Abstract

This study presents a special $k$-type (45°, 135°) microprism structure design for the lateral-type semiconductor laser of optical systems. This study combines front- and back-side inclined exposure technology to develop a $k$-type microprism structure and replaces the optical prism manufactured through traditional machine processing or injection molding with a new polymer (thick-film negative photoresists) micro-optical prism structure. To obtain the optimal structural surface roughness (12–15 nm at $400\mathrm{\mu m}\times 400\mathrm{\mu m}$ area), the percentage of polymer material loss caused by the solvent was controlled. This roughness level meets Blu-ray specifications ($\lambda /10$, $\lambda =405\mathrm{nm}$).

©2012 Optical Society of America

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