Abstract

Two algorithms used for the on-line and off-line characterization of multilayer optical coatings are experimentally compared using test samples produced by two different deposition processes and different monitoring approaches. One of these algorithms, called the triangular algorithm, demonstrates its superiority in all considered situations. We performed experiments with multilayer samples formed by high-density thin films, which allowed us to neglect possible errors in the film refractive indices and concentrate only on errors in the thicknesses of the layers of the produced coatings.

© 2011 Optical Society of America

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  1. B. T. Sullivan and J. A. Dobrowolski, “Deposition error compensation for optical multilayer coatings. I. Theoretical description,” Appl. Opt. 31, 3821–3835 (1992).
    [Crossref] [PubMed]
  2. B. T. Sullivan and J. A. Dobrowolski, “Deposition error compensation for optical multilayer coatings. II. Experimental results—sputtering system,” Appl. Opt. 32, 2351–2360 (1993).
    [Crossref] [PubMed]
  3. A. Tikhonravov, M. Trubetskov, I. Kochikov, J. Oliver, and D. Smith, “Real-time characterization and optimization of e-beam evaporated optical coatings,” in Optical Interference Coatings, 2001 OSA Technical Digest Series (Optical Society of America, 2001), paper ME8–1.
  4. A. Tikhonravov and M. Trubetskov, “On-line characterization and reoptimization of optical coatings,” Proc. SPIE 5250, 406–413 (2004).
    [Crossref]
  5. H. Ehlers, S. Schlichting, and D. Ristau, “Hybrid process control for precision optics enhanced by computational manufacturing,” in Optical Interference Coatings, 2010 OSA Technical Digest Series (Optical Society of America, 2010), paper TuC6.
  6. B. Vidal, A. Fornier, and E. Pelletier, “Optical monitoring of nonquarterwave multilayer filters,” Appl. Opt. 17, 1038–1047(1978).
    [Crossref] [PubMed]
  7. B. Vidal, A. Fornier, and E. Pelletier, “Wideband optical monitoring of nonquarterwave multilayer filters,” Appl. Opt. 18, 3851–3856 (1979).
    [Crossref] [PubMed]
  8. B. Vidal and E. Pelletier, “Nonquarterwave multilayer filters: optical monitoring with a minicomputer allowing correction of thickness errors,” Appl. Opt. 18, 3857–3862 (1979).
    [Crossref] [PubMed]
  9. D. Ristau, H. Ehlers, T. Gross, and M. Lappschies, “Optical broadband monitoring of conventional and ion processes,” Appl. Opt. 45, 1495–1501 (2006).
    [Crossref] [PubMed]
  10. D. Ristau, H. Ehlers, S. Schlichting, and M. Lappschies, “State of the art in deterministic production of optical thin films,” Proc. SPIE 7101, 71010C (2008).
    [Crossref]
  11. B. Badoil, F. Lemarchand, M. Cathelinaud, and M. Lequime, “Interest of broadband optical monitoring for thin-film filter manufacturing,” Appl. Opt. 46, 4294–4303(2007).
    [Crossref] [PubMed]
  12. S. Wilbrandt, O. Stenzel, and N. Kaiser, “Experimental determination of the refractive index profile of rugate filters based on in situ measurements of transmission spectra,” J. Phys. D 40, 1435–1441 (2007).
    [Crossref]
  13. C. Holm, “Optical thin film production with continuous reoptimization of layer thicknesses,” Appl. Opt. 18, 1978–1982(1979).
    [Crossref] [PubMed]
  14. A. N. Tikhonov and V. Y. Arsenin, Solution of Ill-Posed Problems (Winston-Wiley, 1977).
  15. A. V. Tikhonravov, I. V. Kochikov, M. K. Trubetskov, A. V. Krasilnikova, and D. J. Smith, “Stabilization of the on-line characterization procedure using spectral monitoring data,” in Optical Interference Coatings, 1998 OSA Technical Digest Series (Optical Society of America, 1998), pp. 423–425.
  16. A. V. Tikhonravov and M. K. Trubetskov, “OptiLayer thin film software,” http://www.optilayer.com.
  17. J. Woollam, “Ellipsometry, variable angle spectroscopic,” in Wiley Encyclopedia of Electrical and Electronics Engineering: Supplement 1, J.Webster, ed. (Wiley, 2000).
  18. M. Lappschies, B. Görtz, and D. Ristau, “Application of optical broadband monitoring to quasi-rugate filters by ion-beam sputtering,” Appl. Opt. 45, 1502–1506 (2006).
    [Crossref] [PubMed]
  19. T. Gross, M. Lappschies, K. Starke, and D. Ristau, “Systematic errors in broadband optical monitoring,” in Optical Interference Coatings, 2001 OSA Technical Digest Series (Optical Society of America, 2001), paper ME4.
  20. A. V. Tikhonravov, M. K. Trubetskov, M. A. Kokarev, T. V. Amotchkina, A. Duparré, E. Quesnel, D. Ristau, and S. Günster, “Effect of systematic errors in spectral photometric data on the accuracy of determination of optical parameters of dielectric thin films,” Appl. Opt. 41, 2555–2560(2002).
    [Crossref] [PubMed]
  21. A. V. Tikhonravov, M. K. Trubetskov, and T. V. Amotchkina, “Investigation of the effect of accumulation of thickness errors in optical coating production using broadband optical monitoring,” Appl. Opt. 45, 7026–7034 (2006).
    [Crossref] [PubMed]
  22. V. Pervak, A. V. Tikhonravov, M. K. Trubetskov, S. Naumov, F. Krausz, and A. Apolonski, “1.5-octave chirped mirror for pulse compression down to sub-3 fs,” Appl. Phys. B 87, 5–12(2007).
    [Crossref]
  23. V. Pervak, I. Ahmad, J. Fulop, M. K. Trubetskov, and A. V. Tikhonravov, “Comparison of dispersive mirrors based on the time-domain and conventional approaches, for sub-3 fspulses.” Opt. Express 17, 2207–2217 (2009).
    [Crossref] [PubMed]
  24. V. Pervak, M. Trubetskov, and A. Tikhonravov, “Robust synthesis of dispersive mirrors,” Opt. Express 19, 2371–2380(2011).
    [Crossref] [PubMed]
  25. V. Pervak, “Recent development and new ideas in the field of dispersive multilayer optics,” Appl. Opt. 50, C55–C61 (2011).
    [Crossref] [PubMed]

2011 (2)

2010 (1)

H. Ehlers, S. Schlichting, and D. Ristau, “Hybrid process control for precision optics enhanced by computational manufacturing,” in Optical Interference Coatings, 2010 OSA Technical Digest Series (Optical Society of America, 2010), paper TuC6.

2009 (1)

2008 (1)

D. Ristau, H. Ehlers, S. Schlichting, and M. Lappschies, “State of the art in deterministic production of optical thin films,” Proc. SPIE 7101, 71010C (2008).
[Crossref]

2007 (3)

B. Badoil, F. Lemarchand, M. Cathelinaud, and M. Lequime, “Interest of broadband optical monitoring for thin-film filter manufacturing,” Appl. Opt. 46, 4294–4303(2007).
[Crossref] [PubMed]

S. Wilbrandt, O. Stenzel, and N. Kaiser, “Experimental determination of the refractive index profile of rugate filters based on in situ measurements of transmission spectra,” J. Phys. D 40, 1435–1441 (2007).
[Crossref]

V. Pervak, A. V. Tikhonravov, M. K. Trubetskov, S. Naumov, F. Krausz, and A. Apolonski, “1.5-octave chirped mirror for pulse compression down to sub-3 fs,” Appl. Phys. B 87, 5–12(2007).
[Crossref]

2006 (3)

2004 (1)

A. Tikhonravov and M. Trubetskov, “On-line characterization and reoptimization of optical coatings,” Proc. SPIE 5250, 406–413 (2004).
[Crossref]

2002 (1)

2001 (2)

A. Tikhonravov, M. Trubetskov, I. Kochikov, J. Oliver, and D. Smith, “Real-time characterization and optimization of e-beam evaporated optical coatings,” in Optical Interference Coatings, 2001 OSA Technical Digest Series (Optical Society of America, 2001), paper ME8–1.

T. Gross, M. Lappschies, K. Starke, and D. Ristau, “Systematic errors in broadband optical monitoring,” in Optical Interference Coatings, 2001 OSA Technical Digest Series (Optical Society of America, 2001), paper ME4.

2000 (1)

J. Woollam, “Ellipsometry, variable angle spectroscopic,” in Wiley Encyclopedia of Electrical and Electronics Engineering: Supplement 1, J.Webster, ed. (Wiley, 2000).

1998 (1)

A. V. Tikhonravov, I. V. Kochikov, M. K. Trubetskov, A. V. Krasilnikova, and D. J. Smith, “Stabilization of the on-line characterization procedure using spectral monitoring data,” in Optical Interference Coatings, 1998 OSA Technical Digest Series (Optical Society of America, 1998), pp. 423–425.

1993 (1)

1992 (1)

1979 (3)

1978 (1)

1977 (1)

A. N. Tikhonov and V. Y. Arsenin, Solution of Ill-Posed Problems (Winston-Wiley, 1977).

Ahmad, I.

Amotchkina, T. V.

Apolonski, A.

V. Pervak, A. V. Tikhonravov, M. K. Trubetskov, S. Naumov, F. Krausz, and A. Apolonski, “1.5-octave chirped mirror for pulse compression down to sub-3 fs,” Appl. Phys. B 87, 5–12(2007).
[Crossref]

Arsenin, V. Y.

A. N. Tikhonov and V. Y. Arsenin, Solution of Ill-Posed Problems (Winston-Wiley, 1977).

Badoil, B.

Cathelinaud, M.

Dobrowolski, J. A.

Duparré, A.

Ehlers, H.

H. Ehlers, S. Schlichting, and D. Ristau, “Hybrid process control for precision optics enhanced by computational manufacturing,” in Optical Interference Coatings, 2010 OSA Technical Digest Series (Optical Society of America, 2010), paper TuC6.

D. Ristau, H. Ehlers, S. Schlichting, and M. Lappschies, “State of the art in deterministic production of optical thin films,” Proc. SPIE 7101, 71010C (2008).
[Crossref]

D. Ristau, H. Ehlers, T. Gross, and M. Lappschies, “Optical broadband monitoring of conventional and ion processes,” Appl. Opt. 45, 1495–1501 (2006).
[Crossref] [PubMed]

Fornier, A.

Fulop, J.

Görtz, B.

Gross, T.

D. Ristau, H. Ehlers, T. Gross, and M. Lappschies, “Optical broadband monitoring of conventional and ion processes,” Appl. Opt. 45, 1495–1501 (2006).
[Crossref] [PubMed]

T. Gross, M. Lappschies, K. Starke, and D. Ristau, “Systematic errors in broadband optical monitoring,” in Optical Interference Coatings, 2001 OSA Technical Digest Series (Optical Society of America, 2001), paper ME4.

Günster, S.

Holm, C.

Kaiser, N.

S. Wilbrandt, O. Stenzel, and N. Kaiser, “Experimental determination of the refractive index profile of rugate filters based on in situ measurements of transmission spectra,” J. Phys. D 40, 1435–1441 (2007).
[Crossref]

Kochikov, I.

