We design and fabricate a hybrid refractive–diffractive cubic phase plate (CPP) with a combined conventional blazed grating for generating high quality Airy beams. The grating enables elimination of direct incident illumination in the reconstructed beam. The CPP is fabricated in a negative photoresist on a substrate by laser direct writing lithography with precise exposure control of gray scales. Experimentally measured intensity distribution of the Airy beam is found in good agreement with the theoretical predictions. Furthermore, self-healing and nondiffraction properties of the Airy beam are verified experimentally. The proposed method gives rise to a simple, reliable, and low-cost micro-optical element solution for the generation of high quality Airy beams.
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