Abstract

We introduce a relatively simple and efficient optical technique to measure nanoscale displacement based on visibility variations of the Fresnel diffraction fringes from a two-dimensional phase step. In this paper we use our technique to measure electromechanical expansions by a thin piezoelectric ceramic and also thermal changes in the diameter of a tungsten wire. Early results provide convincing evidence that sensitivity up to a few nanometers can be achieved, and our technique has the potential to be used as a nanodisplacement probe.

© 2012 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Subnanometer resolution displacement sensor based on a grating interferometric cavity with intensity compensation and phase modulation

Qianbo Lu, Chen Wang, Jian Bai, Kaiwei Wang, Wenxiu Lian, Shuqi Lou, Xufen Jiao, and Guoguang Yang
Appl. Opt. 54(13) 4188-4196 (2015)

Displacement sensor for indoor machine calibrations

Asloob Ahmad Mudassar and Saira Butt
Appl. Opt. 52(15) 3461-3472 (2013)

Development of a laser synthetic wavelength interferometer for large displacement measurement with nanometer accuracy

Benyong Chen, Liping Yan, Xiguo Yao, Tao Yang, Dacheng Li, Wenjun Dong, Chaorong Li, and Weihua Tang
Opt. Express 18(3) 3000-3010 (2010)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (7)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (21)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription