Abstract

A sinusoidally vibrating interference pattern (SVIP) is used as an exact spatial scale in order to measure a cross-sectional profile of a thread gauge. The SVIP is projected on the thread gauge surface, and lights diffracted and reflected from the end points of the thread gauge surface are extracted by spatial frequency filtering in an imaging system to make an image of the end points whose positions are decided by the peak positions of amplitude distributions in the image. The coordinates of the end points or the cross-sectional profile of the thread gauge is obtained from the phases measured at the positions of the end points, phase distribution of the SVIP on a CCD image sensor, and the pixel positions of the CCD image sensor.

© 2011 Optical Society of America

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References

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  1. F. Takeoka, M. Komori, A. Kubo, H. Fujio, S. Taniyama, T. Ito, T. Takatsuji, S. Osawa, and O. Sato, “Design of laser interferometric measuring device of involute profile,” J. Mech. Des. 130, 052602 (2008).
    [CrossRef]
  2. S. Fang, L. Wang, M. Komori, and A. Kubo, “Simulation method for interference fringe patterns in measuring gear tooth flanks by laser interferometry,” Appl. Opt. 49, 6409–6415(2010).
    [CrossRef] [PubMed]
  3. S. Fang, L. Wang, M. Komori, and A. Kubo, “Design of laser interferometric system for measurement of gear tooth flank,” Optik (Jena) 172, 1301–1304 (2011).
    [CrossRef]
  4. H. Huang, W. Jywe, C. Liu, L. Duan, and M. Wang, “Development of a novel laser-based measuring system for the thread profile of ballscrew,” Opt. Lasers Eng. 48, 1012–1018 (2010).
    [CrossRef]
  5. O. Sasaki, K. Hashimoto, Y. Fujimori, and T. Suzuki, “Measurement of cylinder diameter by using sinusoidally vibrating sinusoidal gratings,” Proc. SPIE 4416, 35–39 (2001).
    [CrossRef]
  6. J. Li, O. Sasaki, and T. Suzuki, “Measurement of sectional profile of a metal cylinder using a sinusoidally vibrating interference pattern,” Opt. Eng. 45, 023601 (2006).
    [CrossRef]
  7. J. Li, O. Sasaki, and T. Suzuki, “Measurement of diameter of metal cylinders using a sinusoidally vibrating interference pattern,” Opt. Commun. 260, 398–402 (2006).
    [CrossRef]
  8. O. Sasaki and H. Okazaki, “Sinusoidal phase modulating interferometry for surface profile measurement,” Appl. Opt. 25, 3137–3140 (1986).
    [CrossRef] [PubMed]
  9. O. Sasaki, T. Okamura, and T. Suzuki, “Sinusoidal phase modulating laser diode interferometer with feedback control system to eliminate external disturbance,” Opt. Eng. 29, 1511–1515 (1990).
    [CrossRef]

2011 (1)

S. Fang, L. Wang, M. Komori, and A. Kubo, “Design of laser interferometric system for measurement of gear tooth flank,” Optik (Jena) 172, 1301–1304 (2011).
[CrossRef]

2010 (2)

H. Huang, W. Jywe, C. Liu, L. Duan, and M. Wang, “Development of a novel laser-based measuring system for the thread profile of ballscrew,” Opt. Lasers Eng. 48, 1012–1018 (2010).
[CrossRef]

S. Fang, L. Wang, M. Komori, and A. Kubo, “Simulation method for interference fringe patterns in measuring gear tooth flanks by laser interferometry,” Appl. Opt. 49, 6409–6415(2010).
[CrossRef] [PubMed]

2008 (1)

F. Takeoka, M. Komori, A. Kubo, H. Fujio, S. Taniyama, T. Ito, T. Takatsuji, S. Osawa, and O. Sato, “Design of laser interferometric measuring device of involute profile,” J. Mech. Des. 130, 052602 (2008).
[CrossRef]

2006 (2)

J. Li, O. Sasaki, and T. Suzuki, “Measurement of sectional profile of a metal cylinder using a sinusoidally vibrating interference pattern,” Opt. Eng. 45, 023601 (2006).
[CrossRef]

J. Li, O. Sasaki, and T. Suzuki, “Measurement of diameter of metal cylinders using a sinusoidally vibrating interference pattern,” Opt. Commun. 260, 398–402 (2006).
[CrossRef]

2001 (1)

O. Sasaki, K. Hashimoto, Y. Fujimori, and T. Suzuki, “Measurement of cylinder diameter by using sinusoidally vibrating sinusoidal gratings,” Proc. SPIE 4416, 35–39 (2001).
[CrossRef]

1990 (1)

O. Sasaki, T. Okamura, and T. Suzuki, “Sinusoidal phase modulating laser diode interferometer with feedback control system to eliminate external disturbance,” Opt. Eng. 29, 1511–1515 (1990).
[CrossRef]

1986 (1)

Duan, L.

H. Huang, W. Jywe, C. Liu, L. Duan, and M. Wang, “Development of a novel laser-based measuring system for the thread profile of ballscrew,” Opt. Lasers Eng. 48, 1012–1018 (2010).
[CrossRef]

Fang, S.

S. Fang, L. Wang, M. Komori, and A. Kubo, “Design of laser interferometric system for measurement of gear tooth flank,” Optik (Jena) 172, 1301–1304 (2011).
[CrossRef]

S. Fang, L. Wang, M. Komori, and A. Kubo, “Simulation method for interference fringe patterns in measuring gear tooth flanks by laser interferometry,” Appl. Opt. 49, 6409–6415(2010).
[CrossRef] [PubMed]

Fujimori, Y.

O. Sasaki, K. Hashimoto, Y. Fujimori, and T. Suzuki, “Measurement of cylinder diameter by using sinusoidally vibrating sinusoidal gratings,” Proc. SPIE 4416, 35–39 (2001).
[CrossRef]

Fujio, H.

F. Takeoka, M. Komori, A. Kubo, H. Fujio, S. Taniyama, T. Ito, T. Takatsuji, S. Osawa, and O. Sato, “Design of laser interferometric measuring device of involute profile,” J. Mech. Des. 130, 052602 (2008).
[CrossRef]

Hashimoto, K.

O. Sasaki, K. Hashimoto, Y. Fujimori, and T. Suzuki, “Measurement of cylinder diameter by using sinusoidally vibrating sinusoidal gratings,” Proc. SPIE 4416, 35–39 (2001).
[CrossRef]

Huang, H.

H. Huang, W. Jywe, C. Liu, L. Duan, and M. Wang, “Development of a novel laser-based measuring system for the thread profile of ballscrew,” Opt. Lasers Eng. 48, 1012–1018 (2010).
[CrossRef]

Ito, T.

F. Takeoka, M. Komori, A. Kubo, H. Fujio, S. Taniyama, T. Ito, T. Takatsuji, S. Osawa, and O. Sato, “Design of laser interferometric measuring device of involute profile,” J. Mech. Des. 130, 052602 (2008).
[CrossRef]

Jywe, W.

H. Huang, W. Jywe, C. Liu, L. Duan, and M. Wang, “Development of a novel laser-based measuring system for the thread profile of ballscrew,” Opt. Lasers Eng. 48, 1012–1018 (2010).
[CrossRef]

Komori, M.

S. Fang, L. Wang, M. Komori, and A. Kubo, “Design of laser interferometric system for measurement of gear tooth flank,” Optik (Jena) 172, 1301–1304 (2011).
[CrossRef]

S. Fang, L. Wang, M. Komori, and A. Kubo, “Simulation method for interference fringe patterns in measuring gear tooth flanks by laser interferometry,” Appl. Opt. 49, 6409–6415(2010).
[CrossRef] [PubMed]

F. Takeoka, M. Komori, A. Kubo, H. Fujio, S. Taniyama, T. Ito, T. Takatsuji, S. Osawa, and O. Sato, “Design of laser interferometric measuring device of involute profile,” J. Mech. Des. 130, 052602 (2008).
[CrossRef]

Kubo, A.

S. Fang, L. Wang, M. Komori, and A. Kubo, “Design of laser interferometric system for measurement of gear tooth flank,” Optik (Jena) 172, 1301–1304 (2011).
[CrossRef]

S. Fang, L. Wang, M. Komori, and A. Kubo, “Simulation method for interference fringe patterns in measuring gear tooth flanks by laser interferometry,” Appl. Opt. 49, 6409–6415(2010).
[CrossRef] [PubMed]

F. Takeoka, M. Komori, A. Kubo, H. Fujio, S. Taniyama, T. Ito, T. Takatsuji, S. Osawa, and O. Sato, “Design of laser interferometric measuring device of involute profile,” J. Mech. Des. 130, 052602 (2008).
[CrossRef]

Li, J.

J. Li, O. Sasaki, and T. Suzuki, “Measurement of sectional profile of a metal cylinder using a sinusoidally vibrating interference pattern,” Opt. Eng. 45, 023601 (2006).
[CrossRef]

J. Li, O. Sasaki, and T. Suzuki, “Measurement of diameter of metal cylinders using a sinusoidally vibrating interference pattern,” Opt. Commun. 260, 398–402 (2006).
[CrossRef]

Liu, C.

H. Huang, W. Jywe, C. Liu, L. Duan, and M. Wang, “Development of a novel laser-based measuring system for the thread profile of ballscrew,” Opt. Lasers Eng. 48, 1012–1018 (2010).
[CrossRef]

Okamura, T.

O. Sasaki, T. Okamura, and T. Suzuki, “Sinusoidal phase modulating laser diode interferometer with feedback control system to eliminate external disturbance,” Opt. Eng. 29, 1511–1515 (1990).
[CrossRef]

Okazaki, H.

Osawa, S.

F. Takeoka, M. Komori, A. Kubo, H. Fujio, S. Taniyama, T. Ito, T. Takatsuji, S. Osawa, and O. Sato, “Design of laser interferometric measuring device of involute profile,” J. Mech. Des. 130, 052602 (2008).
[CrossRef]

Sasaki, O.

J. Li, O. Sasaki, and T. Suzuki, “Measurement of diameter of metal cylinders using a sinusoidally vibrating interference pattern,” Opt. Commun. 260, 398–402 (2006).
[CrossRef]

J. Li, O. Sasaki, and T. Suzuki, “Measurement of sectional profile of a metal cylinder using a sinusoidally vibrating interference pattern,” Opt. Eng. 45, 023601 (2006).
[CrossRef]

O. Sasaki, K. Hashimoto, Y. Fujimori, and T. Suzuki, “Measurement of cylinder diameter by using sinusoidally vibrating sinusoidal gratings,” Proc. SPIE 4416, 35–39 (2001).
[CrossRef]

O. Sasaki, T. Okamura, and T. Suzuki, “Sinusoidal phase modulating laser diode interferometer with feedback control system to eliminate external disturbance,” Opt. Eng. 29, 1511–1515 (1990).
[CrossRef]

O. Sasaki and H. Okazaki, “Sinusoidal phase modulating interferometry for surface profile measurement,” Appl. Opt. 25, 3137–3140 (1986).
[CrossRef] [PubMed]

Sato, O.

F. Takeoka, M. Komori, A. Kubo, H. Fujio, S. Taniyama, T. Ito, T. Takatsuji, S. Osawa, and O. Sato, “Design of laser interferometric measuring device of involute profile,” J. Mech. Des. 130, 052602 (2008).
[CrossRef]

Suzuki, T.

J. Li, O. Sasaki, and T. Suzuki, “Measurement of sectional profile of a metal cylinder using a sinusoidally vibrating interference pattern,” Opt. Eng. 45, 023601 (2006).
[CrossRef]

J. Li, O. Sasaki, and T. Suzuki, “Measurement of diameter of metal cylinders using a sinusoidally vibrating interference pattern,” Opt. Commun. 260, 398–402 (2006).
[CrossRef]

O. Sasaki, K. Hashimoto, Y. Fujimori, and T. Suzuki, “Measurement of cylinder diameter by using sinusoidally vibrating sinusoidal gratings,” Proc. SPIE 4416, 35–39 (2001).
[CrossRef]

O. Sasaki, T. Okamura, and T. Suzuki, “Sinusoidal phase modulating laser diode interferometer with feedback control system to eliminate external disturbance,” Opt. Eng. 29, 1511–1515 (1990).
[CrossRef]

Takatsuji, T.

F. Takeoka, M. Komori, A. Kubo, H. Fujio, S. Taniyama, T. Ito, T. Takatsuji, S. Osawa, and O. Sato, “Design of laser interferometric measuring device of involute profile,” J. Mech. Des. 130, 052602 (2008).
[CrossRef]

Takeoka, F.

F. Takeoka, M. Komori, A. Kubo, H. Fujio, S. Taniyama, T. Ito, T. Takatsuji, S. Osawa, and O. Sato, “Design of laser interferometric measuring device of involute profile,” J. Mech. Des. 130, 052602 (2008).
[CrossRef]

Taniyama, S.

F. Takeoka, M. Komori, A. Kubo, H. Fujio, S. Taniyama, T. Ito, T. Takatsuji, S. Osawa, and O. Sato, “Design of laser interferometric measuring device of involute profile,” J. Mech. Des. 130, 052602 (2008).
[CrossRef]

Wang, L.

S. Fang, L. Wang, M. Komori, and A. Kubo, “Design of laser interferometric system for measurement of gear tooth flank,” Optik (Jena) 172, 1301–1304 (2011).
[CrossRef]

S. Fang, L. Wang, M. Komori, and A. Kubo, “Simulation method for interference fringe patterns in measuring gear tooth flanks by laser interferometry,” Appl. Opt. 49, 6409–6415(2010).
[CrossRef] [PubMed]

Wang, M.

H. Huang, W. Jywe, C. Liu, L. Duan, and M. Wang, “Development of a novel laser-based measuring system for the thread profile of ballscrew,” Opt. Lasers Eng. 48, 1012–1018 (2010).
[CrossRef]

Appl. Opt. (2)

J. Mech. Des. (1)

F. Takeoka, M. Komori, A. Kubo, H. Fujio, S. Taniyama, T. Ito, T. Takatsuji, S. Osawa, and O. Sato, “Design of laser interferometric measuring device of involute profile,” J. Mech. Des. 130, 052602 (2008).
[CrossRef]

Opt. Commun. (1)

J. Li, O. Sasaki, and T. Suzuki, “Measurement of diameter of metal cylinders using a sinusoidally vibrating interference pattern,” Opt. Commun. 260, 398–402 (2006).
[CrossRef]

Opt. Eng. (2)

J. Li, O. Sasaki, and T. Suzuki, “Measurement of sectional profile of a metal cylinder using a sinusoidally vibrating interference pattern,” Opt. Eng. 45, 023601 (2006).
[CrossRef]

O. Sasaki, T. Okamura, and T. Suzuki, “Sinusoidal phase modulating laser diode interferometer with feedback control system to eliminate external disturbance,” Opt. Eng. 29, 1511–1515 (1990).
[CrossRef]

Opt. Lasers Eng. (1)

H. Huang, W. Jywe, C. Liu, L. Duan, and M. Wang, “Development of a novel laser-based measuring system for the thread profile of ballscrew,” Opt. Lasers Eng. 48, 1012–1018 (2010).
[CrossRef]

Optik (Jena) (1)

S. Fang, L. Wang, M. Komori, and A. Kubo, “Design of laser interferometric system for measurement of gear tooth flank,” Optik (Jena) 172, 1301–1304 (2011).
[CrossRef]

Proc. SPIE (1)

O. Sasaki, K. Hashimoto, Y. Fujimori, and T. Suzuki, “Measurement of cylinder diameter by using sinusoidally vibrating sinusoidal gratings,” Proc. SPIE 4416, 35–39 (2001).
[CrossRef]

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Figures (9)

Fig. 1
Fig. 1

Configuration of an instrument for measuring the sectional profile of thread gauge.

Fig. 2
Fig. 2

(a) Photo of a thread gauge, and (b) directions of the groove illustrated schematically in two-dimensions.

Fig. 3
Fig. 3

Images of the sectional profile of the thread gauge on (a) the left side and (b) the right side.

Fig. 4
Fig. 4

Each part of the V-shaped groove and representation of the dimensions.

Fig. 5
Fig. 5

Distribution of (a) amplitude B and (b) phase α detected along the x axis at part A T .

Fig. 6
Fig. 6

Distribution of (a) amplitude B and (b) phase α detected along the x axis at part B 1 .

Fig. 7
Fig. 7

Distribution of (a) amplitude B and (b) phase α detected along the x axis at part C 2 .

Fig. 8
Fig. 8

Coordinate determination of the end points.

Fig. 9
Fig. 9

Measured sectional profile of the thread gauge.

Tables (3)

Tables Icon

Table 1 Phase Difference between the Adjacent Measurement Points at Different Part of the Thread Gauge

Tables Icon

Table 2 Measured Results on the Left Side

Tables Icon

Table 3 Measured Results on the Right Side

Equations (5)

Equations on this page are rendered with MathJax. Learn more.

I ( t , x , y ) = 1 + cos [ Z cos ( ω C t ) + 2 π P x ] ,
I D ( t , x , y ) = A ( x , y ) + B ( x , y ) cos [ Z cos ( ω C t ) + α ( x , y ) ] ,
r ( y ) = P α M ( y ) / 2 π .
x L = N L 1 Δ X + α L α L 1 α L 2 α L 1 Δ X .
x R = N R 1 Δ X + α R α R 1 α R 2 α R 1 Δ X .

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