Abstract

A femtosecond-laser-textured Si photodetector is reported. Broadband spectral optical response is detected from UV to NIR. A quantum efficiency of greater than 80% from 490nm to 780nm has been achieved. The quantum efficiency at 245nm is 62%, which is comparable to UV-enhanced Si photodiodes. The bandwidth of a 250-μm-diameter device is 60MHz.

© 2011 Optical Society of America

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