Optimization of scanning strategy of digital Shack–Hartmann wavefront
                sensing

Wenjiang Guo; Liping Zhao; Xiang Li; I-Ming Chen

doi:10.1364/AO.51.000121

Optimization of scanning strategy of digital Shack–Hartmann wavefront sensing

Wenjiang Guo, Liping Zhao, Xiang Li, and I-Ming Chen

Applied Optics
Vol. 51,
Issue 1,
pp. 121-125
(2012)
•https://doi.org/10.1364/AO.51.000121

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Wenjiang Guo, Liping Zhao, Xiang Li, and I-Ming Chen, "Optimization of scanning strategy of digital Shack–Hartmann wavefront sensing," Appl. Opt. 51, 121-125 (2012)

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Related Topics
Table of Contents Category
- Imaging Systems
Optics & Photonics Topics
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The topics in this list come from the OSA Optics and Photonics Topics applied to this article.
Previously assigned OCIS codes
- Wavefront encoding (110.7348)
- Scanners (120.5800)

About this Article
History
- Original Manuscript: July 6, 2011
- Revised Manuscript: October 6, 2011
- Manuscript Accepted: October 6, 2011
- Published: December 23, 2011

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Abstract

In the traditional Shack–Hartmann wavefront sensing (SHWS) system, a lenslet array with a bigger configuration is desired to achieve a higher lateral resolution. However, practical implementation limits the configuration and this parameter is contradicted with the measurement range. We have proposed a digital scanning technique by making use of the high flexibility of a spatial light modulator to sample the reflected wavefront [X. Li, L. P. Zhao, Z. P. Fang, and C. S. Tan, “Improve lateral resolution in wavefront sensing with digital scanning technique,” in Asia-Pacific Conference of Transducers and Micro-Nano Technology (2006)]. The lenslet array pattern is programmed to laterally scan the whole aperture. In this paper, the methodology to optimize the scanning step for the purpose of form measurement is proposed. The correctness and effectiveness are demonstrated in numerical simulation and experimental investigation.

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Lenslet diameter (mm)	0.96	1.44	1.6	2.4	2.88	4.8
Lenslets per image (along the $x$ direction only)	15	10	9	6	5	3

Lenslet diameter (mm)	0.96	1.44	1.6	2.4	2.88	4.8
Average optimum number of sampling points	65.0	42.9	35.8	25.0	18.9	9.7
Standard deviation	1.3	1.2	0.5	1.0	0.7	1.2
Optimum scanning step	4	4	4	4	4	4

Scanning steps		0	4	50
Surface as shown in Fig. 3a and Fig. 3b	Relative $ε_{ms}$ (µm)	0.33	0.146	0.066
Surface as shown in Fig. 3a and Fig. 3b	Improvement (%)		55.5	55.5
Surface as shown in Fig. 3c and Fig. 3d	Relative $ε_{ms}$ (µm)	0.8548	0.7231	0.631
Surface as shown in Fig. 3c and Fig. 3d	Improvement (%)		15.5	12.7

Lenslet diameter (mm)	0.96	1.44	1.6	2.4	2.88	4.8
Lenslets per image (along the $x$ direction only)	15	10	9	6	5	3

Lenslet diameter (mm)	0.96	1.44	1.6	2.4	2.88	4.8
Average optimum number of sampling points	65.0	42.9	35.8	25.0	18.9	9.7
Standard deviation	1.3	1.2	0.5	1.0	0.7	1.2
Optimum scanning step	4	4	4	4	4	4

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