Abstract

The removal of mid-spatial-frequency errors is a challenging issue in most subaperture polishing technologies. A novel “grolishing” technology has been developed to deal with grinding errors of spatial wavelengths from 1 to 50 mm with the help of power spectral density analysis and filter theory. This grolishing process was implemented on Zeeko’s IRP polishing machine, on which all the subsequent polishing was performed. This has greatly reduced the process time. Although different abrasive have been used, the process is self-contained. The process parameters have been optimized to leave an edge upstand of peak-to-valley of 1 μm over a width of 40 mm.

© 2012 Optical Society of America

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  1. H. Martin, J. Burge, B. Cuerden, W. Davison, J. Kingsley, R. Lutz, S. Miller, and M. Tuell, “Manufacture of a combined primary and tertiary mirror for the large synoptic survey telescope,” Proc. SPIE 7018, 70180C (2008).
    [CrossRef]
  2. D. Walker, A. Beaucamp, V. Doubrovski, C. Dunn, R. Evans, R. Freeman, G. McCanava, R. Morton, D. Riley, J. Simms, G. Yu, and X. Wei, “Commissioning of the first Precessions 1.2 m CNC polishing machines for large optics,” Proc. SPIE 6288, 62880P (2006).
    [CrossRef]
  3. C. Dunn and D. Walker, “Pseudo-random tool path for CNC sub-aperture polishing and other applications,” Opt. Express 16, 18942–18949 (2008).
    [CrossRef]
  4. X. Tonnellier, P. Morantz, P. Shore, A. Baldwin, R. Evans, and D. Walker, “Subsurface damage in precision ground ULE® and Zerodur® surfaces,” Opt. Express 15, 12197–12205 (2007).
    [CrossRef]
  5. D. Walker, A. Baldwin, R. Evans, R. Freeman, X. Wei, and G. Yu, “A quantitative comparison of three grolishing techniques for the Precessions process,” Proc. SPIE 6671, 66711H (2007).
    [CrossRef]
  6. D. Walker, R. Evans, R. Freeman, D. Riley, G. McCanvana, J. Simms, S. Wei, and G. Yu, “The precessions polishing and hybrid grolishing process-implementation in a novel 1.2 m capacity machine tool,” in Proceedings of Laser Metrology and Machine Performance VII (Lamdamap, 2007), pp. 99–108.
  7. R. Parks, P. Lam, and W. Kuhn, “The large optical generator-a progress report,” Proc. SPIE 542, 28–31 (1985).
  8. P. Leadbeater, M. Clarke, W. Wills-Moren, and T. Wilson, “A unique machine for grinding large, off-axis optical components: the OAGM 2500,” Precis. Eng. 11, 191–196 (1989).
    [CrossRef]
  9. C. Song, D. Walker, and G. Yu, “Misfit of rigid tools and interferometer sub-apertures on off-axis aspheric mirror segments,” Opt. Eng. 50, 073401 (2011).
    [CrossRef]

2011 (1)

C. Song, D. Walker, and G. Yu, “Misfit of rigid tools and interferometer sub-apertures on off-axis aspheric mirror segments,” Opt. Eng. 50, 073401 (2011).
[CrossRef]

2008 (2)

H. Martin, J. Burge, B. Cuerden, W. Davison, J. Kingsley, R. Lutz, S. Miller, and M. Tuell, “Manufacture of a combined primary and tertiary mirror for the large synoptic survey telescope,” Proc. SPIE 7018, 70180C (2008).
[CrossRef]

C. Dunn and D. Walker, “Pseudo-random tool path for CNC sub-aperture polishing and other applications,” Opt. Express 16, 18942–18949 (2008).
[CrossRef]

2007 (2)

X. Tonnellier, P. Morantz, P. Shore, A. Baldwin, R. Evans, and D. Walker, “Subsurface damage in precision ground ULE® and Zerodur® surfaces,” Opt. Express 15, 12197–12205 (2007).
[CrossRef]

D. Walker, A. Baldwin, R. Evans, R. Freeman, X. Wei, and G. Yu, “A quantitative comparison of three grolishing techniques for the Precessions process,” Proc. SPIE 6671, 66711H (2007).
[CrossRef]

2006 (1)

D. Walker, A. Beaucamp, V. Doubrovski, C. Dunn, R. Evans, R. Freeman, G. McCanava, R. Morton, D. Riley, J. Simms, G. Yu, and X. Wei, “Commissioning of the first Precessions 1.2 m CNC polishing machines for large optics,” Proc. SPIE 6288, 62880P (2006).
[CrossRef]

1989 (1)

P. Leadbeater, M. Clarke, W. Wills-Moren, and T. Wilson, “A unique machine for grinding large, off-axis optical components: the OAGM 2500,” Precis. Eng. 11, 191–196 (1989).
[CrossRef]

1985 (1)

R. Parks, P. Lam, and W. Kuhn, “The large optical generator-a progress report,” Proc. SPIE 542, 28–31 (1985).

Baldwin, A.

X. Tonnellier, P. Morantz, P. Shore, A. Baldwin, R. Evans, and D. Walker, “Subsurface damage in precision ground ULE® and Zerodur® surfaces,” Opt. Express 15, 12197–12205 (2007).
[CrossRef]

D. Walker, A. Baldwin, R. Evans, R. Freeman, X. Wei, and G. Yu, “A quantitative comparison of three grolishing techniques for the Precessions process,” Proc. SPIE 6671, 66711H (2007).
[CrossRef]

Beaucamp, A.

D. Walker, A. Beaucamp, V. Doubrovski, C. Dunn, R. Evans, R. Freeman, G. McCanava, R. Morton, D. Riley, J. Simms, G. Yu, and X. Wei, “Commissioning of the first Precessions 1.2 m CNC polishing machines for large optics,” Proc. SPIE 6288, 62880P (2006).
[CrossRef]

Burge, J.

H. Martin, J. Burge, B. Cuerden, W. Davison, J. Kingsley, R. Lutz, S. Miller, and M. Tuell, “Manufacture of a combined primary and tertiary mirror for the large synoptic survey telescope,” Proc. SPIE 7018, 70180C (2008).
[CrossRef]

Clarke, M.

P. Leadbeater, M. Clarke, W. Wills-Moren, and T. Wilson, “A unique machine for grinding large, off-axis optical components: the OAGM 2500,” Precis. Eng. 11, 191–196 (1989).
[CrossRef]

Cuerden, B.

H. Martin, J. Burge, B. Cuerden, W. Davison, J. Kingsley, R. Lutz, S. Miller, and M. Tuell, “Manufacture of a combined primary and tertiary mirror for the large synoptic survey telescope,” Proc. SPIE 7018, 70180C (2008).
[CrossRef]

Davison, W.

H. Martin, J. Burge, B. Cuerden, W. Davison, J. Kingsley, R. Lutz, S. Miller, and M. Tuell, “Manufacture of a combined primary and tertiary mirror for the large synoptic survey telescope,” Proc. SPIE 7018, 70180C (2008).
[CrossRef]

Doubrovski, V.

D. Walker, A. Beaucamp, V. Doubrovski, C. Dunn, R. Evans, R. Freeman, G. McCanava, R. Morton, D. Riley, J. Simms, G. Yu, and X. Wei, “Commissioning of the first Precessions 1.2 m CNC polishing machines for large optics,” Proc. SPIE 6288, 62880P (2006).
[CrossRef]

Dunn, C.

C. Dunn and D. Walker, “Pseudo-random tool path for CNC sub-aperture polishing and other applications,” Opt. Express 16, 18942–18949 (2008).
[CrossRef]

D. Walker, A. Beaucamp, V. Doubrovski, C. Dunn, R. Evans, R. Freeman, G. McCanava, R. Morton, D. Riley, J. Simms, G. Yu, and X. Wei, “Commissioning of the first Precessions 1.2 m CNC polishing machines for large optics,” Proc. SPIE 6288, 62880P (2006).
[CrossRef]

Evans, R.

X. Tonnellier, P. Morantz, P. Shore, A. Baldwin, R. Evans, and D. Walker, “Subsurface damage in precision ground ULE® and Zerodur® surfaces,” Opt. Express 15, 12197–12205 (2007).
[CrossRef]

D. Walker, A. Baldwin, R. Evans, R. Freeman, X. Wei, and G. Yu, “A quantitative comparison of three grolishing techniques for the Precessions process,” Proc. SPIE 6671, 66711H (2007).
[CrossRef]

D. Walker, A. Beaucamp, V. Doubrovski, C. Dunn, R. Evans, R. Freeman, G. McCanava, R. Morton, D. Riley, J. Simms, G. Yu, and X. Wei, “Commissioning of the first Precessions 1.2 m CNC polishing machines for large optics,” Proc. SPIE 6288, 62880P (2006).
[CrossRef]

D. Walker, R. Evans, R. Freeman, D. Riley, G. McCanvana, J. Simms, S. Wei, and G. Yu, “The precessions polishing and hybrid grolishing process-implementation in a novel 1.2 m capacity machine tool,” in Proceedings of Laser Metrology and Machine Performance VII (Lamdamap, 2007), pp. 99–108.

Freeman, R.

D. Walker, A. Baldwin, R. Evans, R. Freeman, X. Wei, and G. Yu, “A quantitative comparison of three grolishing techniques for the Precessions process,” Proc. SPIE 6671, 66711H (2007).
[CrossRef]

D. Walker, A. Beaucamp, V. Doubrovski, C. Dunn, R. Evans, R. Freeman, G. McCanava, R. Morton, D. Riley, J. Simms, G. Yu, and X. Wei, “Commissioning of the first Precessions 1.2 m CNC polishing machines for large optics,” Proc. SPIE 6288, 62880P (2006).
[CrossRef]

D. Walker, R. Evans, R. Freeman, D. Riley, G. McCanvana, J. Simms, S. Wei, and G. Yu, “The precessions polishing and hybrid grolishing process-implementation in a novel 1.2 m capacity machine tool,” in Proceedings of Laser Metrology and Machine Performance VII (Lamdamap, 2007), pp. 99–108.

Kingsley, J.

H. Martin, J. Burge, B. Cuerden, W. Davison, J. Kingsley, R. Lutz, S. Miller, and M. Tuell, “Manufacture of a combined primary and tertiary mirror for the large synoptic survey telescope,” Proc. SPIE 7018, 70180C (2008).
[CrossRef]

Kuhn, W.

R. Parks, P. Lam, and W. Kuhn, “The large optical generator-a progress report,” Proc. SPIE 542, 28–31 (1985).

Lam, P.

R. Parks, P. Lam, and W. Kuhn, “The large optical generator-a progress report,” Proc. SPIE 542, 28–31 (1985).

Leadbeater, P.

P. Leadbeater, M. Clarke, W. Wills-Moren, and T. Wilson, “A unique machine for grinding large, off-axis optical components: the OAGM 2500,” Precis. Eng. 11, 191–196 (1989).
[CrossRef]

Lutz, R.

H. Martin, J. Burge, B. Cuerden, W. Davison, J. Kingsley, R. Lutz, S. Miller, and M. Tuell, “Manufacture of a combined primary and tertiary mirror for the large synoptic survey telescope,” Proc. SPIE 7018, 70180C (2008).
[CrossRef]

Martin, H.

H. Martin, J. Burge, B. Cuerden, W. Davison, J. Kingsley, R. Lutz, S. Miller, and M. Tuell, “Manufacture of a combined primary and tertiary mirror for the large synoptic survey telescope,” Proc. SPIE 7018, 70180C (2008).
[CrossRef]

McCanava, G.

D. Walker, A. Beaucamp, V. Doubrovski, C. Dunn, R. Evans, R. Freeman, G. McCanava, R. Morton, D. Riley, J. Simms, G. Yu, and X. Wei, “Commissioning of the first Precessions 1.2 m CNC polishing machines for large optics,” Proc. SPIE 6288, 62880P (2006).
[CrossRef]

McCanvana, G.

D. Walker, R. Evans, R. Freeman, D. Riley, G. McCanvana, J. Simms, S. Wei, and G. Yu, “The precessions polishing and hybrid grolishing process-implementation in a novel 1.2 m capacity machine tool,” in Proceedings of Laser Metrology and Machine Performance VII (Lamdamap, 2007), pp. 99–108.

Miller, S.

H. Martin, J. Burge, B. Cuerden, W. Davison, J. Kingsley, R. Lutz, S. Miller, and M. Tuell, “Manufacture of a combined primary and tertiary mirror for the large synoptic survey telescope,” Proc. SPIE 7018, 70180C (2008).
[CrossRef]

Morantz, P.

Morton, R.

D. Walker, A. Beaucamp, V. Doubrovski, C. Dunn, R. Evans, R. Freeman, G. McCanava, R. Morton, D. Riley, J. Simms, G. Yu, and X. Wei, “Commissioning of the first Precessions 1.2 m CNC polishing machines for large optics,” Proc. SPIE 6288, 62880P (2006).
[CrossRef]

Parks, R.

R. Parks, P. Lam, and W. Kuhn, “The large optical generator-a progress report,” Proc. SPIE 542, 28–31 (1985).

Riley, D.

D. Walker, A. Beaucamp, V. Doubrovski, C. Dunn, R. Evans, R. Freeman, G. McCanava, R. Morton, D. Riley, J. Simms, G. Yu, and X. Wei, “Commissioning of the first Precessions 1.2 m CNC polishing machines for large optics,” Proc. SPIE 6288, 62880P (2006).
[CrossRef]

D. Walker, R. Evans, R. Freeman, D. Riley, G. McCanvana, J. Simms, S. Wei, and G. Yu, “The precessions polishing and hybrid grolishing process-implementation in a novel 1.2 m capacity machine tool,” in Proceedings of Laser Metrology and Machine Performance VII (Lamdamap, 2007), pp. 99–108.

Shore, P.

Simms, J.

D. Walker, A. Beaucamp, V. Doubrovski, C. Dunn, R. Evans, R. Freeman, G. McCanava, R. Morton, D. Riley, J. Simms, G. Yu, and X. Wei, “Commissioning of the first Precessions 1.2 m CNC polishing machines for large optics,” Proc. SPIE 6288, 62880P (2006).
[CrossRef]

D. Walker, R. Evans, R. Freeman, D. Riley, G. McCanvana, J. Simms, S. Wei, and G. Yu, “The precessions polishing and hybrid grolishing process-implementation in a novel 1.2 m capacity machine tool,” in Proceedings of Laser Metrology and Machine Performance VII (Lamdamap, 2007), pp. 99–108.

Song, C.

C. Song, D. Walker, and G. Yu, “Misfit of rigid tools and interferometer sub-apertures on off-axis aspheric mirror segments,” Opt. Eng. 50, 073401 (2011).
[CrossRef]

Tonnellier, X.

Tuell, M.

H. Martin, J. Burge, B. Cuerden, W. Davison, J. Kingsley, R. Lutz, S. Miller, and M. Tuell, “Manufacture of a combined primary and tertiary mirror for the large synoptic survey telescope,” Proc. SPIE 7018, 70180C (2008).
[CrossRef]

Walker, D.

C. Song, D. Walker, and G. Yu, “Misfit of rigid tools and interferometer sub-apertures on off-axis aspheric mirror segments,” Opt. Eng. 50, 073401 (2011).
[CrossRef]

C. Dunn and D. Walker, “Pseudo-random tool path for CNC sub-aperture polishing and other applications,” Opt. Express 16, 18942–18949 (2008).
[CrossRef]

X. Tonnellier, P. Morantz, P. Shore, A. Baldwin, R. Evans, and D. Walker, “Subsurface damage in precision ground ULE® and Zerodur® surfaces,” Opt. Express 15, 12197–12205 (2007).
[CrossRef]

D. Walker, A. Baldwin, R. Evans, R. Freeman, X. Wei, and G. Yu, “A quantitative comparison of three grolishing techniques for the Precessions process,” Proc. SPIE 6671, 66711H (2007).
[CrossRef]

D. Walker, A. Beaucamp, V. Doubrovski, C. Dunn, R. Evans, R. Freeman, G. McCanava, R. Morton, D. Riley, J. Simms, G. Yu, and X. Wei, “Commissioning of the first Precessions 1.2 m CNC polishing machines for large optics,” Proc. SPIE 6288, 62880P (2006).
[CrossRef]

D. Walker, R. Evans, R. Freeman, D. Riley, G. McCanvana, J. Simms, S. Wei, and G. Yu, “The precessions polishing and hybrid grolishing process-implementation in a novel 1.2 m capacity machine tool,” in Proceedings of Laser Metrology and Machine Performance VII (Lamdamap, 2007), pp. 99–108.

Wei, S.

D. Walker, R. Evans, R. Freeman, D. Riley, G. McCanvana, J. Simms, S. Wei, and G. Yu, “The precessions polishing and hybrid grolishing process-implementation in a novel 1.2 m capacity machine tool,” in Proceedings of Laser Metrology and Machine Performance VII (Lamdamap, 2007), pp. 99–108.

Wei, X.

D. Walker, A. Baldwin, R. Evans, R. Freeman, X. Wei, and G. Yu, “A quantitative comparison of three grolishing techniques for the Precessions process,” Proc. SPIE 6671, 66711H (2007).
[CrossRef]

D. Walker, A. Beaucamp, V. Doubrovski, C. Dunn, R. Evans, R. Freeman, G. McCanava, R. Morton, D. Riley, J. Simms, G. Yu, and X. Wei, “Commissioning of the first Precessions 1.2 m CNC polishing machines for large optics,” Proc. SPIE 6288, 62880P (2006).
[CrossRef]

Wills-Moren, W.

P. Leadbeater, M. Clarke, W. Wills-Moren, and T. Wilson, “A unique machine for grinding large, off-axis optical components: the OAGM 2500,” Precis. Eng. 11, 191–196 (1989).
[CrossRef]

Wilson, T.

P. Leadbeater, M. Clarke, W. Wills-Moren, and T. Wilson, “A unique machine for grinding large, off-axis optical components: the OAGM 2500,” Precis. Eng. 11, 191–196 (1989).
[CrossRef]

Yu, G.

C. Song, D. Walker, and G. Yu, “Misfit of rigid tools and interferometer sub-apertures on off-axis aspheric mirror segments,” Opt. Eng. 50, 073401 (2011).
[CrossRef]

D. Walker, A. Baldwin, R. Evans, R. Freeman, X. Wei, and G. Yu, “A quantitative comparison of three grolishing techniques for the Precessions process,” Proc. SPIE 6671, 66711H (2007).
[CrossRef]

D. Walker, A. Beaucamp, V. Doubrovski, C. Dunn, R. Evans, R. Freeman, G. McCanava, R. Morton, D. Riley, J. Simms, G. Yu, and X. Wei, “Commissioning of the first Precessions 1.2 m CNC polishing machines for large optics,” Proc. SPIE 6288, 62880P (2006).
[CrossRef]

D. Walker, R. Evans, R. Freeman, D. Riley, G. McCanvana, J. Simms, S. Wei, and G. Yu, “The precessions polishing and hybrid grolishing process-implementation in a novel 1.2 m capacity machine tool,” in Proceedings of Laser Metrology and Machine Performance VII (Lamdamap, 2007), pp. 99–108.

Opt. Eng. (1)

C. Song, D. Walker, and G. Yu, “Misfit of rigid tools and interferometer sub-apertures on off-axis aspheric mirror segments,” Opt. Eng. 50, 073401 (2011).
[CrossRef]

Opt. Express (2)

Precis. Eng. (1)

P. Leadbeater, M. Clarke, W. Wills-Moren, and T. Wilson, “A unique machine for grinding large, off-axis optical components: the OAGM 2500,” Precis. Eng. 11, 191–196 (1989).
[CrossRef]

Proc. SPIE (4)

R. Parks, P. Lam, and W. Kuhn, “The large optical generator-a progress report,” Proc. SPIE 542, 28–31 (1985).

D. Walker, A. Baldwin, R. Evans, R. Freeman, X. Wei, and G. Yu, “A quantitative comparison of three grolishing techniques for the Precessions process,” Proc. SPIE 6671, 66711H (2007).
[CrossRef]

H. Martin, J. Burge, B. Cuerden, W. Davison, J. Kingsley, R. Lutz, S. Miller, and M. Tuell, “Manufacture of a combined primary and tertiary mirror for the large synoptic survey telescope,” Proc. SPIE 7018, 70180C (2008).
[CrossRef]

D. Walker, A. Beaucamp, V. Doubrovski, C. Dunn, R. Evans, R. Freeman, G. McCanava, R. Morton, D. Riley, J. Simms, G. Yu, and X. Wei, “Commissioning of the first Precessions 1.2 m CNC polishing machines for large optics,” Proc. SPIE 6288, 62880P (2006).
[CrossRef]

Other (1)

D. Walker, R. Evans, R. Freeman, D. Riley, G. McCanvana, J. Simms, S. Wei, and G. Yu, “The precessions polishing and hybrid grolishing process-implementation in a novel 1.2 m capacity machine tool,” in Proceedings of Laser Metrology and Machine Performance VII (Lamdamap, 2007), pp. 99–108.

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