Abstract

The process of fabricating photonic crystals comprised of alternately stacked high- and low-index dielectric materials on periodic substrates to form zigzag films is called the autocloning technique. In this study, we have fabricated ${\mathrm{TiO}}_2/{\mathrm{SiO}}_2$ two-dimensional polarization filters by using electron beam gun evaporation with ion-beam-assisted deposition. The shape of the zigzag structure is preserved, and the total thickness is $8\mathrm{\mu m}$. The symmetric structural design can be utilized as an antireflection coating applied to reduce ripples and achieve a $200\mathrm{nm}$ working wavelength range.

© 2011 Optical Society of America

Design and fabrication of multichannel Si/SiO₂autocloned photonic crystal edge filters

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