Abstract

The possibility for achieving optical performance of objectives, including a minimum amount of diffractive lenses, comparable to optical performance of multiple-lens conventional objectives for nanolithography, is considered. The problem of chromatism connected with using excimer lasers is solved by applying aspheric substrates that help to reduce both axial color and spherochromatic aberration.

© 2011 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Diffractive/refractive (hybrid) UV-imaging system for minimally invasive metrology: design, performance, and application experiments

René Reichle, Christof Pruss, Christopher Gessenhardt, Christof Schulz, and Wolfgang Osten
Appl. Opt. 51(12) 1982-1996 (2012)

Theories for the design of a hybrid refractive–diffractive superresolution lens with high numerical aperture

Haitao Liu, Yingbai Yan, Deer Yi, and Guofan Jin
J. Opt. Soc. Am. A 20(5) 913-924 (2003)

Design of plastic diffractive–refractive compact zoom lenses for visible–near-IR spectrum

Grigoriy I. Greisukh, Evgeniy G. Ezhov, Zoya A. Sidyakina, and Sergei A. Stepanov
Appl. Opt. 52(23) 5843-5850 (2013)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (3)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (4)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (12)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription