K. Hibino, Y. Tani, T. Takatsuji, Y. Bitou, S. Warisawa, and M. Mitsuishi, “Absolute interferometry for surface shapes with large steps by wavelength tuning with a mechanical phase shift,” Proc. SPIE 6292, 62920Q (2006).

Y. Bitou and K. Seta, “Gauge block measurement using a wavelength scanning interferometer,” Jpn. J. Appl. Phys. 39, 6084–6088 (2000).

[CrossRef]

S. Yokoyama, J. Ohnishi, S. Iwasaki, K. Seta, H. Matsumoto, and N. Suzuki, “Real-time and high-resolution absolute-distance measurement using a two-wavelength superheterodyne interferometer,” Meas. Sci. Technol. 10, 1233–1239(1999).

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[CrossRef]

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[CrossRef]

K. Hibino, Y. Tani, T. Takatsuji, Y. Bitou, S. Warisawa, and M. Mitsuishi, “Absolute interferometry for surface shapes with large steps by wavelength tuning with a mechanical phase shift,” Proc. SPIE 6292, 62920Q (2006).

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[CrossRef]
[PubMed]

Y. Bitou and K. Seta, “Gauge block measurement using a wavelength scanning interferometer,” Jpn. J. Appl. Phys. 39, 6084–6088 (2000).

[CrossRef]

M. Born and E. Wolf, “Theory of interference and interferometers,” in Principles of Optics, 7th ed. (Cambridge University, 1999), pp. 324–325.

P. J. de Groot and L. L. Deck, “Surface profiling by analysis of white-light interferograms in the spatial frequency domain,” J. Mod. Opt. 42, 389–401 (1995).

[CrossRef]

P. J. de Groot and L. L. Deck, “Surface profiling by analysis of white-light interferograms in the spatial frequency domain,” J. Mod. Opt. 42, 389–401 (1995).

[CrossRef]

K. Hibino, Y. Tani, T. Takatsuji, Y. Bitou, S. Warisawa, and M. Mitsuishi, “Absolute interferometry for surface shapes with large steps by wavelength tuning with a mechanical phase shift,” Proc. SPIE 6292, 62920Q (2006).

S. Yokoyama, J. Ohnishi, S. Iwasaki, K. Seta, H. Matsumoto, and N. Suzuki, “Real-time and high-resolution absolute-distance measurement using a two-wavelength superheterodyne interferometer,” Meas. Sci. Technol. 10, 1233–1239(1999).

[CrossRef]

S. Yokoyama, J. Ohnishi, S. Iwasaki, K. Seta, H. Matsumoto, and N. Suzuki, “Real-time and high-resolution absolute-distance measurement using a two-wavelength superheterodyne interferometer,” Meas. Sci. Technol. 10, 1233–1239(1999).

[CrossRef]

K. Hibino, Y. Tani, T. Takatsuji, Y. Bitou, S. Warisawa, and M. Mitsuishi, “Absolute interferometry for surface shapes with large steps by wavelength tuning with a mechanical phase shift,” Proc. SPIE 6292, 62920Q (2006).

S. Yokoyama, J. Ohnishi, S. Iwasaki, K. Seta, H. Matsumoto, and N. Suzuki, “Real-time and high-resolution absolute-distance measurement using a two-wavelength superheterodyne interferometer,” Meas. Sci. Technol. 10, 1233–1239(1999).

[CrossRef]

Y. Bitou and K. Seta, “Gauge block measurement using a wavelength scanning interferometer,” Jpn. J. Appl. Phys. 39, 6084–6088 (2000).

[CrossRef]

S. Yokoyama, J. Ohnishi, S. Iwasaki, K. Seta, H. Matsumoto, and N. Suzuki, “Real-time and high-resolution absolute-distance measurement using a two-wavelength superheterodyne interferometer,” Meas. Sci. Technol. 10, 1233–1239(1999).

[CrossRef]

S. Yokoyama, J. Ohnishi, S. Iwasaki, K. Seta, H. Matsumoto, and N. Suzuki, “Real-time and high-resolution absolute-distance measurement using a two-wavelength superheterodyne interferometer,” Meas. Sci. Technol. 10, 1233–1239(1999).

[CrossRef]

K. Hibino, Y. Tani, T. Takatsuji, Y. Bitou, S. Warisawa, and M. Mitsuishi, “Absolute interferometry for surface shapes with large steps by wavelength tuning with a mechanical phase shift,” Proc. SPIE 6292, 62920Q (2006).

K. Hibino, Y. Tani, T. Takatsuji, Y. Bitou, S. Warisawa, and M. Mitsuishi, “Absolute interferometry for surface shapes with large steps by wavelength tuning with a mechanical phase shift,” Proc. SPIE 6292, 62920Q (2006).

K. Hibino, Y. Tani, T. Takatsuji, Y. Bitou, S. Warisawa, and M. Mitsuishi, “Absolute interferometry for surface shapes with large steps by wavelength tuning with a mechanical phase shift,” Proc. SPIE 6292, 62920Q (2006).

M. Born and E. Wolf, “Theory of interference and interferometers,” in Principles of Optics, 7th ed. (Cambridge University, 1999), pp. 324–325.

S. Yokoyama, J. Ohnishi, S. Iwasaki, K. Seta, H. Matsumoto, and N. Suzuki, “Real-time and high-resolution absolute-distance measurement using a two-wavelength superheterodyne interferometer,” Meas. Sci. Technol. 10, 1233–1239(1999).

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Y. Bitou, “Two wavelength phase-shifting interferometry with a superimposed grating displayed on an electrically addressed spatial light modulator,” Appl. Opt. 44, 1577–1581 (2005).

[CrossRef]
[PubMed]

P. J. de Groot and L. L. Deck, “Surface profiling by analysis of white-light interferograms in the spatial frequency domain,” J. Mod. Opt. 42, 389–401 (1995).

[CrossRef]

Y. Bitou and K. Seta, “Gauge block measurement using a wavelength scanning interferometer,” Jpn. J. Appl. Phys. 39, 6084–6088 (2000).

[CrossRef]

S. Yokoyama, J. Ohnishi, S. Iwasaki, K. Seta, H. Matsumoto, and N. Suzuki, “Real-time and high-resolution absolute-distance measurement using a two-wavelength superheterodyne interferometer,” Meas. Sci. Technol. 10, 1233–1239(1999).

[CrossRef]

R. Onodera and Y. Ishii, “Fourier description of the phase-measuring process in wavelength phase-shifting interferometry,” Opt. Commun. 137, 27–30 (1997).

[CrossRef]

K. Hibino, Y. Tani, T. Takatsuji, Y. Bitou, S. Warisawa, and M. Mitsuishi, “Absolute interferometry for surface shapes with large steps by wavelength tuning with a mechanical phase shift,” Proc. SPIE 6292, 62920Q (2006).

M. Born and E. Wolf, “Theory of interference and interferometers,” in Principles of Optics, 7th ed. (Cambridge University, 1999), pp. 324–325.