We fabricated a single-mode planar waveguide in z-cut by multienergy He ion implantation in total fluence of at room temperature and investigated optical properties of before and after He ion implantation by measuring transmission, confocal microluminescence, and confocal Raman spectra. Absorption bands and the photoluminescence features of the bulk crystal have been preserved after He ion implantation. In Raman spectra, most of the peak positions and peak widths had no obvious change before and after He ion implantation. The guiding mode and near-field image in the waveguide were measured by the prism coupling method and end-face coupling method, respectively. We investigated the damage behavior of a waveguide after implantation, annealing treatment by the Rutherford backscattering/channeling technique. The minimum yield of the virgin z-cut was 1.98%, which increased to 4.73% after He ion implantation and decreased to 3.20% after annealing at for 30 minutes.
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