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Ellipsometric study of dielectric functions of Mg 1 y Ca y H x thin films ( 0.03 y 0.17 )

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Abstract

Mg1-yCay (0.03y0.17) alloy thin films covered with thin Pd were hydrogenated using 4% H2 in Ar under atmospheric pressure at room temperature. The complex dielectric functions (ε=ε1+iε2) in the range of 0.75 to 5.0eV of these hydrides were evaluated with spectroscopic ellipsometry. The imaginary part of the dielectric function ε2 was composed of one Drude and three Lorentz oscillator terms whose peak positions were about 1.2eV (L1), 2.8eV (L2), and 5.2eV (L3). The L3 term observed in all hydrides is attributed to optical absorption of MgH2 with Eg=5.16eV. The Drude term, which may be due to unhydrogenated Mg-metal, was observed in the hydrides with a low Ca composition y of less than 0.04. The L1 term was observed in the hydrides with a Ca composition of more than 0.05, while the L2 term was observed for more than 0.11. These L1 and L2 terms were estimated from a variation with hydrogenation of ellipsometric angle Ψ which is due to optical absorption of CaH2-α (L1) and MgCaH3.72 (L2).

© 2011 Optical Society of America

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