Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Highly precise micro-retroreflector array fabricated by the LIGA process and its application as tapped delay line filter

Not Accessible

Your library or personal account may give you access

Abstract

We report on the fabrication of a one-dimensional micro-retroreflector array with a pitch of 100 μm. The array was fabricated by x-ray lithography and the lithographie, galvanik und abformung (LIGA) process in a 1 mm thick poly(methyl methacrylate) (PMMA) layer and subsequently covered with Au. The area of the array is 1mm×10mm. The high precision of the LIGA-based fabrication process allows one to use the element in spectrometers. Here, it is suggested to apply it to the implementation of a transversal filter for femtosecond pulses. We present a theoretical description of the performance of the retroreflector array as a filtering device and show experimental results.

© 2012 Optical Society of America

Full Article  |  PDF Article
More Like This
Application of three-dimensional micro-optical components formed by lithography, electroforming, and plastic molding

K.-H. Brenner, M. Kufner, S. Kufner, J. Moisel, A. Müller, S. Sinzinger, M. Testorf, J. Göttert, and J. Mohr
Appl. Opt. 32(32) 6464-6469 (1993)

Acousto-optic tapped delay-line filter

Robert J. Berinato
Appl. Opt. 32(29) 5797-5809 (1993)

Micro-optical elements fabricated by metal-transparent-metallic-oxides grayscale photomasks

Jianming Zhang, Chuanfei Guo, Yongsheng Wang, Junjie Miao, Ye Tian, and Qian Liu
Appl. Opt. 51(27) 6606-6611 (2012)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (17)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (9)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved