Abstract

The local model fitting (LMF) method is a single-shot surface profiling algorithm. Its measurement principle is based on the assumption that the target surface to be profiled is locally flat, which enables us to utilize the information brought by nearby pixels in the single interference image for robust LMF. Given that the shape and size of the local area is appropriately determined, the LMF method was demonstrated to provide very accurate measurement results. However, the appropriate choice of the local area often requires prior knowledge on the target surface profile or manual parameter tuning. To cope with this problem, we propose a method for automatically determining the shape and size of local regions only from the single interference image. The effectiveness of the proposed method is demonstrated through experiments.

© 2011 Optical Society of America

Full Article  |  PDF Article
Related Articles
Filter selection model for motion segmentation and velocity integration

Steven J. Nowlan and Terrence J. Sejnowski
J. Opt. Soc. Am. A 11(12) 3177-3200 (1994)

Single-shot surface profiling by local model fitting

Masashi Sugiyama, Hidemitsu Ogawa, Katsuichi Kitagawa, and Kazuyoshi Suzuki
Appl. Opt. 45(31) 7999-8005 (2006)

Interpolated local model fitting method for accurate and fast single-shot surface profiling

Tatsuya Yokota, Masashi Sugiyama, Hidemitsu Ogawa, Katsuichi Kitagawa, and Kazuyoshi Suzuki
Appl. Opt. 48(18) 3497-3508 (2009)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (5)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (17)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription