Abstract

A scanning and rotating nanoslit is used to measure submicrometer features in focused spot distributions. Using a filtered backprojection technique, a highly accurate reconstruction is demonstrated. Experimental results are confirmed by simulating the scanning slit technique using a physical optics simulation program. Analysis of various error mechanisms is reported, and the reconstruction algorithm is determined to be very resilient. The slit is 125 nm wide and 50 μm long and is fabricated on a 120 nm thick layer of aluminum. The size of the image field is 15 μm, and simulations indicate that 200 nm Rayleigh resolution is possible with an infinitely narrow slit.

© 2011 Optical Society of America

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2010 (1)

2007 (1)

2001 (1)

J. Zheng, S. Zhao, Q. Wang, X. Zhang, and L. Chen, “Measurement of beam quality factor (M2) by slit-scanning method,” Opt. Laser Technol. 33, 213–217 (2001).
[CrossRef]

1997 (2)

1995 (2)

S. Samson and A. Korpel, “Two-dimensional operation of a scanning optical microscope by vibrating knife-edge tomography,” Appl. Opt. 34, 285–289 (1995).
[CrossRef]

T. D. Milster and C. L. Vernold, “Technique for aligning optical and mechanical axes based on a rotating linear grating,” Opt. Eng. 34, 2840–2845 (1995).
[CrossRef]

1993 (1)

1990 (1)

1984 (1)

1980 (1)

Barrett, H. H.

M. A. Kujoory, E. L. Miller, H. H. Barrett, G. R. Gindi, and P. N. Tamura, “Coded aperture imaging of γ-ray sources with an off-axis rotating slit,” Appl. Opt. 19, 4186–4195 (1980).
[CrossRef]

H. H. Barrett and W. Swindell, Radiological Imaging: The Theory of Image Formation, Detection, and Processing (Academic, 1981), Vol.  2, pp. 413–417.

Born, M.

M. Born and E. Wolf, Principles of Optics, 7th ed. (Cambridge University, 1999), p. 371.

Byer, R. L.

Chen, L.

J. Zheng, S. Zhao, Q. Wang, X. Zhang, and L. Chen, “Measurement of beam quality factor (M2) by slit-scanning method,” Opt. Laser Technol. 33, 213–217 (2001).
[CrossRef]

George, A.

Gindi, G. R.

Gureyev, T. E.

Herman, G. T.

G. T. Herman, Fundamentals of Computerized Tomography: Image Reconstruction from Projections, 2nd ed. (Springer, 2009).

Hertz, H. M.

Korpel, A.

Kujoory, M. A.

Malacara, D.

D. Malacara, Optical Shop Testing (Wiley-Interscience, 1992), p. 465.

Martin, M.

McCally, R. L.

Miller, E. L.

Milster, T. D.

A. George and T. D. Milster, “Characteristics of a scanning nano-slit image sensor for line-and-space patterns,” Appl. Opt. 49, 3821–3830 (2010).
[CrossRef]

T. D. Milster and C. L. Vernold, “Technique for aligning optical and mechanical axes based on a rotating linear grating,” Opt. Eng. 34, 2840–2845 (1995).
[CrossRef]

Nesterets, Y. I.

Pavlov, K. M.

Rendon, M.

Samson, S.

Soto, J.

Sun, H.

H. Sun, “Measurement of laser diode astigmatism,” Opt. Eng. 36, 1082–1087 (1997).
[CrossRef]

Swindell, W.

H. H. Barrett and W. Swindell, Radiological Imaging: The Theory of Image Formation, Detection, and Processing (Academic, 1981), Vol.  2, pp. 413–417.

Tamura, P. N.

Vernold, C. L.

T. D. Milster and C. L. Vernold, “Technique for aligning optical and mechanical axes based on a rotating linear grating,” Opt. Eng. 34, 2840–2845 (1995).
[CrossRef]

Wang, Q.

J. Zheng, S. Zhao, Q. Wang, X. Zhang, and L. Chen, “Measurement of beam quality factor (M2) by slit-scanning method,” Opt. Laser Technol. 33, 213–217 (2001).
[CrossRef]

Wilkins, S. W.

Wolf, E.

M. Born and E. Wolf, Principles of Optics, 7th ed. (Cambridge University, 1999), p. 371.

Zhang, X.

J. Zheng, S. Zhao, Q. Wang, X. Zhang, and L. Chen, “Measurement of beam quality factor (M2) by slit-scanning method,” Opt. Laser Technol. 33, 213–217 (2001).
[CrossRef]

Zhao, S.

J. Zheng, S. Zhao, Q. Wang, X. Zhang, and L. Chen, “Measurement of beam quality factor (M2) by slit-scanning method,” Opt. Laser Technol. 33, 213–217 (2001).
[CrossRef]

Zheng, J.

J. Zheng, S. Zhao, Q. Wang, X. Zhang, and L. Chen, “Measurement of beam quality factor (M2) by slit-scanning method,” Opt. Laser Technol. 33, 213–217 (2001).
[CrossRef]

Appl. Opt. (6)

J. Opt. Soc. Am. A (1)

Opt. Eng. (2)

H. Sun, “Measurement of laser diode astigmatism,” Opt. Eng. 36, 1082–1087 (1997).
[CrossRef]

T. D. Milster and C. L. Vernold, “Technique for aligning optical and mechanical axes based on a rotating linear grating,” Opt. Eng. 34, 2840–2845 (1995).
[CrossRef]

Opt. Laser Technol. (1)

J. Zheng, S. Zhao, Q. Wang, X. Zhang, and L. Chen, “Measurement of beam quality factor (M2) by slit-scanning method,” Opt. Laser Technol. 33, 213–217 (2001).
[CrossRef]

Opt. Lett. (1)

Other (11)

http://www.thorlabs.us/NewGroupPage9.cfm?ObjectGroup_ID=2421

M. Born and E. Wolf, Principles of Optics, 7th ed. (Cambridge University, 1999), p. 371.

http://www.photon-inc.com/products/nanoscan/nanoscan.html

http://www.thorlabs.com/newgrouppage9.cfm?objectgroup_id=804

http://www.dataray.com/pdf/BSDataSh.pdf

https://www.cvilaser.com/products/Documents/Catalog/Measurement_of_Beam_Profiles.pdf

G. T. Herman, Fundamentals of Computerized Tomography: Image Reconstruction from Projections, 2nd ed. (Springer, 2009).

H. H. Barrett and W. Swindell, Radiological Imaging: The Theory of Image Formation, Detection, and Processing (Academic, 1981), Vol.  2, pp. 413–417.

http://www.optics.arizona.edu/Milster/optiscan/OptiScan_MENU_PAGE.htm

http://www.zemax.com

D. Malacara, Optical Shop Testing (Wiley-Interscience, 1992), p. 465.

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