A. Tikhonravov, M. Trubetskov, I. Kochikov, J. Oliver, and D. Smith, “Real-time characterization and optimization of e-beam evaporated optical coatings,” in Optical Interference Coatings, 2001 OSA Technical Digest Series (Optical Society of America, 2001), paper ME8–1.

Kochikov, I. V.

A. V. Tikhonravov, I. V. Kochikov, M. K. Trubetskov, A. V. Krasilnikova, and D. J. Smith, “Stabilization of the on-line characterization procedure using spectral monitoring data,” in Optical Interference Coatings, 1998 OSA Technical Digest Series (Optical Society of America, 1998), pp. 423–425.

Kokarev, M. A.

Krasilnikova, A. V.

A. V. Tikhonravov, I. V. Kochikov, M. K. Trubetskov, A. V. Krasilnikova, and D. J. Smith, “Stabilization of the on-line characterization procedure using spectral monitoring data,” in Optical Interference Coatings, 1998 OSA Technical Digest Series (Optical Society of America, 1998), pp. 423–425.

Krausz, F.

V. Pervak, A. V. Tikhonravov, M. K. Trubetskov, S. Naumov, F. Krausz, and A. Apolonski, “1.5-octave chirped mirror for pulse compression down to sub-3 fs,” Appl. Phys. B 87, 5–12(2007).
[Crossref]

Lappschies, M.

D. Ristau, H. Ehlers, S. Schlichting, and M. Lappschies, “State of the art in deterministic production of optical thin films,” Proc. SPIE 7101, 71010C (2008).
[Crossref]

D. Ristau, H. Ehlers, T. Gross, and M. Lappschies, “Optical broadband monitoring of conventional and ion processes,” Appl. Opt. 45, 1495–1501 (2006).
[Crossref] [PubMed]

M. Lappschies, B. Görtz, and D. Ristau, “Application of optical broadband monitoring to quasi-rugate filters by ion-beam sputtering,” Appl. Opt. 45, 1502–1506 (2006).
[Crossref] [PubMed]

T. Gross, M. Lappschies, K. Starke, and D. Ristau, “Systematic errors in broadband optical monitoring,” in Optical Interference Coatings, 2001 OSA Technical Digest Series (Optical Society of America, 2001), paper ME4.

Lemarchand, F.

Lequime, M.

Naumov, S.

V. Pervak, A. V. Tikhonravov, M. K. Trubetskov, S. Naumov, F. Krausz, and A. Apolonski, “1.5-octave chirped mirror for pulse compression down to sub-3 fs,” Appl. Phys. B 87, 5–12(2007).
[Crossref]

Oliver, J.

A. Tikhonravov, M. Trubetskov, I. Kochikov, J. Oliver, and D. Smith, “Real-time characterization and optimization of e-beam evaporated optical coatings,” in Optical Interference Coatings, 2001 OSA Technical Digest Series (Optical Society of America, 2001), paper ME8–1.

Pelletier, E.

Pervak, V.

Quesnel, E.

Ristau, D.

H. Ehlers, S. Schlichting, and D. Ristau, “Hybrid process control for precision optics enhanced by computational manufacturing,” in Optical Interference Coatings, 2010 OSA Technical Digest Series (Optical Society of America, 2010), paper TuC6.

D. Ristau, H. Ehlers, S. Schlichting, and M. Lappschies, “State of the art in deterministic production of optical thin films,” Proc. SPIE 7101, 71010C (2008).
[Crossref]

M. Lappschies, B. Görtz, and D. Ristau, “Application of optical broadband monitoring to quasi-rugate filters by ion-beam sputtering,” Appl. Opt. 45, 1502–1506 (2006).
[Crossref] [PubMed]

D. Ristau, H. Ehlers, T. Gross, and M. Lappschies, “Optical broadband monitoring of conventional and ion processes,” Appl. Opt. 45, 1495–1501 (2006).
[Crossref] [PubMed]

A. V. Tikhonravov, M. K. Trubetskov, M. A. Kokarev, T. V. Amotchkina, A. Duparré, E. Quesnel, D. Ristau, and S. Günster, “Effect of systematic errors in spectral photometric data on the accuracy of determination of optical parameters of dielectric thin films,” Appl. Opt. 41, 2555–2560(2002).
[Crossref] [PubMed]

T. Gross, M. Lappschies, K. Starke, and D. Ristau, “Systematic errors in broadband optical monitoring,” in Optical Interference Coatings, 2001 OSA Technical Digest Series (Optical Society of America, 2001), paper ME4.

Schlichting, S.

H. Ehlers, S. Schlichting, and D. Ristau, “Hybrid process control for precision optics enhanced by computational manufacturing,” in Optical Interference Coatings, 2010 OSA Technical Digest Series (Optical Society of America, 2010), paper TuC6.

D. Ristau, H. Ehlers, S. Schlichting, and M. Lappschies, “State of the art in deterministic production of optical thin films,” Proc. SPIE 7101, 71010C (2008).
[Crossref]

Smith, D.

A. Tikhonravov, M. Trubetskov, I. Kochikov, J. Oliver, and D. Smith, “Real-time characterization and optimization of e-beam evaporated optical coatings,” in Optical Interference Coatings, 2001 OSA Technical Digest Series (Optical Society of America, 2001), paper ME8–1.

Smith, D. J.

A. V. Tikhonravov, I. V. Kochikov, M. K. Trubetskov, A. V. Krasilnikova, and D. J. Smith, “Stabilization of the on-line characterization procedure using spectral monitoring data,” in Optical Interference Coatings, 1998 OSA Technical Digest Series (Optical Society of America, 1998), pp. 423–425.

Starke, K.

T. Gross, M. Lappschies, K. Starke, and D. Ristau, “Systematic errors in broadband optical monitoring,” in Optical Interference Coatings, 2001 OSA Technical Digest Series (Optical Society of America, 2001), paper ME4.

Stenzel, O.

S. Wilbrandt, O. Stenzel, and N. Kaiser, “Experimental determination of the refractive index profile of rugate filters based on in situ measurements of transmission spectra,” J. Phys. D 40, 1435–1441 (2007).
[Crossref]

Sullivan, B. T.

Tikhonov, A. N.

A. N. Tikhonov and V. Y. Arsenin, Solution of Ill-Posed Problems (Winston-Wiley, 1977).

Tikhonravov, A.

V. Pervak, M. Trubetskov, and A. Tikhonravov, “Robust synthesis of dispersive mirrors,” Opt. Express 19, 2371–2380(2011).
[Crossref] [PubMed]

A. Tikhonravov and M. Trubetskov, “On-line characterization and reoptimization of optical coatings,” Proc. SPIE 5250, 406–413 (2004).
[Crossref]

A. Tikhonravov, M. Trubetskov, I. Kochikov, J. Oliver, and D. Smith, “Real-time characterization and optimization of e-beam evaporated optical coatings,” in Optical Interference Coatings, 2001 OSA Technical Digest Series (Optical Society of America, 2001), paper ME8–1.

Tikhonravov, A. V.

V. Pervak, I. Ahmad, J. Fulop, M. K. Trubetskov, and A. V. Tikhonravov, “Comparison of dispersive mirrors based on the time-domain and conventional approaches, for sub-3 fspulses.” Opt. Express 17, 2207–2217 (2009).
[Crossref] [PubMed]

V. Pervak, A. V. Tikhonravov, M. K. Trubetskov, S. Naumov, F. Krausz, and A. Apolonski, “1.5-octave chirped mirror for pulse compression down to sub-3 fs,” Appl. Phys. B 87, 5–12(2007).
[Crossref]

A. V. Tikhonravov, M. K. Trubetskov, and T. V. Amotchkina, “Investigation of the effect of accumulation of thickness errors in optical coating production using broadband optical monitoring,” Appl. Opt. 45, 7026–7034 (2006).
[Crossref] [PubMed]

A. V. Tikhonravov, M. K. Trubetskov, M. A. Kokarev, T. V. Amotchkina, A. Duparré, E. Quesnel, D. Ristau, and S. Günster, “Effect of systematic errors in spectral photometric data on the accuracy of determination of optical parameters of dielectric thin films,” Appl. Opt. 41, 2555–2560(2002).
[Crossref] [PubMed]

A. V. Tikhonravov, I. V. Kochikov, M. K. Trubetskov, A. V. Krasilnikova, and D. J. Smith, “Stabilization of the on-line characterization procedure using spectral monitoring data,” in Optical Interference Coatings, 1998 OSA Technical Digest Series (Optical Society of America, 1998), pp. 423–425.

A. V. Tikhonravov and M. K. Trubetskov, “OptiLayer thin film software,” http://www.optilayer.com.

Trubetskov, M.

V. Pervak, M. Trubetskov, and A. Tikhonravov, “Robust synthesis of dispersive mirrors,” Opt. Express 19, 2371–2380(2011).
[Crossref] [PubMed]

A. Tikhonravov and M. Trubetskov, “On-line characterization and reoptimization of optical coatings,” Proc. SPIE 5250, 406–413 (2004).
[Crossref]

A. Tikhonravov, M. Trubetskov, I. Kochikov, J. Oliver, and D. Smith, “Real-time characterization and optimization of e-beam evaporated optical coatings,” in Optical Interference Coatings, 2001 OSA Technical Digest Series (Optical Society of America, 2001), paper ME8–1.

Trubetskov, M. K.

V. Pervak, I. Ahmad, J. Fulop, M. K. Trubetskov, and A. V. Tikhonravov, “Comparison of dispersive mirrors based on the time-domain and conventional approaches, for sub-3 fspulses.” Opt. Express 17, 2207–2217 (2009).
[Crossref] [PubMed]

V. Pervak, A. V. Tikhonravov, M. K. Trubetskov, S. Naumov, F. Krausz, and A. Apolonski, “1.5-octave chirped mirror for pulse compression down to sub-3 fs,” Appl. Phys. B 87, 5–12(2007).
[Crossref]

A. V. Tikhonravov, M. K. Trubetskov, and T. V. Amotchkina, “Investigation of the effect of accumulation of thickness errors in optical coating production using broadband optical monitoring,” Appl. Opt. 45, 7026–7034 (2006).
[Crossref] [PubMed]

A. V. Tikhonravov, M. K. Trubetskov, M. A. Kokarev, T. V. Amotchkina, A. Duparré, E. Quesnel, D. Ristau, and S. Günster, “Effect of systematic errors in spectral photometric data on the accuracy of determination of optical parameters of dielectric thin films,” Appl. Opt. 41, 2555–2560(2002).
[Crossref] [PubMed]

A. V. Tikhonravov, I. V. Kochikov, M. K. Trubetskov, A. V. Krasilnikova, and D. J. Smith, “Stabilization of the on-line characterization procedure using spectral monitoring data,” in Optical Interference Coatings, 1998 OSA Technical Digest Series (Optical Society of America, 1998), pp. 423–425.

A. V. Tikhonravov and M. K. Trubetskov, “OptiLayer thin film software,” http://www.optilayer.com.

Vidal, B.

Wilbrandt, S.

S. Wilbrandt, O. Stenzel, and N. Kaiser, “Experimental determination of the refractive index profile of rugate filters based on in situ measurements of transmission spectra,” J. Phys. D 40, 1435–1441 (2007).
[Crossref]

Woollam, J.

J. Woollam, “Ellipsometry, variable angle spectroscopic,” in Wiley Encyclopedia of Electrical and Electronics Engineering: Supplement 1, J.Webster, ed. (Wiley, 2000).

