Abstract

Wire-grid polarizers for terahertz region were fabricated by manufacturing triangular grating using a ruling-based, ultraprecision diamond machining process and replicating the pattern into polymethylpentene (TPX) and cyklo-olefin copolymer (COC) sheets using hot embossing. On top of the imprinted structures, aluminum was evaporated in an oblique angle, forming an aluminum wire grid. The achieved extinction rate was over 150 for TPX polarizers and near 1000 for COC polarizers.

© 2012 Optical Society of America

Full Article  |  PDF Article

References

  • View by:
  • |
  • |
  • |

  1. P. Uhd Jepsen, C. Winnewisser, M. Schall, V. Schyja, S. R. Keiding, and H. Helm, “Detection of THz pulses by phase retardation in lithium tantalate,” Phys. Rev. E 53, R3052–R3054 (1996).
    [CrossRef]
  2. L. L. Zhang, H. Zhong, C. Deng, C. L. Zhang, and Y. J. Zhao, “Terahertz polarization imaging with birefringent materials,” Opt. Commun. 283, 4993–4995 (2010).
    [CrossRef]
  3. M. Reid and R. Fedosejevs, “Terahertz birefringence and attenuation properties of wood and paper,” Appl. Opt. 45, 2766–2772 (2006).
    [CrossRef]
  4. J. Federici, B. Schulkin, F. Huang, D. Gary, R. Barat, F. Oliveira, and D. Zimdars, “THz imaging and sensing for security applications—explosives, weapons and drugs,” Semicond. Sci. Technol. 20, S266–S280 (2005).
    [CrossRef]
  5. I. Yamada, K. Takano, M. Hangyo, M. Saito, and W. Watanabe, “Terahertz wire-grid polarizers with micrometer-pitch Al gratings,” Opt. Lett. 34, 274–276 (2009).
    [CrossRef]
  6. Y. Ma, A. Khalid, T. D. Drysdale, and D. R. R. Cumming, “Direct fabrication of terhertz optical devices on low-absorption polymer substrates,” Opt. Lett. 34, 1555–1557 (2009).
    [CrossRef]
  7. D.-B. Tian, H.-W. Zhang, W.-E. Lai, Q.-Y. Wen, Y.-Q. Song, and Z.-G. Wang, “Double wire-grid terahertz polarizer on low-loss polymer substrates,” Chin. Phys. Lett. 27, 104210 (2010).
    [CrossRef]
  8. L. Zhang, J. H. Teng, H. Tanoto, S. Y. Yew, L. Y. Deng, and S. J. Chua, “Terahertz wire-grid polarizer by nanoimprinting lithography on high resistivity silicon substrate,” in Proceedings of The 35th International Conference on Infrared Millimeter and Terahertz Waves, (IEEE, 2010), pp. 1–2.
  9. K. Takano, H. Yokoyama, A. Ichii, I. Morimoto, and M. Hangyo, “Wire-grid polarizer sheet in the terahertz region fabricated by nanoimprint technology,” Opt. Lett. 36, 2665–2667 (2011).
    [CrossRef]
  10. J. Väyrynen, T. Saastamoinen, J. Mutanen, P. Pääkkönen, K. Mönkkönen, and M. Kuittinen, “Manufacturing of cylindrical diffractive lens by ruling,” Proc. SPIE 7927, 79270M (2011).
    [CrossRef]
  11. T. Saastamoinen, J. Väyrynen, J. Mutanen, P. Pääkkönen, T. Itkonen, K. Mönkkönen, and M. Kuittinen, “Fabrication of hybrid optical structure by direct machining,” Proc. SPIE 7927, 792713 (2011).
    [CrossRef]
  12. L. John, J. Allsop, A. Mateboera, and P. Shore, “Optimising efficiency in diamond turned Fresnel mould masters,” Proc. SPIE 8065, 806509 (2011).
  13. E. Brinksmeier, O. Riemer, and A. Meier, “Submicron structuring by nano fast tool servo assisted diamond turning,” in EUSPEN Special Interest Group Meeting IPT Aachen(EUSPEN, 2010).
  14. Y. Takeuchi, S. Maeda, T. Kawai, and K. Sawada, “Manufacture of multiple-focus micro Fresnel lenses by means of nonrotational diamond grooving,” CIRP Ann. 51, 343–346 (2002).
    [CrossRef]
  15. A. Partanen, J. Väyrynen, S. Hassinen, H. Tuovinen, J. Mutanen, T. Itkonen, P. Silfsten, P. Pääkkönen, M. Kuittinen, and K. Mönkkönen, “Fabrication of terahertz wire-grid polarizer by direct machining,” in Proceedings of the 17th Micro-optics Conference (IEEE, 2011), pp. 1–2.
  16. J. Turunen, “Diffraction theory of micro relief gratings,” in Micro-optics: Elements, Systems and Applications, H. Herzig, ed. (Taylor & Francis, 1997).

2011 (4)

J. Väyrynen, T. Saastamoinen, J. Mutanen, P. Pääkkönen, K. Mönkkönen, and M. Kuittinen, “Manufacturing of cylindrical diffractive lens by ruling,” Proc. SPIE 7927, 79270M (2011).
[CrossRef]

T. Saastamoinen, J. Väyrynen, J. Mutanen, P. Pääkkönen, T. Itkonen, K. Mönkkönen, and M. Kuittinen, “Fabrication of hybrid optical structure by direct machining,” Proc. SPIE 7927, 792713 (2011).
[CrossRef]

L. John, J. Allsop, A. Mateboera, and P. Shore, “Optimising efficiency in diamond turned Fresnel mould masters,” Proc. SPIE 8065, 806509 (2011).

K. Takano, H. Yokoyama, A. Ichii, I. Morimoto, and M. Hangyo, “Wire-grid polarizer sheet in the terahertz region fabricated by nanoimprint technology,” Opt. Lett. 36, 2665–2667 (2011).
[CrossRef]

2010 (2)

L. L. Zhang, H. Zhong, C. Deng, C. L. Zhang, and Y. J. Zhao, “Terahertz polarization imaging with birefringent materials,” Opt. Commun. 283, 4993–4995 (2010).
[CrossRef]

D.-B. Tian, H.-W. Zhang, W.-E. Lai, Q.-Y. Wen, Y.-Q. Song, and Z.-G. Wang, “Double wire-grid terahertz polarizer on low-loss polymer substrates,” Chin. Phys. Lett. 27, 104210 (2010).
[CrossRef]

2009 (2)

2006 (1)

2005 (1)

J. Federici, B. Schulkin, F. Huang, D. Gary, R. Barat, F. Oliveira, and D. Zimdars, “THz imaging and sensing for security applications—explosives, weapons and drugs,” Semicond. Sci. Technol. 20, S266–S280 (2005).
[CrossRef]

2002 (1)

Y. Takeuchi, S. Maeda, T. Kawai, and K. Sawada, “Manufacture of multiple-focus micro Fresnel lenses by means of nonrotational diamond grooving,” CIRP Ann. 51, 343–346 (2002).
[CrossRef]

1996 (1)

P. Uhd Jepsen, C. Winnewisser, M. Schall, V. Schyja, S. R. Keiding, and H. Helm, “Detection of THz pulses by phase retardation in lithium tantalate,” Phys. Rev. E 53, R3052–R3054 (1996).
[CrossRef]

Allsop, J.

L. John, J. Allsop, A. Mateboera, and P. Shore, “Optimising efficiency in diamond turned Fresnel mould masters,” Proc. SPIE 8065, 806509 (2011).

Barat, R.

J. Federici, B. Schulkin, F. Huang, D. Gary, R. Barat, F. Oliveira, and D. Zimdars, “THz imaging and sensing for security applications—explosives, weapons and drugs,” Semicond. Sci. Technol. 20, S266–S280 (2005).
[CrossRef]

Brinksmeier, E.

E. Brinksmeier, O. Riemer, and A. Meier, “Submicron structuring by nano fast tool servo assisted diamond turning,” in EUSPEN Special Interest Group Meeting IPT Aachen(EUSPEN, 2010).

Chua, S. J.

L. Zhang, J. H. Teng, H. Tanoto, S. Y. Yew, L. Y. Deng, and S. J. Chua, “Terahertz wire-grid polarizer by nanoimprinting lithography on high resistivity silicon substrate,” in Proceedings of The 35th International Conference on Infrared Millimeter and Terahertz Waves, (IEEE, 2010), pp. 1–2.

Cumming, D. R. R.

Deng, C.

L. L. Zhang, H. Zhong, C. Deng, C. L. Zhang, and Y. J. Zhao, “Terahertz polarization imaging with birefringent materials,” Opt. Commun. 283, 4993–4995 (2010).
[CrossRef]

Deng, L. Y.

L. Zhang, J. H. Teng, H. Tanoto, S. Y. Yew, L. Y. Deng, and S. J. Chua, “Terahertz wire-grid polarizer by nanoimprinting lithography on high resistivity silicon substrate,” in Proceedings of The 35th International Conference on Infrared Millimeter and Terahertz Waves, (IEEE, 2010), pp. 1–2.

Drysdale, T. D.

Federici, J.

J. Federici, B. Schulkin, F. Huang, D. Gary, R. Barat, F. Oliveira, and D. Zimdars, “THz imaging and sensing for security applications—explosives, weapons and drugs,” Semicond. Sci. Technol. 20, S266–S280 (2005).
[CrossRef]

Fedosejevs, R.

Gary, D.

J. Federici, B. Schulkin, F. Huang, D. Gary, R. Barat, F. Oliveira, and D. Zimdars, “THz imaging and sensing for security applications—explosives, weapons and drugs,” Semicond. Sci. Technol. 20, S266–S280 (2005).
[CrossRef]

Hangyo, M.

Hassinen, S.

A. Partanen, J. Väyrynen, S. Hassinen, H. Tuovinen, J. Mutanen, T. Itkonen, P. Silfsten, P. Pääkkönen, M. Kuittinen, and K. Mönkkönen, “Fabrication of terahertz wire-grid polarizer by direct machining,” in Proceedings of the 17th Micro-optics Conference (IEEE, 2011), pp. 1–2.

Helm, H.

P. Uhd Jepsen, C. Winnewisser, M. Schall, V. Schyja, S. R. Keiding, and H. Helm, “Detection of THz pulses by phase retardation in lithium tantalate,” Phys. Rev. E 53, R3052–R3054 (1996).
[CrossRef]

Huang, F.

J. Federici, B. Schulkin, F. Huang, D. Gary, R. Barat, F. Oliveira, and D. Zimdars, “THz imaging and sensing for security applications—explosives, weapons and drugs,” Semicond. Sci. Technol. 20, S266–S280 (2005).
[CrossRef]

Ichii, A.

Itkonen, T.

T. Saastamoinen, J. Väyrynen, J. Mutanen, P. Pääkkönen, T. Itkonen, K. Mönkkönen, and M. Kuittinen, “Fabrication of hybrid optical structure by direct machining,” Proc. SPIE 7927, 792713 (2011).
[CrossRef]

A. Partanen, J. Väyrynen, S. Hassinen, H. Tuovinen, J. Mutanen, T. Itkonen, P. Silfsten, P. Pääkkönen, M. Kuittinen, and K. Mönkkönen, “Fabrication of terahertz wire-grid polarizer by direct machining,” in Proceedings of the 17th Micro-optics Conference (IEEE, 2011), pp. 1–2.

John, L.

L. John, J. Allsop, A. Mateboera, and P. Shore, “Optimising efficiency in diamond turned Fresnel mould masters,” Proc. SPIE 8065, 806509 (2011).

Kawai, T.

Y. Takeuchi, S. Maeda, T. Kawai, and K. Sawada, “Manufacture of multiple-focus micro Fresnel lenses by means of nonrotational diamond grooving,” CIRP Ann. 51, 343–346 (2002).
[CrossRef]

Keiding, S. R.

P. Uhd Jepsen, C. Winnewisser, M. Schall, V. Schyja, S. R. Keiding, and H. Helm, “Detection of THz pulses by phase retardation in lithium tantalate,” Phys. Rev. E 53, R3052–R3054 (1996).
[CrossRef]

Khalid, A.

Kuittinen, M.

T. Saastamoinen, J. Väyrynen, J. Mutanen, P. Pääkkönen, T. Itkonen, K. Mönkkönen, and M. Kuittinen, “Fabrication of hybrid optical structure by direct machining,” Proc. SPIE 7927, 792713 (2011).
[CrossRef]

J. Väyrynen, T. Saastamoinen, J. Mutanen, P. Pääkkönen, K. Mönkkönen, and M. Kuittinen, “Manufacturing of cylindrical diffractive lens by ruling,” Proc. SPIE 7927, 79270M (2011).
[CrossRef]

A. Partanen, J. Väyrynen, S. Hassinen, H. Tuovinen, J. Mutanen, T. Itkonen, P. Silfsten, P. Pääkkönen, M. Kuittinen, and K. Mönkkönen, “Fabrication of terahertz wire-grid polarizer by direct machining,” in Proceedings of the 17th Micro-optics Conference (IEEE, 2011), pp. 1–2.

Lai, W.-E.

D.-B. Tian, H.-W. Zhang, W.-E. Lai, Q.-Y. Wen, Y.-Q. Song, and Z.-G. Wang, “Double wire-grid terahertz polarizer on low-loss polymer substrates,” Chin. Phys. Lett. 27, 104210 (2010).
[CrossRef]

Ma, Y.

Maeda, S.

Y. Takeuchi, S. Maeda, T. Kawai, and K. Sawada, “Manufacture of multiple-focus micro Fresnel lenses by means of nonrotational diamond grooving,” CIRP Ann. 51, 343–346 (2002).
[CrossRef]

Mateboera, A.

L. John, J. Allsop, A. Mateboera, and P. Shore, “Optimising efficiency in diamond turned Fresnel mould masters,” Proc. SPIE 8065, 806509 (2011).

Meier, A.

E. Brinksmeier, O. Riemer, and A. Meier, “Submicron structuring by nano fast tool servo assisted diamond turning,” in EUSPEN Special Interest Group Meeting IPT Aachen(EUSPEN, 2010).

Mönkkönen, K.

T. Saastamoinen, J. Väyrynen, J. Mutanen, P. Pääkkönen, T. Itkonen, K. Mönkkönen, and M. Kuittinen, “Fabrication of hybrid optical structure by direct machining,” Proc. SPIE 7927, 792713 (2011).
[CrossRef]

J. Väyrynen, T. Saastamoinen, J. Mutanen, P. Pääkkönen, K. Mönkkönen, and M. Kuittinen, “Manufacturing of cylindrical diffractive lens by ruling,” Proc. SPIE 7927, 79270M (2011).
[CrossRef]

A. Partanen, J. Väyrynen, S. Hassinen, H. Tuovinen, J. Mutanen, T. Itkonen, P. Silfsten, P. Pääkkönen, M. Kuittinen, and K. Mönkkönen, “Fabrication of terahertz wire-grid polarizer by direct machining,” in Proceedings of the 17th Micro-optics Conference (IEEE, 2011), pp. 1–2.

Morimoto, I.

Mutanen, J.

J. Väyrynen, T. Saastamoinen, J. Mutanen, P. Pääkkönen, K. Mönkkönen, and M. Kuittinen, “Manufacturing of cylindrical diffractive lens by ruling,” Proc. SPIE 7927, 79270M (2011).
[CrossRef]

T. Saastamoinen, J. Väyrynen, J. Mutanen, P. Pääkkönen, T. Itkonen, K. Mönkkönen, and M. Kuittinen, “Fabrication of hybrid optical structure by direct machining,” Proc. SPIE 7927, 792713 (2011).
[CrossRef]

A. Partanen, J. Väyrynen, S. Hassinen, H. Tuovinen, J. Mutanen, T. Itkonen, P. Silfsten, P. Pääkkönen, M. Kuittinen, and K. Mönkkönen, “Fabrication of terahertz wire-grid polarizer by direct machining,” in Proceedings of the 17th Micro-optics Conference (IEEE, 2011), pp. 1–2.

Oliveira, F.

J. Federici, B. Schulkin, F. Huang, D. Gary, R. Barat, F. Oliveira, and D. Zimdars, “THz imaging and sensing for security applications—explosives, weapons and drugs,” Semicond. Sci. Technol. 20, S266–S280 (2005).
[CrossRef]

Pääkkönen, P.

T. Saastamoinen, J. Väyrynen, J. Mutanen, P. Pääkkönen, T. Itkonen, K. Mönkkönen, and M. Kuittinen, “Fabrication of hybrid optical structure by direct machining,” Proc. SPIE 7927, 792713 (2011).
[CrossRef]

J. Väyrynen, T. Saastamoinen, J. Mutanen, P. Pääkkönen, K. Mönkkönen, and M. Kuittinen, “Manufacturing of cylindrical diffractive lens by ruling,” Proc. SPIE 7927, 79270M (2011).
[CrossRef]

A. Partanen, J. Väyrynen, S. Hassinen, H. Tuovinen, J. Mutanen, T. Itkonen, P. Silfsten, P. Pääkkönen, M. Kuittinen, and K. Mönkkönen, “Fabrication of terahertz wire-grid polarizer by direct machining,” in Proceedings of the 17th Micro-optics Conference (IEEE, 2011), pp. 1–2.

Partanen, A.

A. Partanen, J. Väyrynen, S. Hassinen, H. Tuovinen, J. Mutanen, T. Itkonen, P. Silfsten, P. Pääkkönen, M. Kuittinen, and K. Mönkkönen, “Fabrication of terahertz wire-grid polarizer by direct machining,” in Proceedings of the 17th Micro-optics Conference (IEEE, 2011), pp. 1–2.

Reid, M.

Riemer, O.

E. Brinksmeier, O. Riemer, and A. Meier, “Submicron structuring by nano fast tool servo assisted diamond turning,” in EUSPEN Special Interest Group Meeting IPT Aachen(EUSPEN, 2010).

Saastamoinen, T.

J. Väyrynen, T. Saastamoinen, J. Mutanen, P. Pääkkönen, K. Mönkkönen, and M. Kuittinen, “Manufacturing of cylindrical diffractive lens by ruling,” Proc. SPIE 7927, 79270M (2011).
[CrossRef]

T. Saastamoinen, J. Väyrynen, J. Mutanen, P. Pääkkönen, T. Itkonen, K. Mönkkönen, and M. Kuittinen, “Fabrication of hybrid optical structure by direct machining,” Proc. SPIE 7927, 792713 (2011).
[CrossRef]

Saito, M.

Sawada, K.

Y. Takeuchi, S. Maeda, T. Kawai, and K. Sawada, “Manufacture of multiple-focus micro Fresnel lenses by means of nonrotational diamond grooving,” CIRP Ann. 51, 343–346 (2002).
[CrossRef]

Schall, M.

P. Uhd Jepsen, C. Winnewisser, M. Schall, V. Schyja, S. R. Keiding, and H. Helm, “Detection of THz pulses by phase retardation in lithium tantalate,” Phys. Rev. E 53, R3052–R3054 (1996).
[CrossRef]

Schulkin, B.

J. Federici, B. Schulkin, F. Huang, D. Gary, R. Barat, F. Oliveira, and D. Zimdars, “THz imaging and sensing for security applications—explosives, weapons and drugs,” Semicond. Sci. Technol. 20, S266–S280 (2005).
[CrossRef]

Schyja, V.

P. Uhd Jepsen, C. Winnewisser, M. Schall, V. Schyja, S. R. Keiding, and H. Helm, “Detection of THz pulses by phase retardation in lithium tantalate,” Phys. Rev. E 53, R3052–R3054 (1996).
[CrossRef]

Shore, P.

L. John, J. Allsop, A. Mateboera, and P. Shore, “Optimising efficiency in diamond turned Fresnel mould masters,” Proc. SPIE 8065, 806509 (2011).

Silfsten, P.

A. Partanen, J. Väyrynen, S. Hassinen, H. Tuovinen, J. Mutanen, T. Itkonen, P. Silfsten, P. Pääkkönen, M. Kuittinen, and K. Mönkkönen, “Fabrication of terahertz wire-grid polarizer by direct machining,” in Proceedings of the 17th Micro-optics Conference (IEEE, 2011), pp. 1–2.

Song, Y.-Q.

D.-B. Tian, H.-W. Zhang, W.-E. Lai, Q.-Y. Wen, Y.-Q. Song, and Z.-G. Wang, “Double wire-grid terahertz polarizer on low-loss polymer substrates,” Chin. Phys. Lett. 27, 104210 (2010).
[CrossRef]

Takano, K.

Takeuchi, Y.

Y. Takeuchi, S. Maeda, T. Kawai, and K. Sawada, “Manufacture of multiple-focus micro Fresnel lenses by means of nonrotational diamond grooving,” CIRP Ann. 51, 343–346 (2002).
[CrossRef]

Tanoto, H.

L. Zhang, J. H. Teng, H. Tanoto, S. Y. Yew, L. Y. Deng, and S. J. Chua, “Terahertz wire-grid polarizer by nanoimprinting lithography on high resistivity silicon substrate,” in Proceedings of The 35th International Conference on Infrared Millimeter and Terahertz Waves, (IEEE, 2010), pp. 1–2.

Teng, J. H.

L. Zhang, J. H. Teng, H. Tanoto, S. Y. Yew, L. Y. Deng, and S. J. Chua, “Terahertz wire-grid polarizer by nanoimprinting lithography on high resistivity silicon substrate,” in Proceedings of The 35th International Conference on Infrared Millimeter and Terahertz Waves, (IEEE, 2010), pp. 1–2.

Tian, D.-B.

D.-B. Tian, H.-W. Zhang, W.-E. Lai, Q.-Y. Wen, Y.-Q. Song, and Z.-G. Wang, “Double wire-grid terahertz polarizer on low-loss polymer substrates,” Chin. Phys. Lett. 27, 104210 (2010).
[CrossRef]

Tuovinen, H.

A. Partanen, J. Väyrynen, S. Hassinen, H. Tuovinen, J. Mutanen, T. Itkonen, P. Silfsten, P. Pääkkönen, M. Kuittinen, and K. Mönkkönen, “Fabrication of terahertz wire-grid polarizer by direct machining,” in Proceedings of the 17th Micro-optics Conference (IEEE, 2011), pp. 1–2.

Turunen, J.

J. Turunen, “Diffraction theory of micro relief gratings,” in Micro-optics: Elements, Systems and Applications, H. Herzig, ed. (Taylor & Francis, 1997).

Uhd Jepsen, P.

P. Uhd Jepsen, C. Winnewisser, M. Schall, V. Schyja, S. R. Keiding, and H. Helm, “Detection of THz pulses by phase retardation in lithium tantalate,” Phys. Rev. E 53, R3052–R3054 (1996).
[CrossRef]

Väyrynen, J.

T. Saastamoinen, J. Väyrynen, J. Mutanen, P. Pääkkönen, T. Itkonen, K. Mönkkönen, and M. Kuittinen, “Fabrication of hybrid optical structure by direct machining,” Proc. SPIE 7927, 792713 (2011).
[CrossRef]

J. Väyrynen, T. Saastamoinen, J. Mutanen, P. Pääkkönen, K. Mönkkönen, and M. Kuittinen, “Manufacturing of cylindrical diffractive lens by ruling,” Proc. SPIE 7927, 79270M (2011).
[CrossRef]

A. Partanen, J. Väyrynen, S. Hassinen, H. Tuovinen, J. Mutanen, T. Itkonen, P. Silfsten, P. Pääkkönen, M. Kuittinen, and K. Mönkkönen, “Fabrication of terahertz wire-grid polarizer by direct machining,” in Proceedings of the 17th Micro-optics Conference (IEEE, 2011), pp. 1–2.

Wang, Z.-G.

D.-B. Tian, H.-W. Zhang, W.-E. Lai, Q.-Y. Wen, Y.-Q. Song, and Z.-G. Wang, “Double wire-grid terahertz polarizer on low-loss polymer substrates,” Chin. Phys. Lett. 27, 104210 (2010).
[CrossRef]

Watanabe, W.

Wen, Q.-Y.

D.-B. Tian, H.-W. Zhang, W.-E. Lai, Q.-Y. Wen, Y.-Q. Song, and Z.-G. Wang, “Double wire-grid terahertz polarizer on low-loss polymer substrates,” Chin. Phys. Lett. 27, 104210 (2010).
[CrossRef]

Winnewisser, C.

P. Uhd Jepsen, C. Winnewisser, M. Schall, V. Schyja, S. R. Keiding, and H. Helm, “Detection of THz pulses by phase retardation in lithium tantalate,” Phys. Rev. E 53, R3052–R3054 (1996).
[CrossRef]

Yamada, I.

Yew, S. Y.

L. Zhang, J. H. Teng, H. Tanoto, S. Y. Yew, L. Y. Deng, and S. J. Chua, “Terahertz wire-grid polarizer by nanoimprinting lithography on high resistivity silicon substrate,” in Proceedings of The 35th International Conference on Infrared Millimeter and Terahertz Waves, (IEEE, 2010), pp. 1–2.

Yokoyama, H.

Zhang, C. L.

L. L. Zhang, H. Zhong, C. Deng, C. L. Zhang, and Y. J. Zhao, “Terahertz polarization imaging with birefringent materials,” Opt. Commun. 283, 4993–4995 (2010).
[CrossRef]

Zhang, H.-W.

D.-B. Tian, H.-W. Zhang, W.-E. Lai, Q.-Y. Wen, Y.-Q. Song, and Z.-G. Wang, “Double wire-grid terahertz polarizer on low-loss polymer substrates,” Chin. Phys. Lett. 27, 104210 (2010).
[CrossRef]

Zhang, L.

L. Zhang, J. H. Teng, H. Tanoto, S. Y. Yew, L. Y. Deng, and S. J. Chua, “Terahertz wire-grid polarizer by nanoimprinting lithography on high resistivity silicon substrate,” in Proceedings of The 35th International Conference on Infrared Millimeter and Terahertz Waves, (IEEE, 2010), pp. 1–2.

Zhang, L. L.

L. L. Zhang, H. Zhong, C. Deng, C. L. Zhang, and Y. J. Zhao, “Terahertz polarization imaging with birefringent materials,” Opt. Commun. 283, 4993–4995 (2010).
[CrossRef]

Zhao, Y. J.

L. L. Zhang, H. Zhong, C. Deng, C. L. Zhang, and Y. J. Zhao, “Terahertz polarization imaging with birefringent materials,” Opt. Commun. 283, 4993–4995 (2010).
[CrossRef]

Zhong, H.

L. L. Zhang, H. Zhong, C. Deng, C. L. Zhang, and Y. J. Zhao, “Terahertz polarization imaging with birefringent materials,” Opt. Commun. 283, 4993–4995 (2010).
[CrossRef]

Zimdars, D.

J. Federici, B. Schulkin, F. Huang, D. Gary, R. Barat, F. Oliveira, and D. Zimdars, “THz imaging and sensing for security applications—explosives, weapons and drugs,” Semicond. Sci. Technol. 20, S266–S280 (2005).
[CrossRef]

Appl. Opt. (1)

Chin. Phys. Lett. (1)

D.-B. Tian, H.-W. Zhang, W.-E. Lai, Q.-Y. Wen, Y.-Q. Song, and Z.-G. Wang, “Double wire-grid terahertz polarizer on low-loss polymer substrates,” Chin. Phys. Lett. 27, 104210 (2010).
[CrossRef]

CIRP Ann. (1)

Y. Takeuchi, S. Maeda, T. Kawai, and K. Sawada, “Manufacture of multiple-focus micro Fresnel lenses by means of nonrotational diamond grooving,” CIRP Ann. 51, 343–346 (2002).
[CrossRef]

Opt. Commun. (1)

L. L. Zhang, H. Zhong, C. Deng, C. L. Zhang, and Y. J. Zhao, “Terahertz polarization imaging with birefringent materials,” Opt. Commun. 283, 4993–4995 (2010).
[CrossRef]

Opt. Lett. (3)

Phys. Rev. E (1)

P. Uhd Jepsen, C. Winnewisser, M. Schall, V. Schyja, S. R. Keiding, and H. Helm, “Detection of THz pulses by phase retardation in lithium tantalate,” Phys. Rev. E 53, R3052–R3054 (1996).
[CrossRef]

Proc. SPIE (3)

J. Väyrynen, T. Saastamoinen, J. Mutanen, P. Pääkkönen, K. Mönkkönen, and M. Kuittinen, “Manufacturing of cylindrical diffractive lens by ruling,” Proc. SPIE 7927, 79270M (2011).
[CrossRef]

T. Saastamoinen, J. Väyrynen, J. Mutanen, P. Pääkkönen, T. Itkonen, K. Mönkkönen, and M. Kuittinen, “Fabrication of hybrid optical structure by direct machining,” Proc. SPIE 7927, 792713 (2011).
[CrossRef]

L. John, J. Allsop, A. Mateboera, and P. Shore, “Optimising efficiency in diamond turned Fresnel mould masters,” Proc. SPIE 8065, 806509 (2011).

Semicond. Sci. Technol. (1)

J. Federici, B. Schulkin, F. Huang, D. Gary, R. Barat, F. Oliveira, and D. Zimdars, “THz imaging and sensing for security applications—explosives, weapons and drugs,” Semicond. Sci. Technol. 20, S266–S280 (2005).
[CrossRef]

Other (4)

A. Partanen, J. Väyrynen, S. Hassinen, H. Tuovinen, J. Mutanen, T. Itkonen, P. Silfsten, P. Pääkkönen, M. Kuittinen, and K. Mönkkönen, “Fabrication of terahertz wire-grid polarizer by direct machining,” in Proceedings of the 17th Micro-optics Conference (IEEE, 2011), pp. 1–2.

J. Turunen, “Diffraction theory of micro relief gratings,” in Micro-optics: Elements, Systems and Applications, H. Herzig, ed. (Taylor & Francis, 1997).

E. Brinksmeier, O. Riemer, and A. Meier, “Submicron structuring by nano fast tool servo assisted diamond turning,” in EUSPEN Special Interest Group Meeting IPT Aachen(EUSPEN, 2010).

L. Zhang, J. H. Teng, H. Tanoto, S. Y. Yew, L. Y. Deng, and S. J. Chua, “Terahertz wire-grid polarizer by nanoimprinting lithography on high resistivity silicon substrate,” in Proceedings of The 35th International Conference on Infrared Millimeter and Terahertz Waves, (IEEE, 2010), pp. 1–2.

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (7)

Fig. 1.
Fig. 1.

THz polarizer structure where h=1.5μm is the height of the structure and d=3μm is the period.

Fig. 2.
Fig. 2.

Calculated transmittances for TE and TM polarizations when (a) TPX is used as substrate and (b) when COC is used as substrate. In addition, the calculated extinction ratios for (c) TPX and (d) COC polarizers are shown. For the COC, the sinusoidal shape of the transmission curve is caused by Fabry–Pérot interference between the top and bottom of the COC film.

Fig. 3.
Fig. 3.

Ultraprecision diamond freeform pattern generator setup.

Fig. 4.
Fig. 4.

Machined pattern transferred into (a) COC and (b) TPX by hot embossing.

Fig. 5.
Fig. 5.

Cross-section of the polarizer on TPX substrate.

Fig. 6.
Fig. 6.

Optical profiler picture from the worn left side of the tool taken with 100× magnification.

Fig. 7.
Fig. 7.

Measured transmittance for the polarizer fabricated on (a) TPX and (b) COC, and extinction ratios calculated from measurements for (c) TPX and (d) COC polarizer. The transmittance of TE polarization component was smoothed out by averaging.

Tables (3)

Tables Icon

Table 1. Cutting Values for 90° Tool XYZ-Ruling Cut

Tables Icon

Table 2. Process Parameters for Hot Embossing of TPX and COC

Tables Icon

Table 3. Comparison of Different Polarizers Fabricateda

Metrics