Abstract

Material mixtures offer new possibilities for synthesizing coating materials with tailored optical and mechanical properties. We present experimental results on mixtures of HfO2, ZrO2, and Al2O3, pursuing applications in UV coating technology, while the mixtures are prepared by magnetron sputtering, ion beam sputtering, plasma ion-assisted deposition (PIAD), and electron beam evaporation without assistance. The properties investigated include the refractive index, optical gap, thermal shift, and mech anical stress. The first high reflectors for UV applications have been deposited by PIAD.

© 2011 Optical Society of America

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    [CrossRef] [PubMed]
  8. M. Bonvalot, M. Kahn, C. Vallée, E. Gourvest, H. Abed, C. Jorel, and C. Dubourdieu, “Combined spectroscopic ellipsometry and attenuated total reflection analyses of Al2O3/HfO2 nanolaminates,” Thin Solid Films 518, 5057–5060 (2010).
    [CrossRef]
  9. S. Bruns, M. Vergöhl, O. Werner, and T. Wallendorf, “High rate deposition of mixed oxides by controlled reactive magnetron-sputtering from metallic targets,” in Proceedings of ICCG8 (2010), Vol. 4.11, pp. 185–189.
  10. M. Lappschies, B. Görtz, and D. Ristau, “Application of optical broad band monitoring to quasi-rugate filters by ion beam sputtering,” Appl. Opt. 45, 1502–1506 (2006).
    [CrossRef] [PubMed]
  11. S. Wilbrandt, O. Stenzel, and N. Kaiser, “All-optical in situ analysis of PIAD deposition processes,” Proc. SPIE 7101, 71010D (2008).
    [CrossRef]
  12. O. Stenzel, S. Wilbrandt, K. Friedrich, and N. Kaiser, “Realistische Modellierung der NIR/VIS/UV-optischen Konstanten dünner optischer Schichten im Rahmen des Oszillatormodells,” Vak. Forsch. Prax. 21, 15–23 (2009).
    [CrossRef]
  13. O. Stenzel, S. Wilbrandt, N. Kaiser, M. Vinnichenko, F. Munnik, A. Kolitsch, A. Chuvilin, U. Kaiser, J. Ebert, S. Jakobs, A. Kaless, S. Wüthrich, O. Treichel, B. Wunderlich, M. Bitzer, and M. Grüthrich, “The correlation between mechanical stress, thermal shift and refractive index in HfO2, Nb2O5, Ta2O5 and SiO2 layers and its relation to the layer porosity,” Thin Solid Films 517, 6058–6068 (2009).
    [CrossRef]
  14. K. Friedrich, S. Wilbrandt, O. Stenzel, N. Kaiser, and K. H. Hoffmann, “Computational manufacturing of optical interference coatings: method, simulation results, and comparison with experiment,” Appl. Opt. 49, 3150–3162 (2010).
    [CrossRef] [PubMed]
  15. M. Born and E. Wolf, Principles of Optics (Pergamon, 1968).
  16. O. Stenzel, “A model for calculating the effect of nanosized pores on refractive index, thermal shift and mechanical stress in optical coatings,” J. Phys. D 42, 055312 (2009).
    [CrossRef]
  17. E. C. Freeman and W. Paul, “Optical constants of rf sputtered hydrogenated amorphous Si,” Phys. Rev. B 20, 716–728(1979).
    [CrossRef]
  18. O. Stenzel, The Physics of Thin Film Optical Spectra: An Introduction (Springer-Verlag, 2005).
  19. A. Tikhonravov, M. Trubetskov, T. Amotchkina, G. DeBell, V. Pervak, A. K. Sytchkova, M. L. Grilli, and D. Ristau, “Optical parameters of oxide films typically used in optical coating production,” Appl. Opt. 50, C75–C85 (2011).
    [CrossRef] [PubMed]
  20. A. Tikhonravov, M. Trubetskov, and T. Amotchkina, “Does broadband optical monitoring provide an error self-compensation mechanism?” in Optical Interference Coatings Topical Meeting, OSA Technical Digest (Optical Society of America, 2010), paper TuC3.

2011 (1)

2010 (2)

K. Friedrich, S. Wilbrandt, O. Stenzel, N. Kaiser, and K. H. Hoffmann, “Computational manufacturing of optical interference coatings: method, simulation results, and comparison with experiment,” Appl. Opt. 49, 3150–3162 (2010).
[CrossRef] [PubMed]

M. Bonvalot, M. Kahn, C. Vallée, E. Gourvest, H. Abed, C. Jorel, and C. Dubourdieu, “Combined spectroscopic ellipsometry and attenuated total reflection analyses of Al2O3/HfO2 nanolaminates,” Thin Solid Films 518, 5057–5060 (2010).
[CrossRef]

2009 (3)

O. Stenzel, S. Wilbrandt, K. Friedrich, and N. Kaiser, “Realistische Modellierung der NIR/VIS/UV-optischen Konstanten dünner optischer Schichten im Rahmen des Oszillatormodells,” Vak. Forsch. Prax. 21, 15–23 (2009).
[CrossRef]

O. Stenzel, S. Wilbrandt, N. Kaiser, M. Vinnichenko, F. Munnik, A. Kolitsch, A. Chuvilin, U. Kaiser, J. Ebert, S. Jakobs, A. Kaless, S. Wüthrich, O. Treichel, B. Wunderlich, M. Bitzer, and M. Grüthrich, “The correlation between mechanical stress, thermal shift and refractive index in HfO2, Nb2O5, Ta2O5 and SiO2 layers and its relation to the layer porosity,” Thin Solid Films 517, 6058–6068 (2009).
[CrossRef]

O. Stenzel, “A model for calculating the effect of nanosized pores on refractive index, thermal shift and mechanical stress in optical coatings,” J. Phys. D 42, 055312 (2009).
[CrossRef]

2008 (1)

S. Wilbrandt, O. Stenzel, and N. Kaiser, “All-optical in situ analysis of PIAD deposition processes,” Proc. SPIE 7101, 71010D (2008).
[CrossRef]

2006 (2)

1998 (1)

1989 (2)

1979 (1)

E. C. Freeman and W. Paul, “Optical constants of rf sputtered hydrogenated amorphous Si,” Phys. Rev. B 20, 716–728(1979).
[CrossRef]

Abed, H.

M. Bonvalot, M. Kahn, C. Vallée, E. Gourvest, H. Abed, C. Jorel, and C. Dubourdieu, “Combined spectroscopic ellipsometry and attenuated total reflection analyses of Al2O3/HfO2 nanolaminates,” Thin Solid Films 518, 5057–5060 (2010).
[CrossRef]

Amotchkina, T.

A. Tikhonravov, M. Trubetskov, T. Amotchkina, G. DeBell, V. Pervak, A. K. Sytchkova, M. L. Grilli, and D. Ristau, “Optical parameters of oxide films typically used in optical coating production,” Appl. Opt. 50, C75–C85 (2011).
[CrossRef] [PubMed]

A. Tikhonravov, M. Trubetskov, and T. Amotchkina, “Does broadband optical monitoring provide an error self-compensation mechanism?” in Optical Interference Coatings Topical Meeting, OSA Technical Digest (Optical Society of America, 2010), paper TuC3.

Arntzen, M.

O. Stenzel, S. Wilbrandt, M. Schürmann, N. Kaiser, H. Ehlers, M. Mende, D. Ristau, S. Bruns, M. Vergöhl, M. Stolze, M. Held, H. Niederwald, T. Koch, W. Riggers, P. Burdack, G. Mark, R. Schäfer, S. Mewes, M. Bischoff, M. Arntzen, F. Eisenkrämer, M. Lappschies, S. Jakobs, S. Koch, and B. Baumgarten, “Tailored nanocomposite coatings for optics,” in Optical Interference Coatings Topical Meeting, 2010 OSA Technical Digest (Optical Society of America, 2010), paper MD2.

Baumgarten, B.

O. Stenzel, S. Wilbrandt, M. Schürmann, N. Kaiser, H. Ehlers, M. Mende, D. Ristau, S. Bruns, M. Vergöhl, M. Stolze, M. Held, H. Niederwald, T. Koch, W. Riggers, P. Burdack, G. Mark, R. Schäfer, S. Mewes, M. Bischoff, M. Arntzen, F. Eisenkrämer, M. Lappschies, S. Jakobs, S. Koch, and B. Baumgarten, “Tailored nanocomposite coatings for optics,” in Optical Interference Coatings Topical Meeting, 2010 OSA Technical Digest (Optical Society of America, 2010), paper MD2.

Bischoff, M.

O. Stenzel, S. Wilbrandt, M. Schürmann, N. Kaiser, H. Ehlers, M. Mende, D. Ristau, S. Bruns, M. Vergöhl, M. Stolze, M. Held, H. Niederwald, T. Koch, W. Riggers, P. Burdack, G. Mark, R. Schäfer, S. Mewes, M. Bischoff, M. Arntzen, F. Eisenkrämer, M. Lappschies, S. Jakobs, S. Koch, and B. Baumgarten, “Tailored nanocomposite coatings for optics,” in Optical Interference Coatings Topical Meeting, 2010 OSA Technical Digest (Optical Society of America, 2010), paper MD2.

Bitzer, M.

O. Stenzel, S. Wilbrandt, N. Kaiser, M. Vinnichenko, F. Munnik, A. Kolitsch, A. Chuvilin, U. Kaiser, J. Ebert, S. Jakobs, A. Kaless, S. Wüthrich, O. Treichel, B. Wunderlich, M. Bitzer, and M. Grüthrich, “The correlation between mechanical stress, thermal shift and refractive index in HfO2, Nb2O5, Ta2O5 and SiO2 layers and its relation to the layer porosity,” Thin Solid Films 517, 6058–6068 (2009).
[CrossRef]

Bonvalot, M.

M. Bonvalot, M. Kahn, C. Vallée, E. Gourvest, H. Abed, C. Jorel, and C. Dubourdieu, “Combined spectroscopic ellipsometry and attenuated total reflection analyses of Al2O3/HfO2 nanolaminates,” Thin Solid Films 518, 5057–5060 (2010).
[CrossRef]

Born, M.

M. Born and E. Wolf, Principles of Optics (Pergamon, 1968).

Bruns, S.

S. Bruns, M. Vergöhl, O. Werner, and T. Wallendorf, “High rate deposition of mixed oxides by controlled reactive magnetron-sputtering from metallic targets,” in Proceedings of ICCG8 (2010), Vol. 4.11, pp. 185–189.

O. Stenzel, S. Wilbrandt, M. Schürmann, N. Kaiser, H. Ehlers, M. Mende, D. Ristau, S. Bruns, M. Vergöhl, M. Stolze, M. Held, H. Niederwald, T. Koch, W. Riggers, P. Burdack, G. Mark, R. Schäfer, S. Mewes, M. Bischoff, M. Arntzen, F. Eisenkrämer, M. Lappschies, S. Jakobs, S. Koch, and B. Baumgarten, “Tailored nanocomposite coatings for optics,” in Optical Interference Coatings Topical Meeting, 2010 OSA Technical Digest (Optical Society of America, 2010), paper MD2.

Burdack, P.

O. Stenzel, S. Wilbrandt, M. Schürmann, N. Kaiser, H. Ehlers, M. Mende, D. Ristau, S. Bruns, M. Vergöhl, M. Stolze, M. Held, H. Niederwald, T. Koch, W. Riggers, P. Burdack, G. Mark, R. Schäfer, S. Mewes, M. Bischoff, M. Arntzen, F. Eisenkrämer, M. Lappschies, S. Jakobs, S. Koch, and B. Baumgarten, “Tailored nanocomposite coatings for optics,” in Optical Interference Coatings Topical Meeting, 2010 OSA Technical Digest (Optical Society of America, 2010), paper MD2.

Carniglia, C. K.

Chuvilin, A.

O. Stenzel, S. Wilbrandt, N. Kaiser, M. Vinnichenko, F. Munnik, A. Kolitsch, A. Chuvilin, U. Kaiser, J. Ebert, S. Jakobs, A. Kaless, S. Wüthrich, O. Treichel, B. Wunderlich, M. Bitzer, and M. Grüthrich, “The correlation between mechanical stress, thermal shift and refractive index in HfO2, Nb2O5, Ta2O5 and SiO2 layers and its relation to the layer porosity,” Thin Solid Films 517, 6058–6068 (2009).
[CrossRef]

DeBar, J. I.

DeBell, G.

Dubourdieu, C.

M. Bonvalot, M. Kahn, C. Vallée, E. Gourvest, H. Abed, C. Jorel, and C. Dubourdieu, “Combined spectroscopic ellipsometry and attenuated total reflection analyses of Al2O3/HfO2 nanolaminates,” Thin Solid Films 518, 5057–5060 (2010).
[CrossRef]

Ebert, J.

O. Stenzel, S. Wilbrandt, N. Kaiser, M. Vinnichenko, F. Munnik, A. Kolitsch, A. Chuvilin, U. Kaiser, J. Ebert, S. Jakobs, A. Kaless, S. Wüthrich, O. Treichel, B. Wunderlich, M. Bitzer, and M. Grüthrich, “The correlation between mechanical stress, thermal shift and refractive index in HfO2, Nb2O5, Ta2O5 and SiO2 layers and its relation to the layer porosity,” Thin Solid Films 517, 6058–6068 (2009).
[CrossRef]

Ehlers, H.

O. Stenzel, S. Wilbrandt, M. Schürmann, N. Kaiser, H. Ehlers, M. Mende, D. Ristau, S. Bruns, M. Vergöhl, M. Stolze, M. Held, H. Niederwald, T. Koch, W. Riggers, P. Burdack, G. Mark, R. Schäfer, S. Mewes, M. Bischoff, M. Arntzen, F. Eisenkrämer, M. Lappschies, S. Jakobs, S. Koch, and B. Baumgarten, “Tailored nanocomposite coatings for optics,” in Optical Interference Coatings Topical Meeting, 2010 OSA Technical Digest (Optical Society of America, 2010), paper MD2.

Eisenkrämer, F.

O. Stenzel, S. Wilbrandt, M. Schürmann, N. Kaiser, H. Ehlers, M. Mende, D. Ristau, S. Bruns, M. Vergöhl, M. Stolze, M. Held, H. Niederwald, T. Koch, W. Riggers, P. Burdack, G. Mark, R. Schäfer, S. Mewes, M. Bischoff, M. Arntzen, F. Eisenkrämer, M. Lappschies, S. Jakobs, S. Koch, and B. Baumgarten, “Tailored nanocomposite coatings for optics,” in Optical Interference Coatings Topical Meeting, 2010 OSA Technical Digest (Optical Society of America, 2010), paper MD2.

Freeman, E. C.

E. C. Freeman and W. Paul, “Optical constants of rf sputtered hydrogenated amorphous Si,” Phys. Rev. B 20, 716–728(1979).
[CrossRef]

Friedrich, K.

K. Friedrich, S. Wilbrandt, O. Stenzel, N. Kaiser, and K. H. Hoffmann, “Computational manufacturing of optical interference coatings: method, simulation results, and comparison with experiment,” Appl. Opt. 49, 3150–3162 (2010).
[CrossRef] [PubMed]

O. Stenzel, S. Wilbrandt, K. Friedrich, and N. Kaiser, “Realistische Modellierung der NIR/VIS/UV-optischen Konstanten dünner optischer Schichten im Rahmen des Oszillatormodells,” Vak. Forsch. Prax. 21, 15–23 (2009).
[CrossRef]

Gäbler, D.

Gluck, N. S.

Görtz, B.

Gourvest, E.

M. Bonvalot, M. Kahn, C. Vallée, E. Gourvest, H. Abed, C. Jorel, and C. Dubourdieu, “Combined spectroscopic ellipsometry and attenuated total reflection analyses of Al2O3/HfO2 nanolaminates,” Thin Solid Films 518, 5057–5060 (2010).
[CrossRef]

Grilli, M. L.

Grüthrich, M.

O. Stenzel, S. Wilbrandt, N. Kaiser, M. Vinnichenko, F. Munnik, A. Kolitsch, A. Chuvilin, U. Kaiser, J. Ebert, S. Jakobs, A. Kaless, S. Wüthrich, O. Treichel, B. Wunderlich, M. Bitzer, and M. Grüthrich, “The correlation between mechanical stress, thermal shift and refractive index in HfO2, Nb2O5, Ta2O5 and SiO2 layers and its relation to the layer porosity,” Thin Solid Films 517, 6058–6068 (2009).
[CrossRef]

Gunning, W. J.

Hall, R. L.

Held, M.

O. Stenzel, S. Wilbrandt, M. Schürmann, N. Kaiser, H. Ehlers, M. Mende, D. Ristau, S. Bruns, M. Vergöhl, M. Stolze, M. Held, H. Niederwald, T. Koch, W. Riggers, P. Burdack, G. Mark, R. Schäfer, S. Mewes, M. Bischoff, M. Arntzen, F. Eisenkrämer, M. Lappschies, S. Jakobs, S. Koch, and B. Baumgarten, “Tailored nanocomposite coatings for optics,” in Optical Interference Coatings Topical Meeting, 2010 OSA Technical Digest (Optical Society of America, 2010), paper MD2.

Hoffmann, K. H.

Jakobs, S.

O. Stenzel, S. Wilbrandt, N. Kaiser, M. Vinnichenko, F. Munnik, A. Kolitsch, A. Chuvilin, U. Kaiser, J. Ebert, S. Jakobs, A. Kaless, S. Wüthrich, O. Treichel, B. Wunderlich, M. Bitzer, and M. Grüthrich, “The correlation between mechanical stress, thermal shift and refractive index in HfO2, Nb2O5, Ta2O5 and SiO2 layers and its relation to the layer porosity,” Thin Solid Films 517, 6058–6068 (2009).
[CrossRef]

O. Stenzel, S. Wilbrandt, M. Schürmann, N. Kaiser, H. Ehlers, M. Mende, D. Ristau, S. Bruns, M. Vergöhl, M. Stolze, M. Held, H. Niederwald, T. Koch, W. Riggers, P. Burdack, G. Mark, R. Schäfer, S. Mewes, M. Bischoff, M. Arntzen, F. Eisenkrämer, M. Lappschies, S. Jakobs, S. Koch, and B. Baumgarten, “Tailored nanocomposite coatings for optics,” in Optical Interference Coatings Topical Meeting, 2010 OSA Technical Digest (Optical Society of America, 2010), paper MD2.

Janicki, V.

Jorel, C.

M. Bonvalot, M. Kahn, C. Vallée, E. Gourvest, H. Abed, C. Jorel, and C. Dubourdieu, “Combined spectroscopic ellipsometry and attenuated total reflection analyses of Al2O3/HfO2 nanolaminates,” Thin Solid Films 518, 5057–5060 (2010).
[CrossRef]

Kahn, M.

M. Bonvalot, M. Kahn, C. Vallée, E. Gourvest, H. Abed, C. Jorel, and C. Dubourdieu, “Combined spectroscopic ellipsometry and attenuated total reflection analyses of Al2O3/HfO2 nanolaminates,” Thin Solid Films 518, 5057–5060 (2010).
[CrossRef]

Kaiser, N.

K. Friedrich, S. Wilbrandt, O. Stenzel, N. Kaiser, and K. H. Hoffmann, “Computational manufacturing of optical interference coatings: method, simulation results, and comparison with experiment,” Appl. Opt. 49, 3150–3162 (2010).
[CrossRef] [PubMed]

O. Stenzel, S. Wilbrandt, K. Friedrich, and N. Kaiser, “Realistische Modellierung der NIR/VIS/UV-optischen Konstanten dünner optischer Schichten im Rahmen des Oszillatormodells,” Vak. Forsch. Prax. 21, 15–23 (2009).
[CrossRef]

O. Stenzel, S. Wilbrandt, N. Kaiser, M. Vinnichenko, F. Munnik, A. Kolitsch, A. Chuvilin, U. Kaiser, J. Ebert, S. Jakobs, A. Kaless, S. Wüthrich, O. Treichel, B. Wunderlich, M. Bitzer, and M. Grüthrich, “The correlation between mechanical stress, thermal shift and refractive index in HfO2, Nb2O5, Ta2O5 and SiO2 layers and its relation to the layer porosity,” Thin Solid Films 517, 6058–6068 (2009).
[CrossRef]

S. Wilbrandt, O. Stenzel, and N. Kaiser, “All-optical in situ analysis of PIAD deposition processes,” Proc. SPIE 7101, 71010D (2008).
[CrossRef]

V. Janicki, D. Gäbler, S. Wilbrandt, R. Leitel, O. Stenzel, N. Kaiser, M. Lappschies, B. Görtz, D. Ristau, C. Rickers, and M. Vergöhl, “Deposition and spectral performance of an inhomogeneous broadband wide-angular antireflective coating,” Appl. Opt. 45, 7851–7857 (2006).
[CrossRef] [PubMed]

O. Stenzel, S. Wilbrandt, M. Schürmann, N. Kaiser, H. Ehlers, M. Mende, D. Ristau, S. Bruns, M. Vergöhl, M. Stolze, M. Held, H. Niederwald, T. Koch, W. Riggers, P. Burdack, G. Mark, R. Schäfer, S. Mewes, M. Bischoff, M. Arntzen, F. Eisenkrämer, M. Lappschies, S. Jakobs, S. Koch, and B. Baumgarten, “Tailored nanocomposite coatings for optics,” in Optical Interference Coatings Topical Meeting, 2010 OSA Technical Digest (Optical Society of America, 2010), paper MD2.

Kaiser, U.

O. Stenzel, S. Wilbrandt, N. Kaiser, M. Vinnichenko, F. Munnik, A. Kolitsch, A. Chuvilin, U. Kaiser, J. Ebert, S. Jakobs, A. Kaless, S. Wüthrich, O. Treichel, B. Wunderlich, M. Bitzer, and M. Grüthrich, “The correlation between mechanical stress, thermal shift and refractive index in HfO2, Nb2O5, Ta2O5 and SiO2 layers and its relation to the layer porosity,” Thin Solid Films 517, 6058–6068 (2009).
[CrossRef]

Kaless, A.

O. Stenzel, S. Wilbrandt, N. Kaiser, M. Vinnichenko, F. Munnik, A. Kolitsch, A. Chuvilin, U. Kaiser, J. Ebert, S. Jakobs, A. Kaless, S. Wüthrich, O. Treichel, B. Wunderlich, M. Bitzer, and M. Grüthrich, “The correlation between mechanical stress, thermal shift and refractive index in HfO2, Nb2O5, Ta2O5 and SiO2 layers and its relation to the layer porosity,” Thin Solid Films 517, 6058–6068 (2009).
[CrossRef]

Koch, S.

O. Stenzel, S. Wilbrandt, M. Schürmann, N. Kaiser, H. Ehlers, M. Mende, D. Ristau, S. Bruns, M. Vergöhl, M. Stolze, M. Held, H. Niederwald, T. Koch, W. Riggers, P. Burdack, G. Mark, R. Schäfer, S. Mewes, M. Bischoff, M. Arntzen, F. Eisenkrämer, M. Lappschies, S. Jakobs, S. Koch, and B. Baumgarten, “Tailored nanocomposite coatings for optics,” in Optical Interference Coatings Topical Meeting, 2010 OSA Technical Digest (Optical Society of America, 2010), paper MD2.

Koch, T.

O. Stenzel, S. Wilbrandt, M. Schürmann, N. Kaiser, H. Ehlers, M. Mende, D. Ristau, S. Bruns, M. Vergöhl, M. Stolze, M. Held, H. Niederwald, T. Koch, W. Riggers, P. Burdack, G. Mark, R. Schäfer, S. Mewes, M. Bischoff, M. Arntzen, F. Eisenkrämer, M. Lappschies, S. Jakobs, S. Koch, and B. Baumgarten, “Tailored nanocomposite coatings for optics,” in Optical Interference Coatings Topical Meeting, 2010 OSA Technical Digest (Optical Society of America, 2010), paper MD2.

Kolitsch, A.

O. Stenzel, S. Wilbrandt, N. Kaiser, M. Vinnichenko, F. Munnik, A. Kolitsch, A. Chuvilin, U. Kaiser, J. Ebert, S. Jakobs, A. Kaless, S. Wüthrich, O. Treichel, B. Wunderlich, M. Bitzer, and M. Grüthrich, “The correlation between mechanical stress, thermal shift and refractive index in HfO2, Nb2O5, Ta2O5 and SiO2 layers and its relation to the layer porosity,” Thin Solid Films 517, 6058–6068 (2009).
[CrossRef]

Lappschies, M.

V. Janicki, D. Gäbler, S. Wilbrandt, R. Leitel, O. Stenzel, N. Kaiser, M. Lappschies, B. Görtz, D. Ristau, C. Rickers, and M. Vergöhl, “Deposition and spectral performance of an inhomogeneous broadband wide-angular antireflective coating,” Appl. Opt. 45, 7851–7857 (2006).
[CrossRef] [PubMed]

M. Lappschies, B. Görtz, and D. Ristau, “Application of optical broad band monitoring to quasi-rugate filters by ion beam sputtering,” Appl. Opt. 45, 1502–1506 (2006).
[CrossRef] [PubMed]

O. Stenzel, S. Wilbrandt, M. Schürmann, N. Kaiser, H. Ehlers, M. Mende, D. Ristau, S. Bruns, M. Vergöhl, M. Stolze, M. Held, H. Niederwald, T. Koch, W. Riggers, P. Burdack, G. Mark, R. Schäfer, S. Mewes, M. Bischoff, M. Arntzen, F. Eisenkrämer, M. Lappschies, S. Jakobs, S. Koch, and B. Baumgarten, “Tailored nanocomposite coatings for optics,” in Optical Interference Coatings Topical Meeting, 2010 OSA Technical Digest (Optical Society of America, 2010), paper MD2.

Leitel, R.

Mark, G.

O. Stenzel, S. Wilbrandt, M. Schürmann, N. Kaiser, H. Ehlers, M. Mende, D. Ristau, S. Bruns, M. Vergöhl, M. Stolze, M. Held, H. Niederwald, T. Koch, W. Riggers, P. Burdack, G. Mark, R. Schäfer, S. Mewes, M. Bischoff, M. Arntzen, F. Eisenkrämer, M. Lappschies, S. Jakobs, S. Koch, and B. Baumgarten, “Tailored nanocomposite coatings for optics,” in Optical Interference Coatings Topical Meeting, 2010 OSA Technical Digest (Optical Society of America, 2010), paper MD2.

Mende, M.

O. Stenzel, S. Wilbrandt, M. Schürmann, N. Kaiser, H. Ehlers, M. Mende, D. Ristau, S. Bruns, M. Vergöhl, M. Stolze, M. Held, H. Niederwald, T. Koch, W. Riggers, P. Burdack, G. Mark, R. Schäfer, S. Mewes, M. Bischoff, M. Arntzen, F. Eisenkrämer, M. Lappschies, S. Jakobs, S. Koch, and B. Baumgarten, “Tailored nanocomposite coatings for optics,” in Optical Interference Coatings Topical Meeting, 2010 OSA Technical Digest (Optical Society of America, 2010), paper MD2.

Mewes, S.

O. Stenzel, S. Wilbrandt, M. Schürmann, N. Kaiser, H. Ehlers, M. Mende, D. Ristau, S. Bruns, M. Vergöhl, M. Stolze, M. Held, H. Niederwald, T. Koch, W. Riggers, P. Burdack, G. Mark, R. Schäfer, S. Mewes, M. Bischoff, M. Arntzen, F. Eisenkrämer, M. Lappschies, S. Jakobs, S. Koch, and B. Baumgarten, “Tailored nanocomposite coatings for optics,” in Optical Interference Coatings Topical Meeting, 2010 OSA Technical Digest (Optical Society of America, 2010), paper MD2.

Munnik, F.

O. Stenzel, S. Wilbrandt, N. Kaiser, M. Vinnichenko, F. Munnik, A. Kolitsch, A. Chuvilin, U. Kaiser, J. Ebert, S. Jakobs, A. Kaless, S. Wüthrich, O. Treichel, B. Wunderlich, M. Bitzer, and M. Grüthrich, “The correlation between mechanical stress, thermal shift and refractive index in HfO2, Nb2O5, Ta2O5 and SiO2 layers and its relation to the layer porosity,” Thin Solid Films 517, 6058–6068 (2009).
[CrossRef]

Niederwald, H.

O. Stenzel, S. Wilbrandt, M. Schürmann, N. Kaiser, H. Ehlers, M. Mende, D. Ristau, S. Bruns, M. Vergöhl, M. Stolze, M. Held, H. Niederwald, T. Koch, W. Riggers, P. Burdack, G. Mark, R. Schäfer, S. Mewes, M. Bischoff, M. Arntzen, F. Eisenkrämer, M. Lappschies, S. Jakobs, S. Koch, and B. Baumgarten, “Tailored nanocomposite coatings for optics,” in Optical Interference Coatings Topical Meeting, 2010 OSA Technical Digest (Optical Society of America, 2010), paper MD2.

Paul, W.

E. C. Freeman and W. Paul, “Optical constants of rf sputtered hydrogenated amorphous Si,” Phys. Rev. B 20, 716–728(1979).
[CrossRef]

Pervak, V.

Pond, B. J.

Raj, T.

Rickers, C.

Riggers, W.

O. Stenzel, S. Wilbrandt, M. Schürmann, N. Kaiser, H. Ehlers, M. Mende, D. Ristau, S. Bruns, M. Vergöhl, M. Stolze, M. Held, H. Niederwald, T. Koch, W. Riggers, P. Burdack, G. Mark, R. Schäfer, S. Mewes, M. Bischoff, M. Arntzen, F. Eisenkrämer, M. Lappschies, S. Jakobs, S. Koch, and B. Baumgarten, “Tailored nanocomposite coatings for optics,” in Optical Interference Coatings Topical Meeting, 2010 OSA Technical Digest (Optical Society of America, 2010), paper MD2.

Ristau, D.

Sahoo, N. K.

Schäfer, R.

O. Stenzel, S. Wilbrandt, M. Schürmann, N. Kaiser, H. Ehlers, M. Mende, D. Ristau, S. Bruns, M. Vergöhl, M. Stolze, M. Held, H. Niederwald, T. Koch, W. Riggers, P. Burdack, G. Mark, R. Schäfer, S. Mewes, M. Bischoff, M. Arntzen, F. Eisenkrämer, M. Lappschies, S. Jakobs, S. Koch, and B. Baumgarten, “Tailored nanocomposite coatings for optics,” in Optical Interference Coatings Topical Meeting, 2010 OSA Technical Digest (Optical Society of America, 2010), paper MD2.

Schürmann, M.

O. Stenzel, S. Wilbrandt, M. Schürmann, N. Kaiser, H. Ehlers, M. Mende, D. Ristau, S. Bruns, M. Vergöhl, M. Stolze, M. Held, H. Niederwald, T. Koch, W. Riggers, P. Burdack, G. Mark, R. Schäfer, S. Mewes, M. Bischoff, M. Arntzen, F. Eisenkrämer, M. Lappschies, S. Jakobs, S. Koch, and B. Baumgarten, “Tailored nanocomposite coatings for optics,” in Optical Interference Coatings Topical Meeting, 2010 OSA Technical Digest (Optical Society of America, 2010), paper MD2.

Shapiro, A. P.

Southwell, W. H.

Stenzel, O.

K. Friedrich, S. Wilbrandt, O. Stenzel, N. Kaiser, and K. H. Hoffmann, “Computational manufacturing of optical interference coatings: method, simulation results, and comparison with experiment,” Appl. Opt. 49, 3150–3162 (2010).
[CrossRef] [PubMed]

O. Stenzel, S. Wilbrandt, K. Friedrich, and N. Kaiser, “Realistische Modellierung der NIR/VIS/UV-optischen Konstanten dünner optischer Schichten im Rahmen des Oszillatormodells,” Vak. Forsch. Prax. 21, 15–23 (2009).
[CrossRef]

O. Stenzel, S. Wilbrandt, N. Kaiser, M. Vinnichenko, F. Munnik, A. Kolitsch, A. Chuvilin, U. Kaiser, J. Ebert, S. Jakobs, A. Kaless, S. Wüthrich, O. Treichel, B. Wunderlich, M. Bitzer, and M. Grüthrich, “The correlation between mechanical stress, thermal shift and refractive index in HfO2, Nb2O5, Ta2O5 and SiO2 layers and its relation to the layer porosity,” Thin Solid Films 517, 6058–6068 (2009).
[CrossRef]

O. Stenzel, “A model for calculating the effect of nanosized pores on refractive index, thermal shift and mechanical stress in optical coatings,” J. Phys. D 42, 055312 (2009).
[CrossRef]

S. Wilbrandt, O. Stenzel, and N. Kaiser, “All-optical in situ analysis of PIAD deposition processes,” Proc. SPIE 7101, 71010D (2008).
[CrossRef]

V. Janicki, D. Gäbler, S. Wilbrandt, R. Leitel, O. Stenzel, N. Kaiser, M. Lappschies, B. Görtz, D. Ristau, C. Rickers, and M. Vergöhl, “Deposition and spectral performance of an inhomogeneous broadband wide-angular antireflective coating,” Appl. Opt. 45, 7851–7857 (2006).
[CrossRef] [PubMed]

O. Stenzel, The Physics of Thin Film Optical Spectra: An Introduction (Springer-Verlag, 2005).

O. Stenzel, S. Wilbrandt, M. Schürmann, N. Kaiser, H. Ehlers, M. Mende, D. Ristau, S. Bruns, M. Vergöhl, M. Stolze, M. Held, H. Niederwald, T. Koch, W. Riggers, P. Burdack, G. Mark, R. Schäfer, S. Mewes, M. Bischoff, M. Arntzen, F. Eisenkrämer, M. Lappschies, S. Jakobs, S. Koch, and B. Baumgarten, “Tailored nanocomposite coatings for optics,” in Optical Interference Coatings Topical Meeting, 2010 OSA Technical Digest (Optical Society of America, 2010), paper MD2.

Stolze, M.

O. Stenzel, S. Wilbrandt, M. Schürmann, N. Kaiser, H. Ehlers, M. Mende, D. Ristau, S. Bruns, M. Vergöhl, M. Stolze, M. Held, H. Niederwald, T. Koch, W. Riggers, P. Burdack, G. Mark, R. Schäfer, S. Mewes, M. Bischoff, M. Arntzen, F. Eisenkrämer, M. Lappschies, S. Jakobs, S. Koch, and B. Baumgarten, “Tailored nanocomposite coatings for optics,” in Optical Interference Coatings Topical Meeting, 2010 OSA Technical Digest (Optical Society of America, 2010), paper MD2.

Sytchkova, A. K.

Tikhonravov, A.

A. Tikhonravov, M. Trubetskov, T. Amotchkina, G. DeBell, V. Pervak, A. K. Sytchkova, M. L. Grilli, and D. Ristau, “Optical parameters of oxide films typically used in optical coating production,” Appl. Opt. 50, C75–C85 (2011).
[CrossRef] [PubMed]

A. Tikhonravov, M. Trubetskov, and T. Amotchkina, “Does broadband optical monitoring provide an error self-compensation mechanism?” in Optical Interference Coatings Topical Meeting, OSA Technical Digest (Optical Society of America, 2010), paper TuC3.

Treichel, O.

O. Stenzel, S. Wilbrandt, N. Kaiser, M. Vinnichenko, F. Munnik, A. Kolitsch, A. Chuvilin, U. Kaiser, J. Ebert, S. Jakobs, A. Kaless, S. Wüthrich, O. Treichel, B. Wunderlich, M. Bitzer, and M. Grüthrich, “The correlation between mechanical stress, thermal shift and refractive index in HfO2, Nb2O5, Ta2O5 and SiO2 layers and its relation to the layer porosity,” Thin Solid Films 517, 6058–6068 (2009).
[CrossRef]

Trubetskov, M.

A. Tikhonravov, M. Trubetskov, T. Amotchkina, G. DeBell, V. Pervak, A. K. Sytchkova, M. L. Grilli, and D. Ristau, “Optical parameters of oxide films typically used in optical coating production,” Appl. Opt. 50, C75–C85 (2011).
[CrossRef] [PubMed]

A. Tikhonravov, M. Trubetskov, and T. Amotchkina, “Does broadband optical monitoring provide an error self-compensation mechanism?” in Optical Interference Coatings Topical Meeting, OSA Technical Digest (Optical Society of America, 2010), paper TuC3.

Vallée, C.

M. Bonvalot, M. Kahn, C. Vallée, E. Gourvest, H. Abed, C. Jorel, and C. Dubourdieu, “Combined spectroscopic ellipsometry and attenuated total reflection analyses of Al2O3/HfO2 nanolaminates,” Thin Solid Films 518, 5057–5060 (2010).
[CrossRef]

Vergöhl, M.

V. Janicki, D. Gäbler, S. Wilbrandt, R. Leitel, O. Stenzel, N. Kaiser, M. Lappschies, B. Görtz, D. Ristau, C. Rickers, and M. Vergöhl, “Deposition and spectral performance of an inhomogeneous broadband wide-angular antireflective coating,” Appl. Opt. 45, 7851–7857 (2006).
[CrossRef] [PubMed]

O. Stenzel, S. Wilbrandt, M. Schürmann, N. Kaiser, H. Ehlers, M. Mende, D. Ristau, S. Bruns, M. Vergöhl, M. Stolze, M. Held, H. Niederwald, T. Koch, W. Riggers, P. Burdack, G. Mark, R. Schäfer, S. Mewes, M. Bischoff, M. Arntzen, F. Eisenkrämer, M. Lappschies, S. Jakobs, S. Koch, and B. Baumgarten, “Tailored nanocomposite coatings for optics,” in Optical Interference Coatings Topical Meeting, 2010 OSA Technical Digest (Optical Society of America, 2010), paper MD2.

S. Bruns, M. Vergöhl, O. Werner, and T. Wallendorf, “High rate deposition of mixed oxides by controlled reactive magnetron-sputtering from metallic targets,” in Proceedings of ICCG8 (2010), Vol. 4.11, pp. 185–189.

Vinnichenko, M.

O. Stenzel, S. Wilbrandt, N. Kaiser, M. Vinnichenko, F. Munnik, A. Kolitsch, A. Chuvilin, U. Kaiser, J. Ebert, S. Jakobs, A. Kaless, S. Wüthrich, O. Treichel, B. Wunderlich, M. Bitzer, and M. Grüthrich, “The correlation between mechanical stress, thermal shift and refractive index in HfO2, Nb2O5, Ta2O5 and SiO2 layers and its relation to the layer porosity,” Thin Solid Films 517, 6058–6068 (2009).
[CrossRef]

Wallendorf, T.

S. Bruns, M. Vergöhl, O. Werner, and T. Wallendorf, “High rate deposition of mixed oxides by controlled reactive magnetron-sputtering from metallic targets,” in Proceedings of ICCG8 (2010), Vol. 4.11, pp. 185–189.

Werner, O.

S. Bruns, M. Vergöhl, O. Werner, and T. Wallendorf, “High rate deposition of mixed oxides by controlled reactive magnetron-sputtering from metallic targets,” in Proceedings of ICCG8 (2010), Vol. 4.11, pp. 185–189.

Wilbrandt, S.

K. Friedrich, S. Wilbrandt, O. Stenzel, N. Kaiser, and K. H. Hoffmann, “Computational manufacturing of optical interference coatings: method, simulation results, and comparison with experiment,” Appl. Opt. 49, 3150–3162 (2010).
[CrossRef] [PubMed]

O. Stenzel, S. Wilbrandt, K. Friedrich, and N. Kaiser, “Realistische Modellierung der NIR/VIS/UV-optischen Konstanten dünner optischer Schichten im Rahmen des Oszillatormodells,” Vak. Forsch. Prax. 21, 15–23 (2009).
[CrossRef]

O. Stenzel, S. Wilbrandt, N. Kaiser, M. Vinnichenko, F. Munnik, A. Kolitsch, A. Chuvilin, U. Kaiser, J. Ebert, S. Jakobs, A. Kaless, S. Wüthrich, O. Treichel, B. Wunderlich, M. Bitzer, and M. Grüthrich, “The correlation between mechanical stress, thermal shift and refractive index in HfO2, Nb2O5, Ta2O5 and SiO2 layers and its relation to the layer porosity,” Thin Solid Films 517, 6058–6068 (2009).
[CrossRef]

S. Wilbrandt, O. Stenzel, and N. Kaiser, “All-optical in situ analysis of PIAD deposition processes,” Proc. SPIE 7101, 71010D (2008).
[CrossRef]

V. Janicki, D. Gäbler, S. Wilbrandt, R. Leitel, O. Stenzel, N. Kaiser, M. Lappschies, B. Görtz, D. Ristau, C. Rickers, and M. Vergöhl, “Deposition and spectral performance of an inhomogeneous broadband wide-angular antireflective coating,” Appl. Opt. 45, 7851–7857 (2006).
[CrossRef] [PubMed]

O. Stenzel, S. Wilbrandt, M. Schürmann, N. Kaiser, H. Ehlers, M. Mende, D. Ristau, S. Bruns, M. Vergöhl, M. Stolze, M. Held, H. Niederwald, T. Koch, W. Riggers, P. Burdack, G. Mark, R. Schäfer, S. Mewes, M. Bischoff, M. Arntzen, F. Eisenkrämer, M. Lappschies, S. Jakobs, S. Koch, and B. Baumgarten, “Tailored nanocomposite coatings for optics,” in Optical Interference Coatings Topical Meeting, 2010 OSA Technical Digest (Optical Society of America, 2010), paper MD2.

Wolf, E.

M. Born and E. Wolf, Principles of Optics (Pergamon, 1968).

Woodberry, F. J.

Wunderlich, B.

O. Stenzel, S. Wilbrandt, N. Kaiser, M. Vinnichenko, F. Munnik, A. Kolitsch, A. Chuvilin, U. Kaiser, J. Ebert, S. Jakobs, A. Kaless, S. Wüthrich, O. Treichel, B. Wunderlich, M. Bitzer, and M. Grüthrich, “The correlation between mechanical stress, thermal shift and refractive index in HfO2, Nb2O5, Ta2O5 and SiO2 layers and its relation to the layer porosity,” Thin Solid Films 517, 6058–6068 (2009).
[CrossRef]

Wüthrich, S.

O. Stenzel, S. Wilbrandt, N. Kaiser, M. Vinnichenko, F. Munnik, A. Kolitsch, A. Chuvilin, U. Kaiser, J. Ebert, S. Jakobs, A. Kaless, S. Wüthrich, O. Treichel, B. Wunderlich, M. Bitzer, and M. Grüthrich, “The correlation between mechanical stress, thermal shift and refractive index in HfO2, Nb2O5, Ta2O5 and SiO2 layers and its relation to the layer porosity,” Thin Solid Films 517, 6058–6068 (2009).
[CrossRef]

Appl. Opt. (7)

B. J. Pond, J. I. DeBar, C. K. Carniglia, and T. Raj, “Stress reduction in ion beam sputtered mixed oxide films,” Appl. Opt. 28, 2800–2805 (1989).
[CrossRef] [PubMed]

W. J. Gunning, R. L. Hall, F. J. Woodberry, W. H. Southwell, and N. S. Gluck, “Codeposition of continuous composition rugate filters,” Appl. Opt. 28, 2945–2948 (1989).
[CrossRef] [PubMed]

N. K. Sahoo and A. P. Shapiro, “Process-parameter-dependent optical and structural properties of ZrO2MgO mixed-composite films evaporated from the solid solution,” Appl. Opt. 37, 698–718 (1998).
[CrossRef]

M. Lappschies, B. Görtz, and D. Ristau, “Application of optical broad band monitoring to quasi-rugate filters by ion beam sputtering,” Appl. Opt. 45, 1502–1506 (2006).
[CrossRef] [PubMed]

V. Janicki, D. Gäbler, S. Wilbrandt, R. Leitel, O. Stenzel, N. Kaiser, M. Lappschies, B. Görtz, D. Ristau, C. Rickers, and M. Vergöhl, “Deposition and spectral performance of an inhomogeneous broadband wide-angular antireflective coating,” Appl. Opt. 45, 7851–7857 (2006).
[CrossRef] [PubMed]

K. Friedrich, S. Wilbrandt, O. Stenzel, N. Kaiser, and K. H. Hoffmann, “Computational manufacturing of optical interference coatings: method, simulation results, and comparison with experiment,” Appl. Opt. 49, 3150–3162 (2010).
[CrossRef] [PubMed]

A. Tikhonravov, M. Trubetskov, T. Amotchkina, G. DeBell, V. Pervak, A. K. Sytchkova, M. L. Grilli, and D. Ristau, “Optical parameters of oxide films typically used in optical coating production,” Appl. Opt. 50, C75–C85 (2011).
[CrossRef] [PubMed]

J. Phys. D (1)

O. Stenzel, “A model for calculating the effect of nanosized pores on refractive index, thermal shift and mechanical stress in optical coatings,” J. Phys. D 42, 055312 (2009).
[CrossRef]

Phys. Rev. B (1)

E. C. Freeman and W. Paul, “Optical constants of rf sputtered hydrogenated amorphous Si,” Phys. Rev. B 20, 716–728(1979).
[CrossRef]

Proc. SPIE (1)

S. Wilbrandt, O. Stenzel, and N. Kaiser, “All-optical in situ analysis of PIAD deposition processes,” Proc. SPIE 7101, 71010D (2008).
[CrossRef]

Thin Solid Films (2)

O. Stenzel, S. Wilbrandt, N. Kaiser, M. Vinnichenko, F. Munnik, A. Kolitsch, A. Chuvilin, U. Kaiser, J. Ebert, S. Jakobs, A. Kaless, S. Wüthrich, O. Treichel, B. Wunderlich, M. Bitzer, and M. Grüthrich, “The correlation between mechanical stress, thermal shift and refractive index in HfO2, Nb2O5, Ta2O5 and SiO2 layers and its relation to the layer porosity,” Thin Solid Films 517, 6058–6068 (2009).
[CrossRef]

M. Bonvalot, M. Kahn, C. Vallée, E. Gourvest, H. Abed, C. Jorel, and C. Dubourdieu, “Combined spectroscopic ellipsometry and attenuated total reflection analyses of Al2O3/HfO2 nanolaminates,” Thin Solid Films 518, 5057–5060 (2010).
[CrossRef]

Vak. Forsch. Prax. (1)

O. Stenzel, S. Wilbrandt, K. Friedrich, and N. Kaiser, “Realistische Modellierung der NIR/VIS/UV-optischen Konstanten dünner optischer Schichten im Rahmen des Oszillatormodells,” Vak. Forsch. Prax. 21, 15–23 (2009).
[CrossRef]

Other (7)

M. Born and E. Wolf, Principles of Optics (Pergamon, 1968).

S. Bruns, M. Vergöhl, O. Werner, and T. Wallendorf, “High rate deposition of mixed oxides by controlled reactive magnetron-sputtering from metallic targets,” in Proceedings of ICCG8 (2010), Vol. 4.11, pp. 185–189.

N.Kaiser and H.K.Pulker, eds., Optical Interference Coatings (Springer-Verlag, 2003).

http://www.tailor-coatings.net.

O. Stenzel, S. Wilbrandt, M. Schürmann, N. Kaiser, H. Ehlers, M. Mende, D. Ristau, S. Bruns, M. Vergöhl, M. Stolze, M. Held, H. Niederwald, T. Koch, W. Riggers, P. Burdack, G. Mark, R. Schäfer, S. Mewes, M. Bischoff, M. Arntzen, F. Eisenkrämer, M. Lappschies, S. Jakobs, S. Koch, and B. Baumgarten, “Tailored nanocomposite coatings for optics,” in Optical Interference Coatings Topical Meeting, 2010 OSA Technical Digest (Optical Society of America, 2010), paper MD2.

O. Stenzel, The Physics of Thin Film Optical Spectra: An Introduction (Springer-Verlag, 2005).

A. Tikhonravov, M. Trubetskov, and T. Amotchkina, “Does broadband optical monitoring provide an error self-compensation mechanism?” in Optical Interference Coatings Topical Meeting, OSA Technical Digest (Optical Society of America, 2010), paper TuC3.

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Figures (6)

Fig. 1
Fig. 1

Relation between shift and mechanical stress for mixture layers and corresponding pure oxide coatings. The indicated deposition techniques only reflect the trend in the arrangement of the corresponding data points.

Fig. 2
Fig. 2

Optical bandgap E 04 and UV refractive index n of optically homogeneous coatings.

Fig. 3
Fig. 3

Assumed refractive index profile n ( z ) for an inhomogeneous layer with a negative index gradient. The incidence medium (here air) is on the left side; the substrate is on the right side. The z axis is directed perpendicular to the film surface.

Fig. 4
Fig. 4

Inhomogeneity (in %) of pure and mixed hafnia and zirconia coatings, estimated from Eq. (1) in the corresponding transparency region. The vertical dashed line corresponds to homogeneous layers.

Fig. 5
Fig. 5

Inhomogeneity (in %) of pure and mixed hafnia and alumina coatings, estimated from Eq. (1) in the corresponding transparency region. The vertical dashed line corresponds to homogeneous layers.

Fig. 6
Fig. 6

Measured reflectance for the high-reflector coatings. The assignment of the curves to the type of reflector is given in Table 1.

Tables (1)

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Table 1 Construction Parameters of High-Reflector Coatings

Equations (1)

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Δ R R λ / 2 R substrate 4 n s ( 1 n s ) ( 1 + n s ) 3 n 1 n 2 n .

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