Abstract

A rigorous definition of the error self-compensation effect is provided. An existence of this effect in the case of coating production with broadband optical monitoring of layer thicknesses is investigated for several widely used types of optical coatings.

© 2010 Optical Society of America

Investigation of the error self-compensation effect associated with direct broad band monitoring of coating production

A. V. Tikhonravov, I. V. Kochikov, and A. G. Yagola
Opt. Express 26(19) 24964-24972 (2018)

Turning point monitoring of narrow bandpass filters: the enormous strength of the error self-compensation effect

A. Tikhonravov, Iu. Lagutin, and A. Yagola
Appl. Opt. 61(28) 8281-8285 (2022)

Investigation of the effect of accumulation of thickness errors in optical coating production by broadband optical monitoring

Alexander V. Tikhonravov, Michael K. Trubetskov, and Tatiana V. Amotchkina
Appl. Opt. 45(27) 7026-7034 (2006)

Self-compensation of errors in optical coating production with monochromatic monitoring

A. V. Tikhonravov, A. A. Lagutina, Iu. S. Lagutin, D. V. Lukyanenko, I. V. Kochikov, and A. G. Yagola
Opt. Express 29(26) 44275-44282 (2021)

Error self-compensation mechanism in the optical coating production with direct broad band monitoring

A. V. Tikhonravov, I. V. Kochikov, and A. G. Yagola
Opt. Express 25(22) 27225-27233 (2017)