Abstract

Plasma-enhanced chemical vapor deposition technology has been elaborated for obtaining diamond-like carbon (DLC) coatings of a wide range of properties. Alternative and direct bias voltages have been applied on the substrate, and refractive index dependencies upon various deposition technological parameters have been investigated. The frequency of the bias voltage has been varied in the region of 150450kHz. The maximum refractive index range that has been achieved is 1.46–3.2. Thin DLC films have been prepared on crystalline silicon substrates. Because of the wide range of physical, optical, and mechanical properties of the obtained films, they can successfully be applied in different fields of nano-optics.

© 2011 Optical Society of America

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  1. K. Honglertkongsakul, P. W. May, and B. Paosawatyanyong, “Electrical and optical properties of diamond-like carbon films deposited by pulsed laser ablation,” Diam. Relat. Mater. 19, 1999–10002 (2010).
    [CrossRef]
  2. T. Semikina and A. Shmyryeva, “Optical and protective properties of different type diamond and diamond-like carbon films,” Semicond. Phys. Quantum Electron. Optoelectron. 4, 313–317 (2001).
  3. S. Choi, K. Lee, S. Oh, and S. Lee, “Wide wavelength-range optical studies of hydrogenated amorphous carbon films: from 700 nm to 10 μm,” Appl. Surf. Sci. 169–170, 217–222 (2001).
    [CrossRef]
  4. Y. Hayashi, G. Yu, M. Rahman, K. Krishna, T. Soga, T. Jimbo, and M. Umeno, “Determination of optical properties of nitrogen-doped hydrogenated amorphous carbon films by spectroscopic ellipsometry,” Appl. Phys. Lett. 78, 3962–3964(2001).
    [CrossRef]
  5. V. Litovchenko and N. Klyui, “Solar cells based on DLC film—Si structures for space application,” Solar Energy Mater. Solar Cells 68, 55–70 (2001).
    [CrossRef]
  6. Zh. Panosyan, A. Gharibyan, A. Sargsyan, H. Panosyan, D. Hayrapetyan, and Ye. Yengibaryan, “Preparation and investigation of diamond-like carbon nanocomposite thin films for nanophotonics,” Proc. SPIE 7755, 77550Q (2010).
    [CrossRef]
  7. J. Pern, K. Touryan, Zh. Panosyan, and A. Gippius, “Method and apparatus for making diamond-like carbon films,” U.S. patent 7,459,188 (2 December 2008).
  8. E. D. Palik, Handbook of Optical Constants (Academic, 1998).
  9. Zh. Panosyan, A. Darbasyan, V. Meliksetyan, S. Voskanyan, A. Voskanyan, A. Sahakyan, and R. Gzraryan, “Low resistive diamond like carbon film development technique,” Thin Solid Films 517, 5404–5408 (2009).
    [CrossRef]

2010 (2)

K. Honglertkongsakul, P. W. May, and B. Paosawatyanyong, “Electrical and optical properties of diamond-like carbon films deposited by pulsed laser ablation,” Diam. Relat. Mater. 19, 1999–10002 (2010).
[CrossRef]

Zh. Panosyan, A. Gharibyan, A. Sargsyan, H. Panosyan, D. Hayrapetyan, and Ye. Yengibaryan, “Preparation and investigation of diamond-like carbon nanocomposite thin films for nanophotonics,” Proc. SPIE 7755, 77550Q (2010).
[CrossRef]

2009 (1)

Zh. Panosyan, A. Darbasyan, V. Meliksetyan, S. Voskanyan, A. Voskanyan, A. Sahakyan, and R. Gzraryan, “Low resistive diamond like carbon film development technique,” Thin Solid Films 517, 5404–5408 (2009).
[CrossRef]

2001 (4)

T. Semikina and A. Shmyryeva, “Optical and protective properties of different type diamond and diamond-like carbon films,” Semicond. Phys. Quantum Electron. Optoelectron. 4, 313–317 (2001).

S. Choi, K. Lee, S. Oh, and S. Lee, “Wide wavelength-range optical studies of hydrogenated amorphous carbon films: from 700 nm to 10 μm,” Appl. Surf. Sci. 169–170, 217–222 (2001).
[CrossRef]

Y. Hayashi, G. Yu, M. Rahman, K. Krishna, T. Soga, T. Jimbo, and M. Umeno, “Determination of optical properties of nitrogen-doped hydrogenated amorphous carbon films by spectroscopic ellipsometry,” Appl. Phys. Lett. 78, 3962–3964(2001).
[CrossRef]

V. Litovchenko and N. Klyui, “Solar cells based on DLC film—Si structures for space application,” Solar Energy Mater. Solar Cells 68, 55–70 (2001).
[CrossRef]

Choi, S.

S. Choi, K. Lee, S. Oh, and S. Lee, “Wide wavelength-range optical studies of hydrogenated amorphous carbon films: from 700 nm to 10 μm,” Appl. Surf. Sci. 169–170, 217–222 (2001).
[CrossRef]

Darbasyan, A.

Zh. Panosyan, A. Darbasyan, V. Meliksetyan, S. Voskanyan, A. Voskanyan, A. Sahakyan, and R. Gzraryan, “Low resistive diamond like carbon film development technique,” Thin Solid Films 517, 5404–5408 (2009).
[CrossRef]

Gharibyan, A.

Zh. Panosyan, A. Gharibyan, A. Sargsyan, H. Panosyan, D. Hayrapetyan, and Ye. Yengibaryan, “Preparation and investigation of diamond-like carbon nanocomposite thin films for nanophotonics,” Proc. SPIE 7755, 77550Q (2010).
[CrossRef]

Gippius, A.

J. Pern, K. Touryan, Zh. Panosyan, and A. Gippius, “Method and apparatus for making diamond-like carbon films,” U.S. patent 7,459,188 (2 December 2008).

Gzraryan, R.

Zh. Panosyan, A. Darbasyan, V. Meliksetyan, S. Voskanyan, A. Voskanyan, A. Sahakyan, and R. Gzraryan, “Low resistive diamond like carbon film development technique,” Thin Solid Films 517, 5404–5408 (2009).
[CrossRef]

Hayashi, Y.

Y. Hayashi, G. Yu, M. Rahman, K. Krishna, T. Soga, T. Jimbo, and M. Umeno, “Determination of optical properties of nitrogen-doped hydrogenated amorphous carbon films by spectroscopic ellipsometry,” Appl. Phys. Lett. 78, 3962–3964(2001).
[CrossRef]

Hayrapetyan, D.

Zh. Panosyan, A. Gharibyan, A. Sargsyan, H. Panosyan, D. Hayrapetyan, and Ye. Yengibaryan, “Preparation and investigation of diamond-like carbon nanocomposite thin films for nanophotonics,” Proc. SPIE 7755, 77550Q (2010).
[CrossRef]

Honglertkongsakul, K.

K. Honglertkongsakul, P. W. May, and B. Paosawatyanyong, “Electrical and optical properties of diamond-like carbon films deposited by pulsed laser ablation,” Diam. Relat. Mater. 19, 1999–10002 (2010).
[CrossRef]

Jimbo, T.

Y. Hayashi, G. Yu, M. Rahman, K. Krishna, T. Soga, T. Jimbo, and M. Umeno, “Determination of optical properties of nitrogen-doped hydrogenated amorphous carbon films by spectroscopic ellipsometry,” Appl. Phys. Lett. 78, 3962–3964(2001).
[CrossRef]

Klyui, N.

V. Litovchenko and N. Klyui, “Solar cells based on DLC film—Si structures for space application,” Solar Energy Mater. Solar Cells 68, 55–70 (2001).
[CrossRef]

Krishna, K.

Y. Hayashi, G. Yu, M. Rahman, K. Krishna, T. Soga, T. Jimbo, and M. Umeno, “Determination of optical properties of nitrogen-doped hydrogenated amorphous carbon films by spectroscopic ellipsometry,” Appl. Phys. Lett. 78, 3962–3964(2001).
[CrossRef]

Lee, K.

S. Choi, K. Lee, S. Oh, and S. Lee, “Wide wavelength-range optical studies of hydrogenated amorphous carbon films: from 700 nm to 10 μm,” Appl. Surf. Sci. 169–170, 217–222 (2001).
[CrossRef]

Lee, S.

S. Choi, K. Lee, S. Oh, and S. Lee, “Wide wavelength-range optical studies of hydrogenated amorphous carbon films: from 700 nm to 10 μm,” Appl. Surf. Sci. 169–170, 217–222 (2001).
[CrossRef]

Litovchenko, V.

V. Litovchenko and N. Klyui, “Solar cells based on DLC film—Si structures for space application,” Solar Energy Mater. Solar Cells 68, 55–70 (2001).
[CrossRef]

May, P. W.

K. Honglertkongsakul, P. W. May, and B. Paosawatyanyong, “Electrical and optical properties of diamond-like carbon films deposited by pulsed laser ablation,” Diam. Relat. Mater. 19, 1999–10002 (2010).
[CrossRef]

Meliksetyan, V.

Zh. Panosyan, A. Darbasyan, V. Meliksetyan, S. Voskanyan, A. Voskanyan, A. Sahakyan, and R. Gzraryan, “Low resistive diamond like carbon film development technique,” Thin Solid Films 517, 5404–5408 (2009).
[CrossRef]

Oh, S.

S. Choi, K. Lee, S. Oh, and S. Lee, “Wide wavelength-range optical studies of hydrogenated amorphous carbon films: from 700 nm to 10 μm,” Appl. Surf. Sci. 169–170, 217–222 (2001).
[CrossRef]

Palik, E. D.

E. D. Palik, Handbook of Optical Constants (Academic, 1998).

Panosyan, H.

Zh. Panosyan, A. Gharibyan, A. Sargsyan, H. Panosyan, D. Hayrapetyan, and Ye. Yengibaryan, “Preparation and investigation of diamond-like carbon nanocomposite thin films for nanophotonics,” Proc. SPIE 7755, 77550Q (2010).
[CrossRef]

Panosyan, Zh.

Zh. Panosyan, A. Gharibyan, A. Sargsyan, H. Panosyan, D. Hayrapetyan, and Ye. Yengibaryan, “Preparation and investigation of diamond-like carbon nanocomposite thin films for nanophotonics,” Proc. SPIE 7755, 77550Q (2010).
[CrossRef]

Zh. Panosyan, A. Darbasyan, V. Meliksetyan, S. Voskanyan, A. Voskanyan, A. Sahakyan, and R. Gzraryan, “Low resistive diamond like carbon film development technique,” Thin Solid Films 517, 5404–5408 (2009).
[CrossRef]

J. Pern, K. Touryan, Zh. Panosyan, and A. Gippius, “Method and apparatus for making diamond-like carbon films,” U.S. patent 7,459,188 (2 December 2008).

Paosawatyanyong, B.

K. Honglertkongsakul, P. W. May, and B. Paosawatyanyong, “Electrical and optical properties of diamond-like carbon films deposited by pulsed laser ablation,” Diam. Relat. Mater. 19, 1999–10002 (2010).
[CrossRef]

Pern, J.

J. Pern, K. Touryan, Zh. Panosyan, and A. Gippius, “Method and apparatus for making diamond-like carbon films,” U.S. patent 7,459,188 (2 December 2008).

Rahman, M.

Y. Hayashi, G. Yu, M. Rahman, K. Krishna, T. Soga, T. Jimbo, and M. Umeno, “Determination of optical properties of nitrogen-doped hydrogenated amorphous carbon films by spectroscopic ellipsometry,” Appl. Phys. Lett. 78, 3962–3964(2001).
[CrossRef]

Sahakyan, A.

Zh. Panosyan, A. Darbasyan, V. Meliksetyan, S. Voskanyan, A. Voskanyan, A. Sahakyan, and R. Gzraryan, “Low resistive diamond like carbon film development technique,” Thin Solid Films 517, 5404–5408 (2009).
[CrossRef]

Sargsyan, A.

Zh. Panosyan, A. Gharibyan, A. Sargsyan, H. Panosyan, D. Hayrapetyan, and Ye. Yengibaryan, “Preparation and investigation of diamond-like carbon nanocomposite thin films for nanophotonics,” Proc. SPIE 7755, 77550Q (2010).
[CrossRef]

Semikina, T.

T. Semikina and A. Shmyryeva, “Optical and protective properties of different type diamond and diamond-like carbon films,” Semicond. Phys. Quantum Electron. Optoelectron. 4, 313–317 (2001).

Shmyryeva, A.

T. Semikina and A. Shmyryeva, “Optical and protective properties of different type diamond and diamond-like carbon films,” Semicond. Phys. Quantum Electron. Optoelectron. 4, 313–317 (2001).

Soga, T.

Y. Hayashi, G. Yu, M. Rahman, K. Krishna, T. Soga, T. Jimbo, and M. Umeno, “Determination of optical properties of nitrogen-doped hydrogenated amorphous carbon films by spectroscopic ellipsometry,” Appl. Phys. Lett. 78, 3962–3964(2001).
[CrossRef]

Touryan, K.

J. Pern, K. Touryan, Zh. Panosyan, and A. Gippius, “Method and apparatus for making diamond-like carbon films,” U.S. patent 7,459,188 (2 December 2008).

Umeno, M.

Y. Hayashi, G. Yu, M. Rahman, K. Krishna, T. Soga, T. Jimbo, and M. Umeno, “Determination of optical properties of nitrogen-doped hydrogenated amorphous carbon films by spectroscopic ellipsometry,” Appl. Phys. Lett. 78, 3962–3964(2001).
[CrossRef]

Voskanyan, A.

Zh. Panosyan, A. Darbasyan, V. Meliksetyan, S. Voskanyan, A. Voskanyan, A. Sahakyan, and R. Gzraryan, “Low resistive diamond like carbon film development technique,” Thin Solid Films 517, 5404–5408 (2009).
[CrossRef]

Voskanyan, S.

Zh. Panosyan, A. Darbasyan, V. Meliksetyan, S. Voskanyan, A. Voskanyan, A. Sahakyan, and R. Gzraryan, “Low resistive diamond like carbon film development technique,” Thin Solid Films 517, 5404–5408 (2009).
[CrossRef]

Yengibaryan, Ye.

Zh. Panosyan, A. Gharibyan, A. Sargsyan, H. Panosyan, D. Hayrapetyan, and Ye. Yengibaryan, “Preparation and investigation of diamond-like carbon nanocomposite thin films for nanophotonics,” Proc. SPIE 7755, 77550Q (2010).
[CrossRef]

Yu, G.

Y. Hayashi, G. Yu, M. Rahman, K. Krishna, T. Soga, T. Jimbo, and M. Umeno, “Determination of optical properties of nitrogen-doped hydrogenated amorphous carbon films by spectroscopic ellipsometry,” Appl. Phys. Lett. 78, 3962–3964(2001).
[CrossRef]

Appl. Phys. Lett. (1)

Y. Hayashi, G. Yu, M. Rahman, K. Krishna, T. Soga, T. Jimbo, and M. Umeno, “Determination of optical properties of nitrogen-doped hydrogenated amorphous carbon films by spectroscopic ellipsometry,” Appl. Phys. Lett. 78, 3962–3964(2001).
[CrossRef]

Appl. Surf. Sci. (1)

S. Choi, K. Lee, S. Oh, and S. Lee, “Wide wavelength-range optical studies of hydrogenated amorphous carbon films: from 700 nm to 10 μm,” Appl. Surf. Sci. 169–170, 217–222 (2001).
[CrossRef]

Diam. Relat. Mater. (1)

K. Honglertkongsakul, P. W. May, and B. Paosawatyanyong, “Electrical and optical properties of diamond-like carbon films deposited by pulsed laser ablation,” Diam. Relat. Mater. 19, 1999–10002 (2010).
[CrossRef]

Proc. SPIE (1)

Zh. Panosyan, A. Gharibyan, A. Sargsyan, H. Panosyan, D. Hayrapetyan, and Ye. Yengibaryan, “Preparation and investigation of diamond-like carbon nanocomposite thin films for nanophotonics,” Proc. SPIE 7755, 77550Q (2010).
[CrossRef]

Semicond. Phys. Quantum Electron. Optoelectron. (1)

T. Semikina and A. Shmyryeva, “Optical and protective properties of different type diamond and diamond-like carbon films,” Semicond. Phys. Quantum Electron. Optoelectron. 4, 313–317 (2001).

Solar Energy Mater. Solar Cells (1)

V. Litovchenko and N. Klyui, “Solar cells based on DLC film—Si structures for space application,” Solar Energy Mater. Solar Cells 68, 55–70 (2001).
[CrossRef]

Thin Solid Films (1)

Zh. Panosyan, A. Darbasyan, V. Meliksetyan, S. Voskanyan, A. Voskanyan, A. Sahakyan, and R. Gzraryan, “Low resistive diamond like carbon film development technique,” Thin Solid Films 517, 5404–5408 (2009).
[CrossRef]

Other (2)

J. Pern, K. Touryan, Zh. Panosyan, and A. Gippius, “Method and apparatus for making diamond-like carbon films,” U.S. patent 7,459,188 (2 December 2008).

E. D. Palik, Handbook of Optical Constants (Academic, 1998).

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Figures (8)

Fig. 1
Fig. 1

PECVD technological device: 1, vacuum chamber; 2, ion source; 3, magnetron source; 4, rotating system; 5, electrode system.

Fig. 2
Fig. 2

Comparison of ellipsometric curves of different refractive indices and experimental data (dots).

Fig. 3
Fig. 3

Dependency of the refractive index on the frequency of the bias voltage.

Fig. 4
Fig. 4

Dependency of the refractive index on the plasma power.

Fig. 5
Fig. 5

Dependency of the refractive index on the nitrogen concentration in the plasma gas mixture.

Fig. 6
Fig. 6

Dependency of the refractive index on plasma power in the case of direct bias voltage.

Fig. 7
Fig. 7

Dependency of the refractive index on nitrogen concentration in the plasma gas mixture in the case of direct bias voltage.

Fig. 8
Fig. 8

Dependency of the refractive index on deposition rate in the case of direct bias voltage.

Tables (1)

Tables Icon

Table 1 Technological Parameters of Deposition and Their Ranges

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