Abstract

A virtually imaged phased array (VIPA) installed optical interferometer has been expanded to the two-dimensional (2D) tomography from the previous one-dimensional single-shot imaging technique with keeping the resolution and the measurement range. A single-shot measurement has been realized by a spatial phase modulator installed in the optical interferometer and tracing the delay time to pixel numbers on a 2D charge-coupled device (CCD) image sensor. The flexibility of the sample position was experimentally confirmed to be >25mm, in relation to the VIPA coherency, for which the number of the interference order was confirmed to be 35. As a demonstration, a surface profile of stacked gauge blocks was observed. The repeatability of the surface position was 5 μm for the surface profilometry. In addition, a multilayer structure was observed using a glass plate. The experimental resolution was 53 μm when the amplified spontaneous emission light generated by the optical fiber amplifier was used for the light source. The single-shot measurement was confirmed by the 2D-CCD at a frame rate of 30 frames per second (FPS), and it provided evidence that the 2D scanless profilometry was successfully achieved using the VIPA optical device.

© 2012 Optical Society of America

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References

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2011 (1)

T. Shioda, T. Morisaki, and H. Ono, “Single-shot tomography by means of VIPA and spatial phase modulator installed optical interferometer,” Opt. Commun. 284, 144–147(2011).
[CrossRef]

2009 (1)

S. Choi, N. Tamura, K. Kashiwagi, T. Shioda, Y. Tanaka, and T. Kurokawa, “Supercontinuum comb generation using optical pulse synthesizer and highly nonlinear dispersion-shifted fiber,” Jpn. J. Appl. Phys. 48, 09LF01 (2009).
[CrossRef]

2007 (1)

S. Choi, T. Shioda, Y. Tanaka, and T. Kurokawa, “Frequency-comb-based interference microscope with a line-type image sensor,” Jpn. J. Appl. Phys 46, 6842–6847 (2007).
[CrossRef]

2006 (2)

Y. Watanabe, K. Yamada, and M. Sato, “In vivo nonmechanical scanning grating-generated optical coherence tomography using an InGaAs digital camera,” Opt. Commun. 261, 376–380 (2006).
[CrossRef]

S. Choi, M. Yamamoto, D. Moteki, T. Shioda, Y. Tanaka, and T. Kurokawa, “Frequency-comb-based interferometer for profilometry and tomography,” Opt. Lett. 31, 1976–1978 (2006).
[CrossRef]

2003 (1)

2000 (1)

1998 (1)

1996 (1)

1994 (1)

Alfano, R. R.

Choi, S.

S. Choi, N. Tamura, K. Kashiwagi, T. Shioda, Y. Tanaka, and T. Kurokawa, “Supercontinuum comb generation using optical pulse synthesizer and highly nonlinear dispersion-shifted fiber,” Jpn. J. Appl. Phys. 48, 09LF01 (2009).
[CrossRef]

S. Choi, T. Shioda, Y. Tanaka, and T. Kurokawa, “Frequency-comb-based interference microscope with a line-type image sensor,” Jpn. J. Appl. Phys 46, 6842–6847 (2007).
[CrossRef]

S. Choi, M. Yamamoto, D. Moteki, T. Shioda, Y. Tanaka, and T. Kurokawa, “Frequency-comb-based interferometer for profilometry and tomography,” Opt. Lett. 31, 1976–1978 (2006).
[CrossRef]

de Groot, P.

Deck, L.

Fercher, A. F.

Gilerson, A.

Hitzenberger, C. K.

Kashiwagi, K.

S. Choi, N. Tamura, K. Kashiwagi, T. Shioda, Y. Tanaka, and T. Kurokawa, “Supercontinuum comb generation using optical pulse synthesizer and highly nonlinear dispersion-shifted fiber,” Jpn. J. Appl. Phys. 48, 09LF01 (2009).
[CrossRef]

Kowalczyk, A.

Kurokawa, T.

S. Choi, N. Tamura, K. Kashiwagi, T. Shioda, Y. Tanaka, and T. Kurokawa, “Supercontinuum comb generation using optical pulse synthesizer and highly nonlinear dispersion-shifted fiber,” Jpn. J. Appl. Phys. 48, 09LF01 (2009).
[CrossRef]

S. Choi, T. Shioda, Y. Tanaka, and T. Kurokawa, “Frequency-comb-based interference microscope with a line-type image sensor,” Jpn. J. Appl. Phys 46, 6842–6847 (2007).
[CrossRef]

S. Choi, M. Yamamoto, D. Moteki, T. Shioda, Y. Tanaka, and T. Kurokawa, “Frequency-comb-based interferometer for profilometry and tomography,” Opt. Lett. 31, 1976–1978 (2006).
[CrossRef]

Leitgeb, R.

Lin, C.

Morisaki, T.

T. Shioda, T. Morisaki, and H. Ono, “Single-shot tomography by means of VIPA and spatial phase modulator installed optical interferometer,” Opt. Commun. 284, 144–147(2011).
[CrossRef]

Moteki, D.

Ono, H.

T. Shioda, T. Morisaki, and H. Ono, “Single-shot tomography by means of VIPA and spatial phase modulator installed optical interferometer,” Opt. Commun. 284, 144–147(2011).
[CrossRef]

Sato, M.

Y. Watanabe, K. Yamada, and M. Sato, “In vivo nonmechanical scanning grating-generated optical coherence tomography using an InGaAs digital camera,” Opt. Commun. 261, 376–380 (2006).
[CrossRef]

Shioda, T.

T. Shioda, T. Morisaki, and H. Ono, “Single-shot tomography by means of VIPA and spatial phase modulator installed optical interferometer,” Opt. Commun. 284, 144–147(2011).
[CrossRef]

S. Choi, N. Tamura, K. Kashiwagi, T. Shioda, Y. Tanaka, and T. Kurokawa, “Supercontinuum comb generation using optical pulse synthesizer and highly nonlinear dispersion-shifted fiber,” Jpn. J. Appl. Phys. 48, 09LF01 (2009).
[CrossRef]

S. Choi, T. Shioda, Y. Tanaka, and T. Kurokawa, “Frequency-comb-based interference microscope with a line-type image sensor,” Jpn. J. Appl. Phys 46, 6842–6847 (2007).
[CrossRef]

S. Choi, M. Yamamoto, D. Moteki, T. Shioda, Y. Tanaka, and T. Kurokawa, “Frequency-comb-based interferometer for profilometry and tomography,” Opt. Lett. 31, 1976–1978 (2006).
[CrossRef]

Shirasaki, M.

Sticker, M.

Tamura, N.

S. Choi, N. Tamura, K. Kashiwagi, T. Shioda, Y. Tanaka, and T. Kurokawa, “Supercontinuum comb generation using optical pulse synthesizer and highly nonlinear dispersion-shifted fiber,” Jpn. J. Appl. Phys. 48, 09LF01 (2009).
[CrossRef]

Tanaka, Y.

S. Choi, N. Tamura, K. Kashiwagi, T. Shioda, Y. Tanaka, and T. Kurokawa, “Supercontinuum comb generation using optical pulse synthesizer and highly nonlinear dispersion-shifted fiber,” Jpn. J. Appl. Phys. 48, 09LF01 (2009).
[CrossRef]

S. Choi, T. Shioda, Y. Tanaka, and T. Kurokawa, “Frequency-comb-based interference microscope with a line-type image sensor,” Jpn. J. Appl. Phys 46, 6842–6847 (2007).
[CrossRef]

S. Choi, M. Yamamoto, D. Moteki, T. Shioda, Y. Tanaka, and T. Kurokawa, “Frequency-comb-based interferometer for profilometry and tomography,” Opt. Lett. 31, 1976–1978 (2006).
[CrossRef]

Vega, A.

Watanabe, Y.

Y. Watanabe, K. Yamada, and M. Sato, “In vivo nonmechanical scanning grating-generated optical coherence tomography using an InGaAs digital camera,” Opt. Commun. 261, 376–380 (2006).
[CrossRef]

Weiner, A. M.

Wojtkowski, M.

Yamada, K.

Y. Watanabe, K. Yamada, and M. Sato, “In vivo nonmechanical scanning grating-generated optical coherence tomography using an InGaAs digital camera,” Opt. Commun. 261, 376–380 (2006).
[CrossRef]

Yamamoto, M.

Zeylikovich, I.

Appl. Opt. (2)

Jpn. J. Appl. Phys (1)

S. Choi, T. Shioda, Y. Tanaka, and T. Kurokawa, “Frequency-comb-based interference microscope with a line-type image sensor,” Jpn. J. Appl. Phys 46, 6842–6847 (2007).
[CrossRef]

Jpn. J. Appl. Phys. (1)

S. Choi, N. Tamura, K. Kashiwagi, T. Shioda, Y. Tanaka, and T. Kurokawa, “Supercontinuum comb generation using optical pulse synthesizer and highly nonlinear dispersion-shifted fiber,” Jpn. J. Appl. Phys. 48, 09LF01 (2009).
[CrossRef]

Opt. Commun. (2)

Y. Watanabe, K. Yamada, and M. Sato, “In vivo nonmechanical scanning grating-generated optical coherence tomography using an InGaAs digital camera,” Opt. Commun. 261, 376–380 (2006).
[CrossRef]

T. Shioda, T. Morisaki, and H. Ono, “Single-shot tomography by means of VIPA and spatial phase modulator installed optical interferometer,” Opt. Commun. 284, 144–147(2011).
[CrossRef]

Opt. Lett. (4)

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Figures (13)

Fig. 1.
Fig. 1.

Schematic of the VIPA installed scanless 2D interferometer.

Fig. 2.
Fig. 2.

Photograph and operational image of 2D-VIPA are described. The output spectrum becomes the optical frequency comb.

Fig. 3.
Fig. 3.

(a) Schematic of the experimental setup for the VIPA characterization experiment is drawn. (b) Output trace depending on incident light frequency is experimentally obtained by CCD. The image consisted of individually observed vertical lines that were obtained as the incident light frequency was scanned. (c) Typical comb spectrum of a line drawn in (b).

Fig. 4.
Fig. 4.

Experimental setup for scanless 2D tomography and sample position-free tomography.

Fig. 5.
Fig. 5.

Interference signal when the flat mirror was used as the sample. The envelope of the peak profile is a Fourier-transformed profile of the light source spectrum that produces the tomographic resolution.

Fig. 6.
Fig. 6.

Typical relationship between the relative optical path length (depth direction) and the pixel number of the CCD.

Fig. 7.
Fig. 7.

Observed peak position is plotted against the sample mirror position. 35 interference orders were repeatedly appeared. Each solid line is the linear fitting result from each interference order.

Fig. 8.
Fig. 8.

Measured tomographic image of the superimposed image, in which three stacked gauge blocks are schemed from a side view.

Fig. 9.
Fig. 9.

Two vertical sections of different neighbor steps shown in Fig. 8.

Fig. 10.
Fig. 10.

Line profile linked with the peak positions of Fig. 8.

Fig. 11.
Fig. 11.

Tomographic image of a flat glass plate with an optical thickness of approximately 210 μm.

Fig. 12.
Fig. 12.

Tomographic section of the image in Fig. 10.

Fig. 13.
Fig. 13.

Line profile linked with the peak positions of Fig. 11.

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V(cτ)g(cτ)eiω0t{f(cτ)*Nδ(cτNcτ0)},
FSR=c/(2dn2sin2θ),

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