Abstract

High-speed two-wavelength phase-shifting interferometry is presented. The technique is aimed at high-speed in-line inspection of spacers in liquid crystal display panels or wafer bumps where the measuring range is well determined and high-speed measurements are essential. With our test setup, the measuring range is extended to 10 μm by using two injection locked frequency scanning lasers that offer fast and equidistant phase shifting of interference fringes. A technique to determine the unwrapped phase map in a frequency scanning phase-shifting interferometry without the ordinary phase-unwrapping process is proposed.

© 2011 Optical Society of America

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2009 (1)

2008 (1)

W. J. Ryu, Y. J. Kang, S. H. Baik, and S. J. Kang, “A study on the 3-D measurement by using digital projection moire method,” Optik 119, 453–458 (2008).
[CrossRef]

2007 (1)

2005 (1)

2000 (2)

A. Harasaki, J. Schmit, and J. C. Wyant, “Improved vertical-scanning interferometry,” Appl. Opt. 39, 2107–2115 (2000).
[CrossRef]

Y. Bitou and K. Seta, “Gauge block measurement using a wavelength scanning interferometer,” Jpn. J. Appl. Phys. 39, 6084–6088 (2000).
[CrossRef]

1997 (1)

1996 (1)

S. Tang, “Generalized algorithm for phase shifting interferometry,” Proc. SPIE 2860, 27–32 (1996).
[CrossRef]

1986 (1)

J. C. Wyant, C. L. Koliopoulos, B. Bhushan, and D. Basila, “Development of a three-dimensional noncontact digital optical profiler,” J. Tribol. 108, 1–8 (1986).
[CrossRef]

1985 (1)

1984 (1)

Baik, S. H.

W. J. Ryu, Y. J. Kang, S. H. Baik, and S. J. Kang, “A study on the 3-D measurement by using digital projection moire method,” Optik 119, 453–458 (2008).
[CrossRef]

Basila, D.

J. C. Wyant, C. L. Koliopoulos, B. Bhushan, and D. Basila, “Development of a three-dimensional noncontact digital optical profiler,” J. Tribol. 108, 1–8 (1986).
[CrossRef]

Bhushan, B.

J. C. Wyant, C. L. Koliopoulos, B. Bhushan, and D. Basila, “Development of a three-dimensional noncontact digital optical profiler,” J. Tribol. 108, 1–8 (1986).
[CrossRef]

Bitou, Y.

Y. Bitou and K. Seta, “Gauge block measurement using a wavelength scanning interferometer,” Jpn. J. Appl. Phys. 39, 6084–6088 (2000).
[CrossRef]

Brock, N.

Campbell, D. P.

P. A. Karasev, D. P. Campbell, and M. A. Richards, “Obtaining a 35× speedup in 2D phase unwrapping using commodity graphics processors,” in Proceedings of IEEE Conference on Radar (IEEE, 2007), pp. 574–578.

Cheng, Y.-Y.

Eom, T. B.

Harasaki, A.

Hayes, J.

Huntley, J. M.

Jang, R.

Kang, C.-S.

Kang, S. J.

W. J. Ryu, Y. J. Kang, S. H. Baik, and S. J. Kang, “A study on the 3-D measurement by using digital projection moire method,” Optik 119, 453–458 (2008).
[CrossRef]

Kang, Y. J.

W. J. Ryu, Y. J. Kang, S. H. Baik, and S. J. Kang, “A study on the 3-D measurement by using digital projection moire method,” Optik 119, 453–458 (2008).
[CrossRef]

Karasev, P. A.

P. A. Karasev, D. P. Campbell, and M. A. Richards, “Obtaining a 35× speedup in 2D phase unwrapping using commodity graphics processors,” in Proceedings of IEEE Conference on Radar (IEEE, 2007), pp. 574–578.

Kim, J. W.

Kim, J.-A.

Koliopoulos, C. L.

J. C. Wyant, C. L. Koliopoulos, B. Bhushan, and D. Basila, “Development of a three-dimensional noncontact digital optical profiler,” J. Tribol. 108, 1–8 (1986).
[CrossRef]

Lee, W.-K.

Millerd, J.

North-Morris, M.

Novak, M.

Park, H. Y.

Richards, M. A.

P. A. Karasev, D. P. Campbell, and M. A. Richards, “Obtaining a 35× speedup in 2D phase unwrapping using commodity graphics processors,” in Proceedings of IEEE Conference on Radar (IEEE, 2007), pp. 574–578.

Ryu, W. J.

W. J. Ryu, Y. J. Kang, S. H. Baik, and S. J. Kang, “A study on the 3-D measurement by using digital projection moire method,” Optik 119, 453–458 (2008).
[CrossRef]

Saldner, H. O.

Schmit, J.

Seta, K.

Y. Bitou and K. Seta, “Gauge block measurement using a wavelength scanning interferometer,” Jpn. J. Appl. Phys. 39, 6084–6088 (2000).
[CrossRef]

Suh, H. S.

Tang, S.

S. Tang, “Generalized algorithm for phase shifting interferometry,” Proc. SPIE 2860, 27–32 (1996).
[CrossRef]

Wyant, J.

Wyant, J. C.

Appl. Opt. (5)

Chin. Opt. Lett. (1)

J. Tribol. (1)

J. C. Wyant, C. L. Koliopoulos, B. Bhushan, and D. Basila, “Development of a three-dimensional noncontact digital optical profiler,” J. Tribol. 108, 1–8 (1986).
[CrossRef]

Jpn. J. Appl. Phys. (1)

Y. Bitou and K. Seta, “Gauge block measurement using a wavelength scanning interferometer,” Jpn. J. Appl. Phys. 39, 6084–6088 (2000).
[CrossRef]

Opt. Express (1)

Optik (1)

W. J. Ryu, Y. J. Kang, S. H. Baik, and S. J. Kang, “A study on the 3-D measurement by using digital projection moire method,” Optik 119, 453–458 (2008).
[CrossRef]

Proc. SPIE (1)

S. Tang, “Generalized algorithm for phase shifting interferometry,” Proc. SPIE 2860, 27–32 (1996).
[CrossRef]

Other (1)

P. A. Karasev, D. P. Campbell, and M. A. Richards, “Obtaining a 35× speedup in 2D phase unwrapping using commodity graphics processors,” in Proceedings of IEEE Conference on Radar (IEEE, 2007), pp. 574–578.

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