Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Optical properties and residual stress in aluminum nitride films prepared by alternating-current dual reactive magnetron sputtering

Not Accessible

Your library or personal account may give you access

Abstract

Aluminum nitride films were deposited by alternating-current dual reactive magnetron sputtering. The influence of different nitrogen flow and working pressures at a sputtering power of 5kW on the refractive index, extinction coefficient, crystalline structure, residual stress, and surface roughness of aluminum nitride films was discussed. The aluminum nitride film would have high refractive index, low extinction coefficient and small residual stress at suitable nitrogen flow rate and low working pressure.

© 2011 Optical Society of America

Full Article  |  PDF Article
More Like This
Optical, structural, and mechanical properties of silicon oxynitride films prepared by pulsed magnetron sputtering

Chien-Jen Tang, Cheng-Chung Jaing, Chuen-Lin Tien, Wei-Chiang Sun, and Shih-Chin Lin
Appl. Opt. 56(4) C168-C174 (2017)

Optical properties and stress of ion-assisted aluminum nitride thin films

Philip Martin, Roger Netterfield, Terry Kinder, and Avi Bendavid
Appl. Opt. 31(31) 6734-6740 (1992)

Optical properties and residual stress in Nb-Si composite films prepared by magnetron cosputtering

Chien-Jen Tang, Glen Andrew Porter, Cheng-Chung Jaing, and Fang-Ming Tsai
Appl. Opt. 54(4) 959-965 (2015)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (7)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (1)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved