Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

In situ thickness determination of multilayered structures using single wavelength ellipsometry and reverse engineering

Not Accessible

Your library or personal account may give you access

Abstract

An in situ monitoring setup and process control loop were developed and integrated into a magnetron sputtering coater equipped with a Sentech SE 401 single wavelength ellipsometer, including the engineering of software for in situ process control to enhance production accuracy. By using that software, the system allows direct monitoring of the layer thickness on a moving substrate. It is shown that it is possible to determine the complex index of refraction from the distribution of measurements depending on the layer thickness. A strategy has been developed for in situ reverse thickness engineering of the top layers to compensate measurement errors.

© 2010 Optical Society of America

Full Article  |  PDF Article
More Like This
On the reliability of reverse engineering results

Tatiana V. Amotchkina, Michael K. Trubetskov, Vladimir Pervak, Boris Romanov, and Alexander V. Tikhonravov
Appl. Opt. 51(22) 5543-5551 (2012)

Real-time control by multiwavelength ellipsometry of plasma-deposited multilayers on glass by use of an incoherent-reflection model

M. Kildemo, P. Bulkin, B. Drévillon, and O. Hunderi
Appl. Opt. 36(25) 6352-6359 (1997)

Application of in situ ellipsometry in the fabrication of thin-film optical coatings on semiconductors

Marcel G. Boudreau, Steven G. Wallace, Ginutis Balcaitis, Sangeeta Murugkar, Harold K. Haugen, and Peter Mascher
Appl. Opt. 39(6) 1053-1058 (2000)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (10)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (7)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved