Abstract

Absorption loss in optical components, particularly in optical coatings, is a limiting factor in high-power laser applications. The uniformity of optical coatings becomes more and more important as large-diameter optical devices are used widely. In this paper, the photothermal detuning technique used for absorption uniformity measurement of optical thin films is developed for the first time. Experiments are conducted with a highly reflective coating used in 514 nm to measure the photothermal detuning signal and to evaluate the absorption at 514 nm by detecting the spectral shift with a probe beam at a wavelength of 632.8 nm. The relative absorption at different points on the sample surface can be measured by moving the sample two-dimensionally, and we use the measured data to make the absorption image. The results show that the designed experimental system can be used to analyze the absorption uniformity of optical coatings. The obtained images reflect the absorption uniformity of the sample well. The absorption uniformities of the two samples analyzed in this experiment are different. The film coated on fused silica is better. The research provides a powerful and convenient tool for absorption uniformity measurement of optical thin film.

© 2012 Optical Society of America

Full Article  |  PDF Article

References

  • View by:
  • |
  • |
  • |

  1. B. Cimma, D. Forest, P. Ganau, B. Lagrange, J.-M. Mackowski, C. Michel, J.-L. Montorio, N. Morgado, R. Pignard, L. Pinard, and A. Remillieux, “Ion beam sputtering coatings on large substrates toward an improvement of the mechanical and optical performances,” Appl. Opt. 45, 1436–1439 (2006).
    [CrossRef]
  2. S. Li, H. He, D. Li, M. Zhou, X. Ling, Y. Zhao, and Z. Fan, “Temperature field analysis of TiO2 films with high-absorptance inclusions,” Appl. Opt. 49, 329–333 (2010).
    [CrossRef]
  3. B. Li, H. Blaschke, and D. Ristau, “Combined laser calorimetry and photothermal technique for absorption measurement of optical coatings,” Appl. Opt. 45, 5827–5831 (2006).
    [CrossRef]
  4. Z. L. Wu, M. Thomsen, P. K. Kuo, Y. Lu, C. Stolz, and M. Kozlowski, “Photothermal characterization of optical thin film coatings,” Opt. Eng. 36, 251–262 (1997).
    [CrossRef]
  5. L. Gallais and M. Commandré, “Photothermal deflection in multilayer coatings: modeling and experiment,” Appl. Opt. 44, 5230–5238 (2005).
    [CrossRef]
  6. X. Chen, B. Li, and Y. Yang, “Theory of surface thermal lens signal in optical coating with cw modulated top-hat beam excitation,” Acta Phys. Sin. 55, 4673–4678 (2006), in Chinese.
  7. S. Li, H. He, Y. Shao, D. Li, Y. Zhao, and Z. Fan, “Enhanced surface thermal lensing for absorption evaluation and defect identification of optical films,” Appl. Opt. 49, 2417–2421 (2010).
    [CrossRef]
  8. H. Hao and B. Li, “Photothermal detuning: a sensitive technique for absorption measurement of optical thin films,” Proc. SPIE 6720, 67201D (2007).
    [CrossRef]
  9. H. Hao and B. Li, “Photothermal detuning for absorption measurement of optical coatings,” Appl. Opt. 47, 188–194 (2008).
    [CrossRef]
  10. S.-H. Kim and C. K. Hwangbo, “Derivation of the center-wavelength shift of narrow-bandpass filters under temperature change,” Opt. Express 12, 5634–5639 (2004).
    [CrossRef]
  11. T.-C. Chen, J.-I. Kuo, W.-L. Lee, and C.-C. Lee, “Influences of temperature and stress on transmission characteristics of multilayer thin-film narrow bandpass filters,” Jpn. J. Appl. Phys. 40, 4087–4096 (2001).
    [CrossRef]
  12. E. Drouard, P. Huguet-Chantôme, L. Escoubas, and F. Flory, “∂n/∂T Measurements performed with guided waves and their application to the temperature sensitivity of wavelength-division multiplexing filters,” Appl. Opt. 41, 3132–3136 (2002).
    [CrossRef]

2010

2008

2007

H. Hao and B. Li, “Photothermal detuning: a sensitive technique for absorption measurement of optical thin films,” Proc. SPIE 6720, 67201D (2007).
[CrossRef]

2006

2005

2004

2002

2001

T.-C. Chen, J.-I. Kuo, W.-L. Lee, and C.-C. Lee, “Influences of temperature and stress on transmission characteristics of multilayer thin-film narrow bandpass filters,” Jpn. J. Appl. Phys. 40, 4087–4096 (2001).
[CrossRef]

1997

Z. L. Wu, M. Thomsen, P. K. Kuo, Y. Lu, C. Stolz, and M. Kozlowski, “Photothermal characterization of optical thin film coatings,” Opt. Eng. 36, 251–262 (1997).
[CrossRef]

Blaschke, H.

Chen, T.-C.

T.-C. Chen, J.-I. Kuo, W.-L. Lee, and C.-C. Lee, “Influences of temperature and stress on transmission characteristics of multilayer thin-film narrow bandpass filters,” Jpn. J. Appl. Phys. 40, 4087–4096 (2001).
[CrossRef]

Chen, X.

X. Chen, B. Li, and Y. Yang, “Theory of surface thermal lens signal in optical coating with cw modulated top-hat beam excitation,” Acta Phys. Sin. 55, 4673–4678 (2006), in Chinese.

Cimma, B.

Commandré, M.

Drouard, E.

Escoubas, L.

Fan, Z.

Flory, F.

Forest, D.

Gallais, L.

Ganau, P.

Hao, H.

H. Hao and B. Li, “Photothermal detuning for absorption measurement of optical coatings,” Appl. Opt. 47, 188–194 (2008).
[CrossRef]

H. Hao and B. Li, “Photothermal detuning: a sensitive technique for absorption measurement of optical thin films,” Proc. SPIE 6720, 67201D (2007).
[CrossRef]

He, H.

Huguet-Chantôme, P.

Hwangbo, C. K.

Kim, S.-H.

Kozlowski, M.

Z. L. Wu, M. Thomsen, P. K. Kuo, Y. Lu, C. Stolz, and M. Kozlowski, “Photothermal characterization of optical thin film coatings,” Opt. Eng. 36, 251–262 (1997).
[CrossRef]

Kuo, J.-I.

T.-C. Chen, J.-I. Kuo, W.-L. Lee, and C.-C. Lee, “Influences of temperature and stress on transmission characteristics of multilayer thin-film narrow bandpass filters,” Jpn. J. Appl. Phys. 40, 4087–4096 (2001).
[CrossRef]

Kuo, P. K.

Z. L. Wu, M. Thomsen, P. K. Kuo, Y. Lu, C. Stolz, and M. Kozlowski, “Photothermal characterization of optical thin film coatings,” Opt. Eng. 36, 251–262 (1997).
[CrossRef]

Lagrange, B.

Lee, C.-C.

T.-C. Chen, J.-I. Kuo, W.-L. Lee, and C.-C. Lee, “Influences of temperature and stress on transmission characteristics of multilayer thin-film narrow bandpass filters,” Jpn. J. Appl. Phys. 40, 4087–4096 (2001).
[CrossRef]

Lee, W.-L.

T.-C. Chen, J.-I. Kuo, W.-L. Lee, and C.-C. Lee, “Influences of temperature and stress on transmission characteristics of multilayer thin-film narrow bandpass filters,” Jpn. J. Appl. Phys. 40, 4087–4096 (2001).
[CrossRef]

Li, B.

H. Hao and B. Li, “Photothermal detuning for absorption measurement of optical coatings,” Appl. Opt. 47, 188–194 (2008).
[CrossRef]

H. Hao and B. Li, “Photothermal detuning: a sensitive technique for absorption measurement of optical thin films,” Proc. SPIE 6720, 67201D (2007).
[CrossRef]

B. Li, H. Blaschke, and D. Ristau, “Combined laser calorimetry and photothermal technique for absorption measurement of optical coatings,” Appl. Opt. 45, 5827–5831 (2006).
[CrossRef]

X. Chen, B. Li, and Y. Yang, “Theory of surface thermal lens signal in optical coating with cw modulated top-hat beam excitation,” Acta Phys. Sin. 55, 4673–4678 (2006), in Chinese.

Li, D.

Li, S.

Ling, X.

Lu, Y.

Z. L. Wu, M. Thomsen, P. K. Kuo, Y. Lu, C. Stolz, and M. Kozlowski, “Photothermal characterization of optical thin film coatings,” Opt. Eng. 36, 251–262 (1997).
[CrossRef]

Mackowski, J.-M.

Michel, C.

Montorio, J.-L.

Morgado, N.

Pignard, R.

Pinard, L.

Remillieux, A.

Ristau, D.

Shao, Y.

Stolz, C.

Z. L. Wu, M. Thomsen, P. K. Kuo, Y. Lu, C. Stolz, and M. Kozlowski, “Photothermal characterization of optical thin film coatings,” Opt. Eng. 36, 251–262 (1997).
[CrossRef]

Thomsen, M.

Z. L. Wu, M. Thomsen, P. K. Kuo, Y. Lu, C. Stolz, and M. Kozlowski, “Photothermal characterization of optical thin film coatings,” Opt. Eng. 36, 251–262 (1997).
[CrossRef]

Wu, Z. L.

Z. L. Wu, M. Thomsen, P. K. Kuo, Y. Lu, C. Stolz, and M. Kozlowski, “Photothermal characterization of optical thin film coatings,” Opt. Eng. 36, 251–262 (1997).
[CrossRef]

Yang, Y.

X. Chen, B. Li, and Y. Yang, “Theory of surface thermal lens signal in optical coating with cw modulated top-hat beam excitation,” Acta Phys. Sin. 55, 4673–4678 (2006), in Chinese.

Zhao, Y.

Zhou, M.

Acta Phys. Sin.

X. Chen, B. Li, and Y. Yang, “Theory of surface thermal lens signal in optical coating with cw modulated top-hat beam excitation,” Acta Phys. Sin. 55, 4673–4678 (2006), in Chinese.

Appl. Opt.

Jpn. J. Appl. Phys.

T.-C. Chen, J.-I. Kuo, W.-L. Lee, and C.-C. Lee, “Influences of temperature and stress on transmission characteristics of multilayer thin-film narrow bandpass filters,” Jpn. J. Appl. Phys. 40, 4087–4096 (2001).
[CrossRef]

Opt. Eng.

Z. L. Wu, M. Thomsen, P. K. Kuo, Y. Lu, C. Stolz, and M. Kozlowski, “Photothermal characterization of optical thin film coatings,” Opt. Eng. 36, 251–262 (1997).
[CrossRef]

Opt. Express

Proc. SPIE

H. Hao and B. Li, “Photothermal detuning: a sensitive technique for absorption measurement of optical thin films,” Proc. SPIE 6720, 67201D (2007).
[CrossRef]

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (4)

Fig. 1.
Fig. 1.

Experimental setup.

Fig. 2.
Fig. 2.

Absorption uniformity measurement of the film coated on the fused silica substrate with cross-shaped damage: (a) the sample, (b) 2D image, (c) 3D image.

Fig. 3.
Fig. 3.

Absorption uniformity measurement of the film coated on the fused silica substrate: (a) 2D image and (b) three-dimensional image.

Fig. 4.
Fig. 4.

Uniformity measurement of the film coated on the BK7 substrate: (a) 2D image and (b) 3D image.

Equations (1)

Equations on this page are rendered with MathJax. Learn more.

S(r)=1R0dRdT·ΔT(r)1R0dRdTA0P,

Metrics