Abstract

We propose a general approach that allows one to reveal factors causing production errors in the course of the deposition process controlled by broadband optical monitoring. We consider computational experiments simulating the real deposition process as a crucial point of this approach. We demonstrate application of the approach using multiple experimental deposition runs of the selected multilayer coatings.

© 2012 Optical Society of America

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    [CrossRef]
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  7. H. Ehlers, S. Schlichting, and D. Ristau, “Hybrid process control for precision optics enhanced by computational manufacturing,” in Optical Interference Coatings, 2011 OSA Technical Digest Series (Optical Society of America, 2011), paper TuC6.
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    [CrossRef]
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  13. T. Gross, M. Lappschies, K. Starke, and D. Ristau, “Systematic errors in broadband optical monitoring,” in Optical Interference Coatings, 2001 OSA Technical Digest Series (Optical Society of America, 2001), paper ME4.
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    [CrossRef]
  32. M. Modreanu, J. Sancho-Parramon, D. O’Connell, J. Justice, O. Durand, and B. Servet, “Solid phase crystallisation of HfO2 thin films,” Mater. Sci. Eng. B 118, 127–131 (2005).
    [CrossRef]
  33. M. Modreanu, J. Sancho-Parramon, O. Durand, B. Servet, M. Stchakovsky, C. Eypert, C. Naudin, A. Knowles, and F. Bridou, “Investigation of thermal annealing effects on microstructural and optical properties of HfO2 thin films,” Appl. Surf. Sci. 253, 328–334 (2006).
    [CrossRef]
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    [CrossRef]

2012

2011

2010

2008

D. Ristau, H. Ehlers, S. Schlichting, and M. Lappschies, “State of the art in deterministic production of optical thin films,” Proc. SPIE 7101, 71010C (2008).
[CrossRef]

A. Tikhonravov, M. Trubetskov, and I. Kasahara, “Achievements and challenges in the design and production of high quality optical coatings,” IEICE Trans. Electron. E91-C, 1622–1629 (2008).
[CrossRef]

O. Stenzel, S. Wilbrandt, D. Fasold, and N. Kaiser, “A hybrid in situ monitoring strategy for optical coating deposition: application to the preparation of chirped dielectric mirrors,” J. Opt. A 10, 085305 (2008).
[CrossRef]

2007

2006

M. Modreanu, J. Sancho-Parramon, O. Durand, B. Servet, M. Stchakovsky, C. Eypert, C. Naudin, A. Knowles, and F. Bridou, “Investigation of thermal annealing effects on microstructural and optical properties of HfO2 thin films,” Appl. Surf. Sci. 253, 328–334 (2006).
[CrossRef]

D. Ristau, H. Ehlers, T. Gross, and M. Lappschies, “Optical broadband monitoring of conventional and ion processes,” Appl. Opt. 45, 1495–1501 (2006).
[CrossRef]

M. Tilsch, K. Hendrix, and P. Verly, “Optical interference coating design contest 2004,” Appl. Opt. 45, 1544–1554 (2006).
[CrossRef]

2005

A. V. Tikhonravov and M. K. Trubetskov, “Computational manufacturing as a bridge between design and production,” Appl. Opt. 44, 6877–6884 (2005).
[CrossRef]

M. Modreanu, J. Sancho-Parramon, D. O’Connell, J. Justice, O. Durand, and B. Servet, “Solid phase crystallisation of HfO2 thin films,” Mater. Sci. Eng. B 118, 127–131 (2005).
[CrossRef]

2004

A. V. Tikhonravov and M. K. Trubetskov, “On-line characterization and reoptimization of optical coatings,” Proc. SPIE 5250, 406–413 (2004).
[CrossRef]

M. Lappschies, T. Gross, H. Ehlers, and D. Ristau, “Broadband optical monitoring for the deposition of complex coating designs,” Proc. SPIE 5250, 637–645 (2004).
[CrossRef]

A. V. Tikhonravov, M. K. Trubetskov, T. V. Amotchkina, and M. A. Kokarev, “Key role of the coating total optical thickness in solving design problems,” Proc. SPIE 5250, 312–321 (2004).
[CrossRef]

2003

A. Tikhonravov, M. Trubetskov, T. Amotchkina, A. Tikhonravov, D. Ristau, and S. Günster, “Reliable determination of wavelength dependence of thin film refractive index,” Proc. SPIE 5188, 331–342 (2003).
[CrossRef]

2002

2000

K. Starke, T. Gross, M. Lappschies, and D. Ristau, “Rapid prototyping of optical thin film filters,” Proc. SPIE 4094, 83–92 (2000).
[CrossRef]

1992

Amotchkina, T.

A. Tikhonravov, M. Trubetskov, T. Amotchkina, A. Tikhonravov, D. Ristau, and S. Günster, “Reliable determination of wavelength dependence of thin film refractive index,” Proc. SPIE 5188, 331–342 (2003).
[CrossRef]

Amotchkina, T. V.

Badoil, B.

Boos, M.

A. Zöller, M. Boos, H. Hagedorn, W. Klug, and C. Schmitt, “High accurate in-situ optical thickness monitoring for multilayer coatings,” in Society of Vacuum Coaters 47th Annual Technical Conference Proceedings (Society of Vacuum Coaters, 2004), pp. 72–75.

Brauneck, U.

Bridou, F.

M. Modreanu, J. Sancho-Parramon, O. Durand, B. Servet, M. Stchakovsky, C. Eypert, C. Naudin, A. Knowles, and F. Bridou, “Investigation of thermal annealing effects on microstructural and optical properties of HfO2 thin films,” Appl. Surf. Sci. 253, 328–334 (2006).
[CrossRef]

Cathelinaud, M.

DeBell, G. W.

Dobrowolski, J. A.

Durand, O.

M. Modreanu, J. Sancho-Parramon, O. Durand, B. Servet, M. Stchakovsky, C. Eypert, C. Naudin, A. Knowles, and F. Bridou, “Investigation of thermal annealing effects on microstructural and optical properties of HfO2 thin films,” Appl. Surf. Sci. 253, 328–334 (2006).
[CrossRef]

M. Modreanu, J. Sancho-Parramon, D. O’Connell, J. Justice, O. Durand, and B. Servet, “Solid phase crystallisation of HfO2 thin films,” Mater. Sci. Eng. B 118, 127–131 (2005).
[CrossRef]

Ehlers, H.

T. V. Amotchkina, M. K. Trubetskov, V. Pervak, S. Schlichting, H. Ehlers, D. Ristau, and A. V. Tikhonravov, “Comparison of algorithms used for optical characterization of multilayer optical coatings,” Appl. Opt. 50, 3389–3395 (2011).
[CrossRef]

S. Schlichting, K. Heinrich, H. Ehlers, and D. Ristau, “Online re-optimization as a powerful part of enhanced strategies in optical broadband monitoring,” Proc. SPIE 8168, 81681E (2011).
[CrossRef]

H. Ehlers, S. Schlichting, C. Schmitz, and D. Ristau, “Adaptive manufacturing of high-precision optics based on virtual deposition and hybrid process control techniques,” Chin. Opt. Lett. 08, 62–66 (2010).
[CrossRef]

D. Ristau, H. Ehlers, S. Schlichting, and M. Lappschies, “State of the art in deterministic production of optical thin films,” Proc. SPIE 7101, 71010C (2008).
[CrossRef]

D. Ristau, H. Ehlers, T. Gross, and M. Lappschies, “Optical broadband monitoring of conventional and ion processes,” Appl. Opt. 45, 1495–1501 (2006).
[CrossRef]

M. Lappschies, T. Gross, H. Ehlers, and D. Ristau, “Broadband optical monitoring for the deposition of complex coating designs,” Proc. SPIE 5250, 637–645 (2004).
[CrossRef]

H. Ehlers, S. Schlichting, and D. Ristau, “Hybrid process control for precision optics enhanced by computational manufacturing,” in Optical Interference Coatings, 2011 OSA Technical Digest Series (Optical Society of America, 2011), paper TuC6.

Eypert, C.

M. Modreanu, J. Sancho-Parramon, O. Durand, B. Servet, M. Stchakovsky, C. Eypert, C. Naudin, A. Knowles, and F. Bridou, “Investigation of thermal annealing effects on microstructural and optical properties of HfO2 thin films,” Appl. Surf. Sci. 253, 328–334 (2006).
[CrossRef]

Fasold, D.

O. Stenzel, S. Wilbrandt, D. Fasold, and N. Kaiser, “A hybrid in situ monitoring strategy for optical coating deposition: application to the preparation of chirped dielectric mirrors,” J. Opt. A 10, 085305 (2008).
[CrossRef]

Francis, R.

Friedrich, K.

Gross, T.

D. Ristau, H. Ehlers, T. Gross, and M. Lappschies, “Optical broadband monitoring of conventional and ion processes,” Appl. Opt. 45, 1495–1501 (2006).
[CrossRef]

M. Lappschies, T. Gross, H. Ehlers, and D. Ristau, “Broadband optical monitoring for the deposition of complex coating designs,” Proc. SPIE 5250, 637–645 (2004).
[CrossRef]

K. Starke, T. Gross, M. Lappschies, and D. Ristau, “Rapid prototyping of optical thin film filters,” Proc. SPIE 4094, 83–92 (2000).
[CrossRef]

T. Gross, M. Lappschies, K. Starke, and D. Ristau, “Systematic errors in broadband optical monitoring,” in Optical Interference Coatings, 2001 OSA Technical Digest Series (Optical Society of America, 2001), paper ME4.

Günster, S.

A. Tikhonravov, M. Trubetskov, T. Amotchkina, A. Tikhonravov, D. Ristau, and S. Günster, “Reliable determination of wavelength dependence of thin film refractive index,” Proc. SPIE 5188, 331–342 (2003).
[CrossRef]

Hagedorn, H.

A. Zöller, M. Boos, H. Hagedorn, W. Klug, and C. Schmitt, “High accurate in-situ optical thickness monitoring for multilayer coatings,” in Society of Vacuum Coaters 47th Annual Technical Conference Proceedings (Society of Vacuum Coaters, 2004), pp. 72–75.

Heinrich, K.

S. Schlichting, K. Heinrich, H. Ehlers, and D. Ristau, “Online re-optimization as a powerful part of enhanced strategies in optical broadband monitoring,” Proc. SPIE 8168, 81681E (2011).
[CrossRef]

Hendrix, K.

Hoffmann, K.

Janicki, V.

A. V. Tikhonravov, T. V. Amotchkina, M. K. Trubetskov, R. Francis, V. Janicki, J. Sancho-Parramon, H. Zorc, and V. Pervak, “Optical characterization and reverse engineering based on multiangle spectroscopy,” Appl. Opt. 51, 245–254 (2012).
[CrossRef]

T. V. Amotchkina, J. Sancho-Parramon, V. Janicki, M. K. Trubetskov, H. Zorc, and A. V. Tikhonravov, “Design of multilayer coatings containing metal island films,” Proc. SPIE 8168, 816809 (2011).
[CrossRef]

Justice, J.

M. Modreanu, J. Sancho-Parramon, D. O’Connell, J. Justice, O. Durand, and B. Servet, “Solid phase crystallisation of HfO2 thin films,” Mater. Sci. Eng. B 118, 127–131 (2005).
[CrossRef]

Kaiser, N.

K. Friedrich, S. Wilbrandt, O. Stenzel, N. Kaiser, and K. Hoffmann, “Computational manufacturing of optical interference coatings: method, simulation results, and comparison with experiment,” Appl. Opt. 49, 3150–3162 (2010).
[CrossRef]

S. Wilbrandt, O. Stenzel, and N. Kaiser, “All-oxide broadband antireflection coatings by plasma ion assisted deposition: design, simulation, manufacturing and re-optimization,” Opt. Express 18, 19732–19742 (2010).
[CrossRef]

O. Stenzel, S. Wilbrandt, D. Fasold, and N. Kaiser, “A hybrid in situ monitoring strategy for optical coating deposition: application to the preparation of chirped dielectric mirrors,” J. Opt. A 10, 085305 (2008).
[CrossRef]

S. Wilbrandt, O. Stenzel, and N. Kaiser, “Experimental determination of the refractive index profile of rugate filters based on in situ measurements of transmission spectra,” J. Phys. D 40, 1435–1441 (2007).
[CrossRef]

Kasahara, I.

A. Tikhonravov, M. Trubetskov, and I. Kasahara, “Achievements and challenges in the design and production of high quality optical coatings,” IEICE Trans. Electron. E91-C, 1622–1629 (2008).
[CrossRef]

Klug, W.

A. Zöller, M. Boos, H. Hagedorn, W. Klug, and C. Schmitt, “High accurate in-situ optical thickness monitoring for multilayer coatings,” in Society of Vacuum Coaters 47th Annual Technical Conference Proceedings (Society of Vacuum Coaters, 2004), pp. 72–75.

Knowles, A.

M. Modreanu, J. Sancho-Parramon, O. Durand, B. Servet, M. Stchakovsky, C. Eypert, C. Naudin, A. Knowles, and F. Bridou, “Investigation of thermal annealing effects on microstructural and optical properties of HfO2 thin films,” Appl. Surf. Sci. 253, 328–334 (2006).
[CrossRef]

Kokarev, M. A.

A. V. Tikhonravov, M. K. Trubetskov, T. V. Amotchkina, and M. A. Kokarev, “Key role of the coating total optical thickness in solving design problems,” Proc. SPIE 5250, 312–321 (2004).
[CrossRef]

Lappschies, M.

D. Ristau, H. Ehlers, S. Schlichting, and M. Lappschies, “State of the art in deterministic production of optical thin films,” Proc. SPIE 7101, 71010C (2008).
[CrossRef]

D. Ristau, H. Ehlers, T. Gross, and M. Lappschies, “Optical broadband monitoring of conventional and ion processes,” Appl. Opt. 45, 1495–1501 (2006).
[CrossRef]

M. Lappschies, T. Gross, H. Ehlers, and D. Ristau, “Broadband optical monitoring for the deposition of complex coating designs,” Proc. SPIE 5250, 637–645 (2004).
[CrossRef]

K. Starke, T. Gross, M. Lappschies, and D. Ristau, “Rapid prototyping of optical thin film filters,” Proc. SPIE 4094, 83–92 (2000).
[CrossRef]

T. Gross, M. Lappschies, K. Starke, and D. Ristau, “Systematic errors in broadband optical monitoring,” in Optical Interference Coatings, 2001 OSA Technical Digest Series (Optical Society of America, 2001), paper ME4.

Lemarchand, F.

Lequime, M.

Modreanu, M.

M. Modreanu, J. Sancho-Parramon, O. Durand, B. Servet, M. Stchakovsky, C. Eypert, C. Naudin, A. Knowles, and F. Bridou, “Investigation of thermal annealing effects on microstructural and optical properties of HfO2 thin films,” Appl. Surf. Sci. 253, 328–334 (2006).
[CrossRef]

M. Modreanu, J. Sancho-Parramon, D. O’Connell, J. Justice, O. Durand, and B. Servet, “Solid phase crystallisation of HfO2 thin films,” Mater. Sci. Eng. B 118, 127–131 (2005).
[CrossRef]

Naudin, C.

M. Modreanu, J. Sancho-Parramon, O. Durand, B. Servet, M. Stchakovsky, C. Eypert, C. Naudin, A. Knowles, and F. Bridou, “Investigation of thermal annealing effects on microstructural and optical properties of HfO2 thin films,” Appl. Surf. Sci. 253, 328–334 (2006).
[CrossRef]

O’Connell, D.

M. Modreanu, J. Sancho-Parramon, D. O’Connell, J. Justice, O. Durand, and B. Servet, “Solid phase crystallisation of HfO2 thin films,” Mater. Sci. Eng. B 118, 127–131 (2005).
[CrossRef]

Pervak, V.

Pulker, H.

H. Pulker, “Film deposition methods,” in Optical Interference Coatings, N. Kaiser and H. K. Pulker, eds. (Springer-Verlag, 2003), pp. 131–153.

Ristau, D.

T. V. Amotchkina, M. K. Trubetskov, V. Pervak, S. Schlichting, H. Ehlers, D. Ristau, and A. V. Tikhonravov, “Comparison of algorithms used for optical characterization of multilayer optical coatings,” Appl. Opt. 50, 3389–3395 (2011).
[CrossRef]

S. Schlichting, K. Heinrich, H. Ehlers, and D. Ristau, “Online re-optimization as a powerful part of enhanced strategies in optical broadband monitoring,” Proc. SPIE 8168, 81681E (2011).
[CrossRef]

H. Ehlers, S. Schlichting, C. Schmitz, and D. Ristau, “Adaptive manufacturing of high-precision optics based on virtual deposition and hybrid process control techniques,” Chin. Opt. Lett. 08, 62–66 (2010).
[CrossRef]

D. Ristau, H. Ehlers, S. Schlichting, and M. Lappschies, “State of the art in deterministic production of optical thin films,” Proc. SPIE 7101, 71010C (2008).
[CrossRef]

D. Ristau, H. Ehlers, T. Gross, and M. Lappschies, “Optical broadband monitoring of conventional and ion processes,” Appl. Opt. 45, 1495–1501 (2006).
[CrossRef]

M. Lappschies, T. Gross, H. Ehlers, and D. Ristau, “Broadband optical monitoring for the deposition of complex coating designs,” Proc. SPIE 5250, 637–645 (2004).
[CrossRef]

A. Tikhonravov, M. Trubetskov, T. Amotchkina, A. Tikhonravov, D. Ristau, and S. Günster, “Reliable determination of wavelength dependence of thin film refractive index,” Proc. SPIE 5188, 331–342 (2003).
[CrossRef]

K. Starke, T. Gross, M. Lappschies, and D. Ristau, “Rapid prototyping of optical thin film filters,” Proc. SPIE 4094, 83–92 (2000).
[CrossRef]

H. Ehlers, S. Schlichting, and D. Ristau, “Hybrid process control for precision optics enhanced by computational manufacturing,” in Optical Interference Coatings, 2011 OSA Technical Digest Series (Optical Society of America, 2011), paper TuC6.

T. Gross, M. Lappschies, K. Starke, and D. Ristau, “Systematic errors in broadband optical monitoring,” in Optical Interference Coatings, 2001 OSA Technical Digest Series (Optical Society of America, 2001), paper ME4.

D. Ristau, “Characterization and monitoring,” in Optical Interference Coatings, N. Kaiser and H. K. Pulker, eds. (Springer-Verlag, 2003), pp. 181–205.

Sancho-Parramon, J.

A. V. Tikhonravov, T. V. Amotchkina, M. K. Trubetskov, R. Francis, V. Janicki, J. Sancho-Parramon, H. Zorc, and V. Pervak, “Optical characterization and reverse engineering based on multiangle spectroscopy,” Appl. Opt. 51, 245–254 (2012).
[CrossRef]

T. V. Amotchkina, J. Sancho-Parramon, V. Janicki, M. K. Trubetskov, H. Zorc, and A. V. Tikhonravov, “Design of multilayer coatings containing metal island films,” Proc. SPIE 8168, 816809 (2011).
[CrossRef]

M. Modreanu, J. Sancho-Parramon, O. Durand, B. Servet, M. Stchakovsky, C. Eypert, C. Naudin, A. Knowles, and F. Bridou, “Investigation of thermal annealing effects on microstructural and optical properties of HfO2 thin films,” Appl. Surf. Sci. 253, 328–334 (2006).
[CrossRef]

M. Modreanu, J. Sancho-Parramon, D. O’Connell, J. Justice, O. Durand, and B. Servet, “Solid phase crystallisation of HfO2 thin films,” Mater. Sci. Eng. B 118, 127–131 (2005).
[CrossRef]

Schlichting, S.

T. V. Amotchkina, M. K. Trubetskov, V. Pervak, S. Schlichting, H. Ehlers, D. Ristau, and A. V. Tikhonravov, “Comparison of algorithms used for optical characterization of multilayer optical coatings,” Appl. Opt. 50, 3389–3395 (2011).
[CrossRef]

S. Schlichting, K. Heinrich, H. Ehlers, and D. Ristau, “Online re-optimization as a powerful part of enhanced strategies in optical broadband monitoring,” Proc. SPIE 8168, 81681E (2011).
[CrossRef]

H. Ehlers, S. Schlichting, C. Schmitz, and D. Ristau, “Adaptive manufacturing of high-precision optics based on virtual deposition and hybrid process control techniques,” Chin. Opt. Lett. 08, 62–66 (2010).
[CrossRef]

D. Ristau, H. Ehlers, S. Schlichting, and M. Lappschies, “State of the art in deterministic production of optical thin films,” Proc. SPIE 7101, 71010C (2008).
[CrossRef]

H. Ehlers, S. Schlichting, and D. Ristau, “Hybrid process control for precision optics enhanced by computational manufacturing,” in Optical Interference Coatings, 2011 OSA Technical Digest Series (Optical Society of America, 2011), paper TuC6.

Schmitt, C.

A. Zöller, M. Boos, H. Hagedorn, W. Klug, and C. Schmitt, “High accurate in-situ optical thickness monitoring for multilayer coatings,” in Society of Vacuum Coaters 47th Annual Technical Conference Proceedings (Society of Vacuum Coaters, 2004), pp. 72–75.

Schmitz, C.

H. Ehlers, S. Schlichting, C. Schmitz, and D. Ristau, “Adaptive manufacturing of high-precision optics based on virtual deposition and hybrid process control techniques,” Chin. Opt. Lett. 08, 62–66 (2010).
[CrossRef]

Servet, B.

M. Modreanu, J. Sancho-Parramon, O. Durand, B. Servet, M. Stchakovsky, C. Eypert, C. Naudin, A. Knowles, and F. Bridou, “Investigation of thermal annealing effects on microstructural and optical properties of HfO2 thin films,” Appl. Surf. Sci. 253, 328–334 (2006).
[CrossRef]

M. Modreanu, J. Sancho-Parramon, D. O’Connell, J. Justice, O. Durand, and B. Servet, “Solid phase crystallisation of HfO2 thin films,” Mater. Sci. Eng. B 118, 127–131 (2005).
[CrossRef]

Starke, K.

K. Starke, T. Gross, M. Lappschies, and D. Ristau, “Rapid prototyping of optical thin film filters,” Proc. SPIE 4094, 83–92 (2000).
[CrossRef]

T. Gross, M. Lappschies, K. Starke, and D. Ristau, “Systematic errors in broadband optical monitoring,” in Optical Interference Coatings, 2001 OSA Technical Digest Series (Optical Society of America, 2001), paper ME4.

Stchakovsky, M.

M. Modreanu, J. Sancho-Parramon, O. Durand, B. Servet, M. Stchakovsky, C. Eypert, C. Naudin, A. Knowles, and F. Bridou, “Investigation of thermal annealing effects on microstructural and optical properties of HfO2 thin films,” Appl. Surf. Sci. 253, 328–334 (2006).
[CrossRef]

Stenzel, O.

K. Friedrich, S. Wilbrandt, O. Stenzel, N. Kaiser, and K. Hoffmann, “Computational manufacturing of optical interference coatings: method, simulation results, and comparison with experiment,” Appl. Opt. 49, 3150–3162 (2010).
[CrossRef]

S. Wilbrandt, O. Stenzel, and N. Kaiser, “All-oxide broadband antireflection coatings by plasma ion assisted deposition: design, simulation, manufacturing and re-optimization,” Opt. Express 18, 19732–19742 (2010).
[CrossRef]

O. Stenzel, S. Wilbrandt, D. Fasold, and N. Kaiser, “A hybrid in situ monitoring strategy for optical coating deposition: application to the preparation of chirped dielectric mirrors,” J. Opt. A 10, 085305 (2008).
[CrossRef]

S. Wilbrandt, O. Stenzel, and N. Kaiser, “Experimental determination of the refractive index profile of rugate filters based on in situ measurements of transmission spectra,” J. Phys. D 40, 1435–1441 (2007).
[CrossRef]

Sullivan, B. T.

Thelen, A.

Tikhonravov, A.

A. Tikhonravov, M. Trubetskov, and I. Kasahara, “Achievements and challenges in the design and production of high quality optical coatings,” IEICE Trans. Electron. E91-C, 1622–1629 (2008).
[CrossRef]

A. Tikhonravov, M. Trubetskov, T. Amotchkina, A. Tikhonravov, D. Ristau, and S. Günster, “Reliable determination of wavelength dependence of thin film refractive index,” Proc. SPIE 5188, 331–342 (2003).
[CrossRef]

A. Tikhonravov, M. Trubetskov, T. Amotchkina, A. Tikhonravov, D. Ristau, and S. Günster, “Reliable determination of wavelength dependence of thin film refractive index,” Proc. SPIE 5188, 331–342 (2003).
[CrossRef]

Tikhonravov, A. V.

A. V. Tikhonravov, T. V. Amotchkina, M. K. Trubetskov, R. Francis, V. Janicki, J. Sancho-Parramon, H. Zorc, and V. Pervak, “Optical characterization and reverse engineering based on multiangle spectroscopy,” Appl. Opt. 51, 245–254 (2012).
[CrossRef]

A. V. Tikhonravov, M. K. Trubetskov, T. V. Amotchkina, and V. Pervak, “Estimations of production yields for choosing of a practically optimal optical coating design,” Appl. Opt. 50, C141–C147 (2011).
[CrossRef]

T. V. Amotchkina, J. Sancho-Parramon, V. Janicki, M. K. Trubetskov, H. Zorc, and A. V. Tikhonravov, “Design of multilayer coatings containing metal island films,” Proc. SPIE 8168, 816809 (2011).
[CrossRef]

T. V. Amotchkina, M. K. Trubetskov, V. Pervak, and A. V. Tikhonravov, “Design, production and reverse engineering of two-octave antireflection coatings,” Appl. Opt. 50, 6468–6475 (2011).
[CrossRef]

T. V. Amotchkina, M. K. Trubetskov, V. Pervak, S. Schlichting, H. Ehlers, D. Ristau, and A. V. Tikhonravov, “Comparison of algorithms used for optical characterization of multilayer optical coatings,” Appl. Opt. 50, 3389–3395 (2011).
[CrossRef]

A. V. Tikhonravov, M. K. Trubetskov, and G. W. DeBell, “Optical coating design approaches based on the needle optimization technique,” Appl. Opt. 46, 704–710 (2007).
[CrossRef]

A. V. Tikhonravov and M. K. Trubetskov, “Computational manufacturing as a bridge between design and production,” Appl. Opt. 44, 6877–6884 (2005).
[CrossRef]

A. V. Tikhonravov and M. K. Trubetskov, “On-line characterization and reoptimization of optical coatings,” Proc. SPIE 5250, 406–413 (2004).
[CrossRef]

A. V. Tikhonravov, M. K. Trubetskov, T. V. Amotchkina, and M. A. Kokarev, “Key role of the coating total optical thickness in solving design problems,” Proc. SPIE 5250, 312–321 (2004).
[CrossRef]

A. Thelen, A. V. Tikhonravov, M. K. Trubetskov, M. Tilsch, and U. Brauneck, “Topical meeting on optical interference coatings (OIC ’2001): design contest results,” Appl. Opt. 41, 3022–3038 (2002).
[CrossRef]

Tilsch, M.

Trubetskov, M.

A. Tikhonravov, M. Trubetskov, and I. Kasahara, “Achievements and challenges in the design and production of high quality optical coatings,” IEICE Trans. Electron. E91-C, 1622–1629 (2008).
[CrossRef]

A. Tikhonravov, M. Trubetskov, T. Amotchkina, A. Tikhonravov, D. Ristau, and S. Günster, “Reliable determination of wavelength dependence of thin film refractive index,” Proc. SPIE 5188, 331–342 (2003).
[CrossRef]

Trubetskov, M. K.

A. V. Tikhonravov, T. V. Amotchkina, M. K. Trubetskov, R. Francis, V. Janicki, J. Sancho-Parramon, H. Zorc, and V. Pervak, “Optical characterization and reverse engineering based on multiangle spectroscopy,” Appl. Opt. 51, 245–254 (2012).
[CrossRef]

A. V. Tikhonravov, M. K. Trubetskov, T. V. Amotchkina, and V. Pervak, “Estimations of production yields for choosing of a practically optimal optical coating design,” Appl. Opt. 50, C141–C147 (2011).
[CrossRef]

T. V. Amotchkina, J. Sancho-Parramon, V. Janicki, M. K. Trubetskov, H. Zorc, and A. V. Tikhonravov, “Design of multilayer coatings containing metal island films,” Proc. SPIE 8168, 816809 (2011).
[CrossRef]

T. V. Amotchkina, M. K. Trubetskov, V. Pervak, and A. V. Tikhonravov, “Design, production and reverse engineering of two-octave antireflection coatings,” Appl. Opt. 50, 6468–6475 (2011).
[CrossRef]

T. V. Amotchkina, M. K. Trubetskov, V. Pervak, S. Schlichting, H. Ehlers, D. Ristau, and A. V. Tikhonravov, “Comparison of algorithms used for optical characterization of multilayer optical coatings,” Appl. Opt. 50, 3389–3395 (2011).
[CrossRef]

A. V. Tikhonravov, M. K. Trubetskov, and G. W. DeBell, “Optical coating design approaches based on the needle optimization technique,” Appl. Opt. 46, 704–710 (2007).
[CrossRef]

A. V. Tikhonravov and M. K. Trubetskov, “Computational manufacturing as a bridge between design and production,” Appl. Opt. 44, 6877–6884 (2005).
[CrossRef]

A. V. Tikhonravov and M. K. Trubetskov, “On-line characterization and reoptimization of optical coatings,” Proc. SPIE 5250, 406–413 (2004).
[CrossRef]

A. V. Tikhonravov, M. K. Trubetskov, T. V. Amotchkina, and M. A. Kokarev, “Key role of the coating total optical thickness in solving design problems,” Proc. SPIE 5250, 312–321 (2004).
[CrossRef]

A. Thelen, A. V. Tikhonravov, M. K. Trubetskov, M. Tilsch, and U. Brauneck, “Topical meeting on optical interference coatings (OIC ’2001): design contest results,” Appl. Opt. 41, 3022–3038 (2002).
[CrossRef]

Verly, P.

Wilbrandt, S.

K. Friedrich, S. Wilbrandt, O. Stenzel, N. Kaiser, and K. Hoffmann, “Computational manufacturing of optical interference coatings: method, simulation results, and comparison with experiment,” Appl. Opt. 49, 3150–3162 (2010).
[CrossRef]

S. Wilbrandt, O. Stenzel, and N. Kaiser, “All-oxide broadband antireflection coatings by plasma ion assisted deposition: design, simulation, manufacturing and re-optimization,” Opt. Express 18, 19732–19742 (2010).
[CrossRef]

O. Stenzel, S. Wilbrandt, D. Fasold, and N. Kaiser, “A hybrid in situ monitoring strategy for optical coating deposition: application to the preparation of chirped dielectric mirrors,” J. Opt. A 10, 085305 (2008).
[CrossRef]

S. Wilbrandt, O. Stenzel, and N. Kaiser, “Experimental determination of the refractive index profile of rugate filters based on in situ measurements of transmission spectra,” J. Phys. D 40, 1435–1441 (2007).
[CrossRef]

Zöller, A.

A. Zöller, M. Boos, H. Hagedorn, W. Klug, and C. Schmitt, “High accurate in-situ optical thickness monitoring for multilayer coatings,” in Society of Vacuum Coaters 47th Annual Technical Conference Proceedings (Society of Vacuum Coaters, 2004), pp. 72–75.

Zorc, H.

A. V. Tikhonravov, T. V. Amotchkina, M. K. Trubetskov, R. Francis, V. Janicki, J. Sancho-Parramon, H. Zorc, and V. Pervak, “Optical characterization and reverse engineering based on multiangle spectroscopy,” Appl. Opt. 51, 245–254 (2012).
[CrossRef]

T. V. Amotchkina, J. Sancho-Parramon, V. Janicki, M. K. Trubetskov, H. Zorc, and A. V. Tikhonravov, “Design of multilayer coatings containing metal island films,” Proc. SPIE 8168, 816809 (2011).
[CrossRef]

Appl. Opt.

B. T. Sullivan and J. A. Dobrowolski, “Deposition error compensation for optical multilayer coatings. I. Theoretical description,” Appl. Opt. 31, 3821–3835 (1992).
[CrossRef]

A. Thelen, A. V. Tikhonravov, M. K. Trubetskov, M. Tilsch, and U. Brauneck, “Topical meeting on optical interference coatings (OIC ’2001): design contest results,” Appl. Opt. 41, 3022–3038 (2002).
[CrossRef]

A. V. Tikhonravov and M. K. Trubetskov, “Computational manufacturing as a bridge between design and production,” Appl. Opt. 44, 6877–6884 (2005).
[CrossRef]

D. Ristau, H. Ehlers, T. Gross, and M. Lappschies, “Optical broadband monitoring of conventional and ion processes,” Appl. Opt. 45, 1495–1501 (2006).
[CrossRef]

M. Tilsch, K. Hendrix, and P. Verly, “Optical interference coating design contest 2004,” Appl. Opt. 45, 1544–1554 (2006).
[CrossRef]

A. V. Tikhonravov, M. K. Trubetskov, and G. W. DeBell, “Optical coating design approaches based on the needle optimization technique,” Appl. Opt. 46, 704–710 (2007).
[CrossRef]

B. Badoil, F. Lemarchand, M. Cathelinaud, and M. Lequime, “Interest of broadband optical monitoring for thin-film filter manufacturing,” Appl. Opt. 46, 4294–4303 (2007).
[CrossRef]

K. Friedrich, S. Wilbrandt, O. Stenzel, N. Kaiser, and K. Hoffmann, “Computational manufacturing of optical interference coatings: method, simulation results, and comparison with experiment,” Appl. Opt. 49, 3150–3162 (2010).
[CrossRef]

A. V. Tikhonravov, M. K. Trubetskov, T. V. Amotchkina, and V. Pervak, “Estimations of production yields for choosing of a practically optimal optical coating design,” Appl. Opt. 50, C141–C147 (2011).
[CrossRef]

T. V. Amotchkina, M. K. Trubetskov, V. Pervak, S. Schlichting, H. Ehlers, D. Ristau, and A. V. Tikhonravov, “Comparison of algorithms used for optical characterization of multilayer optical coatings,” Appl. Opt. 50, 3389–3395 (2011).
[CrossRef]

T. V. Amotchkina, M. K. Trubetskov, V. Pervak, and A. V. Tikhonravov, “Design, production and reverse engineering of two-octave antireflection coatings,” Appl. Opt. 50, 6468–6475 (2011).
[CrossRef]

A. V. Tikhonravov, T. V. Amotchkina, M. K. Trubetskov, R. Francis, V. Janicki, J. Sancho-Parramon, H. Zorc, and V. Pervak, “Optical characterization and reverse engineering based on multiangle spectroscopy,” Appl. Opt. 51, 245–254 (2012).
[CrossRef]

Appl. Surf. Sci.

M. Modreanu, J. Sancho-Parramon, O. Durand, B. Servet, M. Stchakovsky, C. Eypert, C. Naudin, A. Knowles, and F. Bridou, “Investigation of thermal annealing effects on microstructural and optical properties of HfO2 thin films,” Appl. Surf. Sci. 253, 328–334 (2006).
[CrossRef]

Chin. Opt. Lett.

H. Ehlers, S. Schlichting, C. Schmitz, and D. Ristau, “Adaptive manufacturing of high-precision optics based on virtual deposition and hybrid process control techniques,” Chin. Opt. Lett. 08, 62–66 (2010).
[CrossRef]

IEICE Trans. Electron.

A. Tikhonravov, M. Trubetskov, and I. Kasahara, “Achievements and challenges in the design and production of high quality optical coatings,” IEICE Trans. Electron. E91-C, 1622–1629 (2008).
[CrossRef]

J. Opt. A

O. Stenzel, S. Wilbrandt, D. Fasold, and N. Kaiser, “A hybrid in situ monitoring strategy for optical coating deposition: application to the preparation of chirped dielectric mirrors,” J. Opt. A 10, 085305 (2008).
[CrossRef]

J. Phys. D

S. Wilbrandt, O. Stenzel, and N. Kaiser, “Experimental determination of the refractive index profile of rugate filters based on in situ measurements of transmission spectra,” J. Phys. D 40, 1435–1441 (2007).
[CrossRef]

Mater. Sci. Eng. B

M. Modreanu, J. Sancho-Parramon, D. O’Connell, J. Justice, O. Durand, and B. Servet, “Solid phase crystallisation of HfO2 thin films,” Mater. Sci. Eng. B 118, 127–131 (2005).
[CrossRef]

Opt. Express

Proc. SPIE

T. V. Amotchkina, J. Sancho-Parramon, V. Janicki, M. K. Trubetskov, H. Zorc, and A. V. Tikhonravov, “Design of multilayer coatings containing metal island films,” Proc. SPIE 8168, 816809 (2011).
[CrossRef]

D. Ristau, H. Ehlers, S. Schlichting, and M. Lappschies, “State of the art in deterministic production of optical thin films,” Proc. SPIE 7101, 71010C (2008).
[CrossRef]

A. V. Tikhonravov and M. K. Trubetskov, “On-line characterization and reoptimization of optical coatings,” Proc. SPIE 5250, 406–413 (2004).
[CrossRef]

A. Tikhonravov, M. Trubetskov, T. Amotchkina, A. Tikhonravov, D. Ristau, and S. Günster, “Reliable determination of wavelength dependence of thin film refractive index,” Proc. SPIE 5188, 331–342 (2003).
[CrossRef]

M. Lappschies, T. Gross, H. Ehlers, and D. Ristau, “Broadband optical monitoring for the deposition of complex coating designs,” Proc. SPIE 5250, 637–645 (2004).
[CrossRef]

K. Starke, T. Gross, M. Lappschies, and D. Ristau, “Rapid prototyping of optical thin film filters,” Proc. SPIE 4094, 83–92 (2000).
[CrossRef]

S. Schlichting, K. Heinrich, H. Ehlers, and D. Ristau, “Online re-optimization as a powerful part of enhanced strategies in optical broadband monitoring,” Proc. SPIE 8168, 81681E (2011).
[CrossRef]

A. V. Tikhonravov, M. K. Trubetskov, T. V. Amotchkina, and M. A. Kokarev, “Key role of the coating total optical thickness in solving design problems,” Proc. SPIE 5250, 312–321 (2004).
[CrossRef]

Other

H. Ehlers, S. Schlichting, and D. Ristau, “Hybrid process control for precision optics enhanced by computational manufacturing,” in Optical Interference Coatings, 2011 OSA Technical Digest Series (Optical Society of America, 2011), paper TuC6.

D. Ristau, “Characterization and monitoring,” in Optical Interference Coatings, N. Kaiser and H. K. Pulker, eds. (Springer-Verlag, 2003), pp. 181–205.

A. V. Tikhonravov and M. K. Trubetskov, OptiLayer Thin Film Software, http://www.optilayer.com.

T. Gross, M. Lappschies, K. Starke, and D. Ristau, “Systematic errors in broadband optical monitoring,” in Optical Interference Coatings, 2001 OSA Technical Digest Series (Optical Society of America, 2001), paper ME4.

“Quartz glass for optics: data and properties,” http://heraeus-quarzglas.com.

H. Pulker, “Film deposition methods,” in Optical Interference Coatings, N. Kaiser and H. K. Pulker, eds. (Springer-Verlag, 2003), pp. 131–153.

A. Zöller, M. Boos, H. Hagedorn, W. Klug, and C. Schmitt, “High accurate in-situ optical thickness monitoring for multilayer coatings,” in Society of Vacuum Coaters 47th Annual Technical Conference Proceedings (Society of Vacuum Coaters, 2004), pp. 72–75.

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