Appl. Opt. (12)

B. T. Sullivan and J. A. Dobrowolski, “Deposition error compensation for optical multilayer coatings. I. Theoretical description,” Appl. Opt. 31, 3821–3835 (1992).
[Crossref] [PubMed]

B. T. Sullivan and J. A. Dobrowolski, “Deposition error compensation for optical multilayer coatings. II. Experimental results—sputtering system,” Appl. Opt. 32, 2351–2360 (1993).
[Crossref] [PubMed]

B. Vidal, A. Fornier, and E. Pelletier, “Optical monitoring of nonquarterwave multilayer filters,” Appl. Opt. 17, 1038–1047(1978).
[Crossref] [PubMed]

B. Vidal, A. Fornier, and E. Pelletier, “Wideband optical monitoring of nonquarterwave multilayer filters,” Appl. Opt. 18, 3851–3856 (1979).
[Crossref] [PubMed]

B. Vidal and E. Pelletier, “Nonquarterwave multilayer filters: optical monitoring with a minicomputer allowing correction of thickness errors,” Appl. Opt. 18, 3857–3862 (1979).
[Crossref] [PubMed]

D. Ristau, H. Ehlers, T. Gross, and M. Lappschies, “Optical broadband monitoring of conventional and ion processes,” Appl. Opt. 45, 1495–1501 (2006).
[Crossref] [PubMed]

C. Holm, “Optical thin film production with continuous reoptimization of layer thicknesses,” Appl. Opt. 18, 1978–1982(1979).
[Crossref] [PubMed]

B. Badoil, F. Lemarchand, M. Cathelinaud, and M. Lequime, “Interest of broadband optical monitoring for thin-film filter manufacturing,” Appl. Opt. 46, 4294–4303(2007).
[Crossref] [PubMed]

M. Lappschies, B. Görtz, and D. Ristau, “Application of optical broadband monitoring to quasi-rugate filters by ion-beam sputtering,” Appl. Opt. 45, 1502–1506 (2006).
[Crossref] [PubMed]

A. V. Tikhonravov, M. K. Trubetskov, M. A. Kokarev, T. V. Amotchkina, A. Duparré, E. Quesnel, D. Ristau, and S. Günster, “Effect of systematic errors in spectral photometric data on the accuracy of determination of optical parameters of dielectric thin films,” Appl. Opt. 41, 2555–2560(2002).
[Crossref] [PubMed]

A. V. Tikhonravov, M. K. Trubetskov, and T. V. Amotchkina, “Investigation of the effect of accumulation of thickness errors in optical coating production using broadband optical monitoring,” Appl. Opt. 45, 7026–7034 (2006).
[Crossref] [PubMed]

V. Pervak, “Recent development and new ideas in the field of dispersive multilayer optics,” Appl. Opt. 50, C55–C61 (2011).
[Crossref] [PubMed]

Appl. Phys. B (1)

V. Pervak, A. V. Tikhonravov, M. K. Trubetskov, S. Naumov, F. Krausz, and A. Apolonski, “1.5-octave chirped mirror for pulse compression down to sub-3 fs,” Appl. Phys. B 87, 5–12(2007).
[Crossref]

J. Phys. D (1)

S. Wilbrandt, O. Stenzel, and N. Kaiser, “Experimental determination of the refractive index profile of rugate filters based on in situ measurements of transmission spectra,” J. Phys. D 40, 1435–1441 (2007).
[Crossref]

Opt. Express (2)

Proc. SPIE (2)

D. Ristau, H. Ehlers, S. Schlichting, and M. Lappschies, “State of the art in deterministic production of optical thin films,” Proc. SPIE 7101, 71010C (2008).
[Crossref]

A. Tikhonravov and M. Trubetskov, “On-line characterization and reoptimization of optical coatings,” Proc. SPIE 5250, 406–413 (2004).
[Crossref]

Other (7)

H. Ehlers, S. Schlichting, and D. Ristau, “Hybrid process control for precision optics enhanced by computational manufacturing,” in Optical Interference Coatings, 2010 OSA Technical Digest Series (Optical Society of America, 2010), paper TuC6.

A. Tikhonravov, M. Trubetskov, I. Kochikov, J. Oliver, and D. Smith, “Real-time characterization and optimization of e-beam evaporated optical coatings,” in Optical Interference Coatings, 2001 OSA Technical Digest Series (Optical Society of America, 2001), paper ME8–1.

T. Gross, M. Lappschies, K. Starke, and D. Ristau, “Systematic errors in broadband optical monitoring,” in Optical Interference Coatings, 2001 OSA Technical Digest Series (Optical Society of America, 2001), paper ME4.

A. N. Tikhonov and V. Y. Arsenin, Solution of Ill-Posed Problems (Winston-Wiley, 1977).

A. V. Tikhonravov, I. V. Kochikov, M. K. Trubetskov, A. V. Krasilnikova, and D. J. Smith, “Stabilization of the on-line characterization procedure using spectral monitoring data,” in Optical Interference Coatings, 1998 OSA Technical Digest Series (Optical Society of America, 1998), pp. 423–425.

A. V. Tikhonravov and M. K. Trubetskov, “OptiLayer thin film software,” http://www.optilayer.com.

J. Woollam, “Ellipsometry, variable angle spectroscopic,” in Wiley Encyclopedia of Electrical and Electronics Engineering: Supplement 1, J.Webster, ed. (Wiley, 2000).

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Figures (8)

Fig. 1
Fig. 1

Comparison of measurement transmittance data of the coating NBPF1 (crosses) and theoretical transmittance of the design NBPF1 (solid curve).

Fig. 2
Fig. 2

Comparison of measurement transmittance data of the coating NBPF2 (crosses) and theoretical transmittance of the design NBPF2 (solid curve).

Fig. 3
Fig. 3

Comparison of relative errors in layer thicknesses in the coating NBPF1 obtained in the course of triangular algorithm (black bars) and sequential algorithm (gray bars).

Fig. 4
Fig. 4

Comparison of discrepancy function values of the coating NBPF1 obtained in the course of triangular algorithm (black bars) and sequential algorithm (gray bars).

Fig. 5
Fig. 5

Comparison of relative errors in layer thicknesses in the coating NBPF1 found by the triangular algorithm (black bars) and sequential algorithm (gray bars) in the case of model data (see the text for details).

Fig. 6
Fig. 6

Comparison of relative errors in layer thicknesses in the coating NBPF2 obtained in the course of the triangular algorithm (black bars) and sequential algorithm (gray bars).

Fig. 7
Fig. 7

Comparison of relative errors in layer thicknesses in the coating QWM-1 obtained in the course of the triangular algorithm (black bars) and sequential algorithm (gray bars).

Fig. 8
Fig. 8

Comparison of relative errors in layer thicknesses in the coating QWM-2 obtained in the course of the triangular algorithm (black bars), sequential algorithm (gray bars), and expected errors (empty bars).

Tables (1)

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Table 1 Structures of the Designs NBPF1 and NBPF2

Equations (4)

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DF ( i ) = ( 1 i k = 1 i 1 L j = 1 L [ T ( d 1 , ... , d k ; λ j ) T ^ ( k ) ( λ j ) Δ T j ] 2 ) 1 / 2 , 1 i m ,
DF ( i ) = ( 1 L j = 1 L [ T ( d ¯ 1 , ... , d ¯ i 1 , d i ; λ j ) T ^ ( i ) ( λ j ) Δ T j ] 2 ) 1 / 2 ,
n 2 ( λ ) = 1 + A 1 λ 2 λ 2 A 2 + A 3 λ 2 λ 2 A 4 ,
n ( λ ) = A 0 + A 1 λ 2 + A 2 λ 4 ,

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