Abstract

This study elucidates the effects of columnar angles and deposition angles on the thermal expansion coefficients and intrinsic stress behaviors of ${\mathrm{MgF}}_2$ films with columnar microstructures. The behaviors associated with temperature-dependent stresses in the ${\mathrm{MgF}}_2$ films are measured using a phase-shifting Twyman–Green interferometer with a heating stage and the application of a phase reduction algorithm. The thermal expansion coefficients of ${\mathrm{MgF}}_2$ films at various columnar angles were larger than those of glass substrates. The intrinsic stress in the ${\mathrm{MgF}}_2$ films with columnar microstructures was compressive, while the thermal stress was tensile. The thermal expansion coefficients of ${\mathrm{MgF}}_2$ films with columnar microstructures and their intrinsic stress evidently depended on the deposition angle and the columnar angle.

© 2010 Optical Society of America

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