Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Sensitivity analysis of thin-film thickness measurement by vertical scanning white-light interferometry

Not Accessible

Your library or personal account may give you access

Abstract

The spectral nonlinear phase method and the Fourier amplitude method have been applied to measure the thin-film thickness profile in vertical scanning white-light interferometry (VSWLI). However, both the methods have their disadvantages, and accordingly their applications are limited. In the paper we have investigated the dependence of the sensitivities of both the methods on the thin-film thickness and refractive index, the objective numerical aperture, and the incident light spectral range of VSWLI. The relation of the Fresnel reflection coefficients on the wavelength effect is also discussed. Some important research results reveal that the combination of both Fourier amplitude and nonlinear phase methods may provide a new approach to improve the VSWLI measurement sensitivity for thin-film thickness profile.

© 2012 Optical Society of America

Full Article  |  PDF Article
More Like This
Application of white-light scanning interferometer on transparent thin-film measurement

Meng-Chi Li, Der-Shen Wan, and Cheng-Chung Lee
Appl. Opt. 51(36) 8579-8586 (2012)

Thickness-profile measurement of transparent thin-film layers by white-light scanning interferometry

Seung-Woo Kim and Gee-Hong Kim
Appl. Opt. 38(28) 5968-5973 (1999)

Spectrally resolved phase-shifting interferometry of transparent thin films: sensitivity of thickness measurements

Sanjit K. Debnath, Mahendra P. Kothiyal, Joanna Schmit, and Parameswaran Hariharan
Appl. Opt. 45(34) 8636-8640 (2006)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (10)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (20)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved