Abstract

A CCD angular resolved scattering setup is presented. This new high sensitivity instrument allows both spatial and angular resolved measurement of scattered field intensity and polarimetric features. Applications to the comprehensive characterization of optical coatings are given.

© 2011 Optical Society of America

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References

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  1. C. Amra, “Light scattering from multilayer optics. II. Application to experiment,” J. Opt. Soc. Am. A 11, 211–226 (1994).
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  4. A. Duparre, J. Ferre-Borrull, S. Gliech, G. Notni, J. Steinert, and J. M. Bennett, “Surface characterization techniques for determining the root-mean-square roughness and power spectral densities of optical components,” Appl. Opt. 41, 154–171(2002).
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  6. J. C. Stover, Optical Scattering: Measurement and Analysis, 2nd ed. (SPIE, 1995), Chap. 6.
    [CrossRef]
  7. S. Maure, G. Albrand, and C. Amra, “Low-level scattering and localized defects,” Appl. Opt. 35, 5573–5582 (1996).
    [CrossRef] [PubMed]
  8. M. Zerrad, C. Deumié, M. Lequime, and C. Amra, “An alternative scattering method to characterize surface roughness from transparent substrates,” Opt. Express 15, 9222–9231(2007).
    [CrossRef] [PubMed]
  9. M. Lequime, M. Zerrad, C. Deumie, and C. Amra, “A goniometric light scattering instrument with high-resolution imaging,” Opt. Commun. 282, 1265–1273 (2009).
    [CrossRef]
  10. M. Zerrad, M. Lequime, C. Deumie, and C. Amra, “Characterization of optical coatings with a CCD angular and spatial resolved scatterometer,” in Optical Interference Coatings(Optical Society of America, 2007), paper ThA5.
  11. M. Zerrad, M. Lequime, C. Deumie, and C. Amra, “Development of a goniometric light scatter instrument with sample imaging ability,” Proc. SPIE 7102, 710207 (2008).
    [CrossRef]
  12. M. Zerrad, M. Lequime, C. Deumié, and C. Amra, “CCD-ARS set-up: a comprehensive and fast high sensitivity characterisation tool for optical components,” Proc. SPIE 7718, 77180A(2010).
    [CrossRef]
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2010 (1)

M. Zerrad, M. Lequime, C. Deumié, and C. Amra, “CCD-ARS set-up: a comprehensive and fast high sensitivity characterisation tool for optical components,” Proc. SPIE 7718, 77180A(2010).
[CrossRef]

2009 (1)

M. Lequime, M. Zerrad, C. Deumie, and C. Amra, “A goniometric light scattering instrument with high-resolution imaging,” Opt. Commun. 282, 1265–1273 (2009).
[CrossRef]

2008 (1)

M. Zerrad, M. Lequime, C. Deumie, and C. Amra, “Development of a goniometric light scatter instrument with sample imaging ability,” Proc. SPIE 7102, 710207 (2008).
[CrossRef]

2007 (1)

2004 (1)

2002 (2)

1998 (1)

1997 (1)

1996 (1)

1994 (2)

1993 (1)

1992 (1)

1987 (1)

1984 (1)

Acosta-Ortiz, S. E.

Albrand, G.

Amra, C.

M. Zerrad, M. Lequime, C. Deumié, and C. Amra, “CCD-ARS set-up: a comprehensive and fast high sensitivity characterisation tool for optical components,” Proc. SPIE 7718, 77180A(2010).
[CrossRef]

M. Lequime, M. Zerrad, C. Deumie, and C. Amra, “A goniometric light scattering instrument with high-resolution imaging,” Opt. Commun. 282, 1265–1273 (2009).
[CrossRef]

M. Zerrad, M. Lequime, C. Deumie, and C. Amra, “Development of a goniometric light scatter instrument with sample imaging ability,” Proc. SPIE 7102, 710207 (2008).
[CrossRef]

M. Zerrad, C. Deumié, M. Lequime, and C. Amra, “An alternative scattering method to characterize surface roughness from transparent substrates,” Opt. Express 15, 9222–9231(2007).
[CrossRef] [PubMed]

S. Maure, G. Albrand, and C. Amra, “Low-level scattering and localized defects,” Appl. Opt. 35, 5573–5582 (1996).
[CrossRef] [PubMed]

C. Amra, “Light scattering from multilayer optics. II. Application to experiment,” J. Opt. Soc. Am. A 11, 211–226 (1994).
[CrossRef]

C. Amra, “Light scattering from multilayer optics. I. Tools of investigation,” J. Opt. Soc. Am. A 11, 197–210 (1994).
[CrossRef]

C. Amra, “From light scattering to the microstructure of thin-film multilayers,” Appl. Opt. 32, 5481–5491 (1993).
[CrossRef] [PubMed]

M. Zerrad, M. Lequime, C. Deumie, and C. Amra, “Characterization of optical coatings with a CCD angular and spatial resolved scatterometer,” in Optical Interference Coatings(Optical Society of America, 2007), paper ThA5.

Bennett, J. M.

Bickel, W. S.

De Martino, A.

Delplancke, F. H.

Deumie, C.

M. Lequime, M. Zerrad, C. Deumie, and C. Amra, “A goniometric light scattering instrument with high-resolution imaging,” Opt. Commun. 282, 1265–1273 (2009).
[CrossRef]

M. Zerrad, M. Lequime, C. Deumie, and C. Amra, “Development of a goniometric light scatter instrument with sample imaging ability,” Proc. SPIE 7102, 710207 (2008).
[CrossRef]

M. Zerrad, M. Lequime, C. Deumie, and C. Amra, “Characterization of optical coatings with a CCD angular and spatial resolved scatterometer,” in Optical Interference Coatings(Optical Society of America, 2007), paper ThA5.

Deumié, C.

M. Zerrad, M. Lequime, C. Deumié, and C. Amra, “CCD-ARS set-up: a comprehensive and fast high sensitivity characterisation tool for optical components,” Proc. SPIE 7718, 77180A(2010).
[CrossRef]

M. Zerrad, C. Deumié, M. Lequime, and C. Amra, “An alternative scattering method to characterize surface roughness from transparent substrates,” Opt. Express 15, 9222–9231(2007).
[CrossRef] [PubMed]

Drévillon, B.

Duparre, A.

Espinosa-Luna, R.

Ferre-Borrull, J.

Gliech, S.

Kim, K.

Laude-Boulesteix, B.

Lequime, M.

M. Zerrad, M. Lequime, C. Deumié, and C. Amra, “CCD-ARS set-up: a comprehensive and fast high sensitivity characterisation tool for optical components,” Proc. SPIE 7718, 77180A(2010).
[CrossRef]

M. Lequime, M. Zerrad, C. Deumie, and C. Amra, “A goniometric light scattering instrument with high-resolution imaging,” Opt. Commun. 282, 1265–1273 (2009).
[CrossRef]

M. Zerrad, M. Lequime, C. Deumie, and C. Amra, “Development of a goniometric light scatter instrument with sample imaging ability,” Proc. SPIE 7102, 710207 (2008).
[CrossRef]

M. Zerrad, C. Deumié, M. Lequime, and C. Amra, “An alternative scattering method to characterize surface roughness from transparent substrates,” Opt. Express 15, 9222–9231(2007).
[CrossRef] [PubMed]

M. Zerrad, M. Lequime, C. Deumie, and C. Amra, “Characterization of optical coatings with a CCD angular and spatial resolved scatterometer,” in Optical Interference Coatings(Optical Society of America, 2007), paper ThA5.

Luna, R. E.

Mandel, L.

Mattsson, L.

J. M. Bennett and L. Mattsson, Introduction to Surface Roughness and Scattering, 2nd ed. (Optical Society of America, 1999).

Maure, S.

Notni, G.

Pelletier, E.

Roche, P.

Schwartz, L.

Steinert, J.

Stover, J. C.

J. C. Stover, Optical Scattering: Measurement and Analysis, 2nd ed. (SPIE, 1995), Chap. 6.
[CrossRef]

Videen, G.

Wolf, E.

Zerrad, M.

M. Zerrad, M. Lequime, C. Deumié, and C. Amra, “CCD-ARS set-up: a comprehensive and fast high sensitivity characterisation tool for optical components,” Proc. SPIE 7718, 77180A(2010).
[CrossRef]

M. Lequime, M. Zerrad, C. Deumie, and C. Amra, “A goniometric light scattering instrument with high-resolution imaging,” Opt. Commun. 282, 1265–1273 (2009).
[CrossRef]

M. Zerrad, M. Lequime, C. Deumie, and C. Amra, “Development of a goniometric light scatter instrument with sample imaging ability,” Proc. SPIE 7102, 710207 (2008).
[CrossRef]

M. Zerrad, C. Deumié, M. Lequime, and C. Amra, “An alternative scattering method to characterize surface roughness from transparent substrates,” Opt. Express 15, 9222–9231(2007).
[CrossRef] [PubMed]

M. Zerrad, M. Lequime, C. Deumie, and C. Amra, “Characterization of optical coatings with a CCD angular and spatial resolved scatterometer,” in Optical Interference Coatings(Optical Society of America, 2007), paper ThA5.

Zou, L. F.

Appl. Opt. (7)

J. Opt. Soc. Am. A (3)

Opt. Commun. (1)

M. Lequime, M. Zerrad, C. Deumie, and C. Amra, “A goniometric light scattering instrument with high-resolution imaging,” Opt. Commun. 282, 1265–1273 (2009).
[CrossRef]

Opt. Express (1)

Opt. Lett. (2)

Proc. SPIE (2)

M. Zerrad, M. Lequime, C. Deumie, and C. Amra, “Development of a goniometric light scatter instrument with sample imaging ability,” Proc. SPIE 7102, 710207 (2008).
[CrossRef]

M. Zerrad, M. Lequime, C. Deumié, and C. Amra, “CCD-ARS set-up: a comprehensive and fast high sensitivity characterisation tool for optical components,” Proc. SPIE 7718, 77180A(2010).
[CrossRef]

Other (3)

M. Zerrad, M. Lequime, C. Deumie, and C. Amra, “Characterization of optical coatings with a CCD angular and spatial resolved scatterometer,” in Optical Interference Coatings(Optical Society of America, 2007), paper ThA5.

J. M. Bennett and L. Mattsson, Introduction to Surface Roughness and Scattering, 2nd ed. (Optical Society of America, 1999).

J. C. Stover, Optical Scattering: Measurement and Analysis, 2nd ed. (SPIE, 1995), Chap. 6.
[CrossRef]

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Figures (8)

Fig. 1
Fig. 1

Influence of localized defects on light scattered by a 500 μm × 500 μm surface with zero or ten defects with a diameter between 3 and 8 μm and a height less than 200 nm .

Fig. 2
Fig. 2

Schematic representation of the CCD-ARS setup.

Fig. 3
Fig. 3

Intrinsic roughness mapping measured with the CCD-ARS setup after extraction of areas of influence of localized defects.

Fig. 4
Fig. 4

Statistical repartition of the local roughness measured on the surface given in Fig. 3 before and after extraction of the pixels whose measurement was disturbed by the vicinity of a defect.

Fig. 5
Fig. 5

TIS cartography recorded for a multi dielectric mirror.

Fig. 6
Fig. 6

Mueller matrix coefficient mappings measured for the same component as in Fig. 5 for an illumination angle of i = 65 ° .

Fig. 7
Fig. 7

Cartography of the contrast ratio of the Mueller matrix coefficient m 11 measured by variation of the illumination angle.

Fig. 8
Fig. 8

Cartography of the contrast ratio of the Mueller matrix coefficient m 13 measured by variation of the illumination angle.

Equations (3)

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PSS = ( S 0 S S 1 S S 2 S S 3 S ) = M * PSI = ( m 00 m 01 m 02 m 03 m 10 m 11 m 12 m 13 m 20 m 21 m 22 m 23 m 30 m 31 m 32 m 33 ) ( S 0 I S 1 I S 2 I S 3 I ) .
TIS = i 2 π BRDF ( i ) cos i sin i d i .
C p , q ( x , y ) = Max 15 ° i 89 ° ( m p , q ( x , y ) ) Min 15 ° i 89 ° ( m p , q ( x , y ) ) | Max 15 ° i 89 ° ( m p , q ( x , y ) ) | + | Min 15 ° i 89 ° ( m p , q ( x , y ) ) | ,

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