Abstract

The combination of in situ spectrophotometry during film deposition and ex situ spectrophotometry allows insight into the depth distribution of optical losses in plasma ion assisted deposition coatings. An adapted optical characterization strategy for absorbing coatings using only in situ transmittance data has been developed and is exemplified in application to magnesium fluoride coatings. Measurements and simulation results strongly indicate an increased absorption caused by local understoichiometry of the fluoride material close to the fused silica substrate.

© 2011 Optical Society of America

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  1. P. J. Martin, H. A. Macleod, R. P. Netterfield, C. G. Pacey, and W. G. Sainty, “Ion-beam-assisted deposition of thin films,” Appl. Opt. 22, 178–184 (1983).
    [CrossRef]
  2. A. Zöller, S. Beisswenger, R. Goetzelmann, and K. Matl, “Plasma-ion-assisted-deposition: a novel technique for the production of optical coatings,” Proc. SPIE 2253, 394–402 (1994).
    [CrossRef]
  3. L. Martinu and D. Poitras, “Plasma deposition of optical films and coatings: a review,” J. Vac. Sci. Technol. A 18, 2619–2645(2000).
    [CrossRef]
  4. B. T. Sullivan, “An overview of optical monitoring techniques,” in Optical Interference Coatings Topical Meeting, 2010 OSA Technical Digest (Optical Society of America, 2010), paper TuC1.
  5. M. Bischoff, “Plasmagestützte Beschichtung von Metallfluoriden für den Tiefen Ultravioletten Spektralbereich,” Ph.D. dissertation (Friedrich-Schiller-University Jena, 2008), http://www.db-thueringen.de/servlets/DerivateServlet/Derivate-19700/Bischoff/Dissertation.pdf.
  6. M. Bischoff, M. Sode, D. Gäbler, H. Bernitzki, C. Zaczek, N. Kaiser, and A. Tünnermann, “Metal fluoride coatings prepared by ion-assisted deposition,” Proc. SPIE 7101, 71010L(2008).
    [CrossRef]
  7. M. Bischoff, D. Gäbler, and N. Kaiser, “Plasma assisted deposition of metal fluoride coatings,” in Optical Interference Coatings, 2010 OSA Technical Digest (Optical Society of America, 2010), paper MD1.
  8. K. Iwahori, M. Furuta, Y. Taki, T. Yamamura, and A. Tanaka, “Optical properties of fluoride thin films deposited by RF magnetron sputtering,” Appl. Opt. 45, 4598–4602 (2006).
    [CrossRef]
  9. E. Quesnel, L. Dumas, D. Jacob, and F. Peiró, “Optical and microstructural properties of MgF2 UV coatings grown by ion beam sputtering process,” J. Vac. Sci. Technol. A 18, 2869–2876 (2000).
    [CrossRef]
  10. T. Yoshida, K. Nishimoto, K. Sekine, and K. Etoh, “Fluoride antireflection coatings for deep ultraviolet optics deposited by ion-beam sputtering,” Appl. Opt. 45, 1375–1379 (2006).
    [CrossRef]
  11. S. Wilbrandt, O. Stenzel, and N. Kaiser, “Combined in situ and ex situ optical analysis of fluoride coatings deposited by PIAD,” in Optical Interference Coatings, 2010 OSA Technical Digest (Optical Society of America, 2010), paper TuD2.
  12. M. Bischoff, O. Stenzel, K. Friedrich, S. Wilbrandt, D. Gäbler, S. Mewes, and N. Kaiser, “Plasma assisted deposition of metal fluoride coatings and modelling the extinction coefficient of as-deposited single layers,” submitted for publication to Appl. Opt.
  13. A. V. Tikhonravov, “Some theoretical aspects of thin-film optics and their applications,” Appl. Opt. 32, 5417–5426(1993).
    [CrossRef]
  14. A. V. Tikhonravov, M. K. Trubetskov, T. V. Amotchkina, and J. A. Dobrowolski, “Estimation of the average residual reflectance of broadband antireflection coatings,” Appl. Opt. 47, C124–C130 (2008).
    [CrossRef]
  15. S. Wilbrandt, O. Stenzel, and N. Kaiser, “All-optical in-situ analysis of PIAD deposition processes,” Proc. SPIE 7101, 71010D (2008).
    [CrossRef]
  16. http://www.iof.fraunhofer.de/departments/optical-coatings/_media/vneinsaetze_e.pdf.
  17. O. Stenzel, S. Wilbrandt, K. Friedrich, and N. Kaiser, “Realistische Modellierung der NIR/VIS/UV-Optischen Konstanten Dünner Optischer Schichten im Rahmen des Oszillatormodells,” Vak. Forsch. Prax. 21, 15–23 (2009).
    [CrossRef]
  18. D. Ristau, S. Günster, S. Bosch, A. Duparré, E. Masetti, J. Ferre-Borrull, G. Kiriakidis, F. Peiro, E. Quesnel, and A. Tikhonravov, “Ultraviolet optical and microstructural properties of MgF2 and LaF3 coatings deposited by ion-beam sputtering and boat and electron-beam evaporation,” Appl. Opt. 41, 3196–3204 (2002).
    [CrossRef]
  19. C.-C. Jaing, M.-H. Shiao, C.-C. Lee, C.-J. Lu, M.-C. Liu, C.-H. Lee, and H.-C. Chen, “Effects of ion assist and substrate temperature on the optical properties and microstructure of MgF2 films produced by e-beam evaporation,” Proc. SPIE 5870, 58700F (2005).
    [CrossRef]
  20. L. Dumas, E. Quesnel, J. Y. Robic, and Y. Pauleau, “Characterization of magnesium fluoride thin films produced by argon ion beam-assisted deposition,” Thin Solid Films 382, 61–68 (2001).
    [CrossRef]
  21. L. J. Lingg, J. D. Targove, J. P. Lehan, and H. A. Macleod, “Ion-assisted deposition of lanthanide trifluorides for VUV applications,” Proc. SPIE 818, 86–92 (1987).
  22. M. Kennedy, D. Ristau, and H. S. Niederwald, “Ion beam-assisted deposition of MgF2 and YbF3 films,” Thin Solid Films 333, 191–195 (1998).
    [CrossRef]
  23. L. Dumas, E. Quesnel, F. Pierre, and F. Bertin, “Optical properties of magnesium fluoride thin films produced by argon ion-beam assisted deposition,” J. Vac. Sci. Technol. A 20, 102–106 (2002).
    [CrossRef]
  24. G. O. Amolo, J. D. Comins, A. T. Davidson, A. G. Kozakiewicz, T. E. Derry, and D. S. McLachlan, “Visible and VUV optical absorption studies of Mg-colloids and colour centres in MgF2 crystals implanted by 100 keV Mg-ions,” Nucl. Instrum. Methods Phys. Res. B 218, 244–248 (2004).
    [CrossRef]
  25. O. Stenzel, The Physics of Thin Film Optical Spectra: an Introduction, Springer Series in Surface Sciences (Springer, 2005).
  26. E. D. Palik, Handbook of Optical Constants of Solids: Part III (Academic, 1998).
  27. S. Wilbrandt, O. Stenzel, and N. Kaiser, “Experimental determination of the refractive index profile of rugate filters based on in situ measurements of transmission spectra,” J. Phys. D 40, 1435–1441 (2007).
    [CrossRef]
  28. S. Kachan, O. Stenzel, and A. Ponyavina, “High-absorbing gradient multilayer coatings with silver nanoparticles,” Appl. Phys. B 84, 281–287 (2006).
    [CrossRef]
  29. V. Janicki, J. Sancho-Parramon, and H. Zorc, “Gradient silver nanoparticle layers in absorbing coatings—experimental study,” in Optical Interference Coatings, 2010 OSA Technical Digest (Optical Society of America, 2010), paper WA11.
  30. http://www.PluTO-projekt.de.

2009 (1)

O. Stenzel, S. Wilbrandt, K. Friedrich, and N. Kaiser, “Realistische Modellierung der NIR/VIS/UV-Optischen Konstanten Dünner Optischer Schichten im Rahmen des Oszillatormodells,” Vak. Forsch. Prax. 21, 15–23 (2009).
[CrossRef]

2008 (3)

M. Bischoff, M. Sode, D. Gäbler, H. Bernitzki, C. Zaczek, N. Kaiser, and A. Tünnermann, “Metal fluoride coatings prepared by ion-assisted deposition,” Proc. SPIE 7101, 71010L(2008).
[CrossRef]

A. V. Tikhonravov, M. K. Trubetskov, T. V. Amotchkina, and J. A. Dobrowolski, “Estimation of the average residual reflectance of broadband antireflection coatings,” Appl. Opt. 47, C124–C130 (2008).
[CrossRef]

S. Wilbrandt, O. Stenzel, and N. Kaiser, “All-optical in-situ analysis of PIAD deposition processes,” Proc. SPIE 7101, 71010D (2008).
[CrossRef]

2007 (1)

S. Wilbrandt, O. Stenzel, and N. Kaiser, “Experimental determination of the refractive index profile of rugate filters based on in situ measurements of transmission spectra,” J. Phys. D 40, 1435–1441 (2007).
[CrossRef]

2006 (3)

2005 (1)

C.-C. Jaing, M.-H. Shiao, C.-C. Lee, C.-J. Lu, M.-C. Liu, C.-H. Lee, and H.-C. Chen, “Effects of ion assist and substrate temperature on the optical properties and microstructure of MgF2 films produced by e-beam evaporation,” Proc. SPIE 5870, 58700F (2005).
[CrossRef]

2004 (1)

G. O. Amolo, J. D. Comins, A. T. Davidson, A. G. Kozakiewicz, T. E. Derry, and D. S. McLachlan, “Visible and VUV optical absorption studies of Mg-colloids and colour centres in MgF2 crystals implanted by 100 keV Mg-ions,” Nucl. Instrum. Methods Phys. Res. B 218, 244–248 (2004).
[CrossRef]

2002 (2)

2001 (1)

L. Dumas, E. Quesnel, J. Y. Robic, and Y. Pauleau, “Characterization of magnesium fluoride thin films produced by argon ion beam-assisted deposition,” Thin Solid Films 382, 61–68 (2001).
[CrossRef]

2000 (2)

L. Martinu and D. Poitras, “Plasma deposition of optical films and coatings: a review,” J. Vac. Sci. Technol. A 18, 2619–2645(2000).
[CrossRef]

E. Quesnel, L. Dumas, D. Jacob, and F. Peiró, “Optical and microstructural properties of MgF2 UV coatings grown by ion beam sputtering process,” J. Vac. Sci. Technol. A 18, 2869–2876 (2000).
[CrossRef]

1998 (1)

M. Kennedy, D. Ristau, and H. S. Niederwald, “Ion beam-assisted deposition of MgF2 and YbF3 films,” Thin Solid Films 333, 191–195 (1998).
[CrossRef]

1994 (1)

A. Zöller, S. Beisswenger, R. Goetzelmann, and K. Matl, “Plasma-ion-assisted-deposition: a novel technique for the production of optical coatings,” Proc. SPIE 2253, 394–402 (1994).
[CrossRef]

1993 (1)

1987 (1)

L. J. Lingg, J. D. Targove, J. P. Lehan, and H. A. Macleod, “Ion-assisted deposition of lanthanide trifluorides for VUV applications,” Proc. SPIE 818, 86–92 (1987).

1983 (1)

Amolo, G. O.

G. O. Amolo, J. D. Comins, A. T. Davidson, A. G. Kozakiewicz, T. E. Derry, and D. S. McLachlan, “Visible and VUV optical absorption studies of Mg-colloids and colour centres in MgF2 crystals implanted by 100 keV Mg-ions,” Nucl. Instrum. Methods Phys. Res. B 218, 244–248 (2004).
[CrossRef]

Amotchkina, T. V.

Beisswenger, S.

A. Zöller, S. Beisswenger, R. Goetzelmann, and K. Matl, “Plasma-ion-assisted-deposition: a novel technique for the production of optical coatings,” Proc. SPIE 2253, 394–402 (1994).
[CrossRef]

Bernitzki, H.

M. Bischoff, M. Sode, D. Gäbler, H. Bernitzki, C. Zaczek, N. Kaiser, and A. Tünnermann, “Metal fluoride coatings prepared by ion-assisted deposition,” Proc. SPIE 7101, 71010L(2008).
[CrossRef]

Bertin, F.

L. Dumas, E. Quesnel, F. Pierre, and F. Bertin, “Optical properties of magnesium fluoride thin films produced by argon ion-beam assisted deposition,” J. Vac. Sci. Technol. A 20, 102–106 (2002).
[CrossRef]

Bischoff, M.

M. Bischoff, M. Sode, D. Gäbler, H. Bernitzki, C. Zaczek, N. Kaiser, and A. Tünnermann, “Metal fluoride coatings prepared by ion-assisted deposition,” Proc. SPIE 7101, 71010L(2008).
[CrossRef]

M. Bischoff, “Plasmagestützte Beschichtung von Metallfluoriden für den Tiefen Ultravioletten Spektralbereich,” Ph.D. dissertation (Friedrich-Schiller-University Jena, 2008), http://www.db-thueringen.de/servlets/DerivateServlet/Derivate-19700/Bischoff/Dissertation.pdf.

M. Bischoff, D. Gäbler, and N. Kaiser, “Plasma assisted deposition of metal fluoride coatings,” in Optical Interference Coatings, 2010 OSA Technical Digest (Optical Society of America, 2010), paper MD1.

M. Bischoff, O. Stenzel, K. Friedrich, S. Wilbrandt, D. Gäbler, S. Mewes, and N. Kaiser, “Plasma assisted deposition of metal fluoride coatings and modelling the extinction coefficient of as-deposited single layers,” submitted for publication to Appl. Opt.

Bosch, S.

Chen, H.-C.

C.-C. Jaing, M.-H. Shiao, C.-C. Lee, C.-J. Lu, M.-C. Liu, C.-H. Lee, and H.-C. Chen, “Effects of ion assist and substrate temperature on the optical properties and microstructure of MgF2 films produced by e-beam evaporation,” Proc. SPIE 5870, 58700F (2005).
[CrossRef]

Comins, J. D.

G. O. Amolo, J. D. Comins, A. T. Davidson, A. G. Kozakiewicz, T. E. Derry, and D. S. McLachlan, “Visible and VUV optical absorption studies of Mg-colloids and colour centres in MgF2 crystals implanted by 100 keV Mg-ions,” Nucl. Instrum. Methods Phys. Res. B 218, 244–248 (2004).
[CrossRef]

Davidson, A. T.

G. O. Amolo, J. D. Comins, A. T. Davidson, A. G. Kozakiewicz, T. E. Derry, and D. S. McLachlan, “Visible and VUV optical absorption studies of Mg-colloids and colour centres in MgF2 crystals implanted by 100 keV Mg-ions,” Nucl. Instrum. Methods Phys. Res. B 218, 244–248 (2004).
[CrossRef]

Derry, T. E.

G. O. Amolo, J. D. Comins, A. T. Davidson, A. G. Kozakiewicz, T. E. Derry, and D. S. McLachlan, “Visible and VUV optical absorption studies of Mg-colloids and colour centres in MgF2 crystals implanted by 100 keV Mg-ions,” Nucl. Instrum. Methods Phys. Res. B 218, 244–248 (2004).
[CrossRef]

Dobrowolski, J. A.

Dumas, L.

L. Dumas, E. Quesnel, F. Pierre, and F. Bertin, “Optical properties of magnesium fluoride thin films produced by argon ion-beam assisted deposition,” J. Vac. Sci. Technol. A 20, 102–106 (2002).
[CrossRef]

L. Dumas, E. Quesnel, J. Y. Robic, and Y. Pauleau, “Characterization of magnesium fluoride thin films produced by argon ion beam-assisted deposition,” Thin Solid Films 382, 61–68 (2001).
[CrossRef]

E. Quesnel, L. Dumas, D. Jacob, and F. Peiró, “Optical and microstructural properties of MgF2 UV coatings grown by ion beam sputtering process,” J. Vac. Sci. Technol. A 18, 2869–2876 (2000).
[CrossRef]

Duparré, A.

Etoh, K.

Ferre-Borrull, J.

Friedrich, K.

O. Stenzel, S. Wilbrandt, K. Friedrich, and N. Kaiser, “Realistische Modellierung der NIR/VIS/UV-Optischen Konstanten Dünner Optischer Schichten im Rahmen des Oszillatormodells,” Vak. Forsch. Prax. 21, 15–23 (2009).
[CrossRef]

M. Bischoff, O. Stenzel, K. Friedrich, S. Wilbrandt, D. Gäbler, S. Mewes, and N. Kaiser, “Plasma assisted deposition of metal fluoride coatings and modelling the extinction coefficient of as-deposited single layers,” submitted for publication to Appl. Opt.

Furuta, M.

Gäbler, D.

M. Bischoff, M. Sode, D. Gäbler, H. Bernitzki, C. Zaczek, N. Kaiser, and A. Tünnermann, “Metal fluoride coatings prepared by ion-assisted deposition,” Proc. SPIE 7101, 71010L(2008).
[CrossRef]

M. Bischoff, D. Gäbler, and N. Kaiser, “Plasma assisted deposition of metal fluoride coatings,” in Optical Interference Coatings, 2010 OSA Technical Digest (Optical Society of America, 2010), paper MD1.

M. Bischoff, O. Stenzel, K. Friedrich, S. Wilbrandt, D. Gäbler, S. Mewes, and N. Kaiser, “Plasma assisted deposition of metal fluoride coatings and modelling the extinction coefficient of as-deposited single layers,” submitted for publication to Appl. Opt.

Goetzelmann, R.

A. Zöller, S. Beisswenger, R. Goetzelmann, and K. Matl, “Plasma-ion-assisted-deposition: a novel technique for the production of optical coatings,” Proc. SPIE 2253, 394–402 (1994).
[CrossRef]

Günster, S.

Iwahori, K.

Jacob, D.

E. Quesnel, L. Dumas, D. Jacob, and F. Peiró, “Optical and microstructural properties of MgF2 UV coatings grown by ion beam sputtering process,” J. Vac. Sci. Technol. A 18, 2869–2876 (2000).
[CrossRef]

Jaing, C.-C.

C.-C. Jaing, M.-H. Shiao, C.-C. Lee, C.-J. Lu, M.-C. Liu, C.-H. Lee, and H.-C. Chen, “Effects of ion assist and substrate temperature on the optical properties and microstructure of MgF2 films produced by e-beam evaporation,” Proc. SPIE 5870, 58700F (2005).
[CrossRef]

Janicki, V.

V. Janicki, J. Sancho-Parramon, and H. Zorc, “Gradient silver nanoparticle layers in absorbing coatings—experimental study,” in Optical Interference Coatings, 2010 OSA Technical Digest (Optical Society of America, 2010), paper WA11.

Kachan, S.

S. Kachan, O. Stenzel, and A. Ponyavina, “High-absorbing gradient multilayer coatings with silver nanoparticles,” Appl. Phys. B 84, 281–287 (2006).
[CrossRef]

Kaiser, N.

O. Stenzel, S. Wilbrandt, K. Friedrich, and N. Kaiser, “Realistische Modellierung der NIR/VIS/UV-Optischen Konstanten Dünner Optischer Schichten im Rahmen des Oszillatormodells,” Vak. Forsch. Prax. 21, 15–23 (2009).
[CrossRef]

S. Wilbrandt, O. Stenzel, and N. Kaiser, “All-optical in-situ analysis of PIAD deposition processes,” Proc. SPIE 7101, 71010D (2008).
[CrossRef]

M. Bischoff, M. Sode, D. Gäbler, H. Bernitzki, C. Zaczek, N. Kaiser, and A. Tünnermann, “Metal fluoride coatings prepared by ion-assisted deposition,” Proc. SPIE 7101, 71010L(2008).
[CrossRef]

S. Wilbrandt, O. Stenzel, and N. Kaiser, “Experimental determination of the refractive index profile of rugate filters based on in situ measurements of transmission spectra,” J. Phys. D 40, 1435–1441 (2007).
[CrossRef]

M. Bischoff, D. Gäbler, and N. Kaiser, “Plasma assisted deposition of metal fluoride coatings,” in Optical Interference Coatings, 2010 OSA Technical Digest (Optical Society of America, 2010), paper MD1.

M. Bischoff, O. Stenzel, K. Friedrich, S. Wilbrandt, D. Gäbler, S. Mewes, and N. Kaiser, “Plasma assisted deposition of metal fluoride coatings and modelling the extinction coefficient of as-deposited single layers,” submitted for publication to Appl. Opt.

S. Wilbrandt, O. Stenzel, and N. Kaiser, “Combined in situ and ex situ optical analysis of fluoride coatings deposited by PIAD,” in Optical Interference Coatings, 2010 OSA Technical Digest (Optical Society of America, 2010), paper TuD2.

Kennedy, M.

M. Kennedy, D. Ristau, and H. S. Niederwald, “Ion beam-assisted deposition of MgF2 and YbF3 films,” Thin Solid Films 333, 191–195 (1998).
[CrossRef]

Kiriakidis, G.

Kozakiewicz, A. G.

G. O. Amolo, J. D. Comins, A. T. Davidson, A. G. Kozakiewicz, T. E. Derry, and D. S. McLachlan, “Visible and VUV optical absorption studies of Mg-colloids and colour centres in MgF2 crystals implanted by 100 keV Mg-ions,” Nucl. Instrum. Methods Phys. Res. B 218, 244–248 (2004).
[CrossRef]

Lee, C.-C.

C.-C. Jaing, M.-H. Shiao, C.-C. Lee, C.-J. Lu, M.-C. Liu, C.-H. Lee, and H.-C. Chen, “Effects of ion assist and substrate temperature on the optical properties and microstructure of MgF2 films produced by e-beam evaporation,” Proc. SPIE 5870, 58700F (2005).
[CrossRef]

Lee, C.-H.

C.-C. Jaing, M.-H. Shiao, C.-C. Lee, C.-J. Lu, M.-C. Liu, C.-H. Lee, and H.-C. Chen, “Effects of ion assist and substrate temperature on the optical properties and microstructure of MgF2 films produced by e-beam evaporation,” Proc. SPIE 5870, 58700F (2005).
[CrossRef]

Lehan, J. P.

L. J. Lingg, J. D. Targove, J. P. Lehan, and H. A. Macleod, “Ion-assisted deposition of lanthanide trifluorides for VUV applications,” Proc. SPIE 818, 86–92 (1987).

Lingg, L. J.

L. J. Lingg, J. D. Targove, J. P. Lehan, and H. A. Macleod, “Ion-assisted deposition of lanthanide trifluorides for VUV applications,” Proc. SPIE 818, 86–92 (1987).

Liu, M.-C.

C.-C. Jaing, M.-H. Shiao, C.-C. Lee, C.-J. Lu, M.-C. Liu, C.-H. Lee, and H.-C. Chen, “Effects of ion assist and substrate temperature on the optical properties and microstructure of MgF2 films produced by e-beam evaporation,” Proc. SPIE 5870, 58700F (2005).
[CrossRef]

Lu, C.-J.

C.-C. Jaing, M.-H. Shiao, C.-C. Lee, C.-J. Lu, M.-C. Liu, C.-H. Lee, and H.-C. Chen, “Effects of ion assist and substrate temperature on the optical properties and microstructure of MgF2 films produced by e-beam evaporation,” Proc. SPIE 5870, 58700F (2005).
[CrossRef]

Macleod, H. A.

L. J. Lingg, J. D. Targove, J. P. Lehan, and H. A. Macleod, “Ion-assisted deposition of lanthanide trifluorides for VUV applications,” Proc. SPIE 818, 86–92 (1987).

P. J. Martin, H. A. Macleod, R. P. Netterfield, C. G. Pacey, and W. G. Sainty, “Ion-beam-assisted deposition of thin films,” Appl. Opt. 22, 178–184 (1983).
[CrossRef]

Martin, P. J.

Martinu, L.

L. Martinu and D. Poitras, “Plasma deposition of optical films and coatings: a review,” J. Vac. Sci. Technol. A 18, 2619–2645(2000).
[CrossRef]

Masetti, E.

Matl, K.

A. Zöller, S. Beisswenger, R. Goetzelmann, and K. Matl, “Plasma-ion-assisted-deposition: a novel technique for the production of optical coatings,” Proc. SPIE 2253, 394–402 (1994).
[CrossRef]

McLachlan, D. S.

G. O. Amolo, J. D. Comins, A. T. Davidson, A. G. Kozakiewicz, T. E. Derry, and D. S. McLachlan, “Visible and VUV optical absorption studies of Mg-colloids and colour centres in MgF2 crystals implanted by 100 keV Mg-ions,” Nucl. Instrum. Methods Phys. Res. B 218, 244–248 (2004).
[CrossRef]

Mewes, S.

M. Bischoff, O. Stenzel, K. Friedrich, S. Wilbrandt, D. Gäbler, S. Mewes, and N. Kaiser, “Plasma assisted deposition of metal fluoride coatings and modelling the extinction coefficient of as-deposited single layers,” submitted for publication to Appl. Opt.

Netterfield, R. P.

Niederwald, H. S.

M. Kennedy, D. Ristau, and H. S. Niederwald, “Ion beam-assisted deposition of MgF2 and YbF3 films,” Thin Solid Films 333, 191–195 (1998).
[CrossRef]

Nishimoto, K.

Pacey, C. G.

Palik, E. D.

E. D. Palik, Handbook of Optical Constants of Solids: Part III (Academic, 1998).

Pauleau, Y.

L. Dumas, E. Quesnel, J. Y. Robic, and Y. Pauleau, “Characterization of magnesium fluoride thin films produced by argon ion beam-assisted deposition,” Thin Solid Films 382, 61–68 (2001).
[CrossRef]

Peiro, F.

Peiró, F.

E. Quesnel, L. Dumas, D. Jacob, and F. Peiró, “Optical and microstructural properties of MgF2 UV coatings grown by ion beam sputtering process,” J. Vac. Sci. Technol. A 18, 2869–2876 (2000).
[CrossRef]

Pierre, F.

L. Dumas, E. Quesnel, F. Pierre, and F. Bertin, “Optical properties of magnesium fluoride thin films produced by argon ion-beam assisted deposition,” J. Vac. Sci. Technol. A 20, 102–106 (2002).
[CrossRef]

Poitras, D.

L. Martinu and D. Poitras, “Plasma deposition of optical films and coatings: a review,” J. Vac. Sci. Technol. A 18, 2619–2645(2000).
[CrossRef]

Ponyavina, A.

S. Kachan, O. Stenzel, and A. Ponyavina, “High-absorbing gradient multilayer coatings with silver nanoparticles,” Appl. Phys. B 84, 281–287 (2006).
[CrossRef]

Quesnel, E.

L. Dumas, E. Quesnel, F. Pierre, and F. Bertin, “Optical properties of magnesium fluoride thin films produced by argon ion-beam assisted deposition,” J. Vac. Sci. Technol. A 20, 102–106 (2002).
[CrossRef]

D. Ristau, S. Günster, S. Bosch, A. Duparré, E. Masetti, J. Ferre-Borrull, G. Kiriakidis, F. Peiro, E. Quesnel, and A. Tikhonravov, “Ultraviolet optical and microstructural properties of MgF2 and LaF3 coatings deposited by ion-beam sputtering and boat and electron-beam evaporation,” Appl. Opt. 41, 3196–3204 (2002).
[CrossRef]

L. Dumas, E. Quesnel, J. Y. Robic, and Y. Pauleau, “Characterization of magnesium fluoride thin films produced by argon ion beam-assisted deposition,” Thin Solid Films 382, 61–68 (2001).
[CrossRef]

E. Quesnel, L. Dumas, D. Jacob, and F. Peiró, “Optical and microstructural properties of MgF2 UV coatings grown by ion beam sputtering process,” J. Vac. Sci. Technol. A 18, 2869–2876 (2000).
[CrossRef]

Ristau, D.

Robic, J. Y.

L. Dumas, E. Quesnel, J. Y. Robic, and Y. Pauleau, “Characterization of magnesium fluoride thin films produced by argon ion beam-assisted deposition,” Thin Solid Films 382, 61–68 (2001).
[CrossRef]

Sainty, W. G.

Sancho-Parramon, J.

V. Janicki, J. Sancho-Parramon, and H. Zorc, “Gradient silver nanoparticle layers in absorbing coatings—experimental study,” in Optical Interference Coatings, 2010 OSA Technical Digest (Optical Society of America, 2010), paper WA11.

Sekine, K.

Shiao, M.-H.

C.-C. Jaing, M.-H. Shiao, C.-C. Lee, C.-J. Lu, M.-C. Liu, C.-H. Lee, and H.-C. Chen, “Effects of ion assist and substrate temperature on the optical properties and microstructure of MgF2 films produced by e-beam evaporation,” Proc. SPIE 5870, 58700F (2005).
[CrossRef]

Sode, M.

M. Bischoff, M. Sode, D. Gäbler, H. Bernitzki, C. Zaczek, N. Kaiser, and A. Tünnermann, “Metal fluoride coatings prepared by ion-assisted deposition,” Proc. SPIE 7101, 71010L(2008).
[CrossRef]

Stenzel, O.

O. Stenzel, S. Wilbrandt, K. Friedrich, and N. Kaiser, “Realistische Modellierung der NIR/VIS/UV-Optischen Konstanten Dünner Optischer Schichten im Rahmen des Oszillatormodells,” Vak. Forsch. Prax. 21, 15–23 (2009).
[CrossRef]

S. Wilbrandt, O. Stenzel, and N. Kaiser, “All-optical in-situ analysis of PIAD deposition processes,” Proc. SPIE 7101, 71010D (2008).
[CrossRef]

S. Wilbrandt, O. Stenzel, and N. Kaiser, “Experimental determination of the refractive index profile of rugate filters based on in situ measurements of transmission spectra,” J. Phys. D 40, 1435–1441 (2007).
[CrossRef]

S. Kachan, O. Stenzel, and A. Ponyavina, “High-absorbing gradient multilayer coatings with silver nanoparticles,” Appl. Phys. B 84, 281–287 (2006).
[CrossRef]

O. Stenzel, The Physics of Thin Film Optical Spectra: an Introduction, Springer Series in Surface Sciences (Springer, 2005).

S. Wilbrandt, O. Stenzel, and N. Kaiser, “Combined in situ and ex situ optical analysis of fluoride coatings deposited by PIAD,” in Optical Interference Coatings, 2010 OSA Technical Digest (Optical Society of America, 2010), paper TuD2.

M. Bischoff, O. Stenzel, K. Friedrich, S. Wilbrandt, D. Gäbler, S. Mewes, and N. Kaiser, “Plasma assisted deposition of metal fluoride coatings and modelling the extinction coefficient of as-deposited single layers,” submitted for publication to Appl. Opt.

Sullivan, B. T.

B. T. Sullivan, “An overview of optical monitoring techniques,” in Optical Interference Coatings Topical Meeting, 2010 OSA Technical Digest (Optical Society of America, 2010), paper TuC1.

Taki, Y.

Tanaka, A.

Targove, J. D.

L. J. Lingg, J. D. Targove, J. P. Lehan, and H. A. Macleod, “Ion-assisted deposition of lanthanide trifluorides for VUV applications,” Proc. SPIE 818, 86–92 (1987).

Tikhonravov, A.

Tikhonravov, A. V.

Trubetskov, M. K.

Tünnermann, A.

M. Bischoff, M. Sode, D. Gäbler, H. Bernitzki, C. Zaczek, N. Kaiser, and A. Tünnermann, “Metal fluoride coatings prepared by ion-assisted deposition,” Proc. SPIE 7101, 71010L(2008).
[CrossRef]

Wilbrandt, S.

O. Stenzel, S. Wilbrandt, K. Friedrich, and N. Kaiser, “Realistische Modellierung der NIR/VIS/UV-Optischen Konstanten Dünner Optischer Schichten im Rahmen des Oszillatormodells,” Vak. Forsch. Prax. 21, 15–23 (2009).
[CrossRef]

S. Wilbrandt, O. Stenzel, and N. Kaiser, “All-optical in-situ analysis of PIAD deposition processes,” Proc. SPIE 7101, 71010D (2008).
[CrossRef]

S. Wilbrandt, O. Stenzel, and N. Kaiser, “Experimental determination of the refractive index profile of rugate filters based on in situ measurements of transmission spectra,” J. Phys. D 40, 1435–1441 (2007).
[CrossRef]

M. Bischoff, O. Stenzel, K. Friedrich, S. Wilbrandt, D. Gäbler, S. Mewes, and N. Kaiser, “Plasma assisted deposition of metal fluoride coatings and modelling the extinction coefficient of as-deposited single layers,” submitted for publication to Appl. Opt.

S. Wilbrandt, O. Stenzel, and N. Kaiser, “Combined in situ and ex situ optical analysis of fluoride coatings deposited by PIAD,” in Optical Interference Coatings, 2010 OSA Technical Digest (Optical Society of America, 2010), paper TuD2.

Yamamura, T.

Yoshida, T.

Zaczek, C.

M. Bischoff, M. Sode, D. Gäbler, H. Bernitzki, C. Zaczek, N. Kaiser, and A. Tünnermann, “Metal fluoride coatings prepared by ion-assisted deposition,” Proc. SPIE 7101, 71010L(2008).
[CrossRef]

Zöller, A.

A. Zöller, S. Beisswenger, R. Goetzelmann, and K. Matl, “Plasma-ion-assisted-deposition: a novel technique for the production of optical coatings,” Proc. SPIE 2253, 394–402 (1994).
[CrossRef]

Zorc, H.

V. Janicki, J. Sancho-Parramon, and H. Zorc, “Gradient silver nanoparticle layers in absorbing coatings—experimental study,” in Optical Interference Coatings, 2010 OSA Technical Digest (Optical Society of America, 2010), paper WA11.

Appl. Opt. (6)

Appl. Phys. B (1)

S. Kachan, O. Stenzel, and A. Ponyavina, “High-absorbing gradient multilayer coatings with silver nanoparticles,” Appl. Phys. B 84, 281–287 (2006).
[CrossRef]

J. Phys. D (1)

S. Wilbrandt, O. Stenzel, and N. Kaiser, “Experimental determination of the refractive index profile of rugate filters based on in situ measurements of transmission spectra,” J. Phys. D 40, 1435–1441 (2007).
[CrossRef]

J. Vac. Sci. Technol. A (3)

L. Dumas, E. Quesnel, F. Pierre, and F. Bertin, “Optical properties of magnesium fluoride thin films produced by argon ion-beam assisted deposition,” J. Vac. Sci. Technol. A 20, 102–106 (2002).
[CrossRef]

E. Quesnel, L. Dumas, D. Jacob, and F. Peiró, “Optical and microstructural properties of MgF2 UV coatings grown by ion beam sputtering process,” J. Vac. Sci. Technol. A 18, 2869–2876 (2000).
[CrossRef]

L. Martinu and D. Poitras, “Plasma deposition of optical films and coatings: a review,” J. Vac. Sci. Technol. A 18, 2619–2645(2000).
[CrossRef]

Nucl. Instrum. Methods Phys. Res. B (1)

G. O. Amolo, J. D. Comins, A. T. Davidson, A. G. Kozakiewicz, T. E. Derry, and D. S. McLachlan, “Visible and VUV optical absorption studies of Mg-colloids and colour centres in MgF2 crystals implanted by 100 keV Mg-ions,” Nucl. Instrum. Methods Phys. Res. B 218, 244–248 (2004).
[CrossRef]

Proc. SPIE (5)

L. J. Lingg, J. D. Targove, J. P. Lehan, and H. A. Macleod, “Ion-assisted deposition of lanthanide trifluorides for VUV applications,” Proc. SPIE 818, 86–92 (1987).

A. Zöller, S. Beisswenger, R. Goetzelmann, and K. Matl, “Plasma-ion-assisted-deposition: a novel technique for the production of optical coatings,” Proc. SPIE 2253, 394–402 (1994).
[CrossRef]

M. Bischoff, M. Sode, D. Gäbler, H. Bernitzki, C. Zaczek, N. Kaiser, and A. Tünnermann, “Metal fluoride coatings prepared by ion-assisted deposition,” Proc. SPIE 7101, 71010L(2008).
[CrossRef]

C.-C. Jaing, M.-H. Shiao, C.-C. Lee, C.-J. Lu, M.-C. Liu, C.-H. Lee, and H.-C. Chen, “Effects of ion assist and substrate temperature on the optical properties and microstructure of MgF2 films produced by e-beam evaporation,” Proc. SPIE 5870, 58700F (2005).
[CrossRef]

S. Wilbrandt, O. Stenzel, and N. Kaiser, “All-optical in-situ analysis of PIAD deposition processes,” Proc. SPIE 7101, 71010D (2008).
[CrossRef]

Thin Solid Films (2)

L. Dumas, E. Quesnel, J. Y. Robic, and Y. Pauleau, “Characterization of magnesium fluoride thin films produced by argon ion beam-assisted deposition,” Thin Solid Films 382, 61–68 (2001).
[CrossRef]

M. Kennedy, D. Ristau, and H. S. Niederwald, “Ion beam-assisted deposition of MgF2 and YbF3 films,” Thin Solid Films 333, 191–195 (1998).
[CrossRef]

Vak. Forsch. Prax. (1)

O. Stenzel, S. Wilbrandt, K. Friedrich, and N. Kaiser, “Realistische Modellierung der NIR/VIS/UV-Optischen Konstanten Dünner Optischer Schichten im Rahmen des Oszillatormodells,” Vak. Forsch. Prax. 21, 15–23 (2009).
[CrossRef]

Other (10)

O. Stenzel, The Physics of Thin Film Optical Spectra: an Introduction, Springer Series in Surface Sciences (Springer, 2005).

E. D. Palik, Handbook of Optical Constants of Solids: Part III (Academic, 1998).

V. Janicki, J. Sancho-Parramon, and H. Zorc, “Gradient silver nanoparticle layers in absorbing coatings—experimental study,” in Optical Interference Coatings, 2010 OSA Technical Digest (Optical Society of America, 2010), paper WA11.

http://www.PluTO-projekt.de.

S. Wilbrandt, O. Stenzel, and N. Kaiser, “Combined in situ and ex situ optical analysis of fluoride coatings deposited by PIAD,” in Optical Interference Coatings, 2010 OSA Technical Digest (Optical Society of America, 2010), paper TuD2.

M. Bischoff, O. Stenzel, K. Friedrich, S. Wilbrandt, D. Gäbler, S. Mewes, and N. Kaiser, “Plasma assisted deposition of metal fluoride coatings and modelling the extinction coefficient of as-deposited single layers,” submitted for publication to Appl. Opt.

http://www.iof.fraunhofer.de/departments/optical-coatings/_media/vneinsaetze_e.pdf.

M. Bischoff, D. Gäbler, and N. Kaiser, “Plasma assisted deposition of metal fluoride coatings,” in Optical Interference Coatings, 2010 OSA Technical Digest (Optical Society of America, 2010), paper MD1.

B. T. Sullivan, “An overview of optical monitoring techniques,” in Optical Interference Coatings Topical Meeting, 2010 OSA Technical Digest (Optical Society of America, 2010), paper TuC1.

M. Bischoff, “Plasmagestützte Beschichtung von Metallfluoriden für den Tiefen Ultravioletten Spektralbereich,” Ph.D. dissertation (Friedrich-Schiller-University Jena, 2008), http://www.db-thueringen.de/servlets/DerivateServlet/Derivate-19700/Bischoff/Dissertation.pdf.

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Figures (6)

Fig. 1
Fig. 1

Configuration of the deposition plant.

Fig. 2
Fig. 2

Refractive index (solid curve) and extinction coefficient (dashed curve) of MgF 2 (left, k = 0 ) and Mg (right).

Fig. 3
Fig. 3

Calculated profile of the extinction coefficient (left) and filling factor (right).

Fig. 4
Fig. 4

Transmittance of a 200 nm single-layer MgF 2 on a quartz substrate measured with OptiMon in vacuum after deposition (solid curve) and after venting (dashed curve).

Fig. 5
Fig. 5

Averaged transmittance ( 400 420 nm ) of a 200 nm single-layer MgF 2 on a quartz substrate calculated from in situ transmittance measurements of OptiMon (solid curve) and from ex situ determined optical constants based on transmittance and reflectance measurements (dashed curve); deposition start and end are marked (dotted line).

Fig. 6
Fig. 6

Averaged transmittance ( 400 420 nm ) of a 200 nm single-layer MgF 2 on a quartz substrate calculated from in situ transmittance measurements of OptiMon (solid curve) and modeled with a bilinear filling factor profile of Mg clusters in a MgF 2 matrix (dashed curve); deposition start and end are marked (dotted line).

Equations (4)

Equations on this page are rendered with MathJax. Learn more.

( ε mix ε MgF 2 ) ε MgF 2 + ( ε mix ε MgF 2 ) L = p ( ε Mg ε MgF 2 ) ε MgF 2 + ( ε Mg ε MgF 2 ) L ,
n ( λ ) + i k ( λ ) = ε ( λ ) .
n mix ( z ) + i k mix ( z ) = n MgF 2 { n MgF 2 2 [ 1 L p ( z ) p ( z ) L ] + ( n Mg + i k Mg ) 2 [ L + p ( z ) p ( z ) L ] n MgF 2 2 [ 1 L + p ( z ) L ] + ( n Mg + i k Mg ) 2 [ L p ( z ) L ] } 1 / 2 .
DF = { 1 21 · 420 m = 0 419 [ j = 0 20 ( T meas , m ( λ j ) T calc , m ( λ j , p ( z = d m ) ) Δ T ( λ j ) ) 2 ] } 1 / 2 with λ j = ( 400 + j ) nm and d m = m 419 d .

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