Abstract

To study the differences between the damaging of thin film components induced by long-pulse and short-pulse lasers, a model of single layer TiO2 film components with platinum high-absorptance inclusions was established. The temperature rises of TiO2 films with inclusions of different sizes and different depths induced by a 1ms long-pulse and a 10ns short-pulse lasers were analyzed based on temperature field theory. The results show that there is a radius range of inclusions that corresponds to high temperature rises. Short-pulse lasers are more sensitive to high-absorptance inclusions and long-pulse lasers are more easily damage the substrate. The first-damage decision method is drawn from calculations.

© 2011 Optical Society of America

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