R. Berger, T. Sure, and W. Osten, “Measurement errors of mirrorlike, tilted objects in white-light interferometry,” Proc. SPIE 6616, 66162E (2007).

[Crossref]

J. Niehues and P. Lehmann, “Dual-wavelength vertical scanning low-coherence interference microscope,” Proc. SPIE 6616, 661606 (2007).

[Crossref]

J. Niehues, P. Lehmann, and K. Bobey, “Dual-wavelength vertical scanning low-coherence interferometric microscope,” Appl. Opt. 46, 7141–7148 (2007).

[Crossref]

P. Lehmann, “Systematic effects in coherence peak and phase evaluation of signals obtained with a vertical scanning white-light Mirau interferometer,” Proc. SPIE 6188, 618811 (2006).

[Crossref]

P. Sandoz, R. Devillers, and A. Plata, “Unambiguous profilometry by fringe-order identification in white-light phase-shifting interferometry,” J. Mod. Opt. 44, 519–534 (1997).

[Crossref]

P. de Groot and L. Deck, “Surface profiling by analysis of white-light interferograms in the spatial frequency domain,” J. Mod. Opt. 42, 389–401 (1995).

[Crossref]

R. Berger, T. Sure, and W. Osten, “Measurement errors of mirrorlike, tilted objects in white-light interferometry,” Proc. SPIE 6616, 66162E (2007).

[Crossref]

P. de Groot, X. C. de Lega, J. Kramer, and M. Turzhitsky, “Determination of fringe order in white-light interference microscopy,” Appl. Opt. 41, 4571–4578 (2002).

[Crossref]

P. de Groot and L. Deck, “Surface profiling by analysis of white-light interferograms in the spatial frequency domain,” J. Mod. Opt. 42, 389–401 (1995).

[Crossref]

P. de Groot and L. Deck, “Three-dimensional imaging by sub-Nyquist sampling of white-light interferograms,” Opt. Lett. 18, 1462–1464 (1993).

[Crossref]

P. de Groot, X. C. de Lega, J. Kramer, and M. Turzhitsky, “High precision surface inspection on the microscale by broadband interferometry,” in Fringe 2001: The 4th International Workshop on Automatic Processing of Fringe Patterns, W. Osten and W. Jüptner, eds. (2001), pp. 47–55.

P. de Groot, X. C. de Lega, J. Kramer, and M. Turzhitsky, “Determination of fringe order in white-light interference microscopy,” Appl. Opt. 41, 4571–4578 (2002).

[Crossref]

P. de Groot, X. C. de Lega, J. Kramer, and M. Turzhitsky, “High precision surface inspection on the microscale by broadband interferometry,” in Fringe 2001: The 4th International Workshop on Automatic Processing of Fringe Patterns, W. Osten and W. Jüptner, eds. (2001), pp. 47–55.

P. Sandoz, R. Devillers, and A. Plata, “Unambiguous profilometry by fringe-order identification in white-light phase-shifting interferometry,” J. Mod. Opt. 44, 519–534 (1997).

[Crossref]

P. de Groot, X. C. de Lega, J. Kramer, and M. Turzhitsky, “Determination of fringe order in white-light interference microscopy,” Appl. Opt. 41, 4571–4578 (2002).

[Crossref]

P. de Groot, X. C. de Lega, J. Kramer, and M. Turzhitsky, “High precision surface inspection on the microscale by broadband interferometry,” in Fringe 2001: The 4th International Workshop on Automatic Processing of Fringe Patterns, W. Osten and W. Jüptner, eds. (2001), pp. 47–55.

J. Niehues and P. Lehmann, “Dual-wavelength vertical scanning low-coherence interference microscope,” Proc. SPIE 6616, 661606 (2007).

[Crossref]

J. Niehues, P. Lehmann, and K. Bobey, “Dual-wavelength vertical scanning low-coherence interferometric microscope,” Appl. Opt. 46, 7141–7148 (2007).

[Crossref]

P. Lehmann, “Systematic effects in coherence peak and phase evaluation of signals obtained with a vertical scanning white-light Mirau interferometer,” Proc. SPIE 6188, 618811 (2006).

[Crossref]

R. Berger, T. Sure, and W. Osten, “Measurement errors of mirrorlike, tilted objects in white-light interferometry,” Proc. SPIE 6616, 66162E (2007).

[Crossref]

P. Sandoz, R. Devillers, and A. Plata, “Unambiguous profilometry by fringe-order identification in white-light phase-shifting interferometry,” J. Mod. Opt. 44, 519–534 (1997).

[Crossref]

P. Sandoz, R. Devillers, and A. Plata, “Unambiguous profilometry by fringe-order identification in white-light phase-shifting interferometry,” J. Mod. Opt. 44, 519–534 (1997).

[Crossref]

R. Berger, T. Sure, and W. Osten, “Measurement errors of mirrorlike, tilted objects in white-light interferometry,” Proc. SPIE 6616, 66162E (2007).

[Crossref]

P. de Groot, X. C. de Lega, J. Kramer, and M. Turzhitsky, “Determination of fringe order in white-light interference microscopy,” Appl. Opt. 41, 4571–4578 (2002).

[Crossref]

P. de Groot, X. C. de Lega, J. Kramer, and M. Turzhitsky, “High precision surface inspection on the microscale by broadband interferometry,” in Fringe 2001: The 4th International Workshop on Automatic Processing of Fringe Patterns, W. Osten and W. Jüptner, eds. (2001), pp. 47–55.

P. A. Floumoy, R. W. McClure, and G. Wyntjes, “White-light interferometric thickness gauge,” Appl. Opt. 11, 1907–1915 (1972).

[Crossref]

T. Dresel, G. Häusler, and H. Venzke, “Three-dimensional sensing of rough surfaces by coherence radar,” Appl. Opt. 31, 919–925 (1992).

[Crossref]

G. S. Kino and S. S. C. Chim, “Mirau correlation microscope,” Appl. Opt. 29, 3775–3783 (1990).

[Crossref]

P. J. Caber, “Interferometric profiler for rough surfaces,” Appl. Opt. 32, 3438–3441 (1993).

[Crossref]

A. Harasaki, J. Schmit, and J. C. Wyant, “Improved vertical scanning interferometry,” Appl. Opt. 39, 2107–2115 (2000).

[Crossref]

A. Harasaki and J. C. Wyant, “Fringe modulation skewing effect in white-light vertical scanning interferometry,” Appl. Opt. 39, 2101–2106 (2000).

[Crossref]

J. Niehues, P. Lehmann, and K. Bobey, “Dual-wavelength vertical scanning low-coherence interferometric microscope,” Appl. Opt. 46, 7141–7148 (2007).

[Crossref]

P. de Groot, X. C. de Lega, J. Kramer, and M. Turzhitsky, “Determination of fringe order in white-light interference microscopy,” Appl. Opt. 41, 4571–4578 (2002).

[Crossref]

P. de Groot and L. Deck, “Surface profiling by analysis of white-light interferograms in the spatial frequency domain,” J. Mod. Opt. 42, 389–401 (1995).

[Crossref]

P. Sandoz, R. Devillers, and A. Plata, “Unambiguous profilometry by fringe-order identification in white-light phase-shifting interferometry,” J. Mod. Opt. 44, 519–534 (1997).

[Crossref]

P. Lehmann, “Systematic effects in coherence peak and phase evaluation of signals obtained with a vertical scanning white-light Mirau interferometer,” Proc. SPIE 6188, 618811 (2006).

[Crossref]

R. Berger, T. Sure, and W. Osten, “Measurement errors of mirrorlike, tilted objects in white-light interferometry,” Proc. SPIE 6616, 66162E (2007).

[Crossref]

J. Niehues and P. Lehmann, “Dual-wavelength vertical scanning low-coherence interference microscope,” Proc. SPIE 6616, 661606 (2007).

[Crossref]

P. de Groot, X. C. de Lega, J. Kramer, and M. Turzhitsky, “High precision surface inspection on the microscale by broadband interferometry,” in Fringe 2001: The 4th International Workshop on Automatic Processing of Fringe Patterns, W. Osten and W. Jüptner, eds. (2001), pp. 47–55.