Abstract

Three-dimensional (3D) shape reconstructions and metrology measurements are often limited by depth-of-field constraints. Current focus-detection-based techniques are insufficient to profile out-of-focus 3D objects with high axial accuracy. Extended-focus imaging (EFI) techniques can improve the range and precision of such measurements. By incorporating digital refocusing with multiwavelength interferometry, a holographic imaging solution is presented in this paper to accurately measure 3D objects over a large depth range. Accuracy and repeatability of the proposed EFI technique are validated by digital simulations and refocusing experiments. A reconstruction example demonstrates the feasibility of high-precision 3D measurements of objects deeper than the system’s classical depth of field.

© 2012 Optical Society of America

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