Abstract

In this paper, an optical accelerometer based on grating interferometer with phase modulation technique is proposed. This device architecture consists of a laser diode, a sensing chip and an optoelectronic processing circuit. The sensing chip is a sandwich structure, which is composed of a grating, a piezoelectric translator and a micromachined silicon structure consisting of a proof mass and four cantilevers. The detected signal is intensity-modulated with phase modulation technique and processed with a lock-in amplifier for demodulation. Experimental results show that this optical accelerometer has acceleration sensitivity of 619V/g and high-resolution acceleration detection of 3 μg in the linear region.

© 2012 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Optical accelerometer based on high-order diffraction beam interference

Liuhua Chen, Qiao Lin, Shu Li, and X. Wu
Appl. Opt. 49(14) 2658-2664 (2010)

Minimizing cross-axis sensitivity in grating-based optomechanical accelerometers

Qianbo Lu, Chen Wang, Jian Bai, Kaiwei Wang, Shuqi Lou, Xufen Jiao, Dandan Han, Guoguang Yang, Dong Liu, and Yongying Yang
Opt. Express 24(8) 9094-9111 (2016)

Sensitivity improvement of micro-grating accelerometer based on differential detection method

Xiao Wang, Lishuang Feng, Baoyin Yao, and Xiaoyuan Ren
Appl. Opt. 52(18) 4091-4096 (2013)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (11)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (4)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription