Abstract

UV optical properties of thin film layers of compound and mixed oxide materials deposited by different processes are presented. Japan Electron Optics Laboratory plasma ion assisted deposition (JEOL PIAD), electron beam with and without IAD, and pulsed DC magnetron sputtering were used. Comparisons are made with published deposition process data. Refractive indices and absorption values to as short as 145nm were measured by spectroscopic ellipsometry (SE). Electronic interband defect states are detected that are deposition-process dependent. SE might be effective in identifying UV optical film quality, especially in defining processes and material composition beneficial for high-energy excimer laser applications and environments requiring stable optical properties.

© 2011 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Annealing dependence of residual stress and optical properties of TiO2 thin film deposited by different deposition methods

Hsi-Chao Chen, Kuan-Shiang Lee, and Cheng-Chung Lee
Appl. Opt. 47(13) C284-C287 (2008)

Optical and interfacial layer properties of SiO2 films deposited on different substrates

Yugang Jiang, Huasong Liu, Lishuan Wang, Dandan Liu, Chenghui Jiang, Xinbin Cheng, Yaping Yang, and Yiqin Ji
Appl. Opt. 53(4) A83-A87 (2014)

Process for deposition of AlF3 thin films

Bo-Huei Liao, Ming-Chung Liu, and Cheng-Chung Lee
Appl. Opt. 47(13) C41-C45 (2008)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (20)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (4)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription