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Estimation of phase shifts linked only to the coating for a dielectric mirror

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Abstract

The wavefront is an important characteristic for a dielectric mirror. Its measurement is usually performed with interferometers. We introduce a new method to evaluate only the coating wavefront distortion due to nonuniform thickness errors by using a reflectometer. This method uses some reflectance or transmittance maps at a wavenumber σm for which the reflectance or transmittance factor variation is high. These variations are translated into some central wavenumber σc variations, which enables the determination of a phase map from experimental treatment.

© 2011 Optical Society of America

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