27, 59–210 (2003).
[CrossRef]

2001 (1)

T. Ishizuya, J. Suzuki, K. Akagawa, and T. Kazama, “Optically readable bi-material infrared detector,” Proc. SPIE 4369, 342–349 (2001).
[CrossRef]

2000 (1)

P. Norton, M. Mao, T. M. Perazzo, Y. Zhao, O. Kwon, A. Majumdar, and J. B. Varesi, “Micro-optomechanical infrared receiver with optical readout: MIRROR,” Proc. SPIE 4028, 72–78 (2000).
[CrossRef]

1997 (1)

S. R. Manalis, S. C. Minne, C. F. Quate, G. G. Yaralioglu, and A. Atalar, “Two-dimensional micromechanical bimorph arrays for detection of thermal radiation,” Appl. Phys. Lett. 70, 3311–3313 (1997).
[CrossRef]

1996 (1)

P. I. Oden, P. G. Datskos, T. Thundat, and R. J. Warmack, “Uncooled thermal imaging using a piezoresistive microcantilever,” Appl. Phys. Lett. 69, 3277–3279 (1996).
[CrossRef]

Akagawa, K.

T. Ishizuya, J. Suzuki, K. Akagawa, and T. Kazama, “Optically readable bi-material infrared detector,” Proc. SPIE 4369, 342–349 (2001).
[CrossRef]

Aksyuk, V. A.

C. D. W. Jones, C. A. Bolle, R. Ryf, M. E. Simon, F. Pardo, V. A. Aksyuk, W. Y.-C. Lai, J. E. Bower, J. F. Miner, F. P. Klemens, R. A. Cirelli, T. W. Sorsch, E. J. Ferry, L. A. Fetter, C.-S. Pai, J. A. Taylor, B. Vyas, G. P. Watson, B. Stekas, M. R. Baker, A. R. Papazian, N. R. Basavanhally, W. M. Mansfield, A. Kornblit, R. C. Keller, J. V. Gates, and A. P. Ramirez, “MEMS thermal imager with optical readout,” Sens. Actuators A 155, 47–57 (2009).
[CrossRef]

Archibald, R.

N. Lavrik, R. Archibald, D. Grbovic, S. Rajic, and P. Datskos, “Uncooled MEMS IR imagers with optical readout and image processing,” Proc. SPIE 6542, 65421E (2006).
[CrossRef]

Atalar, A.

S. R. Manalis, S. C. Minne, C. F. Quate, G. G. Yaralioglu, and A. Atalar, “Two-dimensional micromechanical bimorph arrays for detection of thermal radiation,” Appl. Phys. Lett. 70, 3311–3313 (1997).
[CrossRef]

Baker, M. R.

C. D. W. Jones, C. A. Bolle, R. Ryf, M. E. Simon, F. Pardo, V. A. Aksyuk, W. Y.-C. Lai, J. E. Bower, J. F. Miner, F. P. Klemens, R. A. Cirelli, T. W. Sorsch, E. J. Ferry, L. A. Fetter, C.-S. Pai, J. A. Taylor, B. Vyas, G. P. Watson, B. Stekas, M. R. Baker, A. R. Papazian, N. R. Basavanhally, W. M. Mansfield, A. Kornblit, R. C. Keller, J. V. Gates, and A. P. Ramirez, “MEMS thermal imager with optical readout,” Sens. Actuators A 155, 47–57 (2009).
[CrossRef]

Basavanhally, N. R.

C. D. W. Jones, C. A. Bolle, R. Ryf, M. E. Simon, F. Pardo, V. A. Aksyuk, W. Y.-C. Lai, J. E. Bower, J. F. Miner, F. P. Klemens, R. A. Cirelli, T. W. Sorsch, E. J. Ferry, L. A. Fetter, C.-S. Pai, J. A. Taylor, B. Vyas, G. P. Watson, B. Stekas, M. R. Baker, A. R. Papazian, N. R. Basavanhally, W. M. Mansfield, A. Kornblit, R. C. Keller, J. V. Gates, and A. P. Ramirez, “MEMS thermal imager with optical readout,” Sens. Actuators A 155, 47–57 (2009).
[CrossRef]

Bolle, C. A.

C. D. W. Jones, C. A. Bolle, R. Ryf, M. E. Simon, F. Pardo, V. A. Aksyuk, W. Y.-C. Lai, J. E. Bower, J. F. Miner, F. P. Klemens, R. A. Cirelli, T. W. Sorsch, E. J. Ferry, L. A. Fetter, C.-S. Pai, J. A. Taylor, B. Vyas, G. P. Watson, B. Stekas, M. R. Baker, A. R. Papazian, N. R. Basavanhally, W. M. Mansfield, A. Kornblit, R. C. Keller, J. V. Gates, and A. P. Ramirez, “MEMS thermal imager with optical readout,” Sens. Actuators A 155, 47–57 (2009).
[CrossRef]

Bower, J. E.

C. D. W. Jones, C. A. Bolle, R. Ryf, M. E. Simon, F. Pardo, V. A. Aksyuk, W. Y.-C. Lai, J. E. Bower, J. F. Miner, F. P. Klemens, R. A. Cirelli, T. W. Sorsch, E. J. Ferry, L. A. Fetter, C.-S. Pai, J. A. Taylor, B. Vyas, G. P. Watson, B. Stekas, M. R. Baker, A. R. Papazian, N. R. Basavanhally, W. M. Mansfield, A. Kornblit, R. C. Keller, J. V. Gates, and A. P. Ramirez, “MEMS thermal imager with optical readout,” Sens. Actuators A 155, 47–57 (2009).
[CrossRef]

Chen, D. P.

Z. M. Xiong, Q. C. Zhang, D. P. Chen, X. P. Wu, Z. Y. Guo, F. L. Dong, Z. Y. Miu, and C. B. Li, “Optical-readout micro-cantilever array IR imaging system and performance analysis,” Chin. J. Phys. 56, 2529–2536 (2007).

L. Pan, Q. C. Zhang, X. P. Wu, Z. H. Duan, D. P. Chen, W. B. Wang, and Z. Y. Guo, “MEMS based optomechanical infrared imaging,” Exp. Mech. 19, 404–406 (2004).

Cheng, T.

T. Cheng, “Research of optical readout uncooled infrared imaging system based on MEMS,” Ph.D. dissertation (University of Science and Technology of China, 2010).

Cirelli, R. A.

C. D. W. Jones, C. A. Bolle, R. Ryf, M. E. Simon, F. Pardo, V. A. Aksyuk, W. Y.-C. Lai, J. E. Bower, J. F. Miner, F. P. Klemens, R. A. Cirelli, T. W. Sorsch, E. J. Ferry, L. A. Fetter, C.-S. Pai, J. A. Taylor, B. Vyas, G. P. Watson, B. Stekas, M. R. Baker, A. R. Papazian, N. R. Basavanhally, W. M. Mansfield, A. Kornblit, R. C. Keller, J. V. Gates, and A. P. Ramirez, “MEMS thermal imager with optical readout,” Sens. Actuators A 155, 47–57 (2009).
[CrossRef]

Datskos, P.

N. Lavrik, R. Archibald, D. Grbovic, S. Rajic, and P. Datskos, “Uncooled MEMS IR imagers with optical readout and image processing,” Proc. SPIE 6542, 65421E (2006).
[CrossRef]

Datskos, P. G.

D. Grbovic, N. V. Lavrik, P. G. Datskos, D. Forrai, E. Nelson, J. Devitt, and B. McIntyre, “Uncooled infrared imaging using bimaterial microcantilever arrays,” Appl. Phys. Lett. 89, 073118 (2006).
[CrossRef]

P. I. Oden, P. G. Datskos, T. Thundat, and R. J. Warmack, “Uncooled thermal imaging using a piezoresistive microcantilever,” Appl. Phys. Lett. 69, 3277–3279 (1996).
[CrossRef]

Datskosa, P. G.

D. Grbovic, N. V. Lavrik, S. Rajic, and P. G. Datskosa, “Arrays of SiO2 substrate-free micromechanical uncooled infrared and terahertz detectors,” J. Appl. Phys. 104, 054508(2008).
[CrossRef]

Devitt, J.

D. Grbovic, N. V. Lavrik, P. G. Datskos, D. Forrai, E. Nelson, J. Devitt, and B. McIntyre, “Uncooled infrared imaging using bimaterial microcantilever arrays,” Appl. Phys. Lett. 89, 073118 (2006).
[CrossRef]

DiFilippo, V.

J. Zhao, V. DiFilippo, and M. Li, “Low cost molded optics for IR imaging,” Proc. SPIE 7298, 72983J (2009).
[CrossRef]

Dong, F. L.

Z. M. Xiong, Q. C. Zhang, D. P. Chen, X. P. Wu, Z. Y. Guo, F. L. Dong, Z. Y. Miu, and C. B. Li, “Optical-readout micro-cantilever array IR imaging system and performance analysis,” Chin. J. Phys. 56, 2529–2536 (2007).

Duan, Z. H.

L. Pan, Q. C. Zhang, X. P. Wu, Z. H. Duan, D. P. Chen, W. B. Wang, and Z. Y. Guo, “MEMS based optomechanical infrared imaging,” Exp. Mech. 19, 404–406 (2004).

Ferry, E. J.

C. D. W. Jones, C. A. Bolle, R. Ryf, M. E. Simon, F. Pardo, V. A. Aksyuk, W. Y.-C. Lai, J. E. Bower, J. F. Miner, F. P. Klemens, R. A. Cirelli, T. W. Sorsch, E. J. Ferry, L. A. Fetter, C.-S. Pai, J. A. Taylor, B. Vyas, G. P. Watson, B. Stekas, M. R. Baker, A. R. Papazian, N. R. Basavanhally, W. M. Mansfield, A. Kornblit, R. C. Keller, J. V. Gates, and A. P. Ramirez, “MEMS thermal imager with optical readout,” Sens. Actuators A 155, 47–57 (2009).
[CrossRef]

Fetter, L. A.

C. D. W. Jones, C. A. Bolle, R. Ryf, M. E. Simon, F. Pardo, V. A. Aksyuk, W. Y.-C. Lai, J. E. Bower, J. F. Miner, F. P. Klemens, R. A. Cirelli, T. W. Sorsch, E. J. Ferry, L. A. Fetter, C.-S. Pai, J. A. Taylor, B. Vyas, G. P. Watson, B. Stekas, M. R. Baker, A. R. Papazian, N. R. Basavanhally, W. M. Mansfield, A. Kornblit, R. C. Keller, J. V. Gates, and A. P. Ramirez, “MEMS thermal imager with optical readout,” Sens. Actuators A 155, 47–57 (2009).
[CrossRef]

Forrai, D.

D. Grbovic, N. V. Lavrik, P. G. Datskos, D. Forrai, E. Nelson, J. Devitt, and B. McIntyre, “Uncooled infrared imaging using bimaterial microcantilever arrays,” Appl. Phys. Lett. 89, 073118 (2006).
[CrossRef]

Gates, J. V.

C. D. W. Jones, C. A. Bolle, R. Ryf, M. E. Simon, F. Pardo, V. A. Aksyuk, W. Y.-C. Lai, J. E. Bower, J. F. Miner, F. P. Klemens, R. A. Cirelli, T. W. Sorsch, E. J. Ferry, L. A. Fetter, C.-S. Pai, J. A. Taylor, B. Vyas, G. P. Watson, B. Stekas, M. R. Baker, A. R. Papazian, N. R. Basavanhally, W. M. Mansfield, A. Kornblit, R. C. Keller, J. V. Gates, and A. P. Ramirez, “MEMS thermal imager with optical readout,” Sens. Actuators A 155, 47–57 (2009).
[CrossRef]

Grbovic, D.

D. Grbovic, N. V. Lavrik, S. Rajic, and P. G. Datskosa, “Arrays of SiO2 substrate-free micromechanical uncooled infrared and terahertz detectors,” J. Appl. Phys. 104, 054508(2008).
[CrossRef]

N. Lavrik, R. Archibald, D. Grbovic, S. Rajic, and P. Datskos, “Uncooled MEMS IR imagers with optical readout and image processing,” Proc. SPIE 6542, 65421E (2006).
[CrossRef]

D. Grbovic, N. V. Lavrik, P. G. Datskos, D. Forrai, E. Nelson, J. Devitt, and B. McIntyre, “Uncooled infrared imaging using bimaterial microcantilever arrays,” Appl. Phys. Lett. 89, 073118 (2006).
[CrossRef]

Guo, Z. Y.

Z. M. Xiong, Q. C. Zhang, D. P. Chen, X. P. Wu, Z. Y. Guo, F. L. Dong, Z. Y. Miu, and C. B. Li, “Optical-readout micro-cantilever array IR imaging system and performance analysis,” Chin. J. Phys. 56, 2529–2536 (2007).

L. Pan, Q. C. Zhang, X. P. Wu, Z. H. Duan, D. P. Chen, W. B. Wang, and Z. Y. Guo, “MEMS based optomechanical infrared imaging,” Exp. Mech. 19, 404–406 (2004).

Ishizuya, T.

T. Ishizuya, J. Suzuki, K. Akagawa, and T. Kazama, “Optically readable bi-material infrared detector,” Proc. SPIE 4369, 342–349 (2001).
[CrossRef]

Jones, C. D. W.

C. D. W. Jones, C. A. Bolle, R. Ryf, M. E. Simon, F. Pardo, V. A. Aksyuk, W. Y.-C. Lai, J. E. Bower, J. F. Miner, F. P. Klemens, R. A. Cirelli, T. W. Sorsch, E. J. Ferry, L. A. Fetter, C.-S. Pai, J. A. Taylor, B. Vyas, G. P. Watson, B. Stekas, M. R. Baker, A. R. Papazian, N. R. Basavanhally, W. M. Mansfield, A. Kornblit, R. C. Keller, J. V. Gates, and A. P. Ramirez, “MEMS thermal imager with optical readout,” Sens. Actuators A 155, 47–57 (2009).
[CrossRef]

Kazama, T.

T. Ishizuya, J. Suzuki, K. Akagawa, and T. Kazama, “Optically readable bi-material infrared detector,” Proc. SPIE 4369, 342–349 (2001).
[CrossRef]

Keller, R. C.

C. D. W. Jones, C. A. Bolle, R. Ryf, M. E. Simon, F. Pardo, V. A. Aksyuk, W. Y.-C. Lai, J. E. Bower, J. F. Miner, F. P. Klemens, R. A. Cirelli, T. W. Sorsch, E. J. Ferry, L. A. Fetter, C.-S. Pai, J. A. Taylor, B. Vyas, G. P. Watson, B. Stekas, M. R. Baker, A. R. Papazian, N. R. Basavanhally, W. M. Mansfield, A. Kornblit, R. C. Keller, J. V. Gates, and A. P. Ramirez, “MEMS thermal imager with optical readout,” Sens. Actuators A 155, 47–57 (2009).
[CrossRef]

Klemens, F. P.

C. D. W. Jones, C. A. Bolle, R. Ryf, M. E. Simon, F. Pardo, V. A. Aksyuk, W. Y.-C. Lai, J. E. Bower, J. F. Miner, F. P. Klemens, R. A. Cirelli, T. W. Sorsch, E. J. Ferry, L. A. Fetter, C.-S. Pai, J. A. Taylor, B. Vyas, G. P. Watson, B. Stekas, M. R. Baker, A. R. Papazian, N. R. Basavanhally, W. M. Mansfield, A. Kornblit, R. C. Keller, J. V. Gates, and A. P. Ramirez, “MEMS thermal imager with optical readout,” Sens. Actuators A 155, 47–57 (2009).
[CrossRef]

Kornblit, A.

C. D. W. Jones, C. A. Bolle, R. Ryf, M. E. Simon, F. Pardo, V. A. Aksyuk, W. Y.-C. Lai, J. E. Bower, J. F. Miner, F. P. Klemens, R. A. Cirelli, T. W. Sorsch, E. J. Ferry, L. A. Fetter, C.-S. Pai, J. A. Taylor, B. Vyas, G. P. Watson, B. Stekas, M. R. Baker, A. R. Papazian, N. R. Basavanhally, W. M. Mansfield, A. Kornblit, R. C. Keller, J. V. Gates, and A. P. Ramirez, “MEMS thermal imager with optical readout,” Sens. Actuators A 155, 47–57 (2009).
[CrossRef]

Kwon, O.

P. Norton, M. Mao, T. M. Perazzo, Y. Zhao, O. Kwon, A. Majumdar, and J. B. Varesi, “Micro-optomechanical infrared receiver with optical readout: MIRROR,” Proc. SPIE 4028, 72–78 (2000).
[CrossRef]

M. Mao, T. Perazzo, O. Kwon, A. Majumda, J. Varesi, and P. Norton, “Direct-view uncooled micro-optomechanical infrared camera,” in Proceedings of IEEE Conference on Micro Electro Mechanical Systems (IEEE, 1999), pp. 100–105.

Lai, W. Y.-C.

C. D. W. Jones, C. A. Bolle, R. Ryf, M. E. Simon, F. Pardo, V. A. Aksyuk, W. Y.-C. Lai, J. E. Bower, J. F. Miner, F. P. Klemens, R. A. Cirelli, T. W. Sorsch, E. J. Ferry, L. A. Fetter, C.-S. Pai, J. A. Taylor, B. Vyas, G. P. Watson, B. Stekas, M. R. Baker, A. R. Papazian, N. R. Basavanhally, W. M. Mansfield, A. Kornblit, R. C. Keller, J. V. Gates, and A. P. Ramirez, “MEMS thermal imager with optical readout,” Sens. Actuators A 155, 47–57 (2009).
[CrossRef]

Lavrik, N.

N. Lavrik, R. Archibald, D. Grbovic, S. Rajic, and P. Datskos, “Uncooled MEMS IR imagers with optical readout and image processing,” Proc. SPIE 6542, 65421E (2006).
[CrossRef]

Lavrik, N. V.

D. Grbovic, N. V. Lavrik, S. Rajic, and P. G. Datskosa, “Arrays of SiO2 substrate-free micromechanical uncooled infrared and terahertz detectors,” J. Appl. Phys. 104, 054508(2008).
[CrossRef]

D. Grbovic, N. V. Lavrik, P. G. Datskos, D. Forrai, E. Nelson, J. Devitt, and B. McIntyre, “Uncooled infrared imaging using bimaterial microcantilever arrays,” Appl. Phys. Lett. 89, 073118 (2006).
[CrossRef]

Li, C. B.

Z. M. Xiong, Q. C. Zhang, D. P. Chen, X. P. Wu, Z. Y. Guo, F. L. Dong, Z. Y. Miu, and C. B. Li, “Optical-readout micro-cantilever array IR imaging system and performance analysis,” Chin. J. Phys. 56, 2529–2536 (2007).

Li, M.

J. Zhao, V. DiFilippo, and M. Li, “Low cost molded optics for IR imaging,” Proc. SPIE 7298, 72983J (2009).
[CrossRef]

Majumda, A.

M. Mao, T. Perazzo, O. Kwon, A. Majumda, J. Varesi, and P. Norton, “Direct-view uncooled micro-optomechanical infrared camera,” in Proceedings of IEEE Conference on Micro Electro Mechanical Systems (IEEE, 1999), pp. 100–105.

Majumdar, A.

P. Norton, M. Mao, T. M. Perazzo, Y. Zhao, O. Kwon, A. Majumdar, and J. B. Varesi, “Micro-optomechanical infrared receiver with optical readout: MIRROR,” Proc. SPIE 4028, 72–78 (2000).
[CrossRef]

Manalis, S. R.

S. R. Manalis, S. C. Minne, C. F. Quate, G. G. Yaralioglu, and A. Atalar, “Two-dimensional micromechanical bimorph arrays for detection of thermal radiation,” Appl. Phys. Lett. 70, 3311–3313 (1997).
[CrossRef]

Mansfield, W. M.

C. D. W. Jones, C. A. Bolle, R. Ryf, M. E. Simon, F. Pardo, V. A. Aksyuk, W. Y.-C. Lai, J. E. Bower, J. F. Miner, F. P. Klemens, R. A. Cirelli, T. W. Sorsch, E. J. Ferry, L. A. Fetter, C.-S. Pai, J. A. Taylor, B. Vyas, G. P. Watson, B. Stekas, M. R. Baker, A. R. Papazian, N. R. Basavanhally, W. M. Mansfield, A. Kornblit, R. C. Keller, J. V. Gates, and A. P. Ramirez, “MEMS thermal imager with optical readout,” Sens. Actuators A 155, 47–57 (2009).
[CrossRef]

Mao, M.

P. Norton, M. Mao, T. M. Perazzo, Y. Zhao, O. Kwon, A. Majumdar, and J. B. Varesi, “Micro-optomechanical infrared receiver with optical readout: MIRROR,” Proc. SPIE 4028, 72–78 (2000).
[CrossRef]

M. Mao, T. Perazzo, O. Kwon, A. Majumda, J. Varesi, and P. Norton, “Direct-view uncooled micro-optomechanical infrared camera,” in Proceedings of IEEE Conference on Micro Electro Mechanical Systems (IEEE, 1999), pp. 100–105.

McIntyre, B.

D. Grbovic, N. V. Lavrik, P. G. Datskos, D. Forrai, E. Nelson, J. Devitt, and B. McIntyre, “Uncooled infrared imaging using bimaterial microcantilever arrays,” Appl. Phys. Lett. 89, 073118 (2006).
[CrossRef]

Miner, J. F.

C. D. W. Jones, C. A. Bolle, R. Ryf, M. E. Simon, F. Pardo, V. A. Aksyuk, W. Y.-C. Lai, J. E. Bower, J. F. Miner, F. P. Klemens, R. A. Cirelli, T. W. Sorsch, E. J. Ferry, L. A. Fetter, C.-S. Pai, J. A. Taylor, B. Vyas, G. P. Watson, B. Stekas, M. R. Baker, A. R. Papazian, N. R. Basavanhally, W. M. Mansfield, A. Kornblit, R. C. Keller, J. V. Gates, and A. P. Ramirez, “MEMS thermal imager with optical readout,” Sens. Actuators A 155, 47–57 (2009).
[CrossRef]

Minne, S. C.

S. R. Manalis, S. C. Minne, C. F. Quate, G. G. Yaralioglu, and A. Atalar, “Two-dimensional micromechanical bimorph arrays for detection of thermal radiation,” Appl. Phys. Lett. 70, 3311–3313 (1997).
[CrossRef]

Miu, Z. Y.

Z. M. Xiong, Q. C. Zhang, D. P. Chen, X. P. Wu, Z. Y. Guo, F. L. Dong, Z. Y. Miu, and C. B. Li, “Optical-readout micro-cantilever array IR imaging system and performance analysis,” Chin. J. Phys. 56, 2529–2536 (2007).

Nelson, E.

D. Grbovic, N. V. Lavrik, P. G. Datskos, D. Forrai, E. Nelson, J. Devitt, and B. McIntyre, “Uncooled infrared imaging using bimaterial microcantilever arrays,” Appl. Phys. Lett. 89, 073118 (2006).
[CrossRef]

Norton, P.

P. Norton, M. Mao, T. M. Perazzo, Y. Zhao, O. Kwon, A. Majumdar, and J. B. Varesi, “Micro-optomechanical infrared receiver with optical readout: MIRROR,” Proc. SPIE 4028, 72–78 (2000).
[CrossRef]

M. Mao, T. Perazzo, O. Kwon, A. Majumda, J. Varesi, and P. Norton, “Direct-view uncooled micro-optomechanical infrared camera,” in Proceedings of IEEE Conference on Micro Electro Mechanical Systems (IEEE, 1999), pp. 100–105.

Oden, P. I.

P. I. Oden, P. G. Datskos, T. Thundat, and R. J. Warmack, “Uncooled thermal imaging using a piezoresistive microcantilever,” Appl. Phys. Lett. 69, 3277–3279 (1996).
[CrossRef]

Pai, C.-S.

C. D. W. Jones, C. A. Bolle, R. Ryf, M. E. Simon, F. Pardo, V. A. Aksyuk, W. Y.-C. Lai, J. E. Bower, J. F. Miner, F. P. Klemens, R. A. Cirelli, T. W. Sorsch, E. J. Ferry, L. A. Fetter, C.-S. Pai, J. A. Taylor, B. Vyas, G. P. Watson, B. Stekas, M. R. Baker, A. R. Papazian, N. R. Basavanhally, W. M. Mansfield, A. Kornblit, R. C. Keller, J. V. Gates, and A. P. Ramirez, “MEMS thermal imager with optical readout,” Sens. Actuators A 155, 47–57 (2009).
[CrossRef]

Pan, L.

L. Pan, Q. C. Zhang, X. P. Wu, Z. H. Duan, D. P. Chen, W. B. Wang, and Z. Y. Guo, “MEMS based optomechanical infrared imaging,” Exp. Mech. 19, 404–406 (2004).

Papazian, A. R.

C. D. W. Jones, C. A. Bolle, R. Ryf, M. E. Simon, F. Pardo, V. A. Aksyuk, W. Y.-C. Lai, J. E. Bower, J. F. Miner, F. P. Klemens, R. A. Cirelli, T. W. Sorsch, E. J. Ferry, L. A. Fetter, C.-S. Pai, J. A. Taylor, B. Vyas, G. P. Watson, B. Stekas, M. R. Baker, A. R. Papazian, N. R. Basavanhally, W. M. Mansfield, A. Kornblit, R. C. Keller, J. V. Gates, and A. P. Ramirez, “MEMS thermal imager with optical readout,” Sens. Actuators A 155, 47–57 (2009).
[CrossRef]

Pardo, F.

C. D. W. Jones, C. A. Bolle, R. Ryf, M. E. Simon, F. Pardo, V. A. Aksyuk, W. Y.-C. Lai, J. E. Bower, J. F. Miner, F. P. Klemens, R. A. Cirelli, T. W. Sorsch, E. J. Ferry, L. A. Fetter, C.-S. Pai, J. A. Taylor, B. Vyas, G. P. Watson, B. Stekas, M. R. Baker, A. R. Papazian, N. R. Basavanhally, W. M. Mansfield, A. Kornblit, R. C. Keller, J. V. Gates, and A. P. Ramirez, “MEMS thermal imager with optical readout,” Sens. Actuators A 155, 47–57 (2009).
[CrossRef]

Perazzo, T.

M. Mao, T. Perazzo, O. Kwon, A. Majumda, J. Varesi, and P. Norton, “Direct-view uncooled micro-optomechanical infrared camera,” in Proceedings of IEEE Conference on Micro Electro Mechanical Systems (IEEE, 1999), pp. 100–105.

Perazzo, T. M.

P. Norton, M. Mao, T. M. Perazzo, Y. Zhao, O. Kwon, A. Majumdar, and J. B. Varesi, “Micro-optomechanical infrared receiver with optical readout: MIRROR,” Proc. SPIE 4028, 72–78 (2000).
[CrossRef]

Quate, C. F.

S. R. Manalis, S. C. Minne, C. F. Quate, G. G. Yaralioglu, and A. Atalar, “Two-dimensional micromechanical bimorph arrays for detection of thermal radiation,” Appl. Phys. Lett. 70, 3311–3313 (1997).
[CrossRef]

Rajic, S.

D. Grbovic, N. V. Lavrik, S. Rajic, and P. G. Datskosa, “Arrays of SiO2 substrate-free micromechanical uncooled infrared and terahertz detectors,” J. Appl. Phys. 104, 054508(2008).
[CrossRef]

N. Lavrik, R. Archibald, D. Grbovic, S. Rajic, and P. Datskos, “Uncooled MEMS IR imagers with optical readout and image processing,” Proc. SPIE 6542, 65421E (2006).
[CrossRef]

Ramirez, A. P.

C. D. W. Jones, C. A. Bolle, R. Ryf, M. E. Simon, F. Pardo, V. A. Aksyuk, W. Y.-C. Lai, J. E. Bower, J. F. Miner, F. P. Klemens, R. A. Cirelli, T. W. Sorsch, E. J. Ferry, L. A. Fetter, C.-S. Pai, J. A. Taylor, B. Vyas, G. P. Watson, B. Stekas, M. R. Baker, A. R. Papazian, N. R. Basavanhally, W. M. Mansfield, A. Kornblit, R. C. Keller, J. V. Gates, and A. P. Ramirez, “MEMS thermal imager with optical readout,” Sens. Actuators A 155, 47–57 (2009).
[CrossRef]

Rogalski, A.

A. Rogalski, “Infrared detectors: status and trends,” Prog. Quantum Electron. 27, 59–210 (2003).
[CrossRef]

Ryf, R.

C. D. W. Jones, C. A. Bolle, R. Ryf, M. E. Simon, F. Pardo, V. A. Aksyuk, W. Y.-C. Lai, J. E. Bower, J. F. Miner, F. P. Klemens, R. A. Cirelli, T. W. Sorsch, E. J. Ferry, L. A. Fetter, C.-S. Pai, J. A. Taylor, B. Vyas, G. P. Watson, B. Stekas, M. R. Baker, A. R. Papazian, N. R. Basavanhally, W. M. Mansfield, A. Kornblit, R. C. Keller, J. V. Gates, and A. P. Ramirez, “MEMS thermal imager with optical readout,” Sens. Actuators A 155, 47–57 (2009).
[CrossRef]

Salerno, J. P.

J. P. Salerno, “High frame rate imaging using uncooled optical readout photomechanical IR sensor,” Proc. SPIE 6542, 65421D (2007).
[CrossRef]

Simon, M. E.

C. D. W. Jones, C. A. Bolle, R. Ryf, M. E. Simon, F. Pardo, V. A. Aksyuk, W. Y.-C. Lai, J. E. Bower, J. F. Miner, F. P. Klemens, R. A. Cirelli, T. W. Sorsch, E. J. Ferry, L. A. Fetter, C.-S. Pai, J. A. Taylor, B. Vyas, G. P. Watson, B. Stekas, M. R. Baker, A. R. Papazian, N. R. Basavanhally, W. M. Mansfield, A. Kornblit, R. C. Keller, J. V. Gates, and A. P. Ramirez, “MEMS thermal imager with optical readout,” Sens. Actuators A 155, 47–57 (2009).
[CrossRef]

Sorsch, T. W.

C. D. W. Jones, C. A. Bolle, R. Ryf, M. E. Simon, F. Pardo, V. A. Aksyuk, W. Y.-C. Lai, J. E. Bower, J. F. Miner, F. P. Klemens, R. A. Cirelli, T. W. Sorsch, E. J. Ferry, L. A. Fetter, C.-S. Pai, J. A. Taylor, B. Vyas, G. P. Watson, B. Stekas, M. R. Baker, A. R. Papazian, N. R. Basavanhally, W. M. Mansfield, A. Kornblit, R. C. Keller, J. V. Gates, and A. P. Ramirez, “MEMS thermal imager with optical readout,” Sens. Actuators A 155, 47–57 (2009).
[CrossRef]

Stekas, B.

C. D. W. Jones, C. A. Bolle, R. Ryf, M. E. Simon, F. Pardo, V. A. Aksyuk, W. Y.-C. Lai, J. E. Bower, J. F. Miner, F. P. Klemens, R. A. Cirelli, T. W. Sorsch, E. J. Ferry, L. A. Fetter, C.-S. Pai, J. A. Taylor, B. Vyas, G. P. Watson, B. Stekas, M. R. Baker, A. R. Papazian, N. R. Basavanhally, W. M. Mansfield, A. Kornblit, R. C. Keller, J. V. Gates, and A. P. Ramirez, “MEMS thermal imager with optical readout,” Sens. Actuators A 155, 47–57 (2009).
[CrossRef]

Suzuki, J.

T. Ishizuya, J. Suzuki, K. Akagawa, and T. Kazama, “Optically readable bi-material infrared detector,” Proc. SPIE 4369, 342–349 (2001).
[CrossRef]

Taylor, J. A.

C. D. W. Jones, C. A. Bolle, R. Ryf, M. E. Simon, F. Pardo, V. A. Aksyuk, W. Y.-C. Lai, J. E. Bower, J. F. Miner, F. P. Klemens, R. A. Cirelli, T. W. Sorsch, E. J. Ferry, L. A. Fetter, C.-S. Pai, J. A. Taylor, B. Vyas, G. P. Watson, B. Stekas, M. R. Baker, A. R. Papazian, N. R. Basavanhally, W. M. Mansfield, A. Kornblit, R. C. Keller, J. V. Gates, and A. P. Ramirez, “MEMS thermal imager with optical readout,” Sens. Actuators A 155, 47–57 (2009).
[CrossRef]

Thundat, T.

P. I. Oden, P. G. Datskos, T. Thundat, and R. J. Warmack, “Uncooled thermal imaging using a piezoresistive microcantilever,” Appl. Phys. Lett. 69, 3277–3279 (1996).
[CrossRef]

Varesi, J.

M. Mao, T. Perazzo, O. Kwon, A. Majumda, J. Varesi, and P. Norton, “Direct-view uncooled micro-optomechanical infrared camera,” in Proceedings of IEEE Conference on Micro Electro Mechanical Systems (IEEE, 1999), pp. 100–105.

Varesi, J. B.

P. Norton, M. Mao, T. M. Perazzo, Y. Zhao, O. Kwon, A. Majumdar, and J. B. Varesi, “Micro-optomechanical infrared receiver with optical readout: MIRROR,” Proc. SPIE 4028, 72–78 (2000).
[CrossRef]

Vyas, B.

C. D. W. Jones, C. A. Bolle, R. Ryf, M. E. Simon, F. Pardo, V. A. Aksyuk, W. Y.-C. Lai, J. E. Bower, J. F. Miner, F. P. Klemens, R. A. Cirelli, T. W. Sorsch, E. J. Ferry, L. A. Fetter, C.-S. Pai, J. A. Taylor, B. Vyas, G. P. Watson, B. Stekas, M. R. Baker, A. R. Papazian, N. R. Basavanhally, W. M. Mansfield, A. Kornblit, R. C. Keller, J. V. Gates, and A. P. Ramirez, “MEMS thermal imager with optical readout,” Sens. Actuators A 155, 47–57 (2009).
[CrossRef]

Wang, W. B.

L. Pan, Q. C. Zhang, X. P. Wu, Z. H. Duan, D. P. Chen, W. B. Wang, and Z. Y. Guo, “MEMS based optomechanical infrared imaging,” Exp. Mech. 19, 404–406 (2004).

Warmack, R. J.

P. I. Oden, P. G. Datskos, T. Thundat, and R. J. Warmack, “Uncooled thermal imaging using a piezoresistive microcantilever,” Appl. Phys. Lett. 69, 3277–3279 (1996).
[CrossRef]

Watson, G. P.

C. D. W. Jones, C. A. Bolle, R. Ryf, M. E. Simon, F. Pardo, V. A. Aksyuk, W. Y.-C. Lai, J. E. Bower, J. F. Miner, F. P. Klemens, R. A. Cirelli, T. W. Sorsch, E. J. Ferry, L. A. Fetter, C.-S. Pai, J. A. Taylor, B. Vyas, G. P. Watson, B. Stekas, M. R. Baker, A. R. Papazian, N. R. Basavanhally, W. M. Mansfield, A. Kornblit, R. C. Keller, J. V. Gates, and A. P. Ramirez, “MEMS thermal imager with optical readout,” Sens. Actuators A 155, 47–57 (2009).
[CrossRef]

Wu, X. P.

Z. M. Xiong, Q. C. Zhang, D. P. Chen, X. P. Wu, Z. Y. Guo, F. L. Dong, Z. Y. Miu, and C. B. Li, “Optical-readout micro-cantilever array IR imaging system and performance analysis,” Chin. J. Phys. 56, 2529–2536 (2007).

L. Pan, Q. C. Zhang, X. P. Wu, Z. H. Duan, D. P. Chen, W. B. Wang, and Z. Y. Guo, “MEMS based optomechanical infrared imaging,” Exp. Mech. 19, 404–406 (2004).

Xie, J. H.

J. H. Xie, D. Z. Zhao, and J. X. Yan, Physical Optics Tutorials (Beijing Institute of Technology Press, 2005).

Xiong, Z. M.

Z. M. Xiong, Q. C. Zhang, D. P. Chen, X. P. Wu, Z. Y. Guo, F. L. Dong, Z. Y. Miu, and C. B. Li, “Optical-readout micro-cantilever array IR imaging system and performance analysis,” Chin. J. Phys. 56, 2529–2536 (2007).

Yan, J. X.

J. H. Xie, D. Z. Zhao, and J. X. Yan, Physical Optics Tutorials (Beijing Institute of Technology Press, 2005).

Yaralioglu, G. G.

S. R. Manalis, S. C. Minne, C. F. Quate, G. G. Yaralioglu, and A. Atalar, “Two-dimensional micromechanical bimorph arrays for detection of thermal radiation,” Appl. Phys. Lett. 70, 3311–3313 (1997).
[CrossRef]

Zhang, Q. C.

Z. M. Xiong, Q. C. Zhang, D. P. Chen, X. P. Wu, Z. Y. Guo, F. L. Dong, Z. Y. Miu, and C. B. Li, “Optical-readout micro-cantilever array IR imaging system and performance analysis,” Chin. J. Phys. 56, 2529–2536 (2007).

L. Pan, Q. C. Zhang, X. P. Wu, Z. H. Duan, D. P. Chen, W. B. Wang, and Z. Y. Guo, “MEMS based optomechanical infrared imaging,” Exp. Mech. 19, 404–406 (2004).

Zhao, D. Z.

J. H. Xie, D. Z. Zhao, and J. X. Yan, Physical Optics Tutorials (Beijing Institute of Technology Press, 2005).

Zhao, J.

J. Zhao, V. DiFilippo, and M. Li, “Low cost molded optics for IR imaging,” Proc. SPIE 7298, 72983J (2009).
[CrossRef]

Zhao, Y.

P. Norton, M. Mao, T. M. Perazzo, Y. Zhao, O. Kwon, A. Majumdar, and J. B. Varesi, “Micro-optomechanical infrared receiver with optical readout: MIRROR,” Proc. SPIE 4028, 72–78 (2000).
[CrossRef]

Appl. Phys. Lett. (3)

P. I. Oden, P. G. Datskos, T. Thundat, and R. J. Warmack, “Uncooled thermal imaging using a piezoresistive microcantilever,” Appl. Phys. Lett. 69, 3277–3279 (1996).
[CrossRef]

S. R. Manalis, S. C. Minne, C. F. Quate, G. G. Yaralioglu, and A. Atalar, “Two-dimensional micromechanical bimorph arrays for detection of thermal radiation,” Appl. Phys. Lett. 70, 3311–3313 (1997).
[CrossRef]

D. Grbovic, N. V. Lavrik, P. G. Datskos, D. Forrai, E. Nelson, J. Devitt, and B. McIntyre, “Uncooled infrared imaging using bimaterial microcantilever arrays,” Appl. Phys. Lett. 89, 073118 (2006).
[CrossRef]

Chin. J. Phys. (1)

Z. M. Xiong, Q. C. Zhang, D. P. Chen, X. P. Wu, Z. Y. Guo, F. L. Dong, Z. Y. Miu, and C. B. Li, “Optical-readout micro-cantilever array IR imaging system and performance analysis,” Chin. J. Phys. 56, 2529–2536 (2007).

Exp. Mech. (1)

L. Pan, Q. C. Zhang, X. P. Wu, Z. H. Duan, D. P. Chen, W. B. Wang, and Z. Y. Guo, “MEMS based optomechanical infrared imaging,” Exp. Mech. 19, 404–406 (2004).

J. Appl. Phys. (1)

D. Grbovic, N. V. Lavrik, S. Rajic, and P. G. Datskosa, “Arrays of SiO2 substrate-free micromechanical uncooled infrared and terahertz detectors,” J. Appl. Phys. 104, 054508(2008).
[CrossRef]

Proc. SPIE (5)

J. P. Salerno, “High frame rate imaging using uncooled optical readout photomechanical IR sensor,” Proc. SPIE 6542, 65421D (2007).
[CrossRef]

J. Zhao, V. DiFilippo, and M. Li, “Low cost molded optics for IR imaging,” Proc. SPIE 7298, 72983J (2009).
[CrossRef]

P. Norton, M. Mao, T. M. Perazzo, Y. Zhao, O. Kwon, A. Majumdar, and J. B. Varesi, “Micro-optomechanical infrared receiver with optical readout: MIRROR,” Proc. SPIE 4028, 72–78 (2000).
[CrossRef]

T. Ishizuya, J. Suzuki, K. Akagawa, and T. Kazama, “Optically readable bi-material infrared detector,” Proc. SPIE 4369, 342–349 (2001).
[CrossRef]

N. Lavrik, R. Archibald, D. Grbovic, S. Rajic, and P. Datskos, “Uncooled MEMS IR imagers with optical readout and image processing,” Proc. SPIE 6542, 65421E (2006).
[CrossRef]

Prog. Quantum Electron. (1)

A. Rogalski, “Infrared detectors: status and trends,” Prog. Quantum Electron. 27, 59–210 (2003).
[CrossRef]

Sens. Actuators A (1)

C. D. W. Jones, C. A. Bolle, R. Ryf, M. E. Simon, F. Pardo, V. A. Aksyuk, W. Y.-C. Lai, J. E. Bower, J. F. Miner, F. P. Klemens, R. A. Cirelli, T. W. Sorsch, E. J. Ferry, L. A. Fetter, C.-S. Pai, J. A. Taylor, B. Vyas, G. P. Watson, B. Stekas, M. R. Baker, A. R. Papazian, N. R. Basavanhally, W. M. Mansfield, A. Kornblit, R. C. Keller, J. V. Gates, and A. P. Ramirez, “MEMS thermal imager with optical readout,” Sens. Actuators A 155, 47–57 (2009).
[CrossRef]

Other (3)

M. Mao, T. Perazzo, O. Kwon, A. Majumda, J. Varesi, and P. Norton, “Direct-view uncooled micro-optomechanical infrared camera,” in Proceedings of IEEE Conference on Micro Electro Mechanical Systems (IEEE, 1999), pp. 100–105.

T. Cheng, “Research of optical readout uncooled infrared imaging system based on MEMS,” Ph.D. dissertation (University of Science and Technology of China, 2010).

J. H. Xie, D. Z. Zhao, and J. X. Yan, Physical Optics Tutorials (Beijing Institute of Technology Press, 2005).

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Figures (8)

Fig. 1.
Fig. 1.

Infrared optical detection system diagram. 1, light source; 2, collimating lens; 3, infrared radiation; 4, infrared lens; 5, germanium glass; 6, FPA; 7, double-triangular-prism filtering system; 8, imaging lens; 9, CCD camera; 10, digital image processing system.

Fig. 2.
Fig. 2.

Angle and the reflectivity curve. (a) Light reflectivity from the K9 glass to the air. (b) Light reflectivity from the air to the K9 glass.

Fig. 3.
Fig. 3.

Double-triangular-prism system.

Fig. 4.
Fig. 4.

Schematic diagram of light through the triangular prism system.

Fig. 5.
Fig. 5.

Relationship between the initial incident angle and the minimum detection deflection angle.

Fig. 6.
Fig. 6.

Infrared thermal images when the initial incident angle is (a) 35, (b) 37.5, (c) 39, (d) 40.78, (e) 40.98, and (f) 41.10 deg; (g) infrared image without filtering methods, and (h) the infrared image obtained when using the knife-edge filter.

Fig. 7.
Fig. 7.

Blackbody radiation source.

Fig. 8.
Fig. 8.

Statistical histograms of the thermal response sensitivity. The initial incident angles are (a) 39 and (b) 40.98 deg.

Tables (3)

Tables Icon

Table 1. Relationship between NETD Values and Different Initial Incident Angles

Tables Icon

Table 2. NETD Values of the Knife-Edge Filter

Tables Icon

Table 3. Relationship between NETD Values in Theory and Different Initial Incident Angles

Equations (19)

Equations on this page are rendered with MathJax. Learn more.

R=sin2(θiθt)/sin2(θi+θt).
Rp=tan2(θiθt)/tan2(θi+θt).
R=11+α(αRs+Rp).
R=12(Rs+Rp),
θmin=ΔθN,
Δθ=N*θmin,
β=arcsin1n.
x=βN*θmin.
x=41.264096*θmin.
θmin=θmin2.
θmin=41.26x4096*2.
θmin=λ2NLYrad,
θmin=5.83×105deg.
θminθmin.
NETD=NnoiseΔN/ΔT.
NETD=θminS*k,
ST=ΔδΔT=3(α1α2)*n+1k*Lm2t2.
S=STLY=0.343960rad/K=0.328deg/K.
NETD=θminS*k=5.83×1050.328×1%K=17.8mk.

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