Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Surface profile measurement in white-light scanning interferometry using a three-chip color CCD

Not Accessible

Your library or personal account may give you access

Abstract

White-light scanning interferometry (WLSI) is a useful technique to measure surface profile when a test object contains discontinuous structures or microstructures. A black and white CCD camera is usually utilized to capture interferograms, and a series of corresponding algorithms is used to achieve the profile measurement. However, the color information in the interferograms is lost. A novel profile measurement method that uses phase information in different color channels (red–green–blue) of an interferogram obtained using a three-chip color CCD in WLSI is proposed. The phase values are extracted by a windowed Fourier transform algorithm. Simulation and experimental results are presented to demonstrate the validity of the proposed method.

© 2011 Optical Society of America

Full Article  |  PDF Article
More Like This
Fast template matching method in white-light scanning interferometry for 3D micro-profile measurement

Yiliang Huang, Jian Gao, Lanyu Zhang, Haixiang Deng, and Xin Chen
Appl. Opt. 59(4) 1082-1091 (2020)

Surface recovery algorithm in white light interferometry based on combined white light phase shifting and fast Fourier transform algorithms

Quangsang Vo, Fengzhou Fang, Xiaodong Zhang, and Huimin Gao
Appl. Opt. 56(29) 8174-8185 (2017)

Measurement of large discontinuities using single white light interferogram

Paul Kumar Upputuri, Li Gong, Haifeng Wang, Manojit Pramanik, Krishna Mohan Nandigana, and Mahendra Prasad Kothiyal
Opt. Express 22(22) 27373-27380 (2014)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (7)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (11)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved